BS EN ISO 14644-3

Cleanrooms & associated controlled

environments-
Part 3:
Metrology and test methods

DIS
 BS EN ISO 14644-3
Metrology & Test Methods
Current Status
1. DIS was issued by ISO in September 02
2. UK comments to BSI to be made by end
December 02
3. LBI/30 will consider all UK comments by end
January 03
4. BSI vote to CEN/ISO by end February 03
5. DIS is valid and can be referred to and used
until it is superseded.
6. Likely time when revised DIS will be available -
mid 2004
 BS EN ISO 14644-3
Metrology & Test Methods
14644-1:1999 Classification of air cleanliness
14644-2:2000 Specifications for testing and
monitoring to prove continued compliance
with -1
14644-3:DIS Metrology and test methods
14644-4:2001 Design, construction & start-up
14644-5:FDIS Operations
14644-6:CD Vocabulary/terminology
14644-7:FDIS Separative devices
14644-8:CD Classification of Airborne
Molecular Contamination
 BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction -
Current
BS 5295 Part 1: Classification - Withdrawn
BS 5295 Part 2: Design - Withdrawn
BS 5295 Part 3: Operation - Current
BS 5295 Part 4: Compliance - Withdrawn
 BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction -
Current
BS 5295 Part 1: Classification - 14644-1/3
BS 5295 Part 2: Design - 14644-4
BS 5295 Part 3: Operation - Current
BS 5295 Part 4: Compliance - 14644-2

Some of BS5295 Part 1 is not addressed currently

and PD6609:2000 is being revised to ‘bridge
the gap’.
 BS EN ISO 14644-3
Metrology & Test Methods
This part of BS EN ISO 14644 may be used for the
characterisation of a cleanroom as described and
specified in other parts of BS EN ISO 14644.
Not all cleanroom parameter test procedures are shown.
Other standards may be considered to be applicable
The annexes to this document are ‘informative’. Ie they
are not compulsory, but form a ‘recommendation’ for
compliance with the standard.
Consequently, throughout the document references are
made to ‘or as agreed between customer and supplier’
 BS EN ISO 14644-3
Metrology & Test Methods
SUMMARY OF ESSENTIAL CONTENTS:
1. Scope - ISO standard text and also states
that alternative methods can be used based on
agreement between customer and supplier.
2. Normative - Reference to standards
Reference
3. Terms and - Helps understanding, and
Definitions allows document to exist alone
4. Testing - Recommended tests with
procedures
Procedures and apparatus
 BS EN ISO 14644-3
Metrology & Test Methods
Item 4 forms the crux of this section of the standard.

Recommended tests are listed in table 1. Each test has

a procedure in Annex B and a corresponding set of
apparatus in Annex C. The section of the standard
referencing the test is also given.
Selecting and scheduling of these tests is discussed in
Annex A.
 BS EN ISO 14644-3
Metrology & Test Methods Annex A
ANNEX A (Informative) Choice of recommended tests
of an installation and the sequence in which to carry
them out

A1 Recommended test procedures

Choice of tests
Table A1: Test checklist for installation properties
Table A2: Test checklist for sequencing

The checklists are useful in that they can be taken

from the standard and used as a tool.
 BS EN ISO 14644-3
Metrology & Test Methods Annex A
Test Selection & Sequence Checklist
 Choose which tests are required
 Put them in a logical order for
your application
 Where not applicable put N/A
 Review the schedule of tests
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B1Airborne Particle Count (for classification)
B2Ultrafine Particle Count (for characterisation)
B3Macro Particle Count (for characterisation)
B4Airflow Test
B5Pressure Difference Test
B6Installed Filter Leakage Test
B7Flow Visualisation
B8Airflow Direction Test
B9Temperature Test
B10 Humidity Test
B11 Electrostatic & Ion Generator Test
B12 Particle Deposition Test
B13 Recovery Test
B14 Containment Leak Test
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods

Each section comprises items on:

Principle - what and why

Recommended test procedure - how

Recommended apparatus - with what

Test report - detailed results

 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B1Airborne Particle Count (for classification)

Airborne test for size distributions with thresholds

between 0.1 and 5 microns to certify or verify
cleanliness classification
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B2Ultrafine Particle Count (for characterisation)

Airborne test for particles with size distribution

thresholds less than 0.1 micron for characterisation of
the cleanroom
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B3Macro Particle Count (for characterisation)

Airborne tests for particles with size distribution

thresholds greater than 5 microns for characterisation of
the cleanroom
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B4Airflow Test

Tests to evaluate airflow velocity, uniformity of airflow

velocity and supply air volume depending on
classification.

Airflow velocity and uniformity tests are described for use

principally in unidirectional systems.
Air volume tests are described for unidirectional, non
unidirectional or supply air duct systems.

NB Political correctness avoids terms such as laminar and

turbulent flow systems
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B5Air Pressure Difference Test

Verification of capability of installation to maintain the

specified PD between it and it’s surroundings.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B6Installed Filter Leakage Test

Particle Counter and Photometer tests are both described

Photometer method for ISO 5 and less (ie typically non-

unidirectional), and for MPPS Filters with penetrations
> 0.005% (H14 and lower to BS EN 1822) Acceptance
criteria is 0.01% for all grades.

DPC method more sensitive unidirectional systems.

Evaluation of scan rate and allowable particle counts is
based on BS EN 1822 part 4 and DIN 24184.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B6Installed Filter Leakage Test

Note error on B6.3.5 formula for scan rate

Sr <= Cc.Ps.K.Dp.Fs/Np is equivalent to

Sr = 472 Cc.Ps.K.Dp/Np
Units should be (cm/s)
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B7Flow Visualisation

Tests to demonstrate airflow characteristics in the

installation.
Techniques described are by thread, tracer injection or
image processing (CFD)
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B8Airflow Direction Test

Tests to demonstrate airflow directional characteristics in

the installation.
Techniques described are by thread, tracer injection or
image processing (CFD)
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B9Temperature Test

Tests to demonstrate temperature characteristics in the

installation.
Techniques described are for general or more exacting
measurement requirements.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B10 Humidity Test

Tests to demonstrate the humidity characteristics of the

installation using measurements of dew point or
relative humidity

Humidity tests should be performed in conjunction with

the temperature test.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B11 Electrostatic & Ion Generator Test

Tests to evaluate the level of electrostatic charge and

dissipation rate in the installation.

Techniques for the measurement of surface voltage and

resistance as well as ioniser performance are suggested
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B12 Particle Deposition Test

Tests to evaluate the level of particulates that can be

deposited on work or surfaces in the installation.

Techniques using witness plates or a fall out photometer

are suggested.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B13 Recovery Test

Test to evaluate the capability of the clean air system to

recover from a particle generating event principally in
non-unidirectional applications.
 BS EN ISO 14644-3
Metrology & Test Methods Annex B
ANNEX B (Informative) - Test Methods
B14 Containment Leak Test

Test to evaluate the intrusion of contaminated air from

surrounding areas using DPC or Photometer methods.
 BS EN ISO 14644-3
Metrology & Test Methods Annex C
Annex C (Informative) - Test Instruments

Describes test apparatus that should be used for the corresponding

recommended tests in Annex B. There is a recommendation that
apparatus should be subject to agreement between the customer and
the supplier.

The information provided is not limiting, it represents a sensible

minimum requirement. Ie Equipment that becomes available through
improvements in measurement technology are not restricted by this
Annex.

Equally alternate equipment may be suitable and may be used subject to

agreement.
 BS EN ISO 14644-3
Metrology & Test Methods Annex C
Annex C (Informative) - Test Instruments - example
C1. Discrete Particle Counter (DPC).
C2. Condensation Nucleus Counter (CNC).
C3. Microscope, Cascade Impactor, DPC, Time of Flight.
C4. Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.
C5. Manometers - Electronic, Inclined, Mechanical.
C6. Photometer, DPC, Aerosol Generator,
C7. Anemometers, Tracers, Aerosol generator.
C8. Anemometers, Tracers, Aerosol generator.
C9. Liquid in Glass thermometer, Electronic thermometer.
C10. Humidity meters; Capacitive, Hair.
C11. Voltmeter, Ohmmeter, Charged plate monitor.
C12. Microscope, Fall-out Meter.
C13. Discrete Particle Counter (DPC).
C14. Discrete Particle Counter (DPC), Photometer, Aerosol Generator.
 BS EN ISO 14644-3
Metrology & Test Methods
UK public comments on this section to BSI need
to be made in written form and in an approved
format by end December 02 otherwise they will
not be considered.
This presentation has been prepared
and delivered by:-
Wander ter Kuile
McLeod Russel UK Ltd
c/o Vokes Ltd
Henley Park
Guildford
Surrey, GU3 2AF
UK

tel 01483 207236

fax 01483 235384
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