1

I HC QUC GIA TP.H CH MINH

TRNG I HC KHOA HC T NHIN
KHOA KHOA HC VT LIU
B MN VT LIU NANO & MNG MNG
--------------------------------

NGUYN XUN TRNG

ti:
PHOTODIODES
SEMINAR CHUYN NGNH
Chuyn ngnh: Vt liu Mng mng


CN B HNG DN:
1. Ths NG HI NG

----------------------------------
TP H CH MINH 2013


2
I HC QUC GIA TP.H CH MINH
TRNG I HC KHOA HC T NHIN
KHOA KHOA HC VT LIU
B MN VT LIU V LINH KIN MNG MNG
--------------------------------


NGUYN XUN TRNG
MSSV: 1019190

ti:

PHOTODIODES
SEMINAR CHUYN NGNH
Chuyn ngnh V i Mng mng

CN B HNG DN:
1. Ths NG HI NG



----------------------------------
TP H CH MINH 2013

3
MC LC

Trang
MC LC .................................................................................................................. 3
DANH MC HNH V V TH ........................................................................ 4
M U .................................................................................................................... 5
CHNG 1 : QUANG DIODE LOI P-N ................................................................ 6
1.1. Cu trc ............................................................................................................... 6
1.2. Thi gian nhy ................................................................................................ 8
1.3. Phn cc ............................................................................................................ 10
CHNG 2 : QUANG DIODE LOI P-I-N ........................................................... 14
2.1. Cu trc v tnh cht .......................................................................................... 14
2.2. u im ............................................................................................................. 14
CHNG 3 : CU TRC D TH.......................................................................... 16
3.1. Cu trc d th ................................................................................................... 16
3.2. Quang diode ro Schottky ................................................................................. 18




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DANH MC HNH V V TH
- Hnh 1.1: Cc photon trong lp chuyn tip nghch o p-n di s chiu
sng. Vng chuyn tip v vng khuch tn ln lt l vng 1 v 2.
- Hnh 1.2: Cc electron v l trng c to ra cc vng 1 (a), vng 2 (b), vng 3
(c).
- Hnh 1.3: S to ra cp electron - l trng v tr x.
- Hnh 1.4: S to ra cp electron - l trng mt cch ng u.
- Hnh 1.5: Quang diode tng qut v mi lien h ca i-V.
- Hnh 1.6: Hot ng mch h ca mt quang diode.
- Hnh 1.7: Hot ng mch ngn ca mt quang diode.
- Hnh 1.8: Hot ng phn cc ngc ca mt quang diode m khng c in tr
ti.
- Hnh 1.9: Hot ng phn cc ngc ca mt quang diode khi c in tr ti, cc
im hot ng nm trn ng nt t.
- Hnh 2.1: Cu trc quang diode p-i-n v biu thang nng lng, phn b ht ti
v phn b vng in trng. Linh kin ny c th c chiu sng vung gc
hoc song song n lp chuyn tip.
- Hnh 2.2: nhy ca hai photodiode p-i-n thc t so vi linh kin l tng.
- Hnh 3.1: Cu trc bn dn

.
- Hnh 3.2: Cu trc bn dn

- Hnh 3.3: Cu trc (a) v di nng lng (b) ca quang diode ro Schottky c
cu to bi t mt kim loi vo mt bn dn loi n.





5
M u

Thit b thu quang, hay cn gi l b thu quang, l mt trong nhng b phn quan
trng nht ca h thng thng tin quang v n l v tr sau cng ca t chc h thng
truyn dn, ni m thit b ny thu nhn mi c tnh tc ng trn ton tuyn a ti,
cng v th cho nn hot ng ca n lin quan n cht lng ton b h thng truyn
dn. Chc nng chnh ca n l bin i tn hiu quang thnh tn hiu in.
Trong k thut thng tin quang, cc phn t bin i in - quang s dng trong
cn phi tho mn mt s yu cu c bn sau:
- Thi gian p ng nhanh.
- nhy v hiu sut bin i quang in cao.
- Nhiu thp.
- iu kin ghp vi si quang thun tin.
- Kch thc nh.
p ng cc yu cu trn, trong k thut thng tin quang, ngi ta thng s
dng cc phn t bin i quang - in nh Photodiodes ( quang diode ).






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Chng 1 Quang diode loi p-n
1.1 Cu trc.

Xem xt hai tm bn dn mt loi n v mt loi p khi c chiu sng trn b mt,
xem Hnh 1.1:

Hnh 1.1: Cc photon trong lp chuyn tip nghch o p-n di s chiu sng.
Vng chuyn tip v vng khuch tn ln lt l vng 1 v 2.

Cc photon c hp th mi ni vi h s hp th . Bt c khi no mt photon
c hp th th mt cp l trng - electron c to ra. Nhng ch c mt ni xut hin
vt tch in trng c th di chuyn n vng khc v mt lp chuyn tip p-n c th ch
cung cp mt in trng trong lp thiu ht, y l vng m ta mun to ra mt vt
mang photon.
Tuy nhin c 3 ni m cp l trng - electron c th to ra, xem Hnh 1.2:
- Cc eclectron v l trng c to ra nhanh chng thiu ht (vng 1) trong vng
chuyn tip di nh hng tc dng ca in trng mnh. V in trng
lun hng t n p, cc electron di chuyn t pha n v n l trng hng ti
p. Kt qu, dng quang in c to ra trong mch ngoi lun theo hng
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ngc li ( t vng n p). Mi ht mang in to ra trong mch ngoi vng
in trng e (G=1) t vic ti kt hp khng xy ra trong vng thiu ht.
- Cc electron v l trng c to ra xa vng thiu ht (vng 3) chng khng di
chuyn theo hng in trng v khng c in trng. Chng di chuyn t do
cho n khi b ph hy v s ti kt hp gia electron v l trng, chng khng
pht sinh ra dng in ngoi.
- Mc d cc cp eclectron v l trng c to ra ngoi vng thiu ht, nhng
vng ln cn (vng 2) c c hi tin vo vng thiu ht v khuch tn mt cch
ngu nhin. Mt eclectron bt u t pha p c di chuyn nhanh chng qua
lp chuyn tip v vy chng gp mt e in tch cho mch ngoi. Mt electron
v l trng n t pha n cng c nh hng tng t.


(a) (b) (c)
Hnh 1.2: Cc electron v l trng c to ra cc vng 1 (a), vng 2 (b),
vng 3 (c)

Quang diode c to ra t nhiu vt liu bn dn c lit k trong Bng 1.1 sau:

Vt liu H s khc x
Cc cht bn dn
Ge
Si

4.0
3.5
Bn dn hai thnh phn nhm III V
8
AlN
AlP
AlAs
AlSb
GaN
GaP
GaAs
GaSb
InN
InP
InAs
InSb
2.2
3.0
3.2
3.8
2.5
3.3
3.6
4.0
3.0
3.5
3.8
4.2

Bng 1.1: Cc loi vt liu bn dn lm Quang diode.

Cng c mt s vt liu bn dn kt hp b i, b ba, b bn thnh phn nh: SiC,
InGaAs v InGaAsP. Cc lp vt liu c cu to sao cho nh sng c nh hng trn
b mt lp chuyn tip p-n thay v song song vi chng. Thm vo s khuch tn ht
ti trong vng ngho gy phn ng lm tng , nhng iu ny cn ph thuc vo dy
cu vt liu s lm gim .

1.2 Thi gian nhy.

Thi gian di chuyn ca cc ht ti i qua vng trng (

i vi ht ti electron
v

i vi l trng ) v thi gian nhy RC ng vai tr quan trng i vi thi

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gian nhy ca cm bin quang diode. Thi gian di chuyn ca cc electron v l trng
c trnh by Hnh 1.3 v Hnh 1.4:

Hnh 1.3: S to ra cp electron - l trng v tr x.

Hnh 1.4: S to ra cp electron - l trng mt cch ng u.

Trong cc quang diode c s ng gp ph thuc ca thi gian nhy c ra
sinh t qu trnh khuch tn. Mc d cc ht ti c sinh ra bn ngoi vng l trng
nhng iu kin n c thi gian khuch tn. y l mt qu trnh tng i kh
chm khi so vi dch chuyn. Thi gian ti a cho php qu trnh xy ra l thi gian
sng ca ht ti (

i vi electron trong vng p v

i vi l trng trong vng n ).

Hiu sut ca thi gian khuch tn c th gim xung bng cch s dng diode p-i-n s
trnh by phn sau.
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Tuy nhin, thi gian nhy ca quang diode thng thng nhanh hn quang bn
dn v trong vng ngho vn tc c truyn nhanh n ht ti quang in. Hn na,
quang diode khng b nh hng bi cc hiu ng c kt hp vi quang bn dn.
1.3 Phn cc.
Ging nh cc linh kin in t, quang diode c 1 mi lin h i-V nh sau:
i =

* (

) +

y l mi quan h ( i-V ) thng thng ca mt lp chuyn tip ( p-n ) vi dng quang
in

c thm vo t l vi thng lng photon.

Hnh 1.5: Quang diode tng qut v mi lin h ca i-V.
C 3 kiu hot ng ca quang diode: mch h (quang in), mch ngn v phn
cc ngc (tnh quang dn).
Trong mu mch h, nh sng to ra cc cp l trng v electron trong vng ngho.
Cc electron t do c thm vo lp n v ti hp vi l trng lp p v ngc li. Kt
qu c c l do s gia tng trong vng t trng v to ra dng quang in ( Vp )
xuyn qua linh kin tng ln v lm tng thng lng photon ( ). y l kiu hot ng
c s dng v d nh pin nng lng mt tri. T l ca quang in quang diode c
xc nh bng V /W ng hn l A/W.
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Hnh 1.6: Hot ng mch h ca mt quang diode.

Mch ngn ( V = 0 ) hin ti ch l dng quang in

c trnh by Hnh 1.7.

Hnh 1.7: Hot ng mch ngn ca mt quang diode.
12

Cui cng, quang diode c th hot ng trong phn cc ngc ca n hoc loi
quang dn th hin Hnh 1.8:

Hnh 1.8: Hot ng phn cc ngc ca mt quang diode m khng c in tr
ti.
Quang diode c th hot ng trong phn cc ngc nu c mt loi in tr ti
c chn vo trong mch c trnh by Hnh 1.9:

Hnh 1.9: Hot ng phn cc ngc ca mt quang diode khi c in tr ti, cc
im hot ng nm trn ng nt t.
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Cc quang diode thng hot ng trong phn cc ngc do mt s nguyn nhn
sau:
- Phn cc ngc ln, tng tc dng to ra in trng ln trong lp chuyn tip
lm tng vn tc ca cc ht ti mang in do lm gim thi gian dch
chuyn.
- Phn cc ngc ln, gia tng rng ca vng trng, bn cnh gim lp
in dung v nng cao thi gian c trng.
- Gia tng rng ca vng trng lm mt vng cm quang rng hn, khin n
d hp th nh sng hn.














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Chng 2 Qang diode oi p-i-n

2.1 Cu trc v tnh cht.

Cng nh mt b cm bin, quang diode p-i-n c mt li th hn quang diode p-n.
Quang diode p-i-n l lp p-n vi lp chuyn tip bn trong (thng c pha tp nh) vi
nhiu lp gia lp p v n. c trnh by Hnh 2.1:



Hnh 2.1: Cu trc quang diode p-i-n v biu thang nng lng phn b ht ti v
phn b vng in trng. Linh kin ny c th c chiu sng vung gc hoc song
song n lp chuyn tip.

Quang diode p-i-n c th hot ng trong iu kin phn cc khc nhau, c gii
thiu nhng chng trc. Hnh 2.1 l biu thang nng lng, phn b ht ti v
phn b vng in trng cho phn cc ngc diode p-i-n. Cu trc ny gip m rng
vng cung cp in trng lm tng hiu sut vng trng.
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2.2 im.
Cu trc quang diode p-i-n c nhng u im sau y:
- Tng rng vng trng ca linh kin (ti ni pht sinh cc ht ti c th dch
chuyn bng cch tri ) lm tng vng kh dng gi nh sng.
- Tng rng vng trng, gim lp chuyn tip in dung do lin quan ti
hng s thi gian RC. Mt khc, tng thi gian di chuyn so vi b rng vng
trng.
- Gim h s gia qung ng khuch tn v qung ng tri ca linh kin,
a ra t l kt qu ln hn ca dng ht ti n nh bi qung ng tri
nhanh hn.
nhy ca hai quang diode p-i-n thc nghim so vi linh kin l tng (=1).
nhy ln nht ca chiu di bc sng thp hn so vi chiu di bc sng vng cm.
iu ny l do vt liu Si c vng cm chuyn tip. Vng chuyn tip hp th photon v
vy thay th vng ha tr c trng n vng dn thng cao hn khu vc bin vng dn.
c trnh by Hnh 2.2:


Hnh 2.2: nhy ca hai photodiode p-i-n thc t so vi linh kin l tng.
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Chng 3 Cu trc d th

3.1 Cu trc d th.

Quang diode cu trc d th, c cu to t hai cht bn dn c nng lng vng
cm khc nhau v c nhiu li th hn lp p-n c to ra t mt vt liu. Vng chuyn
tip d th bao gm vng cm rng ca vt liu (

),v d: C th ch to b hp
th quang hc lm gim thiu truyn qua bn ngoi vng ngho. rng vng
cm ca vt liu c th c gi l Window layer ( lp dng lm gim tc ti
hp b mt ). Vic s dng cc vt liu khc nhau cng to ra cc linh kin c linh
ng cao hn.

( mng tinh th AlGaAs ni vi lp cht nn tng ng

GaAs ) ph hp vi di bc sng t 0.7 m n 0.87 m. C cu trc nh Hnh 3.1.


Hnh 3.1:Cu trc bn dn

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( mng tinh th InGaAs ni vi lp cht nn tng ng InP ) c

th thay i bc sng 1300nm n 1600 nm ph hp cho truyn si quang. Loi cm
bin quang in hnh InGaAs p-i-n hot ng tt 1550 nm, c hiu sut lng t =0.75
v nhy R = 0.9 A/W. C cu trc nh Hnh 3.2.









Hnh 3.2: Cu trc bn dn

l vt liu c li v nm gia vng hng ngoi ca quang

ph .V HgTe v CdTe c hng s mng gn nh ging nhau v c th hp mng gn nh
tt c cc cu trc. Vt liu ny c th iu chnh c nng lng vng cm hot ng
trong dy di bc sng t 3m n 17m. ng dng bao gm cc thit b nhn ban
m, nh nhit v truyn tia hng ngoi bc sng di.
Dng bn phn t nh l

,
hot ng tt di bc sng 0.92 m n 1.7m, dng bn phn t ny quan trng
CAP ( p + )
WINDOW

p-lay (

n-lay (

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v nguyn t th t lm tng t do vo mng tinh th thch hp c cc cu trc
khc nhau xc nh i lng

.
3.2 Quang diode ro Schottky.

Quang diode bn dn - kim loi (cn c gi l quang diode ro Schottky) c
cu to t tip xc d th bn dn - kim loi. Mng kim loi na trong sut mng c
s dng vo v tr loi p ( hoc loi n) trong vng chuyn tip quang diode. Mng
mng i khi c lm t hn hp kim loi bn dn m hot ng ging nh kim loi.
Cu trc ro Schottky v vng nng lng c trnh by di Hnh 3.3:




Hnh 3.3: Cu trc (a) v di nng lng (b) ca quang diode ro Schottky c
cu to bi t mt kim loi vo mt bn dn loi n.

Quang diode ro Schottky c nhiu u im bi cc l do sau:
- Khng phi tt c cc cht bn dn c th lm c hai loi p v loi n, cc linh
kin Schottky c s dng c bit trong cc h vt liu.
- Cc cht bn c s dng pht hin nh sng kh kin v tia t ngoi vi
nng lng photon da trn nng lng vng cm c h s hp th ln. iu
ny lm tng b mt ti hp v gim hiu sut lng t. Lp chuyn tip bn
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dn - kim loi c mt lp thiu ht ngay trn b mt, v th c th loi b ti
hp b mt.
- nhy c trng ca lp chuyn tip quang diode p-n v p-i-n th trong cc
phn b gii hn bi lin kt khuch tn vi ht mang photon c to ra nm
ngoi vng trng. Mt cch gim s hp th khng mong mun l gim
dy ca mt trong s lp chuyn tip.
Tuy nhin, t c iu ny m khng lm tng in tr ca linh kin bi v
khi tng s lm gim hiu sut hng s RC. Cu trc ro Schottky t c v in tr ca
kim loi thp. Hn na, cc linh kin cu trc ro Schottky c ht ti a s v vy c
nhy cao v tn s ln. Thi gian hot ng pico giy, tng ng vi tn s kh dng
bng 100 GHz.














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TI LIU THAM KHO

1. Fundamentals of photonic Second Edition, Bahaa E. A. Saleh, Boston University,
Malvin Carl Teich, Boston University, Columbia University.
2. Semiconductor superlattices, R. Mazurcz k, Centre for Molecular and
Macromolecular Studies, Polish Academy of Sciences, Sienkiewicza 112, 90-363 Lodz,
Poland
3. Semiconductor Optoelectronics, Lecture 4 p-N Heterojunctions, Rajeev J.
RamElectrical Engineering, Massachusetts Institute of Technology














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