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Unit Iii Advances in Metrology
Unit Iii Advances in Metrology
Properties of laser
Monochromatic
Collimated beam
Coherent waves
Powerful
A typical helium-neon laser source produces a 1 to 2 mm diameter beam of pure red light
having power of 1MW. So, this type of a beam is focused at a point. It means, beam has
very high intensity. The laser is used extensively for interferometer. Upto a great distance
beam has no divergence but then it begins to expand at a rate of about 1mm/m.
This is used for very accurate measurements in the order of 0.1 µm in 100m.
PRECISION INSTRUMENTS BASED ON LASER
Laser are extensively used for interferometry
Metrology laser are low power instrument that emit visible pr infrared light.
It can measure distance from 1to 2m with accuracy of the order of 0.1 to
1% of the measuring range. The measuring system uses two distance meter
placed at equal distance on either side of the object and a control unit to
measure the thickness of an object.
WORKING
• When the light is emitted by laser or LED hits on object, it scatters and
some of the scattered light is seen by a position sensitive detector or diode
array.
• Th angle at which the light enters the detector will change distance
between the measuring head and object is changed. The change angle of
deviation is measured and calibrated in terms of distance.
ADVANTAGE
• These types of instruments are very reliable because there is no moving
part.
• Instrument response time is in milliseconds.
• The output is measured as 0-20mA.
SCANNING LASER GUAGE
ADVANTAGES
• Accuracy of ±0.25 µm for 10-50mm diameter objects.
• It is used to measure objects of 0.05mm to 450mm diameter.
INTERFEROMETRY
INTRODUCTION
Under ordinary conditions, the wave nature of light is not apparent. But when the light
waves interact with each other, the wave effect is visible and this is made use of for
measuring purpose.
A pattern of dark bands are produced when light is made to interfere. These bands
correspond to accurate scale of division.
The use of interferometric technique for measuring the interference, enables the size
of slip gauges and end bars to be determined directly interms of the wavelength of the
light source
MONOCHROMATIC LIGHT
ADVANTAGES
For interference to occur , the two light rays must be coherent. This is
possible only when the two rays are originated from the same point of the
light source at the same time.
Mutual interference occurs when two rays with same wavelength meet at same
point.
The nature of interference will depend upon the phase of the two waves at their
meeting point.
The two waves are in same phase and they reinforce each other, then the resultant
intensity is the sum of the two intensities.
If these two waves that are in phase have the same amplitude, then the resultant
amplitude become twice and a bright spot is resulted.
The two waves are in out of phase, then the resultant intensity is the difference
between the two intensities.
If these two waves have same amplitude, the resultant amplitude is zero and a dark
spot is resulted.
Xiaoyu Ding
Physics Review
• Diffraction
Diffraction is a sure
sign that whatever is
passing through the
hole is a wave.
Physics Review
• Diffraction of Light
Light, just like a water
wave, does spread out
behind a hole is the
hole
is sufficiently small.
Light is a electromagnetic
wave.
Physics Review
• A Double-Slit Interference Experiment
Interference of Light
Interferometer
• Interferometer:
Is an optical instrument that can produced
two beams interference or multiple beam
interference.
• Amplitude-division interferometers:
A light beam from one source point is
divided into two beams using a beam splitter.
e.g. Michelson’s interferometer
INTERFEROMETERS
Interferometers are optical instruments used for measuring flatness and determining
the length of slip gauges.
The wavelength of lightwave is used for measuring unit.
It is based on the interference principle.
Interferometers are used to overcome the limitations of optical flat.
Types of interferometers.
1. Michelson interferometers
2. Twyman- green specialization of Michelson interferometer
3. Laser interferometer
4. N.P.L flatness interferometer
Xiaoyu Ding
• Configuration:
– A modified configuration of Michelson
interferometer ( rotatable mirror& a
monochromatic point source)
• Work method:
When the interferometer aligned properly, two images
of the light source S from the two mirrors M1&M2 will
coincide. The superposed waves are parallel and have
a constant phase difference. On the serene a uniform
illumination can be seen with a constant intensity
depends on the path difference.
• Mirror imperfections test:
There will be an interference fringes due to the path
difference between W2 and the reference plan
wave W1
TWYMAN –GREEN SPECIALISATION OF MICHELSON INTERFEROMETER
This was modified by Twyman -green. It utilises a pin –hole source diaphragm and collimating
lenses. In this way , all rays are rendered parallel to the central rays and thus all rays describe the
It consists
same path.of two mirror M1 and M2 placed perpendicular to each other from the beam divider.
The mirror M2 is fixed whereas M1 is movable. It is attached to the object whose dimension is to
be
measured.
One part of the incoming light is transmitted through compensating plate P to the mirror M1.
The rays are reflected back from the mirror and are reunited at the semi-reflecting surface where they are
transmitted to the eye.
Usually it is quite difficult to count such fringes by eye. However , photo detectors connected to high speed
counters can do this job very accurately.
TWYMAN-GREEN SPECIALISATION OF MICHELSON INTERFEROMETER
N.P.L. FLATNESS INTERFEROMETER
This instrument is mainly used for checking the flatness of flat surfaces.
The flatness of any surface is judged by comparing with an optically flat surface which is
generally the base plate of the instrument.
This instrument essentially consists of a mercury vapour lamp as shown in the Fig. As we
are interested in having single monochromatic source of light, the radiations of the mercury
lamp are passed through a green filter. The wavelength of the resulting monochromatic
radiation is of the order or 0.0005 mm.
This radiation is then brought to focus on pinhole in order to obtain an intense point source
of light. A mirror is used in order to deflect the light beam through 90°.
N.P.L. FLATNESS INTERFEROMETER
N.P.L. FLATNESS INTERFEROMETER
The pinhole is placed in the focal plane of a collimating lens, thus the radiations out of the lens will be
parallel beam of light. This beam is directed on the gauge to be tested via an optical flat. The fringes
formed are viewed directly above by means of a thick glass plate semi-reflector set at 45° to the
optical axis.
The gauge to be tested is wrung on the base plate whose surface is finished to a degree comparable to
that of the highest quality gauge face.
If the gauge face is flat and parallel to the base plate, then the optical flat being equally
inclined on both the surfaces the fringe pattern from both the gauge face and the base plate will consist
of straight, parallel and equally spaced fringes as shown in Fig. 3. (a).
When the gauge is flat but not parallel to the base plate, then straight and parallel fringes of different
pitch above the gauge face as compared with those of the base plate are seen Fig. 3. (b)
Surface of gauge Gauge surface
is inclined to base plate. convex/concave.
Laser Interferometer
• What’s laser interferometer?
• The principle of standard
• interferometer
• Types of interferometers
Applications
Xiaoyu Ding
f f0 f
We can get the velocity of an object by
measure the frequency change
between
incident laser wave and reflected laser
wave.
Xiaoyu Ding
Applications
• Measurement of Distance
– 1) frequency stabilized He-Ne laser tube
– 2) combination of beam-splitter and retroreflector
– 3) a moving retroreflector
– 4) detection electronics
Applications
• Other Applications
– Measure angles, flatness, straightness, velocity and
vibrations, etc.
Rearrangements
of the light paths
Xiaoyu Ding
Resolution
• XL-80 Laser Measurement
System
LASER IN'TERJi'-
ER O:.\,IETR Y
The Laser interferometry involves the following components,
2. Optical elements.
J.. The two frequency Laser source generally b e c o m e s H�. type that generates stable
coherent ligh t beams of two f requencies- N .In
e these two f requencies= one
polariz ed
horizontally relative to the plane of the mounting feet.
J..
Laser slightly oscillates at two frequencies by a cylindrical permanent magnet around the
cavity.
J...
Beam containing both frequencies passes through a quarter wave and half wave plates
which change the circular polarization, one vertical and other horizontal.
•
The linear polarized beam is expanded in a collimating telescope, after which most of the
beam is transmitted through a 4Y' beam splitter and one of Laser bead.
The various optical elements are
1. Beam splitters.
2. Beam benders
3. Retro reflectors
1. Beam
sptiltte1·s
In is used to divide the laser beam in to separate beams along different axes. Itt is possible
to adju st the splitte rs laser's output in te nsity by having a choice of be am
splitte r
reflectivi ti es.
The below fig shows the use of beam splitters to divide the laser output equally .along the
different axis. F o:r example, tacking 100% Laser beam is splined equally in three axes.
2. Beam [benders
� It is used to deflect the light be am around corners on it path f rom the laser to the axis
.th e
be am benders are ju st flat mirrors .but having absolute flat and very high reflectivity
.normally .the 90° beam deflection is avoided for not to disturb the polarizing vectors.
AXIS 1 1'
AXIS
1
33%
25
%
AXIS2
50o/�BEA
M
SPLIITER
•
67% 50
%
25
%
100%
LASE AXI
R S4
� They are plane mirrors, roof prism or cubic corners .. The cube corners are 3 mutually
perpendicular plane mirrors, and the reflected beam is always parallel to the incident
beam i11 these devices ..
� In case of AC laser interferometer measurements, t,:vo retro reflectors are used.. \\Ihe11
plane mirror is used as retro reflector i11 plane mirror interferometer, it must be flat with
in 0 .. Oeirnicron per cm
� It is used to detect the part ofthe returning beam as/J -f2 and a Doppler shifted frequency
component .
A� ....
f...,. DISPL.A.Y:
,4. 1\ilEASUREl\ilE1'1T
The measurement display has a microcomputer to compute and display results .. The
signals f rom reference re ce iver and m ea su rem en t rece iv er located i 11 th e laser head
are
counted i11 two separate pulse counter and subtract. Other input signals for correction are
temperature co-efficient of expansions .. Air velocity is also displayed..
.
,
...._M.EASURES I
CHANGETSHI DISTANCE N
_....
S
F
Rs
FROM -
LASER -
SCOURG INTERFEROMETER F
E ....._ .......... CUBE CORNE
. O R
RECEIVER·
(a) Standard
Interferometer.
A.C LASER INTERFEROMETER
4. Ext ernal c111.b e
corners.
5.
Photo detectors.
6
Amplifiers.
7.
Pulse convener.
L Two frequency Zeeman Laser.
It is generally He-Ne type 1Iha1I generates stable coherent light beams of two frequencies, one is
polarized vertically and th e other on e is polarized horizontally relative to th e plane of the
mounting .
. Bea.111 splitters
2.
It divides the laser beam into separate beams along different axis. It is possible 1Io adjust the
splined Laser, s output intensity by having a choice of beam splitter reflectivities.
,.. c
1
. : , • •• ub e
corners
TI11e cube corners can be plane mirrors roof prisms. Each AC Laser interferometers are required at
least tw o retro f re qu encie s. One is fixed external cube corner and another on e is ex te m al
cube corner. Both the cube corners are used 1Io reflect the lase r be am.
, - - , . i � FIXED
INTERNAL
8 CUBE
1 BEAM CORNER
SPLITIERS
TWO
FREQUENCY
ZEEMAN
LASER
EXTERN
iP, AL
REFERENCE CUBE
BEA� CORNER
. PHOT DOPPLE
DEO
TECTOR R
S . UP
SIGN PULS .
REFERENC AL AMPLIFIER . E OlNEATOR
E ·t- S L,....;..--.,
SG
I NAL �±6
t- � DOWN
�
4. Photo detectors
Photo d et ect crs receive li:be signal frorn the beam spfitn ers .an.d claan.g ers inuo electrical
signal.
5. Amplifiers
References
• http://www.aerotech.com/products/engref/intexe.html
• http://www.renishaw.com/en/interferometry-explained--7854
• http://en.wikipedia.org/wiki/Michelson_interferometer
• http://en.wikipedia.org/wiki/Interferometry
• PHYSICS FOR SCIENTISTS AND ENGINEERS, Randall Knight,
D.
2003.
Basic Principles of Coordinate
Measuring machines
Basic Principles of Coordinate Measuring machines
Measurements are defined by a probe attached to the third moving axis of this
machine. Probes may be mechanical, optical, laser, or white light, among
others.
DESCRIPTION
CO-ORDINATE
DIGITAL
MEASURING COMPUTER
READ OUT
MACHINE
PROBING SOFTWARE
SYSTEM
Uses
They can measure practically any dimensional characteristic of virtually any part
configuration, including cams, gears, and contoured surfaces.
No special fixtures or gages are required; because electronic probe contact is light,
most parts can be inspected without being clamped to a surface plate.
Establishing part alignment and appropriate reference points are very time
consuming with conventional surface-plate inspection techniques.
Moreover, measuring all significant features of a part in one setup prevents the
introduction of errors due to setup changes.
In the part-program-assisted mode, the operator positions the machine; once the initial
position has been set, the machine is under the control of a program that eliminates
operator choice.
This all adds up to the fact that less skilled operators can be readily instructed to
perform relatively complex inspection procedures.
IMPROVED PRODUCTIVITY:
All the factors previously mentioned help to make CMMs more productive than
conventional inspection techniques.
COORDINATE Iii..
... DIGITAL Iii..
CONIPUTER
NIEASURIN G I �
.,,,.
)
READ OUT r
IvlACHINE All",...
-
I
"'I,.
,...
-
I
PR OB EING
SYSTEM I SO F T \VAR E
I
• Each moving element is also fitted with a linear measurement transducer for positional
feedback, with the help of which we can have the co-ordinate of a particular
position
with respect to a reference.
• The moving elements can be moved by means of frictionless air bearings or mechanical
bearings.
• The Job to be measured will be mounted over a table made of granite because of its
stability in various temperatures.
• The work table of the machine generally consists of tapped holes to facilitate clamping
and locating of parts.
CANTILEVER TYPE
• The probe is attached to the vertical quill that moves in a Z-axis direction
relative to a horizontal arm that over hangs the work table.
• The quill can be moved along the length of the arm to achieve y-axis motion,
and the arm can be moved to the work table to achieve x-axis motion.
Advantages
• Convenient access to the work table and its relatively small floor space
requirements
Disadvantages
• Lower rigidity than some of the other CMM construction
Types of cantilever
1. Moving Table Horizontal Arm CMM
2. Moving Arm Horizontal Arm CMM
3. Column CMM
4. Fixed Table Horizontal Arm CMM
Types of CMM
> However, because of the weight of the extra s:1JJ1ppo111I= the inertia of die moving mess is
great er than in the cantilever con fi.gurati on.
> In. addition, the pans being measured \,...ith this type of CMM cannot be wider than die
clearance between die two sides of the bridges.
, (b}
�) Firxed
Moving brid11e
brridgl!
td
)
L·shaped bridge Central drive bridge
COLUMN:
Column-type CMMs are similar in construction to
accurate jig boring machines.
The column moves in a vertical (Z) direction only, and a
two-axis saddle permits movement in the horizontal (X
and Y) direction.
Column-type CMMs are often referred to as universal
measuring machines rather than CMMs by
manufacturers and are considered gage-room instruments
rather than production-floor m/c.
Column-type CMM
G.l tN TR Y
::
: Gan t r y -t y p e C M M s em p l o y t h r ee m o v ab l e compo nen ts mov in g alo ng mutuall y
> perpendicular gu ide way s.
> Th e probe is attached to the probe quill, which moves vertically (Z direction) relative
to a cross beam.
: Th e p robe q uill is mounted in a carriage than moves horizontally C,·[ direction) along
> the cross beam.
> The cross beam is supported and moves in die X direction along two elevated rails=
which are supported by columns attached to the floor.
Fixed table
: T h e r a m is e n c a s e d i n a c a r r i a g e t h a t r n o v e s m a v e r t i c a l ( Z ) directi o n a n d i s
> supported
on a co· urnn that moves horizontat y (X directi on) re· ative to the base.
: I n t h e m o vin g -t ab e d e s ig n , t h e p r o b e is a tta c h e d to t h e arm , w hi ch
> h o riz o n t af is
p e r r n a n e n t y a tta c h e d a t on e o n ly to a c a r r i ag e t h a t m o v e s
en d in a vertical (Z)
directi on on the column.
h tg h -p r e c i s i o n b o r e arid g e o m e t r y are r e q u i r e d .B y
a l ig n m e n t r n e as u r e r n e n ts
m c o r p o r a tin g a r o ta r y t a b ' e, f o u r -a x i s c a p a b i rt y ·�s
o b t ain a b e _
PROBES
» TI1e utility of a Coordinate measuring machine depends largely on the nature of the
probing device.
> Three types of probes are commonly used:
1. H.ard
2. Electronic
3. N oncont
}> A probe is act
selected according no the dimensional and geometrical requirements of the
. .
mspecuon process.
HARD
PROBES::
> Hard probes consist of a shaft .and a probe tip mounted in various ways to the probe
.a.1111.
> A variety of probe tip sh a pes and siz es are available: the sh ape of the
probe
det ermines i1r s application,
> Conical probe s are use d f or locating holes. Ball probe s f or esta blishing
surf ace
locations. Cylindrical probes for checking slots and boles in sheet metal parts,
> Hard probe s can only be used in small, manually operate d CMMs when
in spectin g
simple parts of .a short production rnn.
El.ECTR ONIC
PR OBES:
: Electronic probes are die most popular probes in use.
» This electronic probe= also called a touch probe = is an omni-direction al
> triggering
device consisting of a. probe body and a stylus: multiple stylus arrangements are also
available.
:> \V11en the stylus is brought into contact with die workpiece, a signal is sent to the
computer interface= indicating the instantaneous three-dimensional location of the
stylus.
---..---
E ( ec
tri col
circuit
Microswitch
Probing
directio
n
Component
.....
Probe Systems
system system
. :\,.l[easuri.o type probe system:
2. g
> Measuring type probe is a sm all co- ordina te maehme in.
mechanism measurin g
itse lf .The "buckling me chanism =� of th]s sy ste m consists of parallel guide.
A n die
moment of probing= the spring parallelograms are dleflectedl from their initial
-j'F-
;. TI b d '11 1!...
position.
I • .,.. .,.. •
, b
J .
• •
>
�"""'......._....,.__--i.-.A dju 5 ta b
le
S p .r 'irn g
X ....
d i r e e t i ·orn
NONCONTAClT PROBES::
)- N oncontacr probes are used when fast, accurate measurements are required with no
ph ysic al contact with th e part. Several types of non con ra ct probe s are u se d.
)- Optical probes are used when inspecting drawings, printed circuit boards, and s111.al1=
fragile workpieces, When these probes are used= the basic measuring programs can
still be used.
1 TOUCH SCANNERS
_ LASER PROBES
2 ''ISION PROBES
_
3
_
SOFT\VARE
: Ahho11lgbthe cenpner is the hem ofthe sefiware that
} CMM= it is the enables the
steins toscftwne
SJ'fan1ily
:) A fulfil the potential.
that ,�lovls the transfer of data baweet
s of CMMs and CAD
SJ' steas,CAD
baweer other pregrsms
systen1s av�lable
sredifferent
nade thatfacilitate the
n1anufact11lies.
and
:) Developn1ent in this area
eermmicnicn ofhas
databeen so dy11an1ic tbat
s sundsrd
ahea been de foma
for data an have
accept bJ' the indusny. S11lch as
d}' eloped interface
n1easuren1ents d edspecification
Din1ensional
for conununication
frem CMMs toCAD SJ sen
: and initial graphicsspecification for CAD toCAD data
exchange.
j' s1 1lch for re\, enginee in specification deived frem ·
Such
as integration
ene
n1eas11lien1ents 1nakes
a neddpossible
1ing
of vlhich sthe
or a brokenareuse
all=ofand
CMMSthe in a (
va1ieuy of new, applications= ....
for the desdcpnen ofpall
progxa111s
Data flow between CAD/CAM system and CMM
CAD
Theoritical part
CAM
Part Program
NC CMM
processor processor
NC
machine CMM
center
Part
CMM
Inspe
Update NC
ction Flag tool room management
Tool
part program
and
planning
wear adjustment
Measurement with a CMM
• Step 1: Calibration of the stylus or probe tip with respect to
the probe head reference point using a calibrated ball.
Step 2: Metrological determination of the work piece
position in the measuring machine-related coordinated
system.
Step 3: Measurement of the surface points on the work
piece in the measuring machine-related coordinate system.
• Step 4: Evaluation of the geometric parameters of the work
piece
Step 5: Representation of the measurement results after
coordinate transformation into the work piece related
coordinate system.
Basic Geometric elements
Circle: Requires 3 points for measurement: By
measuring 4 (up to 50) or more points form
deviation is determined
Plane: Planar measurements require 4 or more
points for form. The intersection of Planes 2
and 3 generate Line 5; Point 6 is the
intersection of Plane 4 and Line 5
• In human vision system, eyes sense the image and brain analyses the
information and takes action on the basis of analysis. Similarly in machine
vision system, visual sensing of information is done after forming an image of
the object and information is analysed to make a useful decision about its
content. Machine vision system thus needs both visual-sensing and interpretive
capabilities.
• Machine vision system is better suited for inspecting the masks used in the
production of microelectronic devices.
(a) Windowing. This technique is used to concentrate the processing in the desired area of
interest and ignoring other non-interested part of image. An electronic mask is created
around a small area of an image to be studied. Thus only the pixels that are not blocked
out will be analysed by the computer.
(b) Image Restoration. This involves preparation of an image in more suitable form during
the pre-processing stage by removing the degradation suffered. The image may be
degraded (blurring of lines/boundaries; poor contrast between image regions, presence
of background noise, etc.) due to motion of camera/object during image formation, poor
illumination/poor placement, variation in sensor response, poor contrast on surface,
etc.).
• The quality may be improved, (i) by improving the contrast by constant brightness
addition, (ii) by increasing the relative contrast between high and low intensity elements
by making light pixels lighter and dark pixels darker (contrast stretching) or (iii) by
Fourier domain processing.
IMAGE ANALYSIS
• Digital image of the object formed is analysed in the central processing unit of the
system to draw conclusions and make decisions.
• Analysis is done by describing and measuring the properties of several image features
which may belong to either regions of the image or the image as a whole.
• Process of image interpretation starts with analysis of simple features and then more
complicated features are added to define it completely.
• Analysis is carried for describing the position of the object, its geometric
configuration, and distribution of light intensity over its visible surface, etc.
• Three important tasks performed by machine vision systems are measuring the
distance of an object from a vision system camera, determining object orientation, and
defining object position.
• Various conclusions are drawn by comparing the results of the analysis with a presorted
set of standard criteria.
• Then all groups of black pixels within each segment (called blocks) and groups of white
pixels (called holes) are counted and total quantity is compared with expected numbers
to determine how closely the real image matches the standard image.
MACHINE VISION SYSTEM APPLICATIONS
(b) Part identification. Machine vision systems due to their ability of part recognition
provide positive identification of an object for decision making purposes.
Part identification applications of machine vision systems range from the familiar
optical character recognition process to part sorting and bin picking operations.
(c) Guidance and Control. Machine vision systems are being used to provide sensory
feedback for real-time guidance and control applications, ranging from visual servoing
of industrial robots and weld seam
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