SOFT LITHOGRAPHY

Presented By: Summayya Shafique

INTRODUCTION

• Pioneered by George M. Whitesides in mid 1990’s from Harvard

University.
• Soft lithography represents the non-photolithographic technique.
• Word “soft” represents here the elastomer stamps.
• It based on combinations of replica molding and self-assembly to
create the micro and Nano fabrication
Advantages

• This lithography is efficient because of:

• Low cast
• 3D patterns at room temperature and pressure
• No need of the perfectly flat substrate
• Easy in molding, transferring or printing
• Surface Properties controlled at molecular level
Applications

• It applies in different applications that are:

• Micro fluidics
• Sensors
• lab-on-chip system
• Bio surfaces
• Biochips
• MEMS
Materials used in Soft Lithography

• Sylguard
• It is thermally curable PDMS elastomer
mostly used. It consist of Flexibil
two parts: part 1 is polymer and part 2 ity
is cross linker (catalyst); mixed with Optically
ratio 1:10 this gives us information transparent,
about viscosity and elasticity. Bio compatible,
• PDMS (Polydimethylsiloxane)
Chemically inert

Non-toxicity
SOFT LITHOGRAPHIC TECHNIQUES

Soft
Lithography

Topographical Chemical
patterns patterns

Solvent
Micro Molding Capillary force
Replica Assisted Micro Micro Transfer microcontact
in Capillaries Lithography
Molding (RM) Molding Printing (µTP) printing(µCP)
(MIMC) (CFL)
(SAMIM)
 Process of Soft Lithography

• Firstly, create a substrate through

photolithographic technique.
• Process by using photoresist and masks.
• Then, Pore PDMS on the Substrate to get
negative of the master.
• Thermally cure it and peeled it off and it used
in most of the techniques of Soft lithography.
Replica Molding

• PDMS formed in earlier process now

use it as a secondary master to create
another stamp from it.
• The original master is not degraded
in this way as we make multiple
copies of it
Micro molding in capillaries (MIMIC)

• Technique based on spontaneously

filling capillaries formed between
two surfaces which are in conformal
contact.
• This flow of liquid is because of the
pressure difference created in these
channels and it also minimize the
free energy of it.
Mathematically

• The rate of capillary filling is determined by the surface tension

and viscosity of the liquid, the radius of the capillary R, and the
length of the filled section of the capillary z, LV, SV, and SL are
liquid vapor, solid vapor, and solid liquid interfacial free energies
Limitations:

• Replica we get from this technique is rich in solvent and it gives us

significant reduction in volume after evaporation of solvent.
• Large area patterning is not achieve because the flow along long
tube is difficult.
Solvent-Assisted Micro molding:

• Technique that allows fabrication of

patterned to modify surface morphologies
of polymers.
Advantages and Limitations

Advantage Limitation
Use of Soft Stamp. Swelling

Use of solvent instead of thermal

curing for soften the polymer.

No more suffering for

capillaries filling.
 Capillary force Lithography (CFL)

 Firstly, spin coat the surface of substrate with

polymer.
 Place earlier made mold over this surface.
 Heat it above the glass transition temperature
as it properly attain the shape of stamp,
timing also play an important role here.
 Then cool it down and remove the stamp.
Micro Transfer Molding (µTM)

• This process is known for 3 D patterning

structures at Nano and micro level, it
largely used in microfabrication of MEMS,
also in microfluidic system. The feature
size is up to 1 micron. The same PDMS
can be used several times.
Limitations

• When we use liquid-based sol or colloidal suspension mostly

material is removed during conversion.
• During drying process, the thin film diverge from the original
shape from shrinking.
Microcontact printing (µCP)

• It is a techniques of making
patterns of self-assembled
monolayers (SAMs) of ink on
the Substrates.
• It is applicable in surface
chemistry, cell biology and
in microelectronics
Advantages

• Simplicity and ease in creating patterns of microscale.

• No need of clean room is required.(except making of master)
• Same stamp can be used several times.
• Inexpensive technique.
Limitations

• Stamp of high aspect ratio may deform during direct contact.

• Stamp swells in case of organic solvents use.
• During curing process, stamp may shrinks and effect the feature
size.
• Mobility of ink can cause spread in unwanted regions.
References:

• SoftLithography_AnnRenMaterRes(1998).pdf
• JMicromechMicroeng202010115012.pdf
• Capillary Force Lithography By Kahp Y. Suh, Yun S. Kim, and Hong
H. Lee*.pdf
• Soft Lithography By Younan Xia and George M. Whitesides*
• https://www.sciencedirect.com/topics/materials-science/soft-
lithography
Thank you!