ANALYTICAL AND INSTRUMENTATION

TECHNIQUES
TOPIC : SCANNING ELECTRON MICROSCOPE
(SEM)
Presentation by: R.TAMILKAVIYAN

I st M. Sc., APPLIED GEOLOGY

 CONTENTS

 INTRODUCTION
 CONSTRUCTION
 SEM Vs TEM
 ADVANTAGES
 DISADVANTAGES
 INTRODUCTION

 The development of a SEM began a few years after the invention of

a TEM by Ruska in 1931.
 But the commercialisation of the SEM required about 30 years
 The original prototype of the SEM, was made by Knoll in 1935
(Germany) which scans the specimen with an electron beam to
obtain an image.
 Here, specimen irradiated with an 100 micro diameter electron
beam and an absorbed current image was taken from the system.
 In 1938, Von Ardenne (Germany) developed SEM that was
incorporated with a demagnifying lens system.
 It is also called Scanning Transmission Electron Microscope
(STEM) because it is used for thin film specimens.
 Here, the image obtained was directly recorded on a photographic
film placed below the specimen.
 The image was not visible until developing the photographic film
and this model was not used for observing bulk specimen.
 CONSTRUCTION
Basic components
 Electron gun (Filament)
 Condenser lenses
 Objective Aperture
 Scanning coils
 Electron Detectors
 Vaccum system
Condenser lenses, Aperture
And scanning coil
Electron Detectors
SEM Vs TEM
(TRANSMITTED ELECTRON
MICROSCOPE) TEM
 ADVANTAGES
 Advantages of a Scanning Electron Microscope include its wide-array
of applications, the detailed three-dimensional and topographical
imaging and the versatile information garnered from different detectors.
 SEMS are also easy to operate with the proper training and advances in
computer technology and associated software make operation user-
friendly.
 Although all samples must be prepared before placed in the vacuum
chamber, most SEM samples require minimal preparation actions.
 DISADVANTAGES

 The disadvantages of a Scanning Electron Microscope start with the size and cost.
 SEMS are expensive, large and must be housed in an area free of any possible
electric, magnetic or vibration interference.
 Maintenance involves keeping a steady voltage, currents to electromagnetic coils
and circulation of cool water.
 SEMS are limited to solid, inorganic samples small enough to fit inside the
vacuum chamber that can handle moderate vacuum pressure .
Thank you