Electron Beam Parameters

dp = 1nm
p = 0.20.3o
ip =60 pA

Electron Specimen Interactions

Electron Scattering
Cross section Q is a measure of the probability that an event will take place.
Q = N /nint
N is the number of events of a certain type per unit volume
ni is the number of target sites per unit volume
nt is the number of incident particles per unit area
Q has the dimensions of cm2.
Mean free path l is defined as the average distance the electron travels in the
Specimen between events of a certain type.
= A /(NAQ)
A is the atomic weight
NA is Avogadros number
is the density
Q is the cross section
If a,b, and c.. are the mean free paths for individual scattering process, then
the total mean free path is given by (1/) = (1/a +1/b+ 1/c +..)

Interaction of high energy electrons

with solids

Interaction of high energy electrons

with solids

Multiple secondary electron

generation

Elastic and Inelastic

Scattering
Z is the atomic number
E is the electron energy (keV)

Electron and Photon generation

Signals used in SEM,AES, EDAX

Interaction volume
Experimental evidence

irecti Visualization of electron beam in polymethylmethacralate

Monte Carlo electron-trajectory

simulation

Iron, at (a) 10keV, (b) 20 keV, and 30 ke

Effect of Accelerating
Voltage

Effect of Accelerating
Voltage

Effect of sample composition on

interaction volume

Effect of tilt on interaction

volume

Interaction Volume

Interaction volume depends o

Atomic Number (Z)
Accelerating Voltage

Angle of incidence for the bea

Electron Range

Bethe Range total distance that the beam travels in the target while losing
all of its energy.

J is the mean ionization potential

Kanaya-Okayama Range- considers the combined effects of elastic scatter

And energy loss due to inelastic scattering More accurate

Comparison of Ranges

Kanaya-Okayama Range

Signals from Electron

Scattering

Energy Distribution of Emitted

Electrons

Energy distribution of electron emission in

Ag. Primary electron energy of 165eV.

Backscattered Electrons

Secondary electrons
Secondary electron coefficient

Secondary Electrons