I HC QUC GIA THNH PH H CH MINH

TRNG I HC CNG NGH THNG TIN

BI BO CO

TCAD

Gio vin hng dn: Nguyn Trn Sn

Sinh vin thc hin:
Nguyn Nht Qun 10520625
Bi Vn Thu 10520549
Nguyn Thnh Lim 10520601
Nguyn Trng Ngha 10520318

MC LC
I GII THIU V TCAD

II - TM HIU V ATHENA V CCH CHY V D THAM KHO 2D TRN PHN MM

SILVACO

III - HNG PHT TRIN CA TCAD 3D

I GII THIU V TCAD

Technology CAD ( Technology Computer Aided Design vit tt l TCAD) l mt nhnh ca t ng ha
thit k in t ch to m hnh bn dn v cc thit b bn dn hot ng. Cc m hnh ca vic ch to
c gi l qu trnh TCAD, trong khi cc m hnh ca cc thit b hot ng c gi l Device TCAD.
Bao gm cc m hnh ca cc bc ca quy trnh (chng hn nh vic khuch tn v cy ion) v m hnh
ha cc hnh vi ca cc thit b in da trn vt l c bn, chng hn nh cc cu doping ca cc thit
b. TCAD cng c th bao gm vic to ra cc m hnh nh gn (chng hn nh cc m hnh Spice
transistor), nm bt cc hnh vi in ca cc thit b nh vy nhng thng khng ly c chng t cc
vt l c bn. (Tuy nhin, cc gi lp SPICE t thng c xem nh l mt phn ca ECAD hn
TCAD.)

II - TM HIU V ATHENA V CCH CHY V D THAM KHO 2D TRN PHN MM

SILVACO
1.Gii thiu v Athena
ATHENA l mt m phng cung cp kh nng chung cho s, vt l da trn m phng 2 chiu bn dn.
ATHENA c mt kin trc mun m sau c th cp giy php v m rng:
ATHENA: Cng c ny thc hin khi to cu trc v thao tc, lng ng v cung cp c bn v c s
etch
SSUPREM4: Cng c ny c s dng trong vic thit k, phn tch v ti u ha cc cht bn dn
silicon cu trc. N m phng cc bc x l silicon nh cy ion, khuch tn v qu trnh oxy ha.
ELITE: Cng c ny l mt mc ch chung a hnh 2D m phng m t chnh xc mt rng phm vi
ca qu trnh lng ng, etch v reflow c s dng trong cng ngh vi mch hin i.
OPTOLITH: Cng c ny thc hin m phng in thch bn quang hc ni chung bao gm c hnh nh
trn khng 2D, khng phng cn quang tip xc, v gi nng tip xc v pht trin.

2.S dng ATHENA vi phn mm silvaco

ATHENA thng c s dng kt hp vi cc VWF INTERACTIVETOOLS. Nhng cng c ny bao
gm DECKBUILD, TONYPLOT, DEVEDIT, MASKVIEWS v ti u ha. DECKBUILD cung cp mt
thi gian chy tng tc mi trng. TONYPLOTsupplies kh nng khoa hc hnh dung. DEVEDITis
mt cng c tng tc cho cu trc v c im k thut li v tinh t, v MASKVIEWSis BTV IC
Layout. Cc OPTIMIZER supports ti u ha hp en trn nhiu m phng.
ATHENA cng thng xuyn c s dng kt hp vi cc gi lp ATLAS device. ATHENA predicts
s c cu c th l kt qu t ch bin. Nhng cu trc vt l c s dng nh l u vo ca
ATLAS,m sau d on cc c tnh in kt hp vi iu kin thin v nht nh. S dng ATHENA
v ATLAS lm cho n d dng xc nh nh hng ca cc thng s qu trnh trn thit b.
ATHENA cng c th c s dng nh l mt trong nhng m phng ct li trong VIRTUAL WAFER
FAB (VWF). VWFmakes n thun tin thc hin cc th nghim t ng ha cao da trn m phng.
VWFis s dng theo cch gn ging vi quy trnh nghin cu v pht trin thc nghim. V vy, n lin
kt cht ch m phng s pht trin cng ngh, kt qu tng ln rt nhiu li ch t vic s dng m
phng.
3.Cch s dng Athena
a.Chy ATHENA trong DECKBUILD
DECKBUILD l mt mi trng ha tng tc c s dng cho cc mc ch sau y:
To cc tp tin u vo cho qu trnh hoc thit b m phng hoc c hai,

 Chy m phng tng tc,

Giao din gia m phng khc nhau,
Gi VWF tng tc.
bt u ATHENA trong DECKBUILD trong ch tng tc, nhp lnh UNIX sau y:
Deckbuild -an
Sau mt thi gian ch ngn, cc Deckbuild ca s chnh s xut hin. Ca s vn bn di ca ca s
ny s cha cc biu tng v s phin bn ATHENA, mt danh sch cc module c sn, v mt du
nhc lnh. ATHENA sn sng chy. lm quen vi c ch hot ng ATHENA trong
DECKBUILD, ti v chy mt s cc v d ATHENA.

b.Ti v chy v d Athena

DECKBUILD lm cho n c th ti v chy mt s tp tin u vo v d m phng. truy cp vo cc
v d ATHENA, chn Main ControlExamples v cc v d Deckbuild Window s xut hin
Nhm v d DECKBUILD c lit k trong Section v c nhm theo m phng hoc m phng v
d minh chng. Cc tiu mc danh sch trnh n c nhn
V d tp tin u vo. chy v d, chn mt trong cc mc (v d, ATHENA_IMPLANT) trong Mc
menu. iu ny s m ra mt danh sch cc tn tp tin u vo. M t ngn v cc v d s xut hin
trong Examples Windoww.
Chn mt trong cc tp tin u vo bng cch s dng Sub-sectionmenu hoc bng cch nhn p chut
vo tn tp tin u vo v mt m t ca cc tp tin u vo c la chn s xut hin.
Nhn nt Load Example ti cc tp tin u vo c la chn vo Text Deckbuild Subwindow
(bng iu khin pha di ca ca s). Cc tp tin u vo, cng vi cc tp tin khc lin quan n cc
tp tin u vo (tp tin cu trc, setfiles cho TONYPLOT, v cc tp tin b tr cho MASKVIEWS), s
c sao chp vo th mc hin ti.
Mt khi cc tp tin u vo l Deckbuild Text Subwindow(panel pha di ca ca s), nhn nt Run
trong Main Deckbuild window hoc lm theo cc ch dn c bit trong Deckbuild Examples Window
chy input file.
Hu ht cc v d ATHENA cha cc cuc gi ci t sn cc cng c x l sau ha TONYPLOT.
Mt hoc nhiu l s xut hin trong khi cc v d c chn s c chy.

2. Cc ch lm vic
a.M hnh tng tc vi Deckbuild
bt u ATHENA trong DECKBUILD, g:
Deckbuild -an
ti du nhc lnh UNIX h thng. Cc ty chn dng lnh -an DECKBUILD bt u
ATHENA l trnh gi lp mc nh.
bt u vi mt tp tin u vo, loi hin c:
Deckbuild -an <input filename>
Thi gian chy ra cho thy vic thc hin ca mi ATHENAcommand v bao gm cc thng bo li,
cnh bo, cc thng s tch ra v xut quan trng khc nh gi tng ATHENArun. khi no
chy tng tc ATHENA, sn lng thi gian chy s c gi n Deckbuild Subwindow ca
Deckbuild Application Window v ta c th lu n khi cn thit. Ta khng cn phi tit kim thi gian
chy u ra mt cch r rng. Cc dng lnh sau y, tuy nhin, ch nh tn tp tin s c s dng
cho lu tr u ra thi gian chy:
Deckbuild -an <filename input> -outfile <u ra tn tp tin>
Trong trng hp ny, sn lng thi gian chy s c gi n cc tp tin u ra v vo phn u ra ca
Deckbuild Window.
b.Khng tng tc vi Deckbuild
s dng DECKBUILD trong mt ch khng tng tc hoc hng lot, thm tham s-run vi cc
lnh m gi DECKBUILD. Mt tp lnh chun b c yu cu cho chy trong ch hng lot. Chng
t tit kim u ra thi gian chy vo mt tp tin bi v cc thng bo li trong u ra thi gian chy
s b mt khi cc cng vic hng lot hon thnh.
Deckbuild-run -an <filename input> -outfile <u ra tn tp tin>
S dng lnh ny i hi mt h thng X-Windows cc b c chy. Cc cng vic chy bn trong
mt biu tng DECKBUILD trn thit b u cui v b t ng khi m phng ATHENAhon tt. Bn
cng c th chy DECKBUILD s dng mt mn hnh hin th t xa. V d:
Deckbuild-run -an <file input> <file output> -outfile -display <hostname>: 0.0
c. KHng ca s tng tc vi Deckbuild
Cc tham s -ascii l cn thit cho hot ng phi X- Windows ca DECKBUILD. V d:
Deckbuild-run -ascii -an <filename input> -outfile <u ra tn tp tin>
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Lnh ny lnh cho DECKBUILD chy m phng ATHENAsimulation m khng c mn hnh hin th
ca ca s DECKBUILD. iu ny rt hu ch cho thc hin t xa m khng cn mt m phng X hoc
chy thay th ATHENA trong chng trnh da trn UNIX.
Khi s dng ch hng lot, s dng cc lnh UNIX & suffix tch cc cng vic t tin ch dng
lnh hin hnh. chy mt m phng ATHENA xa theo DECKBUILD khng c mn hnh, v sau
ng xut khi h thng, s dng lChy ATHENA bn Deckbuild
d.Chy ATHENA trongDeckbuild
Mi ATHENA chy bn DECKBUILD nn bt u vi cc dng lnh sau y:
go Athena

III - HNG PHT TRIN CA TCAD 3D

1.L do la chn:
Thi gian l tin bc. Hiu qu l cha kha chnh
-Mt khi cc tp tin u vo l trong cc bn vn Subwindow Deckbuild (panel pha di ca ca s),
TCAD ri truyn thng 3D l tn thi gian, c th mt ngay c lu hn l thi gian ch to thc t
-2D Khng c chp nhn cho ngnh cng nghip bn dn hin nay
Quasi-3D v Full-3D
Quasi-3D b qua cc dopant khuch tn tit kim thi gian lc u khi no, tt c mi th u n, full3D s a n tt tng tc khng gian
2.V d
CH TO NPN BJT

CC BC M PHNG 3D
Bc 1: Load file GDSII
Ta s dng mt in ng NPN BJT nh mt v d. T layout, to ra cc file GDSII

Bc 2: Ct lp theo chiu z

Crosslight cung cp mt cng c to cu trc 3D tch hp n gin ha qu trnh m hnh 3D.

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Cc tp tin cu trc z (file .zst) c s dng kim sot v tr ct v my bay theo chiu z
Mt n file (.msk file) c s dng to ra lp mt n trong cc tp tin u vo cho CSuprem
Bc 3: Virtual Fabrication s dng CSuprem
CSuprem l phin bn Crosslight ca SUPREM IV, ban u c pht trin bi i hc Stanford.
Ta c th chn t bn 3 m phng 3D chiu hoc y , phng tin quasi-3d
s khuch tn gia cc chiu z khng c xem l thc y tc

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M phng NPN BJT 3D

Bc 4: Virtual Testing s dng APSYS

M hnh vt l tin tin ca thit b bn dn, da trn 2D / 3D phn tch phn t hu hn cc tnh cht
in, quang v nhit ca cc thit b cht bn dn , vi silicon l mt trng hp c bit.

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Kt qu m phng

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