Speed vs thickness(spin coating)

30
Thickness(µm)
28
26
24
22
20

Thickness(µm)
18
16
14
12
10
8
6
4
2
0
0 250 500 750 1000 1250 1500 1750 2000 2250 2500
Speed(rpm)
 65000 65000 65000
210 55000 190 55000 185 55000
45000 45000 180 45000
185
35000 35000 175 35000
200 25000 180 25000 25000
170
175 165
190 170 160

Width(µm)

Width(µm)
155
width(µm)

165
180 150
160
145
155 140
170
150 135
130
145
160 125
140
120
135 115
150
0 4 8 12 16 20 24 28 0 4 8 12 16 20 24 28 0 4 8 12 16 20 24 28
Thickness(µm) Thickness(µm) Thickness(µm)
speed= 50 steps per minute speed= 75 steps per minute speed =100 steps per minute

Thickness vs width(for 50 steps per

minute)
DFR
• Speed vs Width • Intensity vs Width
65000 100
55000 90
130 45000 130 80
35000 70
125 25000 125 60
50
120 120

115 115

110 110
width(microns)

105 105

speed
100 100
95
95
90
90
85
85
80
80
75
75
70
70
45 50 55 60 65 70 75 80 85 90 95 100 105 20000 30000 40000 50000 60000 70000
Speed(steps per minute) Intensity