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RAMAKRISHNA A R
Clean Zone
Dedicated place in which the concentration of airborne
particles is controlled, and which is constructed and used
in a manner to minimize the introduction, generation and
retention of particles inside the room and in which other
relevant parameters, e.g. temperature, humidity and
pressure, are controlled as necessary.
Types of Cleanroom
* Unidirectional airflow
* Mixed airflow
Unidirectional Airflow Clean Room
It is a clean room in which the filtered air entering the room makes a
single pass through the work area in a parallel flow pattern
Non unidirectional Airflow
Clean Room
It is a clean room in which the filtered air entering the room or
passing through the work zone is characterized by non uniform
velocity or turbulent flow
Mixed Airflow Clean Room
It is a clean room which containing both unidirectional and non
unidirectional types of airflow within the same enclosure
Particle
Solid or Liquid object which, for purposes of
classification of air cleanliness, falls within a
cumulative distribution that is based upon a
threshold( Lower Limit ) size in the range from 0.1Mic
to 5 Mic
Particle Concentration
Number of Individual Particles per unit volume of air
Ultrafine Particle
Particles with an equivalent diameter less
than 0.1 Mic
Macro Particle
Particles with an equivalent diameter greater than
5 Mic
WHERE DO ALL THESE
PARTICLES COME FROM?
WE ARE THE
BIGGEST SOURCE
OF
CONTAMINATION!
How to minimize these
particles in a clean room?
•By using specified material for clean room
construction
•By Proper Clean room Entry Exit Procedures
By Validation
Predetermined protocols
Written reports
Processes and procedures
Periodic revalidation
Specific attention:
processing
testing
cleaning
Why Validation is required?
. To ensure that all the systems will have a
high level of assurance and produce a
product that meets its designed
specifications.
• At initial installation.
WHO 2002
• EUROPEAN UNION GUIDE TO GOOD
MANUFACTURING PRACTICE.
• SCHEDULE M
IEST GUIDELINES
IEST-RP-CCOO1.3. - HEPA AND ULPA FILTERS (1993)
IEST-RP-CC002.2 - UNIDIRECTIONAL FLOW CLEAN-
AIR DEVICES (1999)
IEST-RP-CC006.2. - TESTING CLEAN ROOMS. (1993)
IEST-RP-CC022.1 - ELECTROSTATIC CHARGE IN
CLEANROOMS AND OTHER CONTROLLED
ENVIRONMENTS. (1992)
IEST-RP-CC023.1. - MICROORGANISMS IN
CLEANROOMS. (1993)
IEST-RP-CCOO26.1. - CLEANROOM OPERATIONS.
(1995)
IEST-RP-CCOO34.1. - HEPA AND ULPA FILTER LEAK
TESTS (1999)
Tests Recommended for Clean room Performance (Ref: IEST-RP)
Non
Uni directional
Section Tests Unidirection Mixed Airflow
Airflow
al Airflow
Airflow Volume &
1,2,3 1,2,3, 1,2,3
Uniformity
6.1
Airflow Velocity &
1,2,3 OPT OPT
Uniformity
6.2 Filter Integrity 1,2 1,2 1,2
6.3 Particle Count 1,2,3 1,2,3 1,2,3
6.4 Pressurization 1,2,3 1,2,3 1,2,3
6.5 Air Flow Visualization 1,2 NA OPT (1,2 Only)
6.7 Recovery 1,2 1,2 1,2
6.8 Particle Fall Out 1,2,3 1,2,3 1,2,3
6.9 Lighting Level 1, OPT (2.3) 1, OPT (2.3) 1, OPT (2.3)
6.10 Noise Level 1,2,3 1,2,3 1,2,3
6.11-6.13 Temp & RH Uniformity 1,2,3 OPT 1,2,3 OPT 1,2,3 OPT
6.14 Vibration OPT OPT OPT
The order in which tests are performed is optional, but some sequences are optimal.
1 35 7.5 3 1 ***
10 350 75 30 10 ***
100 *** 750 300 100 ***
1000 *** *** *** 1000 7
10,000 *** *** *** 10,000 70
100,000 *** *** *** 100,000 700
ISO 14644 consists of the following parts, under the
general title Clean rooms and associated controlled
environments
14644-1:1999 Classification of air cleanliness
Specifications for testing and monitoring to
14644-2:2000
prove continued compliance with -1
14644-3:2005 Metrology and test methods
14644-4:2001 Design, construction & start-up
14644-5:2005 Operations
14644-6:2007 Vocabulary/terminology
Separative devices (clean air hoods, glove boxes,
14644-7:2004 isolators and mini-environments)
Classification of Airborne Molecular
14644-8:2006
Contamination
Note
Grade A and B correspond to with class 100, ISO Class 5
•Grade C correspond to with class 10000, ISO class 7
•Grade D correspond to with class 100000, ISO Class 8
Airborne Classification as per SCHEDULE M
Comparison between selected equivalent classes of
Federal Standard 209 and ISO 14644-1
ISO
Class 3 Class 4 Class 5 Class 6 Class 7 Class 8
14644-1
Classes
France Germany
Country and U.S.A. U.S.A. Britain BS Australia ISO
AFNOR VD
standard 209D 209E 5295 AS 1386 standard
X44101 I.2083
Date of
1990
current 1988 1992 1989 1989 1972 1997
onwards
issue
- 0
1 M1.5 C 0.035 - 1 3
10 M2.5 D 0.35 - 2 4
1 000 M4.5 G or H 35 - 4 6
d) Vibration test
CLEANROOMS CAN BE TESTED
IN THREE PHASES:
a)
Airflow Velocity: Thermal anemometer,
vane-type anemometer, or equivalent
Airflow Volume: Electronic micro-
b) manometer with appropriate airflow hood, or
equivalent
Airflow Velocity Test
Airflow Velocity Measuring Units
Flow Hood
testo 425
Airflow Velocity Test
3. For measuring the filter face velocity, the distance should be about
150 mm and for checking the uniformity, it should be more than 300 mm
Airflow Velocity Test
Test procedure for Air Flow Velocity Measurement
in Unidirectional Airflow Clean room/Clean Zone
(Ref: ISO 14644-3 Section B.4.2.1.3)
b) The air changes per hour (for non unidirectional airflow) for the
clean room or clean zone should not be less than the value specified
for the clean room or clean zone, or within other tolerance limits
agreed upon by the buyer & the seller.
Airflow Velocity Test
Test Report Should have the following details
4. Measurement Locations
6. Occupancy State
Typical Format – Air Velocity Test & ACPH Test
HEPA Filter Installation Leak Test
This test is performed o confirm that the HEPA & ULPA filter system
is properly installed by verifying the absence of bypass leakage in the
installation and that the filters are free from defects and small leaks.
This test will be applied to clean rooms in “As built” or in “At Rest”
occupancy states
HEPA Filter Installation Leak Test
To Photometer
Airflow
HEPA Filter Installation Leak Test
Acceptance Criteria
Obtained Leaks should be with 0.01% of the upstream
challenge aerosol concentration, otherwise mutually agreed
between the customer & Supplier
The following information and data to be
reflected in the test report
1. Title of the test method
2. The Measuring Apparatus & its calibration status
3. The ISO Class of the clean room & its operational status
4. The calculated average upstream aerosol concentration and
its distribution
5. The sample flow rate of photometer
6. The acceptance criteria applied for the downstream
measurements
7. The result of downstream measurement for each clearly
identified filter with location
8. Filter Grade
9. The final result of the test for each defined location
Typical Report Format – ON SITE HEPA FILTER
INSTALLATION LEAK INTEGRITY TEST
Room Pressurization Test
The purpose of this test is to verify the capability of the cleanroom system to
maintain the specified pressure difference between installation and its surroundings.
Test Procedure
1. Make sure that al the related doors of the clean room closed
2. The pressure difference between the enclosure cleanroom with respect to surrounding
room should be measured and recorded
6. Occupancy state(s)
Room Pressurization Test
Acceptance Criteria
The pressure difference between the
enclosure room and the adjacent
rooms should be as per the specified
data or else mutually agreed between
the buyer and the seller
ISO 14644-1
CLEANROOMS AND ASSOCIATED CONTROLLED
ENVIRONMENTS
Cn = 10N x (0.1/D)2.08
Where
Cn is the maximum permitted concentration (particles/cubic meter) of
airborne particles that are equal to or larger than the considered size
N is the ISO classification number
D is the considered particle size
Note: If measurements are to be made at more than one considered particle size, each particle diameter
(e.g. D2) shall be at least 1.5 times the next smaller particle diameter (e.g. D1)
D2 > 1.5 x D1
Selected airborne particulate cleanliness classes
for clean rooms and clean zones as per ISO
14644-1: 1999(E)
ISO Maximum concentration limits (particles/m3 of air) for particles equal to and
Classification
Number
larger than the considered sizes
NL = SQRT( A )
Where
NL is the minimum number of sampling locations
A is the area of the cleanroom or clean zone in square
metres
Note: sample to be taken in minimum two locations in a
clean room
Airborne Particle Count Test
Establishment of single sample volume per location
Ref: ISO 14644-1 section B.4.2.1
The single sample volume (Vs) per location is determined by using
equation
Vs = (20/Cn.m) X 1000
Where
Vs is the minimum sample volume per location expressed in litres
Cn.m is the class limit (No. of particles/m3) for the largest
considered particle size specified for the relevent class
20 is the defined number
Airborne Particle Count Test
Sampling Procedure (Ref: ISO 14644-1 section B.4.3.1)
1. The sampling probe shall be positioned at the working height level pointing
into the airflow
2. If the direction of the airflow being sampled is not controlled (e.g. non
unidirectional airflow), the inlet of the sampling probe shall be directed
vertically upward
3. Where only one sample is required, take minimum of three single samples at that
location
Then
This test should be carried out in the as built or at rest occupancy state
Acceptance Criteria
Acceptable recovery times are a matter for agreement between the
buyer and the seller.
Recovery Test
Acceptance Criteria
Acceptable recovery
times are a matter for
agreement between the
buyer and the seller.
Test Report
1. Identification of apparatus
operator and data collection
system
2. Identification of apparatus
and their calibration status
Test Report
• Identification of the apparatus operator
• Identification of the test apparatus
• Type of test, method of visualization and test conditions