Index

A
Accumulation, 250253
Active dissolution, 378381
Adiabatic limit, 2426
Adriamycin, 410
Adsorbate, 1826, 38, 41, 412
Adsorption, 384
AES, 378
AFM, 35, 378, 408, 410
AFM tip scratching, 403
Al alloy, 398
ALD, 295
Alumina membrane, 282285
Anodization, 435
Anodization of aluminium, 282
Atom dynamics, 6
Atomic force microscopy, 61, 378
Atomic layer deposition, 295297
Au nanowires, 165
B
Band-energy diagram, 251
Benzoquinone, 223224
Benzotriazole, 381
Biocompatibility, 438
Bioelectrocatalysis, 428430
Bioelectrochemistry, 407
Biofilms, 410
Biomolecule immobilization, 226227
Biomolecules, 408
Biosensor, 409, 413, 414, 415, 425
BTA, 382
ButlerVolmer equation, 19, 360
C
Carbon-masking, 165
Carbon nanoelectrodes, 301307
Carbon nanotube membrane, 303
Carbon nanotubes, 303, 424

Carbon-paste electrode, 412

Cells, 410
Cell-surface interactions, 459
Ceramic-modulated structures, 371
Charging curves, 252
Chemical vapor deposition, 294295
Chromium passive film, 389
CMMMs, 349372
CNM, 303305
Colloidal crystals, 285287
Compositionally modulated metal multilayers,
349372
CoNiP deposition, 335
Contamination lithography, 163
Contamination writing, 161
Copper interconnects, 97, 378
Corrosion, 41, 168, 349, 377404
Corrosion inhibitor, 381384
Crystallization of oxide film, 386
Cu interconnects, 329
Current oscillations, 442443
Currentpotential curves, 261, 269
CVD, 294
D
Damascene electrodeposition, 97
Damascene process, 323, 327
Depletion, 253256
Deposition, 279317
Desorption/ionization on silicon, 230
Deuterium termination, 188
Dielectric breakdown, 437
Diffusion barrier layer, 330332
DIOS, 230
Dip-pen nanolithography, 72
Dislocation, 401
Displacement energy, 149, 150
Displacement reaction, 356
DNA, 226, 315, 316, 420, 421

467

468
DNA ion channel, 314316
DNA nanotube, 426
DNA tiles, 421
Doping of TiO2 nanotubes, 455
Dual-bath electrodeposition, 351353
Ductility, 108110
Dye sensitization, 455456
E
E-beam-induced deposition, 160161
EBICD, 161, 162
EBID, 160161
EBL, 140
ECALE, 55
ECSTM, 378
Electrochemical AFM, 6167
Electrochemical atomic layer epitaxy, 55
Electrochemical etching, 156157,
165169, 185
Electrochemical phase formation, 5157
Electrochemical quartz crystal
microbalance, 415
Electrochemical STM, 3660, 378
Electrochromic effects, 456457
Electrodeposition, 51, 65, 79, 85, 92, 289,
349, 414
Electrodeposition of multilayers, 349
Electrodeposition of polymers, 289
Electrografting, 211
Electroless deposition, 289293, 321
Electroluminescence, 185, 259, 260, 264
Electrolyte stability, 366368
Electron-beam, 140, 152169
Electron-beam lithography, 140, 152155
Electron beam lithography, 335
Electron injection, 272275
Electron scattering, 155
Electron transfer, 1, 17
Electron tunneling, 257260
Electroosmotic flow, 302
Electroplating, 155156, 163
EOF, 302
EQCM, 415
F
Faraday equation, 359
Fatigue, 107
FIB cutting, 169176
FIBL, 140
Flat-band potential, 250
Flow modulation, 358359
Focused ion beam, 139176
Focused ion beam lithography, 140

Index
Free-standing membrane, 448
FTIR spectroscopy, 187, 190, 203, 211, 223
G
Galvanic corrosion, 362
Gold nanoelectrodes, 298301
Grain boundary, 398, 401
Grain refinement, 110124
Gramicidin, 413
Grand-canonical simulation, 6, 12, 13, 14
Grignard reaction, 205207
Growth of nanotubes, 443
H
Halide termination, 188189
HallPetch behavior, 110, 112
HfO2 , 436, 449
Hole-filling, 327
Hole injection, 271272
H-sensing, 461
Hydride abstraction, 204205
Hydride-terminated porous germanium,
240241
Hydrogen termination, 186187
Hydrosilylation, 189205
Metal-induced, 189193
Microwave-irradiation-induced, 202204
Photochemical, 193196
Thermal, 197202
Hydroxyapatite, 459460
I
Immunosensor, 425, 426
In situ AFM, 6366
In situ nanoprobe, 378
In situ STM, 37
Inclusion, 377
Initiation of porous layers, 441443
Interaction potential, 67
Interconnects, 330, 378
Interfacial forces, 59
Interfacial instability, 363365
Ion channels, 312314, 413
Ion insertion, 456
Ion milling, 163
Ion optics, 172173
K
Kinetic control, 354
Kink, 380
L
Lattice misfit, 392
LIGA, 79131

Index
Li-ion battery, 280
Li-ion battery nanoelectrodes, 307312
Lithography, 79131
Localized corrosion, 394403
M
MAC mode AFM, 412, 416
Macroporous, 249
Macroporous germanium, 238240
Macroporous Si, 186
Macroporous silicon, 255
Magnetic nanodot arrays, 334337
Magnetic nanodots, 334337
Magnetic nanoparticles, 428
Majority-carrier reactions, 269271
MALDI, 230
Mass-transport control, 356
Matrix-assisted laser desorption/
ionization, 230
Mesoporous, 249
Mesoporous metals, 341
Mesoporous Si, 186
Mesoporous silica, 341
Metallic mesoporous particles, 341343
Metallophthalocyanine, 412
Metal-oxide-modulated structures, 371
Metastable pit, 396, 397
Methoxylation, 216217
Micelles, 338
Microcapillary, 399
Micromachining, 72, 139, 173
Micromotor, 90
Microporous, 249
Microporous Si, 185
Microwave irradiation, 189, 202204
Minority-carrier injection, 268269
MnS inclusion, 399
Modulus, 107, 125129
Molecular dynamics, 4
Monte Carlo method, 6
Multilayer, 448
N
Nanobioelectrochemistry, 407431
Nanobiosensor, 413
Nanobiotechnology, 407
Nanocell, 7173
Nanocrystalline germanium, 183
Nanocrystalline silicon, 183
Nanocrystallinity of passive films, 394
Nanoelectrode ensemble, 298
Nanoelectrodes, 298
Nanoparticles, 338
Nanopit, 390

469
Nanoprobe, 378
Nanosphere-template, 312
Nanostructuring, 10, 68, 152
Nanotubes, 288, 291
Nanotubular layer, 439
Nanowires, 280, 287288
Nb2 O5 , 437, 449
N-doping, 438
NEE, 298
Ni-alloy diffusion barrier layer, 330331
Nickel passivity, 394
NiCo electrodeposition, 115
Ni electrodeposition, 99
NiFe electrodeposition, 102, 104
NiMn electrodeposition, 97
Nucleation of oxide film, 386, 395
O
Organic layers, 184
Organohalide reduction, 209
Oxide-dispersion-strengthening, 124
Oxide nanoparticles, 338340
P
Passivation, 384389
Passivation of PSi surface, 201
Passive film, 389394, 397
Passivity breakdown, 394398
Peptide, 426
Peptide nanotube, 426
PFV, 411
PGe, 183
Phase instability, 363365
Photocatalysis, 457
Photocurrent, 261, 454
Photoderivation, 217219
Photoelectrochemistry, 264
Photoelectrode, 265
Photogeneration, 260268
Photoluminescence, 183, 195, 234,
250, 252
Pitting corrosion, 398401
Plasma modification, 224
Polarization curves, 439
Polymer/PSi hybrid, 225226
Pore size classification, 186
Porous alumina, 157, 282
Porous etching, 257
Porous GaP, 259
Porous germanium, 233238, 240
Porous oxide, 435
Porous semiconductors, 249276
Porous silicon, 157, 158, 162, 183,
185, 252

470
Protein film voltammetry, 411
Protein mask, 414
Protein nanotube, 20
PSi, 184186, 188
PSiGermanium, 240
Pulsed current, 353
Pulsed potential, 353
Pulse plating, 120, 121
Q
Quantum efficiency, 261
Quartz-crystal microbalance, 363
R
Radiation damage, 149151
Raman spectroscopy, 197
RDE, 367
Recombination, 266
Resonant transition, 2024
Resonant tunneling, 42
Rotating ring disc electrode, 358
RRDE, 358
S
SAM patterning, 157159
SAMs, 157159, 329, 381, 415
Sand equation, 360
Scanning electrochemical microscopy, 37
Scanning electron microscope, 119, 139
Scanning near-field optical microscopy,
34, 67
Scanning probe microscope, 2
Scanning tunneling microscope, 2, 390
Scanning tunneling spectroscopy, 5760
Scanning vibrating electrode technique, 399
Scattering of particles, 141145
Schottky barrier breakdown, 174
SECM, 37
Self-assembled biomolecules, 412415
Self-assembled monolayers, 157159, 329,
381, 415
Self-assembly, 413, 421
Self-organization, 451
Self-organized pore formation, 441
Semiconductor deposition, 371
Semiconductor electrochemistry, 174, 250
Semiconductor surface functionalization,
184
Sensing, 230233
Silicongermanium, 240
SIMS, 378
Simulation, 130
Single-bath electrodeposition, 353358
Si surface functionalization, 159

Index
S-layer, 414415
SNOM, 34, 67
Solgel deposition, 293
Space-charge layer, 251, 252259, 264
SPM, 2, 35
Sputtering, 151152
Stain etching, 186
Stainless steel, 389, 393394
Statistical thermodynamics, 5
Step decoration, 54
Step edge, 379, 381, 385
Step-flow mechanism, 379, 382
STM, 2, 390
Stopping of particles, 145148
Strength, 91, 107
Stressstrain behavior, 111, 114, 115, 118,
119, 122
Structure of passive film, 389394
STS, 58
Superfilling, 323328
By electrodeposition, 323
By electroless deposition, 324
Surface faceting, 388
Surface reconstruction, 38, 40, 384, 385
SVET, 399
Synchrotron radiation, 7980
T
Ta2 O5 , 436, 449
TEM, 170
Template, 279317
Template synthesis, 287297
Terrace, 381, 386
Texture, 107, 118, 119, 122, 123, 125
Ti alloys, 438
TiO2 , 438
Tip-induced cluster formation, 8
Tip-induced deposition, 68
Tip-induced localized corrosion, 403
Tip-induced metal deposition, 2, 8
Tip-induced nanohole filling, 1417
Titanium, 442
Track-etch membranes, 280282
Tunnel barrier, 36
Tunnel contact, 40
Tunnel current, 36
U
ULSI, 329330
ULSI interconnects, 329330
Ultralarge-scale integration, 321
Ultramicroelectrode, 67, 410
UME, 67

Index
Underpotential deposition, 70, 371
Underpotential shift, 12
UPD, 70, 371
V
Valve metal, 437439, 440
Vesicles, 410
Vickers hardness, 109
Video-STM, 48

471
W
Wettability, 458
WO3 , 437, 449450
X
X-ray, 79131
X-ray mask, 82
Z
ZrO2 , 436, 437