VACUUM

COMPONENTS
2009

Vol.8.8

http://www.canon-anelvatx.co.jp

Vacuum Components

Vacuum
Components
------------------------------------------------------------------

------------------------------------------------------

10

1. -----------------------------------------------------------------------------

13

------------------------------------------------------ ---------------------------------------------------------------------------- ----------------------------------- ---------------------------------------------------------------POWER -----------------------------------------------POWERECO ------------------------------------------- ------------------------------------------------------------ --------------------------------------------------------- ------------------------------------------------------------------ -----------------------------------------------------------------------------------------------------------------------------------------

14
42
50
54
60
70
94
104
106
112
116

----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- ------------------------------------------------------ --------------------------------------------------------------- ------------------------------------------

122
162
176
190
192
197

---------------------------------------------------------- 204

---------------------------------------------------------- 210
------------------------------------------------------------------- 212
---------------------------------------------------------------- 214

2. ---------------------------------------------------------------------

217

----------------------------------------------------------------------
D ----------------------------------
-------------------------------------------- --------------------------------------------------------------------------

218
226
230
242

---------------------------------------------------------
---------------------------------------------------------------
---------------------------------------------------------
------------------------------------------------------------------------------- -------------------------------------------------------------

3. --------------------------------------------------------------------------------
----------------------------------------------------------------------ICF ------------------------------------------------------------------------- --------------------------------------------------------------- ---------------------------------------------------------------------------- -------------------------------------------------------------------------
-------------------------------------------------------------------------------------------------- --------------------------------------------------------- --------------------------------------------------------------- ----------------------------------------------- ------------------------------------------------------------------------- ------------------------------------------------------------------
MSB --------------------------------------------------------------------------STD ---------------------------------------------------------------------------
------------------------------------------------------------------------------- -------------------------------------------------------------------------------R/L ------------------------------------------------------------------------------- ---------------------------------------------------------------------------------- ------------------------------------------------------E ------------------------------------------------------------------------------------

264
278

282
284
302

307

308
320
326
334
336
342
346
350
354
360
362
366
368
372
378
384
386
388
408
412

Vacuum
Components

mm

Vol.8.8

Vacuum Components

Vol.8.8

215-8550 2-5-1
TEL 044-980-3500FAX 044-986-4236

401-0397 8532-28
TEL.055520-5585FAX.055585-2199

215-8550 2-5-1
TEL 044-980-3503/3505FAX 044-986-4236

564-0044 1-4-33
TEL 06-6821-9708( )FAX 06-6821-9702

215-8550 2-5-1
TEL 044-980-3502FAX 044-986-4236

862-0924 3-3-10 MJ
TEL 096-385-3111( )FAX 096-385-3061

Vol.8.8

011-721-5221

022-272-2313

022-221-7501

022-743-3221

027-362-5551

029-858-0211

03-5805-0515 http//www.sankei-coltd.co.jp

03-3231-1131 http//www.yamato-net.co.jp

03-3862-1385

03-3270-5761

03-3251-5731

044-435-5856

046-226-1471

052-882-1371

06-6475-5266

http//www.cryovac.jp

072-339-5360

http//www.yamato-gr.jp

0745-53-3414

076-424-2806

http//www.kentech-co.com

07912-9-0211

http//www.asahigroup.net/

088-632-6132

0878-31-2177

08275-2-5241

084-920-3344

0836-72-3177

0958-62-5891

0985-30-4811

URL
http//www.hayasaka-rikoh.co.jp
http//www.ndk-com.co.jp
http//www.asahi-syokai.co.jp
http//www.toei-tc.co.jp

http//www.rdec.co.jp

http;//www.ryosan.co.jp
http//www.cosmotec-co.jp
http//www.n-denkei.co.jp
http//www.toyokokagaku.co.jp
http//www.ec-marubishi.co.jp
http//www.ozawasc.co.jp

http//ys-vacuum.com

http//www.e-tokushima.co.jp/ts

Vol.8.8

http//www.satokikai.com
http//www.asahigrp.net

http//www.choshu.co.jp

http//www.possible.co.jp

215-8550 2-5-1
TEL 044-980-3506FAX 044-986-4236

FS
215-8550 2-5-1

299-0102 1-11-22

TEL 044-980-5130FAX 044-986-4237

TEL.043624-6521 FAX.043624-6526

SS

SS

SS

997-0838 26-23

254-0013 8-25-12102

TEL.023525-5670 FAX.023525-5675

TEL.046354-6333 FAX.046354-6333

FS

SS

981-3133 3-1-2 SS 1F

399-0746 1-1

TEL.022776-3250 FAX.022776-3255

TEL.026354-3689 FAX.026352-8939

SS

950-2004 3-7-6

465-0092 3-230

TEL.025233-7111 FAX.025233-7955

TEL.052776-1151 FAX.052773-3199

SS

10

FS
564-0004 1-4-33

300-0746 1-8-4 2

TEL.029824-9811 FAX.029824-9815

TEL.066821-9703 FAX.066821-9704

Vol.8.8

 SS

SS

680-0873 2-82

739-0015 10-30-302

TEL.085753-7311 FAX.085753-7308

TEL.082424-0001 FAX.082424-0050

FS

770-8053 2-37

862-0924 3-3-10 MJ

TEL.088602-1877 FAX.088602-1878

TEL.096385-3111 FAX.096385-3061

FS

SS

723-0052 6-17-5

TEL.084862-7811 FAX.084862-7814

870-0027 1-1-18
12F

TEL.097513-6050 FAX.097537-4119

SS

SS
FS
SS

SS

SS
SS
SS

SS
SS

SS

SS
FS
FS

Vol.8.8

FS
SS

11

Memorandum

12

Vol.8.8

VACUUM PUMPS

ATP
ATH
1025
ACP15/28/40 2

Vol.8.8

13

PIC-052

Ti

14

Vol.8.8

915-9520

1
140L/s 110L/s

1.

9.3 10 7Pa

1.6 10 5Pa

11013A
11012A

M/e 12

18

28

M/e 12

18

28

44

57

80

91

3
M/e 44

Vol.8.8

15

915-9510

3.

2.
10

Pa 10

Pa

10 3 10 2Pa

10 9Pa

OFF

NEG

10 10Pa

109Pa
20
18
16
14
12
10

ON

OFF

OFF

OFF

ON

ON

2
50sec

100sec

150sec

10 9Pa ON-OFF
OFF ON 10 9Pa

5.

4.

W
600
500
400
300
200
100
0
106

105

104

103

102

101

Pa

5 60L/s

7.

6.

10 Pa 10

Pa

1.3Pa

6.7Pa

16

Vol.8.8

8.

21

10 4Pa

10 3Pa

9.

10.
20L/s
30cm

200 270

200 270

200 270

100
100
100

100
100
100

100
100
100

100

100

100

90 160
57
10
1

90 160
57
30
21

90 160
57
30
21

10 3Pa
100 110

10

Vol.8.8

17

 20L/s /

20L/s

20L/s

912-7125

912-7120

N2

20L/s

10 1 10 9Pa

1 10 9Pa

1.3Pa

6.7Pa

1.4L

300

70ICF

912-71211

10.5kg

PIC-050A-IP

PIC-050A-NP

5 10 3Pa

5 10 3Pa

AC100V 10
1 50/60Hz

AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kVA

DC 5.2kVA

50/60Hz

35mA

35mA
0 4090

10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

1.3 10 3 10 6Pa

1.3 10 3 10 6Pa

2.5m

2.5m
3m954-7403

4kg

4kg

2
3 AC200V AC100V

20L/s

912-7125

912-7120

70ICF

PIC-050A-IP

PIC-050A-NP
1

2 3A

2 3A

1 2.5m

1 2.5m

1 36
16

1 36
16

REMOTE

18

20L/s

1 3m

Vol.8.8

67

1331.5

65

105
194
214
2161.5

100

1872

13

121

11

M32PI

20

70 ICF

20

1541.5

4-M6
361

7 a 20L/s
912-7125
20L/s 912-7120)

Vol.8.8

19

 30L/s /

30L/s

30L/s

912-7135

912-7130

N2

30L/s

10 1 10 9Pa

1 10 9Pa

1.3Pa

6.7Pa

2.2L

300

114ICF

954-7281

912-71211

12.5kg

PIC-050A-IP

PIC-050A-NP

5 10 3Pa

5 10 3Pa

AC100V 10
1 50/60Hz

AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kV

DC 5.2kV

35mA

35mA

50/60Hz

0 4090

10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

1.3 10 3 10 6Pa

1.3 10 3 10 6Pa

2.5m

2.5m
3m954-7403

4kg

4kg

2
3 AC200V AC100V

30L/s

912-7135

912-7130

114ICF

PIC-050A-IP

REMOTE

20

30L/s

PIC-050A-NP
1

2 3A

2 3A

1 2.5m

1 2.5m
1 3m

1 36
16

1 36
16
1

Vol.8.8

2161.5
214
194

1331.5

105

1683

114 ICF

20

1541.5

2282

150
13

100

40

22

M32PI

4-M6
361

7 c 30L/s
912-7135
30L/s 912-7130

Vol.8.8

21

 60L/s /

60L/s

60L/s

912-7165

912-7160

N2

60L/s

1
1

10 1 10 9Pa

1 10 9Pa

1.3Pa

6.7Pa

6.2L

300

152ICF

954-7281

915-70271

915-95271

912-71212

25.6kg

50/60Hz

PIC-050A-IP

PIC-050A-NP

1.7 10 3Pa

1.7 10 3Pa

AC100V 10
1 50/60Hz

AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kVA

DC 5.2kVA

35mA

35mA
0 4090

10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

1.3 10 3 10 6Pa

1.3 10 3 10 6Pa

2.5m

2.5m
3m954-7403

4kg

4kg

AC200V AC100V

60L/s

912-7165

912-7160

152ICF

PIC-050A-IP

REMOTE

22

60L/s

PIC-050A-NP
1

2 3A

2 3A

1 2.5m

1 2.5m
1 3m

1 36
16

1 36
16
1

Vol.8.8

1331.5
67

3561.5

1884
152 ICF

195
9.5

28.5
214
3.5

2932

M32PI

10 100

1081

100

110

126

110

4-M6
1081

7 e 60L/s
912-7165
60L/s 912-7160

Vol.8.8

23

 110L/s 140L/s

N2

1
1

110L/s

140L/s

912-7020

912-7010

110L/s

140L/s

1 10 9Pa

10 1 10 9Pa

6.7Pa

1.3Pa

18L

300

203ICF

954-7281

915-95201

915-95101

912-70011

48kg

50/60Hz

PIC-050A-NP

PIC-075A-IP

1.3 10 3Pa
AC100V 10
1 50/60Hz

8 10 4Pa
AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kV

DC 7.5kV

35mA

20mA

0 4090

10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

1.3 10 3 10 6Pa

8 10 4 10 6Pa

2.5m

2.5m

3m954-7403

4kg

4kg

140L/s

912-7020

912-7010

203ICF

PIC-050A-NP

PIC-075A-IP
1
2 3A

1 2.5m

1 3m

REMOTE

24

110L/s

1 36 16
1

Vol.8.8

7 g 110L/s 912-7020
140L/s 912-7010

Vol.8.8

25

 220L/s

220L/s

912-7040

912-7041

N2

220L/s

5 10 1 10 9Pa

3.4Pa

26L

28L

300

203ICF

954-7281

915-95102

912-70021

912-70012

85kg

90kg

PIC-050A-NP

6 10 4Pa
AC100V 10
1 50/60Hz

50/60Hz

2.5A
DC 5.2kV

35mA

0 4090
10kV
LINEAR
100mA
LOG

6 10 4 10 6Pa

2.5m

3m954-7403

4kg

220L/s

912-7040

912-7041

203ICF

PIC-050A-NP
1
2 3A

1 2.5m

1 3m

REMOTE

26

220L/s

1 36 16
1

Vol.8.8

5046

2103

M32PI

4806

2173

1793

1283

2503

1863

80

2984
M32PI

3105

2103

2103

203 ICF

203 ICF

25

84

4295

4705

30

25

30

M32PI

164.5 962

7 h 220L/s 912-7040
270L/s 912-7030

1303

1403

1303

5545

3735

5545

4705

3735
4295

8-M12

16-M12

7 i 220L/s 912-7041
270L/s 912-7031

Vol.8.8

27

 270L/s

270L/s

912-7030

912-7031

N2

270L/s

5 10 2 10 9Pa

6.5 10 1Pa

26L

28L

300

203ICF

954-7281

915-95102

912-70021

912-70012

85kg

90kg

PIC-075A-IP

4 10 4Pa
AC100V 10
1 50/60Hz

50/60Hz

2.5A
DC 7.5kV

20mA

0 4090
10kV
LINEAR
100mA
LOG

4 10 4 10 6Pa

2.5m

3m954-7403

4kg

270L/s

912-7030

912-7031

203ICF

PIC-075A-IP
1
2 3A

1 2.5m

1 3m

REMOTE

28

270L/s

1 36 16
1

Vol.8.8

 400L/s 500L/s

N2

1
1

400L/s

500L/s

912-7060

912-7050

400L/s

500L/s

1 10 9Pa

10 1 10 9Pa

6.7Pa

1.3Pa

38L

300

203ICF

954-7281

915-95204

915-95104

912-70022

120kg

50/60Hz

PIC-050A-NP

PIC-075A-IP

4 10 4Pa
AC100V 10
1 50/60Hz

2 10 4Pa
AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kV

DC 7.5kV

35mA

20mA

4090

10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

4 10 4 10 6Pa

2 10 4 10 6Pa

2.5m

2.5m

3m954-7403

4kg

4kg

400L/s

500L/s

912-7060

912-7050

203ICF

PIC-050A-NP

PIC-075A-IP
1
2 3A

1 2.5m

1 3m

REMOTE

1 36 16
1

Vol.8.8

29


4835
5076

962

2164

962

7 j 400L/s 912-7060
500L/s 912-7050

30

Vol.8.8

16-M12

5545

3735
4295

1863

2503

2103

M32PI

4705

25.4
30

203 ICF

 800L/s 1000L/s

800L/s
912-9110

N2

912-9100

1000L/s

10 2 10 9Pa

10 3 10 9Pa

1.3 10 1Pa

1.3 10 2Pa

106L

300

326CS

356ICF

912-7195

800L/s

1
1

1000L/s

912-7190

326CS

356ICF

954-7281
912-95208

915-95108
912-70032

257kg

PIC-050A-NP

PIC-075A-IP

2 10 4Pa
AC100V 10
1 50/60Hz

1.1 10 4Pa
AC100V 10
1 50/60Hz

2.5A

2.5A

DC 5.2kV

DC 7.5kV

35mA

20mA

50/60Hz

4090
10kV
LINEAR
100mA
LOG

10kV
LINEAR
100mA
LOG

2 10 4 10 6Pa

1.1 10 4 10 6Pa

2.5m

2.5m

3m954-7403

4kg

4kg

800L/s

800L/s

912-9110

912-7190

1000L/s

1000L/s

912-9100

912-7195

3 326CS

3 356ICF

3 326CS

3 356ICF

PIC-050A-NP

PIC-075A-IP
1
2 3A

1 2.5m

1 3m

REMOTE

1 36 16
1

Vol.8.8

31


7 k 800L/s 912-9110
800L/s 912-7190
1000L/s 912-9100
1000L/s 912-7195

32

Vol.8.8


10 3 10 5Pa

PIC

912-7125

20L/s

912-7135

30L/s

912-7165

60L/s

912-7120

20L/s

912-7130

30L/s

912-7160

60L/s

PIC-075A-IP

912-7010

140L/s

8 10 4Pa

PIC-050A-NP

912-7020

110L/s

1.3 10 3Pa

PIC-050A-IP

PIC-050A-NP

5 10 3Pa
1.7 10 3Pa
5 10 3Pa
1.7 10 3Pa

270L/s
270L/s

912-7040

220L/s

912-7041

220L/s

PIC-075A-IP

912-7050

500L/s

2 10 4Pa

PIC-050A-NP

912-7060

400L/s

4 10 4Pa

PIC-050A-NP

PIC-075A-IP
PIC-050A-NP

912-9100

1000L/s

912-7195

1000L/s

912-9110

800L/s

912-7190

800L/s

912-7030
912-7031

PIC-075A-IP

4 10 4Pa
6 10 4Pa

1.1 10 4Pa
2 10 4Pa

PIC-050A-IP
PIC-050A-NP

19mA
OVER LOAD

PIC-075A-IP

12mA

OVER

LOAD
OVER LOAD 30 HV
FAILURE
HVON/ON LOCK

ON LOCK
2
1 A 20mA 1A

1.3mA

REMOTE/LOCAL

HV
REMOTE HV ON/OFF
ON/OFF
DC12 24V6 12mA
HV
REMOTE/LOCALHV ON
INHIBT
DC12 24V6 12mA

0 10VDCLOG
2A
HV ON/OFF
MAX100mADC24V
REMOTE/LOCAL
OVER LOAD REMOTE/LOCAL

FAILURE

Vol.8.8

33

 PIC-052

20L/s

PIC-052

PIC-052NP

20L/s

912-7135

30L/s

912-7165

60L/s

1 10 2Pa

912-7010

140L/s

6 10 3Pa

2 10

Pa

912-7030

270L/s

912-7031

270L/s

912-7050

500L/s

912-9100

1000L/s

912-7195

1000L/s

912-7120

20L/s

912-7130

30L/s

912-7160

60L/s

1 10 2Pa

912-7020

110L/s

6 10 3Pa

912-7040

220L/s

912-7041

220L/s

912-7060

400L/s

912-9110

800L/s

912-7190

800L/s

912-7100

125L/s

3 10 3Pa
1.5 10 3Pa
1 10 3Pa
2 10 2Pa

3 10 3Pa
2 10 3Pa
1 10 3Pa
1 10 2Pa

REMOTE
AC IN

29.5
1.5

203
2

197
1.5

MIN160
()

0 10V DCLOG 100

DC12 24V
6 12mA

HV OUT

78.5
1.5
76.5
1.5

2
HV ON/OFF
REMOTE/LOCAL
OVER LOAD

MAX 100mA DC24V

REMOTE/LOCAL

333
1.5

HV INHIBT

REMOTE HV
ON/OFF
REMOTE/LOCAL
HV ON

HV ON/OFF

PUMP
GND

FAILURE

REMOTE/LOCAL

HV ON LOCK

(13.5)

(15)

10.5
POWER

HV

RMT

SP1
10A

FLR

OL

POWER
ON

ON

SP2

HV
ON OFF
LOCK

RMT LCL

100A

ION PUMP CONTROLLER

PIC-052NP

34

Vol.8.8

10mA
6

SET POINT

OFF

52
1

1mA

105
1 209
1

100mA
8

1A
10KV

VOLTAGE

4-5

(3.2)

99
87 1
1

PIC-052IP

912-7125

L/s

80

N2

L/s

80

60 L/s

60
30 L/s

40

20 L/s

20
104

103

40

30 L/s
20 L/s

20
0
106

102

105

104

103

Pa

Pa

20L/s30L/s60L/s

20L/s30L/s60L/s

625

N2

L/s

270 L/s

N2

400 L/s

375

140 L/s

102

500 L/s

500

220 L/s

200

250

100

110 L/s

125

0
106

105

104

103

102

N2

105

104

103

102

400L/s 500L/s

110L/s 140L/s
220L/s 270L/s

1,250

0
106

Pa

Pa

1000 L/s

1,000

L/s

60

300

105

60 L/s

L/s

0 6
10

N2

800 L/s

750
500
250
0
106

105

104

103

102

Pa

800L/s 1000L/s

Vol.8.8

35

102

102

103

20L/s30L/s

104

Pa

Pa

103

60L/s

105

106

20L/s30L/s

104

60L/s

105

10A 100A

1mA

10mA

106

100mA

10A 100A

1mA

10mA

20L/s30L/s60L/s

20L/s30L/s60L/s

102

102
220L/s

400L/s

Pa

Pa

110L/s
104
800L/s

105

106
100A

1mA

10mA 100mA

1A

110L/s220L/s400L/s800L/s

500L/s

140L/s

104

1000L/s

105

36

270L/s

103

103

106

100mA

10A 100A

1mA

10mA

100mA

1A

140L/s270L/s500L/s1000L/s

Vol.8.8

 10

1102

A
1103

1104

1105
0

B
20 cm

40 cm

Tesla

Tesla

1102

1103

1104

1105

60 cm

A
0

20 cm

20L/s
20L/s

40 cm

60 cm

1102

60L/s
60L/s

1102

Tesla

Tesla

1103

110

1105
0

20 cm

40 cm

1103

1104

1105

60 cm

110L/s
140L/s

20 cm

40 cm

60 cm

400L/s
500L/s

Tesla

1102
A
C
1103

1104

A
1105
0

20 cm

40 cm

60 cm

800L/s
1000L/s

Vol.8.8

37

3m

5m

954-7405

7m

954-7407

9m

954-7409

20/60L/s
20/60L/s
110L/s
140L/s
220L/s
270L/s
400L/s
500L/s
800L/s
1000L/s

954-7403740574077409

38

Vol.8.8

30L/s

60L/s

30L/s

B A

A B
B

A B

A B M32

M32

M32

915-7020

M32 (1)

110L/s140L/s220L/s270L/s400L/s500L/s800L/s1000L/s

20.2

915-7019

M32 (2)

1L/s8L/s20L/s60L/s

19.3

Vol.8.8

39

Ti

-S

11

12 -S

12 PIC-220IPPIC-220NPPIC-800BIPPIC-800BNP PIC

6.7Pa

Pa

10 4Pa 30,000

40,000

1.110

11

-S956-7130
12

956-7015

Oil free

956-7015

NEG

40

Vol.8.8

Memorandum

Vol.8.8

41

XHV

NEG
XHV

1. UHV XHV

3.

NEG

10 10Pa

4.

2.
110L/s 40

125L/s

152ICF 4

42

Vol.8.8

 125L/s

125L/s

912-7100

N2

125L/s
10 3 10 10Pa NEG

1 10 2Pa
10L
250
450
152ICF

954-7281

915-7070 2

912-70051

38kg

1
PIC-052NP

PIC-052NP

1 10 2Pa

50/60Hz
4

AC100V 101 50/60Hz

8A
DC 7.0kV
120mA 50Hz
4090
10kV LINEAR
1A LOG
1.3 10 3 10 6Pa

3m

3m954-7403

6kg

2
3AC200V
4912-7100 125L/s DC-7kV
DC-5.2kV

912-7100 125L/s
1

152ICF

REMOTE

PIC-052NP
1
1 3m
1 3m
1 36 16

Vol.8.8

43

REMOTE

E
AC IN

29.5
1.5

HV OUT

333
1.5

MIN160
()

PUMP
GND

197
1.5

203
2

78.5
1.5
76.5
1.5

(3.2)

(13.5)

(15)

10.5
HV

RMT

SP1

FLR

OL

SP2

99
87 1
1

10A

POWER
ON

HV
ON ON OFF
LOCK

RMT LCL

100A

1mA

10mA
6

SET POINT

100mA
8

1A
10KV

VOLTAGE

4-5

POWER

OFF

ION PUMP CONTROLLER

PIC-052NP

52
1

1 a912-7100 125L/s

44

105
1 209
1

1 bPIC-052NP

Vol.8.8

L/s

150

N2

without NEG

100

50

107

106

105

104

103

pa

125L/s

101

102

Pa

103

104

105

106

107
10A 100A 1mA

10mA 100mA

125L/s
without NEG

4
1102

Tesla

1103
B

1104

1105

20 cm
40 cm

60 cm

Vol.8.8

125L/s

45

915-7130
125L/s

920W

1AC100V

400W
260W

1set
2set
1set

4H
NEG

350
260
150

NEG

NEG

4H

NEG

UHV
XHV
XHV

UHV XHV
UHV XHV

XHV

46

Vol.8.8

NEG

NEG

Non Evapolable Getter Pump

A90NEG
ST707

Zr70-V24.6-Fe5.6

H2 300L/s
N2 45L/s

H2 240000PaL
N2 120PaL

NEG

915-7090

TSP CO

2 10 6Pa

NEG

3
1.3 10 6Pa 500h
1.3 10 7Pa 5000h

St101
70 Zr-24.6 V-5.6 Fe

St707

915-7130

NEG

NEG
NEG

792

301.5

5
4

245
15

602

2302

5 NEG

Vol.8.8

47

1 125L/s NEG

2 H2
NEG
H2
3 H2O CO CO2
UHV

84 Zr-16 AL

PIC-052

NEG
NEG

3m

PIC

5m

954-7405

7m

954-7407

9m

954-7409

PIC-052NP

AC100V
912-7100125 L/s

915-7090 A90 NEG

915-7130

110 3Pa

8H

TMP

10

Pa

NEG
NEG

110 5Pa

915-7130

30 NEG

30

40

NEG

30 90

915-7130 125L/s

48

Vol.8.8

912-7125

20L/s

912-7127

20L/s

70ICF
70ICF

912-7135

30L/s

114ICF

912-7137

30L/s

114ICF

912-7165

60L/s

152ICF

912-7010

140L/s

203ICF

912-7030

270L/s

203ICF

912-7031

270L/s

203ICF

912-7050

500L/s

203ICF

912-9100

1000L/s

326CS

912-7195

1000L/s

356ICF

912-7120

20L/s

70ICF

912-7122

20L/s

70ICF

912-7130

30L/s

114ICF

912-7132

30L/s

114ICF

912-7160

60L/s

152ICF

912-7020

110L/s

203ICF

912-7040

220L/s

203ICF

912-7041

220L/s

203ICF

912-7060

400L/s

203ICF

912-9110

800L/s

326CS

912-7190

800L/s

356ICF

912-7100

125L/s

152ICF

PIC-050A-IP

DC5.2kV/20mA

PIC-075A-IP

DC7.5kV/13mA140L/s

PIC-050A-NP

DC5kV/20mA

PIC-052IP

AC100V13m

PIC-052NP

AC100V13m

954-7403

20L/S-1000L/S IP/NP 3m

954-7405

20L/S-1000L/S IP/NP 5m

954-7407

20L/S-1000L/S IP/NP 7m

954-7409

20L/S-1000L/S IP/NP 9m

Vol.8.8

10020
10021
10022
10023
10030
10040
10042
10043
10050
10060
10062
10120
10121
10122
10123
10130
10140
10142
10143
10150
10160
10162
10651
10270
10271
10370
10273
10323
10548
10549
10550
10551

49

1.

2.

956-7015

956-7040

3Pa

1g/1

0.07g/h1
45A

0.35g/h
48A

3.

15

70ICF
580g

680g

4.
ON-OFF

5.

922-9119

AC200 20V 1 2A 50/60Hz

AC100V

2.8 10.4VAC
50A
430W

6.

2 ON-OFF
ON
OFF 3.6VAC

ONOFF 0 15

19kg

2m

2m

50

Vol.8.8


TSP

TSP

956-7015TSP

1
12 1

953-5014 70ICF

5 1

10 10

7 8

M4 4

4P 2m

200V

5A AC200V

10A AC100V

AC100V

50A

956-0010

125

956-7035

1
1
1

953-5014 70ICF

5 1

10 10

M4 4

47.5

341.5

1
2

C
3
1
2

ANELVA 922-9119
SUBLIMATION PUMP
CONTROL
PO WER
0

15

15

ON

O FF

100.5

FILAMENT CURRENT
FILAMEN T

SELEC T

POWER ADJ

D U TY RATIO

4601.5
4802.0

1491.5

3482

3031.5

70 ICF

60.5
1001

24.50.5

4301.5

C
3

501.5
47.5

251

TSP

2285
703 331

70 ICF

26.5
0.5

501.5

2714
1462

341.5

1421.5

956-7030

3.5
0.5

Vol.8.8

51

203ICF

253ICF

101.6

160

203

120

180

221

300

350

400

330

380

430

380

430

480

60

58

65

5.5kg

10kg

15kg

70 ICF

D
E
F

24

152ICF

24

1600L/s

800L/s

400L/s

8mm SUS

10 Pa

10 2Pa

1 10 1Pa

105103Pa

L/seccm2

H2

N2

O2

CO

CO2

H2O

20

2.6

3.5

8.8

8.3

4.7

7.3

195

17.6

8.3

11.0

11.2

52

Vol.8.8


1.

3.

2.

LiqN2

10720

956-7040

70ICF , 1

10730

956-7035

TI

10700

956-7015

70ICF , / /

10711

956-0010

12

10731

956-7030

10770

922-9119

AC200V/1 ,TSP

10780

. . .

2m

10781

. . .

3m

10782

. . .

5m

10783

. . .

7m

10752

941-7104

400 /

152ICF

10753

941-7108

800 /

203ICF

10754

941-7116

1600 /

253ICF

Vol.8.8

53

1600L/s

100

50

500

1000

1500
2000
L/s

1
400L/s 100

5.

1.
1L/s

AC

1/2 1/3

6.

2.

1/5 1/10

7.

3.

4.

54

Vol.8.8

 400L/s

L/s

10 1Pa 10 9 Pa

AX 300

Pam3/s

1000

15kg

152ICF

4.5L

922-9119
PIC-052NP 20/60L/s

110 3

100

110 4

10

110 5

110 4

110 3

110 2

Pa

2143

1332

1362

76

152 ICF

2013

52

2903

3724

8mm SUS

Vol.8.8

55

 800L/s

4
1

L/s

10

MAX 300

25kg

203ICF

7.5L

922-9119
PIC-052NP 20/60L/s

Pa 10

Pa

Pam3/s

1000

110 3

100

10

110 4

110 5

110 4

110 3

Pa

110 2

53

2143

1332

1742

2363

1242

203 ICF

632

2163

4065

1142

4- 13

8mm SUS

56

Vol.8.8

 1600L/s

6
1

10

MAX 300

35kg

Pa 10

L/s

Pa

Pam3/s

253ICF

15.5L

922-9119
PIC-052NP 20/60L/s

1000

110 3

100

110 4

10

110 5

110 4

110 3

110 2

Pa

1332

4295

70

2303

253 ICF

1702

4305

2503

2143

1102

129

200V900W

2403
8mm SUS

Vol.8.8

57

956-0010

12

913-7000
913-7001
913-7002

954-7281

34

956-7040

400L/s
800L/s
1600L/s

PIC-060NP 20/60L/s

922-9119

10 1Pa

8mm

5/4

58

Vol.8.8

10600

913-7000

400L/s

152ICF TSPNP

10610

913-7001

800L/s

203ICF TSPNP

10620

913-7002

1600L/s

253ICF TSPNP

10711

956-0010

TSP

12

10720

956-7040

70ICF 1

Vol.8.8

59

 POWER/POWEREco

Pt- Co

Pt-Co

MCT 110TP 450CM

P 011CC

JIS ISO JIS

ASA ICF

POWER POWERECO

P 080CL A

08 22

60

JIS
AASA
SISO JIS
UICF
X

Vol.8.8

POWER

8 12

POWER

3.

1.

10 1

4. POWER

2. POWER

POWER

Vol.8.8

61

12

5. POWER

POWER

He

He

He

He Gas

He Gas

POWER

P-081C

60

120

180

150

40

POWER

70

3
Ar500L

50

240

70

98

1
3

50

POWER
1 56
0

62

20

40

60

80

Vol.8.8

100


30

20

10
POWER
0

400

200

600

800

1000
Hz

P-122CAr 4000L

P-081CAr 800L
Pa

Pa

1E-3

1E-4

1E-3

1E-4

890L
1E-5

1E-6

1E-7
0

800L
780L
10

20

30

4400L

1E-5

1E-6

1E-7
0

4000L
3000L
10

20

Vol.8.8

30

63

 POWER

P-080C
P-081C
P-081CL
P-082C
P-122C

POWER

AC200V3

P-421CA

OUT
IN

CRYONAVI

POWER
BOX
AC100V

CRYONAVI
CRYONAVI

AC200V3

CRYONAVI

JOINT BOX
AC100V

P-875CA P-875CA

64

P-875CA

OUT
IN

Vol.8.8

 POWER

L/S

P-080C

P-081C

P-081CL

P-082C

P-083C

P-100CL

P-101C

P-101CL

10

10

10

1,500

1,500

1,500

1,500

1,500

2,400

2,400

2,400

1,300

1,300

1,300

1,300

1,300

2,000

2,000

2,000

1,000

2,500

2,200

1,000

1,000

3,000

3,800

3,700

4,000

4,000

4,000

4,000

4,000

6,400

6,400

6,400

Pa /s

1.5

1.2

1.2

1.5

1.5

1.0

1.0

1.0

Pam3

18.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

45

50

65

45

50

80

70

80

30

30

30

30

35

40

35

45

Pa

75

80

95

75

85

120

105

125

80,000

80,000

80,000

150,000

190,000

140,000

160,000

140,000

1,300

1,800

1,600

1,300

1,300

1,300

2,000

1,800

15

Pa

70

h
kg

22

22

23

24

25

24

25

P-421CA

P-875CA

L/S

16,000
22

P-120C

P-120CL

P-121C

P-121CL

P-122C

12

12

12

12

12

4,000

4,000

4,000

4,000

4,000

3,200

3,200

3,200

3,200

3,200

3,600

3,000

6,000

5,000

3,000

9,000

9,000

9,000

9,000

9,000

1.0

1.0

1.0

1.0

1.0

Pa /s
3

Pam

18.0

18.0

18.0

18.0

18.0

60

90

70

100

60

35

40

40

50

30

95

130

110

150

90

260,000

200,000

260,000

200,000

400,000

1,600

1,400

2,400

2,200

1,600

Pa

15

Pa

70

h
kg

16,000
29

29

29

30

29

P-421CA

P-875CA

) POWER CRYONA VI ( )
( ) ( )
(
)
)

Vol.8.8

65

 P-080C/P-081C

P-081CL

P-082C

66

Vol.8.8

 P-101C

P-100CL/P-101CL

Vol.8.8

67

 P-120C/P-121C

P-120CL/P-121CL

P-122C

68

Vol.8.8

Memorandum

Vol.8.8

69

POWER Eco

8 22

POWER

POWER Eco
POWER

POWER

P-875CA

1.0 1.2kW
POWER Eco

1 .

15 70 %
2 .

3 .

1.5 4

4 .
1 10

70

Vol.8.8

 POWEREco

P-085C

P-086C

P-086CL

P-087C

P-106C

P-106CL

P-126C

P-126CL

P-127C

10

10

12

12

12

1,500

1,500

1,500

1,500

2,400

2,400

4,000

4,000

4,000

1,300

1,300

1,300

1,300

2,000

2,000

3,200

3,200

3,200

1,000

2,500

2,200

1,000

3,800

3,700

6,000

6,000

3,000

4,000

4,000

4,000

4,000

6,400

6,400

9,000

9,000

9,000

Pa /s

1.2

1.2

1.1

1.2

1.0

1.0

0.8

0.8

0.8

Pam3

18.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

L/S

60

65

80

60

85

100

95

105

70

40

40

45

40

45

50

45

50

40

100

105

125

100

130

150

140

155

110

80,000

80,000

80,000

150,000

160,000

140,000

260,000

200,000

400,000

1,300

1,800

1,600

1,300

2,000

1,800

2,400

2,200

1,600

Pa

15

Pa

10 7
70

10 35

h
kg

16,000
22

22

22

23

24

25

29

30

29

P-421CA

3*

3*

3*

3*

2*

2*

2*

2*

2*

3
4

P-875CA

1 POWER CRYONAVIG

2
3
4 * Eco

Vol.8.8

71

 POWEREco

P-128C

P-128CL

P-160C

P-161C

P-161CL

12

12

16

16

16

P-166C

P-201C

P-206C

P-226C

16 20 20

22

4,000

4,000

8,000

8,000

7,400

8,000

13,000

13,000

17,000

3,200

3,200

5,500

5,500

5,000

5,500

9,000

9,000

11,000

6,000

5,000

5,500

11,000

10,000

11,000

17,000

17,000

23,000

9,000

9,000

17,000

17,000

17,000

17,000

28,000

28,000

39,000

Pa /s

2.2

2.2

2.2

2.0

2.2

3.5

1.3

3.0

2.7

Pam3

40

40

50

50

50

50

80

80

133

110

115

70

90

120

80

150

100

120

70

70

40

60

60

60

70

80

80

180

185

110

150

180

140

220

180

200

270,000

200,000

400,000

400,000

200,000

400,000

800,000

800,000 1,000,000 2

4,000

3,500

1,600

3,400

3,000

3,400

4,500

7,500

7,500

65

50

60

60

87

L/S

Pa

15

Pa

10 7

70

10 35

h
kg

16,000
33

34

50

50

P-421CA

P-875CA

1 POWER CRYONAVIG

2
3
4P-421CA Eco

72

Vol.8.8


8 5
POWER Eco

P-086C5

P-875CA

P-875CA

P-421CA

7.2 9.1kW50/60Hz
600L/h

4.8 6.1kW50/60Hz
420L/h

33% !

12 2

POWER Eco

P-1262

Eco
P-875CA

P-421CA

:4.8/6.1kW50/60Hz
:420L/h

:2.4/3.0 kW50/60Hz
:180L/h

50% !

Vol.8.8

73

12 4
Eco

POWER

P-126C4

P-875CA

P-875CA
P-421CA

:7.2/9.1kW50/60Hz
:600L/h

:4.8/6.1kW50/60Hz
:420L/h

33% !

12 2

POWER Eco

P-128C2

P-875CA

P-875CA

:9.6/12.2kW50/60Hz
:840L/h

P-875CA

:4.8/6.1kW50/60Hz
:420L/h

50

POWER Eco

74

Vol.8.8


P-085C

P-086C

P-086CL

Vol.8.8

75

P-087C

P-106C

P-106CL

76

Vol.8.8


P-126C

P-126CL

P-127C

Vol.8.8

77

P-128C
597
387.5
125

4 -M 8
PCD.3 6 3

13

1 0 " ASA

1 2 -2 5 .
PCD.3 6 2

295

86

125

185.7

344.5

15

1 2 -1 5
PCD.3 7 0
4 0 0 JIS

14

64
125
386
511

42

P-128CL

436.5

164

42

14
15

522.5

185.7

12-15
PCD.370

4-M8
PCD.363
86

180

284

400 J IS

12-25.4
PCD.362
10"ASA

298

175

13

100

164

P-161C
607
398
20

28

12-19
PCD.480

185.7

406

86

4-M8
PCD.473

15

355

64

125
397
42

78

521

Vol.8.8

JIS-VG400

64


P-166C
607
398

4-M8
PCD.473

20

185.7

406

86

28

12-19
PCD.480

15

355

64

JIS-VG400

125
397
42

521

P-201C
639
428
22

4 -M 8
16-19
PCD.578 PCD.585

20

185.7

506

86

15

385

64

122

JISVG500

426.9
42

553

P- 206C
639
428
22

4 -M 8
16-19
PCD.578 PCD.585

20

185.7

506

86

15

385

64

122

JISVG500

426.9
42

553

Vol.8.8

79

P-226C
639
428
24

86

578

185.7

6
3

4-M8
16-19
PCD.633 PCD.640

15

385

64

125
426.5
42

JISVG550

553

80

Vol.8.8

 - POWER

MPa

P-421CA

1.60 1.65

2.0 2.2

1.8 2.0

L H

180

MPa

0.13

MPa

0.69

30
AC200V 10 3

50 60Hz
kW

2.4

60Hz

2.8

10 35

15 55

50Hz

30,000

mmW D H

400 450 470

kg

75

P-421CA

Vol.8.8

81

 - POWER

P-875CA

1.50 1.55

MPa

420

MPa

0.15

0.69

MPa

30

AC200V 10 3

50 60Hz
kW

1.8 2.0

L/h

2.0 2.1

4.8

50Hz

6.1

60Hz

10 35

15 55
30,000

W D H

mm

450 500 632

kg

115

3. POWERECO 2

1. POWER

ECO

2. POWER

4. POWER

10
124

450

P-875CA

500
90

58

100

2%#

584.3
632

55
50

45

40

82

32
425

554.3

%4;127/2%1/24'5514706

Vol.8.8


P-450CM

P-450CM

PV

OUT MAN
LOW HIGH

UP

91

MODE

SEL/ENT

48

100

44

92+0.8
0

70

92+0.8
0

120

DOWN

96

1ST 2ND
SV3 SV4

116

SV

48N-3+20
N:

t110mm
10 15

45+0.6
0

Vol.8.8

83

P-011CC

POWER POWEREco

POWER POWEREco

POWER

1 4

DC24V 3A

DC24V0.5A

AC100V 3A AC100V 1A

POWER

ON OFF

ON OFF

TC

TC ON OFF

ON OFF

RS232C

TC

RS232C

1st2nd

0-5V RS232C 1st2nd

DC 0-10V

RS232C

4800960019200bps

50

Help

Help

Help

20 70

0 50

POWER POWEREco 1

POWER

P.V.N2
R.V.
T.C.
1st Temp
2ndTemp
He
3 200V

P-011CC

DC24V

P-011CC-P1

He

3 200V

P-421CA

3 AC200V

AC100V

84

Vol.8.8

POWER POWEREco 4

P.V.
N2

POWER

P.V.
N2

POWER

R.V.
T.C.

P.V.
N2

POWER

R.V.
T.C.

R.V.
T.C.

P.V.
N2

POWER

T.C.

1st Temp

1st Temp

1st Temp

1st Temp

2ndTemp

2ndTemp

2ndTemp

2ndTemp

He

He

He

He

3 200V

3 200V

3 200V

3 200V

P-021CD

P-011CC

R.V.

P-011CC

DC24V

P-011CC

DC24V

P-011CC

DC24V

200V
1

He
4
3 200V
3

DC24V

P-011CC-J2
4

P-875CA

AC200V

AC100V

P-011CC

98

129

COMP

REMOT E

RS2 3 2 C

SENSOR
ANAL OG

REL AY

POWER
F USE

403

104

CRYO NAVI

AT M

MANU
UP
CRYOOK

DOWN ABORT

REGEN

MODE

SET

COOL

MEMO

HEL P

139

149

P -0 1 1 CC

POWER

ST OP

EXE

2- 4.6

(422.5)

Vol.8.8

85

P-011CC-P11

129

98

300

104

139

149

P-0 1 1 CC-P 1

(319.5)

2- 4.6

P-011CC-J13

203.5

COMP
CN1

CN2

CN3

J R1

J R2

129

RP OUT

1
AC1 0 0 V

DC2 4 V OUT
2

F USE

300

209.5

139

149

P-0 1 1 CC-J 1

POWER

105

86

4- 4.6

(318.5)

Vol.8.8

P-011CC-J24

308.5

CN1

CN2

CN3

CN4

J R2

J R1

J R3

129

RP OUT

DC2 4 V OUT
1
AC1 0 0 V

F USE

300

314.5

139

149

P-0 1 1 CC-J 2

POWER

105

105

6- 4.6

(318.5)

P-011CC-J35

308.5

CN1

CN2

CN3

CN4

COMP

CN5

J R1

J R2

J R3

J R4

129

RP OUT

AC1 0 0 V

DC2 4 V OUT
3

F USE 5 A

300

314.5

139

149

P-0 1 1 CC-J 3

POWER

105

105

6- 4.6

(318.5)

Vol.8.8

87

P- 021CD

190

JR

129

JC

JP

209.5

3.2

300

COL D HEAD

139

149

MAI N POW ER
EXT
I NT

ON
OFF

105

4-4.6

(342)

UL

88

Vol.8.8

P-080C-A

POWER ASA

P-080C-J

POWER JIS

15M
15M

P-080C-I

POWER ICF

15M

P-081C-A

POWER ASA

15M

P-081C-J

POWER JIS

15M

P-081C-I

POWER ICF

15M

P-081CL-A

POWER ASA

15M

P-081CL-J

POWER JIS

15M

P-081CL-I

POWER ICF

15M

P-082C-A

POWER ASA

15M

P-082C-J

POWER JIS

15M

P-082C-I

POWER ICF

15M

P-101C-J

POWER JIS

15M

P-122C-A

POWER ASA

15M

P-122C-J

POWER JIS

15M

P-122C-I

POWER ICF

15M

P-085C-A

ASA

15M

P-085C-J

JIS

15M

P-085C-U

ICF

15M

P-086C-A

ASA

15M

P-086C-J

JIS

15M

P-086C-U

ICF

15M

P-086CL-A

ASA

15M

P-086CL-J

JIS

15M

P-086CL-U

ICF

15M

P-087C-A

ASA

15M

P-087C-J

JIS

15M

P-087C-U

ICF

15M

P-106C-J

JIS

15M

P-106C-U

ICF

15M

P-106CL-J

JIS

15M

P-106CL-U

ICF

15M

P-126C-A

ASA

15M

P-126C-J

JIS

15M

P-126C-U

ICF

15M

P-126CL-A

ASA

15M

P-126CL-J

JIS

15M

P-126CL-U

ICF

15M

P-127C-A

ASA

15M

P-127C-J

JIS

15M

P-127C-U

ICF

15M

P-128C-A

ASA

15M

P-128C-J

JIS

15M

P-128C-U

ICF

15M

P-128CL-A

ASA

15M

P-128CL-J

JIS

15M

P-128CL-U

ICF

15M

P-161C-J

JIS

15M

P-166C-J

JIS

15M

P-201C-J

JIS

15M

P-206C-J

JIS

15M

P-226C-J

JIS

15M

Vol.8.8

11300
11301
11302
11303
11304
11305
11306
11307
11308
11309
11310
11311
11315
11312
11313
11314
11750
11751
11752
11753
11754
11755
11756
11757
11758
11759
11760
11761
11762
11763
11764
11765
11766
11767
11768
11769
11770
11771
11772
11773
11774
11775
11776
11777
11778
11779
11780
11781
11782
11783
11784
11785

89

11418
11419
11511
11533
11788
11789
11537
11786
11792
11793
11705
11524
11525
11790
11791
11787
11550
11551
11552
11556
11553
11554
11555
11557
11509

90

P-875CA

AC200V 3

P-421CA

AC200V 3

P-011CC

5M,
POWER CRYO

P-011CC-J1

JOINT BOX 3

J-BOX 1M , J-BOX 5M

P-011CC-J2

AC100V2M

P-011CC-J3

AC100V2M

P-011CC-P1

P-BOX 1M , 5M

P-021CD-1

AC200V 3 6M

P-450CM

AC100V1st2nd

P-450CM-AL

AC100V1st2nd

, , ,TC

HE L-2

HE L-3

He 4

4 R S

MCT-110T

He 5

5 R S

Eco 5L

T 8A 1M

15A 3M

P-080 127 1

15A 6M

P-080 127 1

15A 9M

P-080 127 1

15A 12M

P-080 127 1

20A 3M

P-128 266 1

20A 6M

P-128 266 1

20A 9M

P-128 266 1

20A 12M

P-128 266 1

AC100V2nd

Vol.8.8

He

2
1

H2O

50K 80K
2 10K 20K

102

Ar

2
2

20

78

He

10

10K 20K
101

1
2
2 20K
H2NeHe
10

Pa

H2NeHe 3 H2

Pa

H2
Ne
He

CO2

102

H2O

H2
103

Ne
N2

104

Ar

105

O2

106

CH4

107
108

10

20

50

100

200

106

Pa

102

30K

102
20K
106

15K
10K

1010

12K

1014
1018

0.1

0.2

0.3

0.4

H2L/g

Vol.8.8

91


G-M
4

He

P2

P1
P2

P1

TLQ

C
B
P2
P1
TLQ

G-M

92

Vol.8.8

Memorandum

Vol.8.8

93


900L/min 1500L/min

1.3Pa

94

Vol.8.8

1.

2.

5.

3.

6.

4.

V090S

Vol.8.8

95


6.

1.

N2

2.
N2

7.

3.

4.

5.

96

Vol.8.8

S
V090S

1.

2.

3.

4.

5. 2

1500
V090S

1000

V060S

500
L/min

0 1
10

100

101

102

103

104

105

Pa

Vol.8.8

97

V060S

V090S

L/min

1,000

1,500

Pa

1.3

Pa

10

Pa

10

r.p.m.

8,000
200V50Hz 60Hz

kW

3.7

4.7
L/min0.2 0.5MPa, 25
60 1

L/min

62 2

dB

VG40
NW40
mm3

370 680 500

370 735 545

190

210

kg

5 40

mm

157 8218

N2
N2

V060S/V090S

370
210200

VG40
4-M8 15

680735

N2
: MAX.25L/min

: MAX.40L/min

58

484524

N2

423469

104114

500545

119

60
NW40 3121 51

128142
1

488527

38 4035

N2 Rc1/4

75

Rc3/8
Rc3/8

V090S

98

Vol.8.8

NW40

115
NW40 17.5

80

17.5

NW40

75

956-7660

55

NW40

55

23

238.5

48

NW40

NW40

114.3

149

309.5

SR-19

NW40

NW40
55

956-7670

4- 10

50

VF40/NW40

10

85
105
VF40

Vol.8.8

99

V H
V060H

V H

5.

6.

N2

7.

1.

2.

CVD

3.
40

60V060H

4. N2
N2 N2

N2

100

Vol.8.8

V060H
L/min

900/1100

50/60Hz
N2 50/60Hz

Pa

13/2

Pa

105

Pa

1.05 105
2.2kW
3.0kVA
200V50/60Hz
220V60Hz
3 5L/min5 250.2 0.5MPa

N2

0 12L/min0.1 0.7MPa

0.4

B ( 1)

NW40

NW40
285 745 304 2

W L Hmm

77

5 40

N2
H497

V060HA

L/min50/60Hz

V060HB
900/1100

N2 2

V005H DC24V 0.1A

V005H 5m

V060H

204

76
18

N 2 Rc1/4

11
B

222

285

N 2

142.5

N 2

63

240
220

10

745

150

10
6
20 50 20
90

210

28

40

5
40

POWER

TEST
REM
LOG

50

NW40

NW40

RUN

STOP

RESET

H
A

V006H PUMP CONTROLLER

956-7680
NW40

367

Rc3/8

165
125

25

MS3102A20-4PW

23

XM4A-1521

20

100

20

140

50

320
304

362
328

497

Rc3/8

115

Vol.8.8

NW40

101

V005H

V060 V005H

14604

V060S

1,000L/min

3200V50HZ

14605

V060S

1,000L/min

3200V60HZ

14606

V090S

1,500L/min

3200V50HZ

14607

V090S

1,500L/min

3200V60HZ

14614

V060HA

14615

V060HB

14800

956-7660

V040/060/090

14802

956-7670

VF40/NW40

V040/060/090

14803

SR-19

V040/060/090

14810

V005H

V030H/060H

14813

956-7680

V030H/060H

102

Vol.8.8

Memorandum

Vol.8.8

103


V-080LT V-081LT

V-081LT

AC100V

V-080LT
20 100
LED
LED
ON/OFF
V-081LT
500ccV-080LT300cc
65 LED
LED

104

,1

287

Vol.8.8

( 25 45 )
( )
( )
/

1
2

V-080LT

V080LT

V081LT

11800

V-080LT

V-081LT

AC 1.8MAC100V

Vol.8.8

105

V-080LT
V-081LT
20 100 1
2
60 5 80 6 ( )
60W at 23.3 ( )
25W at 80 ( )
300cc
500cc

65 LED( )
ON/OFF
( ) ON/OFF
LED( )
LED( )
ALARM LED( )
ON/OFF

1)

DC5V
(N.O.)
2) ( )
DC5V
3)
( ) (N.O.)
( )
( )
NW40(INOUT )
1AC100 240V 10%50/60Hz
1AC100V 10%50/60Hz
)
90 20W

0 400 90 ( )
W160 L257 H428 (mm)
W160 L200 H490 (mm)
15kg
8kg
He3N3MPaHe 510-6Pam3/s
He ( )


V-080R V-081R

V-081R

V-080R

V-081R
65 LED

100

84

106

Vol.8.8


V-080R
V-081R

20
123 2
1

13
60 4 80 5
60W at 23.3
25W at 80

65 LED

R/S

ON/OFF

ALARM LED
DC1.0 5.0V

DC4 20mA

25
45

COOLERON/OFF

DC5V

N.O.

N.O.

DC5V

N.O.

DC5V

DC24V

VG80 JIS 160

150 4-M5
DC24V 10150W
6ARMS
DC24V
90 20W

0 400 90
W160 L203 H360
W160 L203 H381
W160 L200 H360
6
6.6
6
He
He

1
2
3 -20 50

1 AC100 240V 10(50/60Hz)

DC24V
150W
AC I/O
L188.5 W104.5 H60

2MDC
AC 1.8
AC100V
AC125V

Vol.8.8

107

ON/OFF

mm

kg

V-080R

V-081R

108

Vol.8.8

DC24V

D-sub

160

V-080R

11810

V-080R

11813

V-081R

11811

V-080R

11812

V-080R081R

Vol.8.8

109


V-150R

100 +100

100 +100

200W 120W at 23.33

50W at 80

ACV

95

110

Vol.8.8

V-150R
-100

-100 100 ( )

120W at 23.3 50W at 80

145 JIS

10.3

AC100 240V (50/60Hz)

300W ( 200W 100W)

V-150R

V-150R
V-150R

Vol.8.8

111


2F
S

956-7100

1.

2.

3.

956-7100
956-7105

g
55

956-7110
956-7111
956-7112

kg

1.3

100V
60W

0.9
2.5

500

2.1
2.1

100V
125W

70ICF

NW25

70ICF

NW25

NW40

13X

1953-5014
5

112

Vol.8.8

70 ICF

70 ICF

NW25

NW25

146

100.5

38

100.5

146

76

76

177

164

956-7100

956-7105

NW25
NW40

114.3

203

150

NW25
NW40

38

150

203

70 ICF

70 ICF

114.3

200

210

956-7110

956-7112

956-7111/956-7112

956-7130

956-7131

956-7130
956-7131
956-7132

kg

70ICF 1

2.4
500

2.0

100V380W

2.0

NW25 2
NW40 2

13X

1953-5014
5

Vol.8.8

113


70 ICF

91

98

NW25
NW40

367

NW25
NW40

38

360

160

167

38

70 ICF

113

113

956-7130

956-7132

956-7131/956-7132

13X
956-7101
500

956-9100

956-7100
956-7105

100V60W

956-7114

956-7110
956-7111
956-7112

100V125W

956-9150

956-7130
956-7131
956-7132

100V380W

114

Vol.8.8

13800

956-7100

2F

, 70ICF ,AC100V/60W

13802

956-7105

2F

,NW25 ,AC100V/60W

13803

956-7110

2F

, 70ICF ,AC100V/125W

13804

956-7111

2FNW25

,NW25 ,AC100V/125W

13805

956-7112

2FNW40

,NW40 ,AC100V/125W

13801

956-7130

S70ICF

, 70ICF ,AC100V/380W

13806

956-7131

SNW25

,NW25 ,AC100V/380W

13807

956-7132

SNW40

,NW40 ,AC100V/380W

13810

956-7101

13X

500

13811

956-9100

956-7100/7105 ,AC100V/60W

13813

956-7114

956-7110/7111/7112 ,AC100V/125W

Vol.8.8

115

CF3

CF3 O-CF-CF2n-O-CF2mO-CF3
Yn m

FOMBLIN
Solvay Solexis S.p.A

5.

6.

1.

GALDEN SV9
113

2.

7.

3.
N2 350

300

4.
20 10

8.

11

Pa

9.

YL-VAC YL-VAC YL-VAC YL-VAC YH-VAC YH-VAC YH-VAC YH-VAC

06/6
14/6
16/6
25/6
18/8
25/9 40/11 140/13

Y
04

Y
06

116

Vol.8.8

Y
Y
25
45

Y
R

 FOMBLIN

20

cSt

mg KOH/g

w/w

ASTM D445

MAN29/1

ASTM
D972

25/6

270 20

0.05

16/6

160 15

14/6

YL V
AC

20

22 149 100
Pa

Pa

mL/h

g/cm2sec minmax

w/w

MAN29/27
MAN29/29 MAN29/29 MAN29/29
MAN29/31

2.7104
2.7 101

0.01

4 10 2

0.7

12

63
70

0.05

6.7 104
9.3101

0.03

9.3102

0.5

12

58
65

140 20

0.05

2.7 104
2.7 101

0.03

6.7 101

0.6

12

57
64

06/6

62 6

0.05

5.3104
9.3101

0.03

6.7 101

0.4

12

53
60

25/9

270 20

0.05

2.7107
2.7 103

2.7 10 6

18/8

180 20

0.05

2.7 10 6
2.7 102

2.7 10 6

40/11

450 50

0.05

51010
510 6

140/13

1400 200

0.05

6.71011
6.710 6

YH V
AC

MAN PF29/2 MAN29/31

ALCATEL-2012ARP
120

1Knudsen-Eusion20

2201.87 1.92 /mL2018 22dyne/cm381.01J/g2001.3

103Pa21 42J/g

10

L-VAC
25/6

L-VAC
14/6

101
102
103

L-VAC
14/6
L-VAC
06/6
H-VAC
140/13

20.0
15.0

Pa

cSt.

10000
5000
3000
2000
1000
500
300
200
150
100
75
50
40
30

L-VAC
06/6

104
105
106
107

H-VAC
18/8
H-VAC
25/9

108

10.0

H-VAC
40/11

6.0
5.0

H-VAC
40/11
H-VAC
140/13

109
1010

4.0

H-VAC L-VAC
18/8 25/6

3.0
2.0

1011
1012

20

50

70

100

150

20

50

Vol.8.8

100

150

200

117

YNX

NO

200
BAM

220BAR

YES

AR555
AR855
CR861
CR261D

NO

YES

NO

YES

BAM

200
BAR

OT-20

70

UT-18

60

OT-15

70

YVAC3

60

YNX
RT15
20200
UT18
30150
OT20
70100
CRM30
60230
CRM30
50240

Y-VAC1

1
6.71011Pa

20

118

Y-VAC2

2
6.71011Pa

20

Y-VAC3

3
6.71011Pa

20

ZNF

3
3.91010Pa

20
1.3106Pa

100

Vol.8.8

ZLHT

2
2.1104Pa

20
2.2103Pa

100

 FOMBLIN

RT-15

Y-VAC1 Y-VAC2 Y-VAC3

YNX

GRM30 GRM60

HVAC HVAC HVAC

140/13 140/13 140/13

Y25

M30

OT-20

UT-18

ZLHT

ZNF

M60

Z15

Z25

Y04

Y45

YR

NLGI No.

2.1

2.1

2.1

2.1

2.1

2.1

2.1

2.0

2.0

2.0

2.0

280

280

276

335

268

240

280

277

275

280

240

10,000

300

295

290

277

260

300

285

245

100sec-1

90

130

190

250

280

150

240

300sec-1

40

80

100

140

140

60

100

204 /22hr
wt

0.5

0.3

0.3

0.5

0.3

2.8

0.2

ASTM
D2595

204 /30hrwt

7.7

11

10.7

6.1

6.6

FTMS
791-321

500

500

500

700

700

ASTM
D2596

ASTM
D1743

DIN
51802

70
120

30
250

20
250

20
250

20
250

20
250

40
220

60
230

60
240

80
200

60
220

1
mm/10

20P

ASTM
D217

1
2

300

113

300

GALDENSV90 H-

700

H-GALDENZV130

GALDEN SV90

1kg

100g

20
20

90

g/mL

1.7

dynes/cm

16

HGALDEN ZV100

25
25

130

g/mL

1.65

dynes/cm

14.6

SV90

ZV30

Vol.8.8

119

kg

ASTM
D217

18200
18201
18202
18203
18204
18205
18206
18207
18208
18209
18210
18213
18214
39750
39751
39752
39753
39754
39755
39759
39760

953-7930

Y04

1kg

953-7931

Y06

1kg

953-7932

Y25

1kg

953-7933

Y45

1kg

953-7934

YR

1kg

953-7935

YL-VAC 06/6

1kg

953-7936

YL-VAC 25/6

1kg

953-7937

YH-VAC 18/8

0.5kg 2

953-7938

YH-VAC 25/9

0.5kg 2

953-7939

YH-VAC 40/11

0.5kg 2

953-7940

YH-VAC 140/13

0.5kg 2

953-7947

YL-VAC 14/6

1kg

953-7948

YL-VAC 16/6

1kg

953-7941

OT-20

100g

953-7942

RT-15

100g

953-7943

Y-VAC3

100g
/

953-7951

UT-18

100g

953-7952

Y-VAC2

100g
/

953-7953

YNX

100g

953-7957

ZLHT

100g

953-7958

ZNF

100g

AR555

100g

AR855

100g

CR861

100g

CR2610

100g
/

GRM30

100g

GRM60

100g

5kg

120

Vol.8.8

Vol.8.8

ATP
ATH
1025
ACP15/28/40 2

121

CP 4

Pascal

1.

3.

2.

4
CP

I 5 SD
I C1 C2 H1

m3/h

50/60Hz

L/min

SD
I

122

5.4/6.5

9.7/11.6

15/18

20.7/24.8

30/36

60/72

120/144

90/108

162/193

250/300

345/413

500/600

1000/1200

2000/2400

2005SD

2010SD

2015SD

2021SD

2033SD

2063SD

2100SD

2005I

2010I

2015I

2021I

C1

2005C1

2010C1

2015C1

2021C1

2033C1

2063C1

C2

2010C2

2015C2

2021C2

2033C2

2063C2

H1

2005H1

2015H1

2033H1

2063H1

Vol.8.8

N2ArCO2

2033C12063C1 SiH4PH3
O2

SiH4PH3 N2

Vol.8.8

123

SDI

SDIC1C2H1
5

START

YES

SD

NO

C1

C2

H1
3

1 He

124

Vol.8.8

21

SDIC1H1 C2

NEOIL-SS

ANELVA

NEOIL-S

ALCATEL120

ALCATEL

ALCATEL200

ALCATEL

NEOIL-SSC

YL-VAC25/6
Y25A

Vol.8.8

125

126

Vol.8.8

CRT)

RGA

CVDLPCVD

SDI 1 C1C2H1

Vol.8.8

127

SD

5.4 120m3/h90 2000L/min 7

R&D
5.4 20.7m3/h90 345L/min 4

C1

5.4 60m3/h90 1000L/min 6

C2

9.7 60m3/h162 1000L/min 5

H1

1
5.4 60m3/h90 1000L/min 4

128

Vol.8.8

 SD 2005SD-2010SD-2015SD-2021SD-2033SD-2063SD-2100SD

SD

2005 2021SD

2010SD

90

O-

2033SD

2033 2100SD

2005 2100SD


2100SD

Vol.8.8

129

 SD
*3

M2005SD

*3

T2005SD

M2010SD

T2010SD

M2015SD

T2015SD

M2021SD

T2021SD

50/60Hz

m /h
L/min

5.4/6.5
90/108

9.7/11.6
162/193

15/18
250/300

20.7/24.8
345/413

50/60Hz

m3/h
L/min

4.8/5.8
80/95

8.5/10.2
142/170

12.5/15.0
208/250

16.5/19.8
275/330

*1
Pa

<2 10 1
<1
<1 10 2
1.3 105

*2
Pa
Pa

1
Pa
2
g/h

3.5 103/2.5 103

120/110

0.83

W L H
mm

164 420 240

kg

kW

25

2.0 103/1.5 103

1.2 103/1.0 103
125/100
110/100
NW 25(ISO)/NW 25(ISO)
0.95
0.95
164 441 240

T2033SD

T2063SD

T2100SD

m3/h
L/min

30/36
500/600

60/72
1000/1200

120/144
2000/2400

50/60Hz

m3/h
L/min

27/32
450/533

55/65
917/1080

100/120
1670/2000

3 10 1
2
2 10 2

3 10 1
2
3 10 2
1.3 105

3 10 1
3
2 10 2

3 103
700
NW 40
3.6
213 699
336
63

200V(50/60Hz)
1.1

2.5 103
1200
NW 40
7
264 809
385
98

200V(50/60Hz)
2.2
12 40

4 103
3500
NW 50
7.5
344 1060
530
256

200V(50/60Hz)
3

Pa
*2
Pa

1
Pa
2
g/h
/

L
W L H
mm

kg

kW

0.98
164 483 240

26
27
28
100110200220V50Hz
100120200220230V60Hz
170 254V/342 460V
50Hz
170 300V/342 520V
60Hz
0.45/0.55
50/60Hz
12 45

50/60Hz

*1
Pa

164 462 240

7 102/7 102
90/90

*1

PNEUROP

*2

PNEUROP
*3 M

2m

O-

2005SD 2021SD

130

Vol.8.8

 3
2005 2021

200, 220V50Hz200, 220, 23060Hz
100, 110V50Hz100, 12060Hz

/
IEC
200V

UL/CSA/CE
IP43

/

342 460V50Hz
342 520V60Hz

170 254V50Hz
170 300V60Hz

UL/CSA/CE
IP43
NC

Vol.8.8

131

 I 2005I-2010I-2015I-2021I

GC/MS
LC/MS

10 Pa

I
49dBA

OEM I

UL/CSA/CE

O-

132

Vol.8.8

 I
*3

50/60Hz

m /h
L/min

50/60Hz

m3/h
L/min

*3

M2005I

T2005I

M2010I

T2010I

M2015I
15/18

162/193

250/300

345/413

4.8/5.8

8.5/10.2

12.5/15.0

16.5/19.8

80/95

142/170

208/250

275/330

*2

Pa

<1 10 2

Pa

1.3 105

W L H
mm

3.5 103/2.5 103

2.0 103/1.5 103

1.2 103/1.0 103

7 102/7 102

120/110

125/100

110/100

90/90

kg

NW 25(ISO)/NW 25(ISO)
48/50

49/51

50/52

50/53

0.83

0.95

0.95

0.98

164 420 240

164 441 240

164 462 240

164 483 240

25

26

27

28

100110V50Hz
100120V60Hz
200220V50Hz
200220230V60Hz

170 254V/342 460V

50Hz
170 300V/342 520V
60Hz

kW

0.45/0.55
50/60Hz

12 45

20.7/24.8

<1

T2021I

90/108

<2 10 1

50/60HzdB(A)

M2021I

9.7/11.6

*1
Pa

1
Pa
2
g/h

T2015I

5.4/6.5

*1
*2
*3

PNEUROP

PNEUROP
M
T

2m

O-

Vol.8.8

133

 C1 2005C1-2010C1-2015C1-2021C1-2033C1-2063C1

C1

2005C1
2021C1

2033C1
2063C1

2021C1

2063C1

2005C1 2021C1 3
2033C12063C13

134

Vol.8.8

 C1

*3

M2005C1
3

50/60Hz

m /h
L/min

50/60Hz

m3/h
L/min

T2005C1

M2010C1

T2010C1

M2015C1

15/18

162/193

250/300

345/413

4.8/5.8

8.5/10.2

12.5/15.0

16.5/19.8

80/95

142/170

208/250

275/330

*2

Pa

<1 10 2

Pa

1.3 105

20.7/24.8

<1

1
Pa
2
g/h

3.5 103/2.5 103

2.0 103/1.5 103

1.2 103/1.0 103

7 102/7 102

120/110

125/100

110/100

90/90

NW 25(ISO)/NW 25(ISO)

50/60HzdB(A)

0.83

0.95

0.95

0.98

164 420 240

164 441 240

164 462 240

164 483 240

25

26

27

28

W L H
mm
kg

100110200220V50Hz
100120200220230V60Hz

170 254V/342 460V

50Hz
170 300V/342 520V
60Hz

kW

0.45/0.55
50/60Hz

12 45

50/60Hz

m3/h
L/min

50/60Hz

m3/h
L/min

T2033C1

T2063C1

30/36

60/72

500/600

1000/1200

27.0/32.4

55/66

450/540

917/1100

Pa
*1

3 10 1

3 10 1

*2

3 10 2

3 10 2

Pa

1.3 105

Pa

T2021C1

90/108

<2 10 1

M2021C1

9.7/11.6

Pa
*1

T2015C1

5.4/6.5

*1

PNEUROP
*2

PNEUROP
*3 M
T

2m

2005C1 2021C1

1
Pa
2
g/h

3 10

2.5 10

700

1200

NW 40

NW 40

50/60HzdB(A)

3.6

213 787
336

264 897
385

74

98

W L H
mm

kg

200V(50/60Hz) 200V(50/60Hz)

kW

1.1

2.2
12 40

O-

C1

Vol.8.8

135

 C2 2010C2-2015C2-2021C2-2033C2-2063C2

CVDPECVD
RIE

2033C2

C2

2010C2 2021C2

2033C2/2063C2

HP

2012C2

10
2033C2 2063C2
PFPE

2021C2

136

Vol.8.8

 C2
*3

M2010C2

50/60Hz

m /h
L/min

50/60Hz

m3/h
L/min

*3

T2010C2

M2015C2

T2015C2

M2021C2

T2021C2

T2033C2

T2063C2

9.7/11.6

15/18

20.7/24.8

30/36

60/72

162/193

250/300

345/413

500/600

1000/1200

8.5/10.2

12.5/15.0

16.5/19.8

27/32

55/65

142/170

208/250

275/330

450/533

917/1080

*1
Pa

<3 10 1
C2

*2

<5 10 2

Pa

1.3 105

Pa

1
Pa
2
g/h

NW 40

NW 40

/
50/60HzdB(A)

0.95

0.95

0.98

164 441 240

164 462 240

164 483 240

26

27

28

3.6
213 699
336
70

7
264 809
385
85

100110200220V50Hz
100120200220230V60Hz

170 254V/342 460V

50Hz
170 300V/342 520V
60Hz

200V(50/60Hz)

kW

0.45/0.55
50/60Hz

12 45

1.1

2.2
12 40

*1
*2
*3

PNEUROP

PNEUROP
M
T

2m

O-

A113

2010C22015C22021C2

Vol.8.8

137

L
W L H
mm

kg

NW 25(ISO)/NW 25(ISO)

 H1 2005H1-2033H1-2015H1-2063H1

H1
3

O-

1.
3.
4.
5.

2.

6.

H1 5k 200kPa
2033H1 2063H1

2005H1/2015H1
2033H1/2063H1
/

138

KPa

2005H1

2015H1

2033H1

2063H1

100

100

100

100

20

200

10

2033/2063H1

Vol.8.8

 H1
*3

50/60Hz

m /h
L/min

50/60Hz

m3/h
L/min

Pa
*1

*2
Pa

*3

M2005H1

T2005H1

15/18

30/36

60/72

500/660

1000/1200

4.8/5.8

12.5/15.0

27.0/32.4

55/65

80/95

208/250

450/540

917/1100

2 10 1

2 10 1

3 10 1

3 10 1

10 2

10 2

2 10 2

2 10 2

5 200
2 10 8
NW 25/NW 25

NW 40/NW 40

0.58

0.78

141 471 240

141 502 240

27

29.5

4.8
269 762.5
364
68

7.8
293 866
385
87

170 254V/342 460V

50Hz170 300V/342 520V
60Hz

kW

0.45/0.55
50/60Hz

12 45

20L/min

100110200220V50Hz100120200220230V60Hz

T2063H1

250/300

T2033H1

5.4/6.5

50/60HzdB(A)

T2015H1

90/108

Pa

1
Pa
2
g/h
/

L
W L H
mm

kg

M2015H1

200V(50/60Hz)
1.1

2.2
12 40

*1
*2
*3

PNEUROP

PNEUROP
M
T

2m

O-

Vol.8.8

139


2005SD - 2010SD - 2015SD - 2021SD
[m3/h]

[m3/h]

2021
20

20

2021
15

2015
15

2015

2010

50Hz

2010

10

2005

2005

60Hz

10

101

10

102

103

104

105

101

[Pa]

10

102

103

104

105

[Pa]

2005I/C1 - 2010I/C1/C2 - 2015I/C1/C2 - 2021I/C1/C2

[m3/h]

[m3/h]

2021
20

20

2021
15

50Hz

2015
15

2015

2010
10

10

2010

2005

2005

101

10

102

103

104

60Hz

105

101

[Pa]

10

102

103

104

105

[Pa]

2005H1 - 2015H1
[m3/h]

[m3/h]
20

20

2015

50Hz

101

60Hz

10

10

2005

2005

10

102

103

[Pa]

140

15

2015

15

104

105

101

10

102

103

[Pa]

Vol.8.8

104

105

2033SD/C1/C2/H1 - 2063SD/C1/C2/H1
[m3/h]

[m3/h]

80

80

70

70

2063

60

50Hz

2063

60

50

50

40
30

30

20

20

10

10

101

102

10

103

104

2033

40

2033

105

101

102

10

103

104

60Hz

105

[Pa]

[Pa]

2100SD
[m3/h]

[m3/h]
160

200

140
120

150

2100

2100

100

50Hz

80

100

60
40

60Hz

50

20
101

102

10

103

104

105

101

[Pa]

102

10

103

104

105

[Pa]

2005SD/I/C1/H1 - 2010SD/I/C1/C2 - 2015SD/I/C1/C2/H1 - 2021SD/I/C1/C2

V = 1m3

[Pa]
105

104

104

103

103

2005

102

V = 1m3

[Pa]
105

102

2005
10

10

2010

2021
2015

101
0

20

40

2010
2021
2015

60

80 100 120 140 160 180 200

101
0

20

40

60

80 100 120 140 160 180 200

[ ]
50Hz

[ ]
60Hz

Vol.8.8

141

2033SD/C1/C2/H1 - 2063SD/C1/C2/H1

105

105

104

104

103

103

102

102

2033

10

2033

10

2063

2063
1

101
0

V = 1m3

[Pa]

V = 1m3

[Pa]

10

20

30

40

50

101
0

10

20

30

60Hz

2100SD
V = 1m3

[Pa]
105

104

103

102

10

50Hz
1

101
0

60Hz

10

15

20

25

[ ]

142

50

[ ]

[ ]
50Hz

40

Vol.8.8


2005I/SD/C1 - 2010I/SD/C1 - 2015I/SD/C1 - 2021I/SD/C1

3/8G

NW25

NW25

L mm

2005

228

2010

249

2015

270

2021

291

* 3

3/8G

2010C2 - 2015C2 - 2021C2

NW25

C1

NW25

1/8NPT

Vol.8.8

143

2005H1 - 2015H1
3/8G

NW25

3/8G

NW25

A mm

2005

279

B mm
195

2015

310

226

3/8G

2033SD - 2063SD

11/4G

3/8G

33/63

2033C1 - 2063C1

1/8NPT

1/8NPT

11/4G

3/8G

33/63

144

Vol.8.8

2033C2 - 2063C2
1/8NPT

1/8NPT

1/8NPT

11/4G

3/8G

33/63

3/8G
NW40

1 G

NW40

3/8G

33/63

3/8G
/ 1/8G

SD C1

2100SD
1 G
1 G

NW50
1 G

NW50

3/8G

3/8G

Vol.8.8

145

2033H1 - 2063H1

ISO-KF

OME 25S
OME 25HP
ST 25C

OME 40C1

LNT 25C

OME 50C

146

LNT 25P1

Vol.8.8

40
cSt

NEOIL-SS

0.883

256

73.6

NEOIL-S

0.878

230

44.6

ALCATEL120

260

120

ALCATEL200

223

58

NEOIL-SSC

0.896

254

63.7

1.

Pa

1.3 10 3
50
1.3 10 2
17.5
50
<4 10 3

25
6 10 4

25
4 10 4
20
50
17.5

Pa
<1 10 2
<2 10 2
<1 10 2
<1 10 2
<1 10 2

ANELVA

ALCATEL

ALCATEL

ALCATEL 2015RP
(Ultimate partial pressure)
(Ultimate total pressure)
10 10

2.

(
)

Vol.8.8

147

15/4

2100SD

2033 - 2063H1

2033 - 2063C2

2033 - 2063C1

2033 - 2063SD

2005 - 2015H1

OME 25HP

2010 - 2021C2

2005 - 2021SD

OME 25S

2005 - 2021C1

2005 - 2021I

OME 25C/H
OME 40S

OME 40C1
OME 40C2

OME 40H

OME 50S

OME 50C

ODK1

ODK2

LNT 25P1

LNT 25P2

LNT 25S
LNT 25C

LNT 40

ST 25S

ST 25C

ST 40

ST 50

DFT 25

CT 25

AGB4
AGB36

OLS 4

OLS 36

148

Vol.8.8

100Pa

OME 25S
mm
.......................
................................... /
........................0.217kg
/ ..NW 25
p/n
...........104200
1
p/n 068304
.................... 1 1
1

OME 25HP
mm

OME25HP 15 21m3/h

.........................
.................................... /
......................... 1.2kg
/ ... NW 25
p/n
............ 104199
1
p/n 100522
..................... 1 1

OME 25C/H

........................
...................................PTFE/
........................0.530kg
................... 2 10 8Pa m3/s
/ ..NW 25
p/n
...........066849
1
p/n 066800
.................... 1 1
NW 25

Vol.8.8

149

OME 40S
...........................
....................................../
...........................0.9kg
/ .....NW 40
p/n
..............104887
1
p/n 068443
....................... 1 1

NW40

OME 40C1

170

NW 40

102

217

372

138

125

42.4

37

120

NW 40

85

...........................
......................................PTFE/
...........................4.1kg
/ .....NW 40
p/n
..............068785
1 p/n 068778

104

14

3/8G

OME 40C2

170

372

NW 40

102

217

138

125

42.4

37

120

NW 40

85

...........................
......................................
...........................4.1kg
/ .....NW 40
p/n
..............068942
1
p/n 100802

104

14

3/8G

OME 40H

14

...........................
...................................... /
...........................4.1kg
................... 2 10-8 Pa m3/s

372

125
NW 40

102

217

138

150

170
42.4

37

120

NW 40

85

/ .....NW 40
p/n
..............068744
1
p/n 068443

104
3/8G

Vol.8.8

OME 50S
........................
...................................
........................3.5kg
...................NW 50
................... 33.7mm
p/n
...........104888
1
p/n 082672

ODK1-I/SD 5 21m3/h
G1/8"
NFE 03-005

G1/8"
NFE 03-005

* ODK1

RVP

...............0.1kg
p/n........104360

ODK2- I/SD 5 21m3/h

G1/8"
NFE 03-005
6/4

G1/8"
NFE 03-005

OME
25HP

2 ODK1
NC

...............0.1kg

RVP

p/n

230V
50/60Hz

115V
60Hz

104361

104362

Vol.8.8

100V
200V
24V DC
50/60Hz 50/60Hz
104363

104364

104365

151

6/4

OME
25HP

1
OME25HPODK1
OME25HP

OME HP

196

LNT 25S
mm

...............
..........................
................1.690kg
.......0.5L
/ .....NW 25

9595

44 L/s

10Pa

5h

1Pa

10 L/s

1Pa

11h

.................... 1 1
p/n
...........104197

LNT 25C

8686

mm

........................
...................................
........................1.885kg
......0.5L
/ ..NW 25

9494

33 L/s

10Pa

5h30

1Pa

6 L/s

1Pa

14h

............ 1 1
p/n.......066889

LNT 25P1

........................
...................................
........................1kg
......0.5L
/ ..NW 25

6 L/s

1Pa

5h

p/n
...........786346

LNT 25P2

........................
...................................
........................1.5kg
......1L
/ ..NW 25

6 L/s

1Pa

6h

p/n
...........786347

152

Vol.8.8

LNT 40
........................
...................................
........................3kg
......1L
/ . NW 40

43 L/s

1Pa

15h

p/n
...........786537

M8

ST 25S
mm

ST 25C

mm

........................
...................................
........................1.15kg
...................................0.36kg
/ ..NW 25

45 L/s

10Pa

11 L/s

1Pa

p/n
...........104107-
.......................p/n 068779
.................................................p/n 068182
.................... 1 1

........................
...................................
........................1.4kg
...................................0.26kg
/ ..NW 25

45 L/s

10Pa

20 L/s

1Pa

p/n
066845115V-
p/n
066841220V-
p/n 068779
p/n 068182
115V p/n 066876220V p/n 068319
1 1

Vol.8.8

153

ST 40

........................
...................................
........................1.7kg
...................................0.36kg
/ ..NW 40

25 L/s

10Pa

p/n
...........104371 115V - 053380 220V-

p/n 068779
....................................... p/n 068182
115V p/n 066876, 220V p/n 068319

ST 50

...............
..........................
................2kg
.......................... 0.36kg
/ .....NW 50

30 L/s

10Pa

p/n
...........104372 115V - 053381 220V -

p/n 068779
......................p/n 068182
115V p/n 066876, 220V p/n 068319

154

Vol.8.8

DFT 25
........................
...................................
........................0.217kg
6m

mm

6262

2 L/s

10Pa

0.6 L/s

1Pa

/ ..NW 25
p/n
...........104202
1 p/n 068445
1 1 1

Vol.8.8

155

CT 25

........................
...................................
........0.6L
........................1.2kg

mm

15 L/s

10Pa

6 L/s

1Pa

/ ..NW 25
p/n
...........104201
.... p/n 066825
1 1

NC
Automatic Gas Bal-

last

AGB 4-I/SD/C1 5 21m3/h

mm

....................600mm
........................................
.......................0.3kg

p/n

230V
50/60Hz

115V
60Hz

100V
200V
50/60Hz 50/60Hz

24V
DC

AGB4

104086 104087 104088 104366 104089

103552 038122 038126 038125 038066

600mm

AGB36-SD/C1 33/63m3/h

156

....................
........................................
.........................0.7kg

p/n

230V/240V
50/60Hz

115V
60Hz

AGB36

068391 104367 104368 104369 104370

104866 104867 104868 104869 104870

Vol.8.8

100V
200V
50/60Hz 50/60Hz

24V
DC


OLS 4
OLS4-I/SD 5 21m3/h
OLS36-SD 33/63m3/h

OLS

OLS 36

Vol.8.8

........................ /
........................OLS4 : 0.85kg
...................................OLS36 : 1.1kg

.........10VA 250V AC/DC 0.5A

.............1m
p/n
...........OLS 4 : 104376
..................................OLS 36 : 104377

157

16001

M2005SD

16002

T2005SD

16003

M2010SD

16004

T2010SD

16005

M2015SD

16006

T2015SD

16007

M2021SD

16008

T2021SD

16009

T2033SD

16010

T2063SD

16011

T2100SD

16021

M2005I

16022

T2005I

16023

M2010I

16024

T2010I

16025

M2015I

16026

T2015I

16027

M2021I

16028

T2021I

16041

M2005C1

16042

T2005C1

16043

M2010C1

16044

T2010C1

16045

M2015C1

16046

T2015C1

16047

M2021C1

16048

T2021C1

16049

T2033C1

16050

T2063C1

16063

M2010C2

16064

T2010C2

16065

M2015C2

16066

T2015C2

16067

M2021C2

16068

T2021C2

16069

T2033C2

16070

T2063C2

16081

M2005H1

16082

T2005H1

16085

M2015H1

16086

T2015H1

16089

T2033H1

16090

T2063H1

158

Vol.8.8

18000

953-7920

NEOIL-SS 1L

1L,

18001

953-7921

NEOIL-SS 20L

20L,

18002

953-7924

NEOIL-SSC 1L

1L, RP

18003

953-7927

NEOIL-S 4L

4L,

18004

953-7928

NEOIL-S 20L

20L,

104200

OME25S

104887

OME40S

104888

OME50S

066849

OME25C/H

068785

OME40C1

068942

OME40C2

068744

OME40H

104199

OME25HP

068304

OME25S

068443

OME40S/H

082672

OME50S

068778

OME40C1

100802

OME40C2

16280
16281
16282
15223
15222
16288
15220
16289
15230
15234
15236
15239
16294
16293
16302
16303
16304
16305
16307
16310
16311
16312
16313
16314
15247
15249
15206
15207
16315
16320
16325
16326
16327
16330
16335
16336
16340
16341
16342

100522

OME25HP

066889

LNT25C

786346

LNT25P1

786347

LNT25P2

786537

LNT40

104197

LNT25S

104107

ST25S

104371

ST40

053380

ST40

220V

104372

ST50

115V

115V

053381

ST50

220V

066845

ST25C

115V

066841

ST25C

220V

068182

450 ,FTML/ST

068779

500 ,FTML/ST

104201

CT25

104202

DFT25

104360

ODK1

104363

ODK2100V

104364

ODK2200V

104365

ODK2DC24V

104376

OLS4

2005/2010/2015/2021I,SD

104377

OLS36

2033/2063SD

104088

AGB4100V

2005/2010/2015/2021I,SD,C1

038126

104088

104366

AGB4200V

2005/2010/2015/2021I,SD,C1

Vol.8.8

159


16343
16344
16345
16346
16347
16352
16353
16358
16359
16387
16390

038125
104368
104868
104369
104869
104089
038066
104370
104870
066876
066825

104366
AGB36
100V
104368
AGB36
200V
104369
AGB4DC24V
104089
AGB36
DC24V
104370
ST/25/40/50
CT25

2033/2063SD,C1
2033/2063SD,C1
2005/2010/2015/2021I,SD,C1
2033/2063SD,C1
115V

15491
16201
16206
16208
15304
15305
15314
16210
16214
16221
16222
16223
16224
15351
16229
16230
16231
16232
16233
16234
16235
16236
16237
15366
15367
16241
16242
16243
16246
16247
15387
15388
15390
15391
15393
15394
15395
15396
15397
15398
15399

160

065612
103911
103912
104975
054285
054485
054286
054488
104611
103902
103903
103904
103905
054595
103906
103907
103908
103909
104421
104976
104977
104978
104979
054289
054489
104614
104615
104616
104612
104613
054288
054487
065126
065544
065079
105452
103307
103306
076135
082925
102847

A437741
A437745
A449365
A449362
(33/63CP)
(33/63C2)
(33/63SD)
(33/63SD)
33/63
(33/63SD)
(33/63SD)

2005 2021SD/I/C1/C2
2005SD/2010SD/2015SD/2021SD
2005I/2010I/2015I/2021I
2005C1/2010C1/2015C1/2021C1/2010C2/2015C2/2021C2
2033SD
2063SD
2033C1
2063C1
2005H1/2015H1
2005SD
2010SD
2015SD
2021SD
2100SD
2005I
2010I
2015I
2021I
2002C1
2005C1
2010C1
2015C1
2021C1
2033C1
2063C1
2010C2
2015C2
2021C2
2005H1
2015H1
2033SD &
2063SD &
2033C2
2063C2

P/N103307

Vol.8.8

Memorandum

Vol.8.8

161

ATP

15
ATP

5 10 8Pa ATP

C
5

162

Vol.8.8

ATP

NWICF ASA

ATP

ATP ACT
ATP ACT

ACT

ACT

Vol.8.8

163

ATP

 ATP 10 8 Pa

ATP

L/s
1000

ATP 10 8Pa 80

900

900L/s 12

800

ATP900
ATP400
ATP150
ATP100
ATP 80

N2
700

600

80 900L/s 5

500
400
300
200

100

0
104

103

102

101
1

Pa

NW/ICF/ASA

164

Vol.8.8

10

102

L/s

ATP80

ATP100

ATP150

ATP400

ATP900

NW 63

NW 100

NW 100

NW 160

NW 200

ICF 114

ICF 152

ICF 152

ICF 203

ICF 253

N2

80

100

140

400

900

He

50

60

100

300

540

H2

40

40

80

250

300

N2

8 107

8 107

7 108

7 108

1 109

He

2500

2500

1.2 104

1.5 104

2 104

H2

300

300
7

5 10

1 10
7

2 103

5 10 8

1 10

Pa

Pa

10

10

10

Pa

10

10

10

10

10

2005

2005

2005

2015

2021

5 10

rpm

27 000

27 000

27 000

27 000

1 45

1 45

50

50

50

50

50

120

120

100

100

100

NW

25

25

25

40

40

NW

ICF

4.3

4.3

6.5

6.5

kg

27 000

NW

ICF

5.3

5.3

NW

3.4

3.5

ICF

4.4

4.7

kg

17.5
18.5
17
18

ACT 200T

ACT 600TH

2.6

8.5

1/4

1/2

1/2

5 10

5 10

ACT 1000T

100 240V50/60Hz

VA

100

100

300

300

800

* ICF

ATP400

UHV

SEM

Vol.8.8

165

 ATPC

L/s
1000

900

800

700

600

ATP900 C
ATP400 C
ATP150 C
ATP100 C
ATP 80 C

N2

500

400

C ATP

300

200
100

0
104

103

102

101
1

Pa

NW/ICF/ASA

IDS

166

Vol.8.8

10

102

L/s

ATP80C

ATP100C

ATP150C

ATP400C

ATP900C

NW 63

NW 100

NW 100

NW 160

NW 200

ICF 114

ICF 152

ICF 152

ICF 203

ICF 253

N2

80

100

140

400

900

He

50

60

100

300

540

H2

40

40

80

250

300

N2

8 107

8 107

7 108

7 108
4

1 109
4

2 104

He

2500

2500

1.2 10

1.5 10

H2

300

300

1 103

1 103

2 103

5 10 7

5 10 7

5 10 8

8 10 8

5 10 8

5 10 6

5 10 6

1 10 5

1 10 5

1 10 5
50

Pa

Pa
sccm

50

50

50

50

Pa

10

10

10

Pa

10

10

10

10

10

2033 CP

2063 CP

2005 CP 2005 CP 2021 CP

rpm

27 000

27 000

27 000

27 000

27 000

1 45

1 45

40

40

40

40

50

120

120

120

100

100

NW

25

25

25

40

40

N2
NW

16

16

16

16

16

6.5

9.1

17.7

6.5

9.2

17.2

kg

NW

ICF

5.3

5.3

NW

3.4

3.5

ICF

4.4

4.7

ACT 200T
kg

ACT 600TH

2.6

8.5

1/4

1/2

1/2

ACT 1000T

100 240V50/60Hz
VA

100

100

300

300

800

* CF-F

ATP400C

N2

Vol.8.8

167

 ACT

ACT 200T

ACT 600TH

ACT 1000T

RS232/RS485

100 240V50/60Hz

0 10

168

Vol.8.8


C ATP
ATP 80

ATP 100
ATP 80 / ATP 80C

NW63

114ICF

112.0

127.0

152.8

167.8

65

65

mm

77.3

77.3

ALI
ALI

ATP 100 / ATP 100C

21

39.5

18
1.3

129.5

NW25

CN2
ATP 80C, 100C

21

152ICF

NW100

105

145.8

39.5

18
1.3

ATP 80, 80C, ATP100, 100C

129.5

NW25

ATP 80, 80C, ATP100, 100C

12.1
95.4

30

26.1

15

23.8

65

56

82

102

NW16

119.3
22

12.4

118

12

24
IN/OUT

Vol.8.8

169

mm

ATP 150

ATP 400

ATP 900

30

30

30

149.7
189.5
240

ALI

ALI

A
B
42.7

18

105.7

NW25

38.1
NW40

60

NW40
118.2

ATP 400/ ATP 400C

mm

NW100

152ICF

105.0

116.0

170

101.5

106.1

ATP 150 / ATP 150C

210.7

8.5

60

87.4

35.8

103.9

60

AL

3.4
B

221.7

mm

NW160
NW100

203ICF
152ICF

113
143.5

130
145

216.9
247.5

233.9
248.9

ATP 900/ ATP 900C

mm

NW200

253ICF

110.0

130.0

221.5

231.5

Vol.8.8


ATP 150

ATP 400

20

20

20

87

87

87

ATP 900

45

45

45
51,9

50,1

47,7

IN/OUT

CN2
ATP150C,400C,900C)

ATP150,150C,ATP400,400C,ATP900,900C
26.2

12.1

ATP 150 ATP 400 ATP 900

mm

80
D

10
E

91.5

91.5

124.2

97.0

97.0

134.0

175.8

175.8

234.9

122.1

122.1

168.0

123.5

121.1

119.3

F
G

15,5

13.4
NW16

Vol.8.8

171

mm
ACT 200T

ACT 600TH

ACT 1000T

ATP80

NW 63

ATP100

ATP150

ATP400

ICF 114 NW 100 ICF 152 NW 100 ICF 152 NW 100 NW 160 ICF 152 ICF 203 NW 200 ICF 253

F 12101 F 12201 G 13101 G 13201

F 12111 F 12211 G 13111 G 13211 H 13111 H 13211

ATP900

I 13111

I 14111

I 13211

I 14211

K 15111 K 15211

F 12121 F 12221 G 13121 G 13221 H 13121 H 13221 I 13121

I 14121

I 13221

I 14221

K 15121 K 15221

C
ATP80C
DN

NW 63

ATP100C

ATP150C

ATP400C

ATP900C

ICF 114 NW 100 ICF 152 NW 100 ICF 152 NW 100 NW 160 ICF 152 ICF 203 NW 200 ICF 253

F 22111 F 22211 G 23111 G 23211 H 23111 H 23211 I 23111

I 24111

I 23211

I 24211

K 25111 K 25211

F 22121 F 22221 G 23121 G 23221 H 23121 H 23221 I 23121

I 24121

I 23221

I 24221

K 25121 K 25221

ATP80/80C
ATP100/100C
ATP150/150C
ATP400/400C

ATP900/900C

172

ATP ACT

3.5m

101956

5m

101957

10m

101958

3.5m

101812

5m

101810

10m

101811

3.5m

101812

5m

101810

10m

101811

ACT200T

ACT 600TH

ACT 1000T

ATP80/80C

100 240 V

ATP100/100C

50/60 Hz

ATP150/150C

100 240 V

ATP400/400C

50/60 Hz

ATP900/900C

Vol.8.8

100 240 V
50/60 Hz

101932

102017

102021

ATP80/80C
ATP100/100C

066671

066672

066673

066674

066675

ATP150/150C
ATP400/400C
ATP900/900C

066691

066692

066693

066694

066695

ACT
NW

100V
50/60Hz

200V
50/60Hz

ATP80/80C
ATP100/100C
ATP150/150C

25

063175

063176

ATP400/400C
ATP900/900C

40

063479

063480

062698

056993

063044

063078

101924

101930

ATP400/400C

063076

101924

101930

ATP900/900C

062992

101924

101930

ATP80/80C
ATP100/100C
ATP150/150C

ATP80

NW 63
ICF 114

ATP100
ATP150
ATP400
ATP400

NW 100
ICF 152
NW 160
ICF 203

ATP900

NW 200
ICF 253

2.5mm

20 m

063000

200V
50/60Hz

100V
50/60Hz

063115

ATP80/80C
ATP100/100C

056934

056844

ATP150/150C

063028

063181

063215

ATP400/400C

101926

101927

056845

ATP900/900C

063324

056942

063216
056928

063158

063214

062911
063159

Vol.8.8

173

TMP ATP

16600
16660
16601
16661
16602
16662
16603
16663
16604
16664
16605
16665
16606
16666
16607
16667
16608
16668
16609
16669
16610
16670
16611
16671
16612
16672
16613
16673
16614
16674
16615
16675
16616
16676
16617
16677
16618
16678
16619
16679
16620
16680
16621
16681
16622
16682
16623
16683
16624
16625
16626
16627

174

F12101

ATP8063 ISO-K

F22111

ATP80C63 ISO-K

F12111

ATP8063 ISO-K

F22121

ATP80C63 ISO-F

F12121

ATP8063 ISO-K

F22211

ATP80C63 CF-F

F12201

ATP8063 CF-F

F22221

ATP80C63 CF-F

F12211

ATP8063 CF-F

G23111

ATP100C100 ISO-K

F12221

ATP8063 CF-F

G23121

ATP100C100 ISO-F

G13101

ATP100100 ISO-K

G23211

ATP100C100 CF-F

G13111

ATP100100 ISO-K

G23221

ATP100C100 CF-F

G13121

ATP100100 ISO-K

H23111

ATP150C100 ISO-K

G13201

ATP100100 CF-F

H23121

ATP150C100 ISO-F

G13211

ATP100100 CF-F

H23211

ATP150C100 CF-F

G13221

ATP100100 CF-F

H23221

ATP150C100 CF-F

H13111

ATP150100 ISO-K

I23111

ATP400C100 ISO-K

H13121

ATP150100 ISO-K

I23121

ATP400C100 ISO-F

H13211

ATP150100 CF-F

I24111

ATP400C160 ISO-K

H13221

ATP150100 CF-F

I24121

ATP400C160 ISO-F

I13111

ATP400100 ISO-K

I23211

ATP400C100 CF-F

I13121

ATP400100 ISO-K

I23221

ATP400C100 CF-F

I14111

ATP400160 ISO-K

I24211

ATP400C160 CF-F

I14121

ATP400160 ISO-K

I24221

ATP400C160 CF-F

I13211

ATP400100 CF-F

K25111

ATP900C200 ISO-K

I13221

ATP400100 CF-F

K25121

ATP900C200 ISO-F

I14211

ATP400160 CF-F

K25211

ATP900C200 CF-F

I14221

ATP400160 CF-F

K25221

ATP900C200 CF-F

K15111

ATP900200 ISO-K

K15121

ATP900200 ISO-K

K15211

ATP900200 CF-F

K15221

ATP900200 CF-F

Vol.8.8

101932

ACT 200T ATP ATP80100C

11692

ACT 600TH ATP ATP150400C

100-240 50/60Hz
100-240 50/60Hz

102021

ACT 1000T ATP ATP900C

100-240 50/60Hz

101956

3.5M

ATP80/100C

101957

5M

ATP80/100C

101958

10M

ATP80/100C

101812

3.5M

ATP150/400/900C

101810

5M

ATP150/400/900C

101811

10M

ATP150/400/900C

63175

ATP80/100/150C

100V 50/60Hz

63176

ATP80/100/150C

200V 50/60Hz

63479

ATP400/900C

100V 50/60Hz

63480

ATP400/900C

200V 50/60Hz

62698

ATP80/100C

63078

ATP150C

63076

ATP400C

62992

ATP900C

16735

56993

AT P 8 0 /10 0 C M D P 5 0 H C
TMP5080/5100/5081/5101ATS100

16736
16738
16739
16740
16741
16742
16743
16744
16745
16746
16747
16748
16749
16750
16751
16752
16754
16755
16756
16757
16758

101924

ATP150/400/900C

63044

ATP80/100C

101930

ATP150/400/900C

63000

2.5MM

DN63 ISO-K

63214

20

DN63 ISO-K

63115

2.5MM

DN63 CF-F

56844

2.5MM

DN100 ISO-K

63215

20

DN100 ISO-K 20

56845

2.5MM

DN100 CF-F

56942

2.5MM

DN160 ISO-K

63216

20

DN160 ISO-K

56928

2.5MM

DN160 CF-F

63158

2.5MM

DN200 ISO-K

62911

20

DN200 ISO-K

63159

2.5MM

DN200 CF-F

56934

ATP80/100C200V

63028

ATP150C200V

63181

ATP150C100V

101926

ATP400C200V

101927

ATP400C100V

63324

ATP900C200V

Vol.8.8

175

16700
16803
16702
16704
16705
16706
16707
16708
16709
16720
16721
16722
16723
16730
16731
16732
16733

ATH

30 300/s
-
ATH

ATH
ATH

OEM

ATH

ATH

ATH 31 ATH 300

I/O

176

Vol.8.8

ATH 31

Pa

-8

35

10 Pa
ATH 31+ N2 1011H2

10 -3

10 -2

10 -1

N2 ATH 31

30

10

10 2

105
4,500Pa

25

/S

He ATH 31+

N2 ATH 31+

20

15

He ATH 31
10

50Pa 200sccm

10 -5

10 -4

10 -3

10 -2

ATH 31+ 50Pa 200sccm

N2

Pa
10 3

10 -2

10 -1

sccm

N2

10

10

10 2

ATH 31+

ATH 31

10 -1
10 -4

10 -3

10 -2

10 -1

mbar

20
Pa
10 -2
1

10 -1

10

10 2 2
10

10 -1

10

10 -2

10

-3

10 -4
10 -1

Pa

ISO-K/CF-F/ASA

10

mbar

10 -1

mbar

10 -1

10 -2
1

10 1

10 2

10 3

mbar

Vol.8.8

177

ATH 31

L/s

ATH 31+

ATH 31C

NW 40

NW 63

NW 40

NW 63

NW 40

NW 63

N2

33

26

30

33

26

30

33

26

30

He

15

13

14

22

18

20

22

18

20

H2

15

14

14

15

14

14

N2

108

1011

2.109

He

6.103

2.107

2.106

H2

300

1.105

1.104

(*)

Pa

< 10-6

< 5.10-8

< 5.10-8

Pa

1.10-6

sccm

25

N2
(**)

Pa

100

50

100

Pa

2500

4500

4500

RVP,ACP,

rpm

42,000

dBA

45

mm/s

0.1

VA

100

150

120

kg

1.2(2.7)

ACT 101HACT 201H

(*)CFF AMD 48
(**) 67R/min,4m3/h

ATH 31

ATH 31+

ATH 31C

ATH 31

ATH 31+

ATH 31 C

ATH 31 1

ATH 31+ 1

ATH 31 C 1

2,500Pa

178

Vol.8.8

ATH 200
ATH200() NW100

Pa

-8

10 Pa

10 -2

10 -3
200

ATH 200

10 -1

10

N2

He

ATH 200
ATH 200I

/S

150

100

N2
10 /s
50

0
10 -5

10 -4

10 -3

10 -2

10 -1

mbar

Pa
10

210

10 -2

-3

10 -1

10

sccm

N2

10

He

10 0

10

10 -5

10 -4

10 -3

10 -2

10 -1

mbar

20
Pa
10 -2

10

10 -2

10 -3
1

10 -4

10 -2

10 -5
10 -2

10 -1

Pa

10 -1

mbar

10 -3

10 -3
10 1

mbar

Vol.8.8

179

ATH 300
ATH300(CI)

Pa

10Pa

ATH300CI

/S

10 -8Pa

350

10 -2

10 -1

10

N2 NW 160
300

N2 NW 100

250

He NW 160

200

He NW 100
150

100

50

10 -4

10 -3

10 -2

10 -1

10

mbar

sccm

10 3

10 -2

10 -1

Pa

N2 NW 100
He NW 160
10

N2 NW 160

He NW 100

10 1

1
10 -4

10 -3

10 -2

10 -1

mbar

20
Pa
10

-1

10

10 2

10 3
10

10 -2

10 -3

10 -1

10 -4

10

10 -3

-5

10 -2

10 -1

mbar

180

10 -2

Vol.8.8

10 1

Pa

mbar

ATH 300 NW 160

 ATH 200 - ATH 300

ATH 300(CI)

ATH 300(CI)

NW 100

NW 100

NW 160

N2

200

250

300

He

130

215

N2

> 109

> 109

He

105

105

Pa

< 5.10-8

< 5.10-8

L/s

(*)

ATH 200(I)

-1

Pa

4.10

Pa

400

L/s

10
1000

NW 25(I )

NW 16

10(I)

2 - 5(CI)

N2
He

240

rpm

8(I)

3 - 5(CI)

RVP,ACP,AMD

RVP,ACP,AMD

NW 16

NW 25

42000

dB(A)

< 53

< 53

mm/s

0.3

0.3

VA

100

250

150

300

min

<6

< 3.5

kg

5.5 / 9.7

6.5 / 10.5

ISO-K/CF-F

36000

ACT 102 H,ACT 202 H

ACT 600THACT 250

(*)CFF 48

ATH 200(I)

ATH 300(Cl)

Vol.8.8

181

 I/O
ACT 101 HACT 102 HACT 250

ACT 101 H

ATH 31

ACT 102 H

ATH 200

ACT 250

ATH 300

ACT 101 HACT 102 H

ACT 250

1/4 3U

1/4 3U

4 LED

4 LED

ON/OFF

100V115V
200V230V(50/60Hz)

100-240V(50/60Hz)
RS 232/485

182

mm

Vol.8.8


ACT 201 HACT 202 H

ACT 201 H

ATH 31

ACT 202 H

ATH 200

ACT 600TH

ATH 300

RS 232/RS 485

10

ACT201HACT202H

0 10V

/ /

100 240V 50/60Hz

ACT 201 H / ACT 202 H

mm

ACT 600 TH

Vol.8.8

183

 OEM
OEM

ACT 250

ACT 201 H

ATP 150 ATP 400

ATH 31

ATH 200

ATH 31

184

mm

ATH 200

ATH 300

Vol.8.8


ATH 31

ATH31
1

ATH31
8

Nude
0

NW 40
NW 63
1
2

Nude
0

ISO-K
CF-F
1
2

/(*)
0

ATH31C
2

ATH 200

S 1

00

ATH 200 I
ATH 200
NW100 ISO-K NW100 CF-F NW100 ISO-K NW100 CF-F NW63 ISO-K
3C
3D
31
32
21

1
2

ATH 300

ATH 300

SD
1

CI
2

NW100 ISO-K NW100 CF-F NW160 ISO-K NW160 CF-F

31
32
41
42

00

00

1
2

Vol.8.8

185

ACT 201 HACT 202 HACT 600 TH

1 1
ACT 101 HACT 102 HACT 250
P/N

ACT P/N
1OOV
115V
200V
230V
50/60Hz 50/60Hz 50/60Hz 50/60Hz

ACT 101 H / ATH 31

111114

111115

111116

111117

ACT 102 H / ATH 200

111118

111119

111120

111121

ACT 250 / ATH 300

108320

103567
103898

103566

(*)

103567
104559

ACT P/N

ACT 201 H

ATH 31

108916

ACT 202 H

ATH 200

110787

ACT 600 TH

ATH 300

111692

(*)

ATH 31

P/N
ACT 101 H

ACT 201 H

1m

A460913-010

A460422-010

3m

A460913-030

A460422-030

5m

A460913-050

A460422-050

10m

A460913-100

A460422-100

20m

A460913-200

A460422-200

ATH 200

P/N
ACT 102 H

ACT 202 H

1m

A460913-010

A460422-010

3m

A460913-030

A460422-030
A460422-050

5m

A460913-050

10m

A460913-100

A460422-100

20m

A460913-200

A460422-200

ATH 300

1m

P/N
ACT 250 ACT 600 TH
A461237-010

3.5m

A461237-035

5m

A461237-050

186

10m

A461237-100

20m

A461237-200

P/N

Vol.8.8

104411
A459212

2.5mm

P/N

20 m

NW 40 ISO-KF

102670

103078

102635

NW 40 CF-F
ATH 31

102644

NW 63 ISO-K

062912

NW 63 CF-F

102662

NW 100 ISO-K

102664
056844

ATH 200,300

NW 100 CF-F

063215
056845

NW 160 ISO-K

102680
056942

ATH 300

063216
056928

NW 160 CF-F

063117

102685

ATH 31,ATH 200,ATH 300

ATH 300

NW 16

NW 25 ISO-K

24VDC

108347

108348

100V-50/60Hz

063165

063175

115V-50/60Hz

063171

063089

200V-50/60Hz

063173

063176

220V-50/60Hz

063169

056994

240V-50/60Hz

063172

063177

ATH 31
ATH 200
ATH 300

P/N

107605

107593

109258

109259

109258

109259

Vol.8.8

187

16500

ATH31PLUS NW40

ACT201H

16501

ATH31PLUS NW63

ACT201H

16502

ATH31PLUS ICF70

ACT201H

ATH31

16503

ATH31PLUS ICF114 ACT201H

16504

ATH31 NW40

ACT201H

16505

ATH31 NW63

ACT201H

16506

ATH31 ICF70

ACT201H

16507

ATH31 ICF114

ACT201H

16540

ATH200I NW100

ACT202H

16541

ATH200I ICF152

ACT202H

16545

ATH200 NW63

ACT202H

16546

ATH200 NW100

ACT202H

16547

ATH200 ICF152

ACT202H

16556

ATH300SD NW100 ACT250 100V

ATH200

ATH300
16557

ATH300SD NW160

ACT250 100V

16558

ATH300SD ICF152

ACT250 100V

16559

ATH300SD ICF203

ACT250 100V

16566

ATH300CI NW100

ACT250 100V

16567

ATH300CI NW160

ACT250 100V

16568

ATH300CI ICF152

ACT250 100V

16569

ATH300CI ICF203

ACT250 100V

188

16510

102670

NW402.5mm

16511

063117

NW632.5mm

16743

56844

NW1002.5m

16746

56942

NW1602.5m

16512

102644

ICF702.5mm

16513

102662

ICF1142.5mm

16745

56845

ICF1522.5mm

16748

56928

ICF2032.5mm

16509

108347

VDC)

NW16

16538

108348

VDC)

NW25

Vol.8.8

Memorandum

Vol.8.8

189


DRYTEL1025

DRYTEL1025-AS

DRYTEL1025-AQ

MDP5011+AMD1)

MDP5011+AMD4)

DRYTEL1025-BS

DRYTEL1025-BQ

ATH31Plus+AMD1)

ATH31Plus+AMD4)

DRYTEL1025 4
1m3/h AS4m3/
AQ ATH31+
BSBQ 4

ON/OFF 1
-4

-5

10 ASAQ 10 BS

BQ

R D

AS BS 16kg

190

Vol.8.8


DRYTEL1025

AS

Pa

1Pa L/s

BS

BQ
10-5

MDP5011

ATH31+

N2

7.5

30

He

20

H2

14

AQ
10-4

AMD1

AMD4

AMD1

AMD4

L/min

17

68

17

68

m /h

Pa

kg

500
NW63

50
NW63ICF114

10 40

160
16

310
26

160
16

310
26

Drytel1025AS
Drytel1025AQ
Drytel1025BS
Drytel1025BQ

A
265
265
240
240

B
305
410
305
410

14307
14308
14309
14310
14439
14441
14474
14471
16735

D025ASNNS710
D025AQNNS710
D025BSNNS710
D025BQNS710
303056
063117
109149
110068
056993
062912
102662
102664

Drytel 1025-AS
Drytel 1025-AQ
Drytel 1025-BS
Drytel 1025-BQ

MDP5011+AMD1100V50/60Hz
MDP5011+AMD4100V50/60Hz
ATH31Plus+AMD1100V50/60Hz
ATH31Plus+AMD4100V50/60Hz
NW63 2.5mm
Drytel 1025-ASBS AMD1
Drytel 1025-AQBQ AMD4
MDP5011
NW63 20
ICF1142.5mm
ICF11420

Vol.8.8

191


ACP 15/28/40 2

ACP15
14m3/h
230L/min

ACP28
27m3/h
450L/min

ACP40
37m3/h
600L/min

ACP15ACP28ACP40

R D
/

ACP15

20,000

ACP28/40 22,000
1/

50

192

Vol.8.8


ACP15

ACP15

14

50/60Hz

ACP28

Pa

ACP28G

ACP40

ACP40G

G G

Pa

30

Pa

30

20

20

AC90 250V50/60Hz

AC90 250 50/60Hz

520

750

600

1200

12 40 85

12 40 85

NW25DN25 ISO-KF

NW16DN16 ISO-KF

NW25DN25 ISO-KF

Pam3/s

5 10-8

N2
: L W H

"G

kg

23

mm

514 190 270

"G

"G

30

32

NW40DN40 ISO-KF

NW25DN25 ISO-KF

47 193 322

ACP15
m3/h
10-2

10-2

1m3

Pa
1

101

102

103

105

10

10

101

103

102

10

Pa

10

mbar

m3/h

15

10-1

10

10-2

0
10-2

10-2

101

102

103

10

20

30

mbar

40

50

60

70

80

1
90

Vol.8.8

193

ACP28/40

m3/h
ACP 28 / ACP 28G

ACP 40 / ACP 40G

Pa
1

10

102

Pa

103

104

105

40

35

35

30

30

25

25

m3/h

m3/h

40

20

15

10

102

103

104

101

102

105

20

15

10

10

0
10-2

10-2

101

102

mbar

103

10-2

10-2

mbar

103

1m3
ACP 28 / ACP 28G

ACP 40 / ACP 40G

103

10

103

10

102

104

102

104

10

10-1

10

10-2
0

10

20

30

40

50

60

70

80

1
90

10

10

10-1

10

10

10-2
0

10

20

30

40

60

70

80

1
90

194

50

Vol.8.8

Pa

mbar

Pa

10

mbar

10


ACP15

ACP28/40

14741

V5SATSMFJF

14742

V5GATSRFJF

ACP15 DRY PUMP

ACP15G DRY PUMP

100-230V50/60Hz 2m(100V )

14752

V6SATSFJMF

ACP28 DRY PUMPSeries2

100-230V50/60Hz 2m(100V )

14753

V6GATSFJBF

ACP28G DRY PUMPSeries2

100-230V50/60Hz 2m(100V )

14762

V8SACSFJMF

ACP40 DRY PUMPSeries2

100-230V50/60Hz 2m(100V )

14763

V8GACSFJBF

ACP40G DRY PUMPSeries2

100-230V50/60Hz 2m(100V )

14770

111649

IPF25

14771

111650

IPF25

14772

111647

IPF40

14773

111648

IPF40

14774

109873

ES25S

14775

109797

ES25S

Vol.8.8

195

Memorandum

196

Vol.8.8


TURBOSTAND
TURBOPACK

Innovative packages for every need

TURBOPACK

TURBOSTAND

Our best selling package

TMP 80 400L/S
5 21m3/h

TURBOSTAND

TMP 80 400L/S
5 21m3/h

Vol.8.8

197

TURBOPACK-TURBOSTAND
Innovative packages . . . .

TURBOPACK

TURBOSTAND TMP

ELECTRICAL SAFETY
TMP

LOW VIBRATION
TMP

ONE-TOUCH OPERATION

ROBUST:

TMP

TMP

50kg

FLEXIBILITY:
TMP

198

Vol.8.8

. . . . Superior system

TMP
TMP

ISV25

Vol.8.8

199

 TURBOPACK/TURBOSTAND

ATP80

ATP100

ATP150

NW63
ICF114

NW100
ICF152

NW100
ICF152

N2

80

100

140

400290

He

50

60

100

300220

H2

40

L/s

40
7

250180

8 10

7 10

He

2500

2500

1.2 104

Pa

Pa

5 10

300
7

5 10

10

5 10

10

7 108
1.5 104

1 103

5 10 8

1 10
7

1 45

NW100
ICF152

8 10
300

NW160
ICF203

80
7

N2
H2

ATP400

10

35

35

35

50

50

50

50

120

120

100

ACT200T

100
ACT600T
2015/2021
SDC1 RP

2005/2010/2015/2021SDIC1 RP

OME25S or OME25C

AC100V or 200V50/60Hz

0.8

0.8

kW

464 560 602

464 560 606

464 560 606

464 560 608

mm

464 585 1102

464 585 1106

464 585 1106

464 585 1108

kg

55 58

55 58

59 62

63 65

60 63

60 63

64 67

68 70

//

2
NEOIL-SS

1. NW100 ICF152
2.
ICF

200

Vol.8.8

GSABBASNOFA1

TURBOSTANDATP802010SD

OMEISVICF100V

GSBBBASNOFA1

TURBOSTANDATP1002010SD OMEISVICF100V

GSCBBASNOFA1

TURBOSTANDATP1502010SD

GSEBCASNOFA1

TURBOSTANDATP4002015SD OMEISVICF100V

OMEISVICF100V

GSABBASNOGA1

TURBOSTANDATP802010SD

GSBBBASNOGA1

TURBOSTANDATP1002010SD OMEISVICF200V

OMEISVICF200V

GSCBBASNOGA1

TURBOSTANDATP1502010SD

OMEISVICF200V

GSEBCASNOGA1

TURBOSTANDATP4002015SD OMEISVICF200V

GSABDASNOFA1

TURBOSTANDATP802021SD

OMEISVICF100V

GSBBDASNOFA1

TURBOSTANDATP1002021SD

OMEISVICF100V

GSCBDASNOFA1

TURBOSTANDATP1502021SD

OMEISVICF100V

GSEBDASNOFA1

TURBOSTANDATP4002021SD OMEISVICF100V

GSABDASNOGA1

TURBOSTANDATP802021SD

OMEISVICF200V

GSBBDASNOGA1

TURBOSTANDATP1002021SD

OMEISVICF200V

GSCBDASNOGA1

TURBOSTANDATP1502021SD

OMEISVICF200V

GSEBDASNOGA1

TURBOSTANDATP4002021SD OMEISVICF200V

GSABBASVOFA1

TURBOSTANDATP802010SD

GSBBBASVOFA1

TURBOSTANDATP1002010SD OMEISVICF100V

OMEISVICF100V

GSCBBASVOFA1

TURBOSTANDATP1502010SD

OMEISVICF100V

GSEBCASVOFA1

TURBOSTANDATP4002015SD OMEISVICF100V

GSABBASVOGA1

TURBOSTANDATP802010SD

GSBBBASVOGA1

TURBOSTANDATP1002010SD OMEISVICF200V

GSCBBASVOGA1

TURBOSTANDATP1502010SD

GSEBCASVOGA1

TURBOSTANDATP4002015SD OMEISVICF200V

GSABDASVOFA1

TURBOSTANDATP802021SD

OMEISVICF100V

GSBBDASVOFA1

TURBOSTANDATP1002021SD

OMEISVICF100V

GSCBDASVOFA1

TURBOSTANDATP1502021SD

OMEISVICF100V

OMEISVICF200V
OMEISVICF200V

GSEBDASVOFA1

TURBOSTANDATP4002021SD OMEISVICF100V

GSABDASVOGA1

TURBOSTANDATP802021SD

OMEISVICF200V

GSBBDASVOGA1

TURBOSTANDATP1002021SD

OMEISVICF200V

GSCBDASVOGA1

TURBOSTANDATP1502021SD

OMEISVICF200V

GSEBDASVOGA1

TURBOSTANDATP4002021SD OMEISVICF200V

GCABBASNOFA1

TURBOPACKATP802010SD

OMEISVICF100V

GCBBBASNOFA1

TURBOPACKATP1002010SD

OMEISVICF100V

GCCBBASNOFA1

TURBOPACKATP1502010SD

OMEISVICF100V

GCEBCASNOFA1

TURBOPACKATP4002015SD

OMEISVICF100V

GCABBASNOGA1

TURBOPACKATP802010SD

OMEISVICF200V

GCBBBASNOGA1

TURBOPACKATP1002010SD

OMEISVICF200V

GCCBBASNOGA1

TURBOPACKATP1502010SD

OMEISVICF200V

GCEBCASNOGA1

TURBOPACKATP4002015SD

OMEISVICF200V

GCABDASNOFA1

TURBOPACKATP802021SD

OMEISVICF100V

GCBBDASNOFA1

TURBOPACKATP1002021SD

OMEISVICF100V

GCCBDASNOFA1

TURBOPACKATP1502021SD

OMEISVICF100V

GCEBDASNOFA1

TURBOPACKATP4002021SD

OMEISVICF100V

GCABDASNOGA1

TURBOPACKATP802021SD

OMEISVICF200V

GCBBDASNOGA1

TURBOPACKATP1002021SD

OMEISVICF200V

GCCBDASNOGA1

TURBOPACKATP1502021SD

OMEISVICF200V

GCEBDASNOGA1

TURBOPACKATP4002021SD

OMEISVICF200V

GCABBASVOFA1

TURBOPACKATP802010SD

OMEISVICF100V

GCBBBASVOFA1

TURBOPACKATP1002010SD

OMEISVICF100V

GCCBBASVOFA1

TURBOPACKATP1502010SD

OMEISVICF100V

GCEBCASVOFA1

TURBOPACKATP4002015SD

OMEISVICF100V

Vol.8.8

201

16810
16811
16812
16813
16815
16816
16817
16818
16820
16821
16822
16823
16825
16826
16827
16828
16830
16831
16832
16833
16835
16836
16837
16838
16840
16841
16842
16843
16845
16846
16847
16848
16910
16911
16912
16913
16915
16916
16917
16918
16920
16921
16922
16923
16925
16926
16927
16928
16930
16931
16932
16933


16935
16936
16937
16938
16940
16941
16942
16943
16945
16946
16947
16948

GCABBASVOGA1

TURBOPACKATP802010SD

OMEISVICF200V

GCBBBASVOGA1

TURBOPACKATP1002010SD

OMEISVICF200V

GCCBBASVOGA1

TURBOPACKATP1502010SD

OMEISVICF200V

GCEBCASVOGA1

TURBOPACKATP4002015SD

OMEISVICF200V

GCABDASVOFA1

TURBOPACKATP802021SD

OMEISVICF100V

GCBBDASVOFA1

TURBOPACKATP1002021SD

OMEISVICF100V

GCCBDASVOFA1

TURBOPACKATP1502021SD

OMEISVICF100V

GCEBDASVOFA1

TURBOPACKATP4002021SD

OMEISVICF100V

GCABDASVOGA1

TURBOPACKATP802021SD

OMEISVICF200V

GCBBDASVOGA1

TURBOPACKATP1002021SD

OMEISVICF200V

GCCBDASVOGA1

TURBOPACKATP1502021SD

OMEISVICF200V

GCEBDASVOGA1

TURBOPACKATP4002021SD

OMEISVICF200V

16950

202

GCABRASNOFA0

TURBOPACKATP80ACP15

ATP80 ICF114ISV100V

Vol.8.8

Vol.8.8

203

PTS300/PTS600

PTS /PTS Varian

1.

Pa

PTS300
3

PTS600
3

15m /hr250l/m@60Hz
13m3/hr210l/m@50Hz

30m /hr500l/m@60Hz
25m3/hr420l/m@50Hz

1.3Pa

0.93Pa

AC100 115V,200 230V 10%50/60Hz1

AC200 230V, 10%50Hz3
AC200 230V, 10%60Hz3

0.48kW

0.98kW10.48kW3

26.4kg

31kg

204

Vol.8.8


PTS300

PTS600

1.NW25 NW40AC120V AC220V

2.PTS300 PTS600
3.PTS300 PTS600

Speed: liter/min

1000

PTS600

100
60Hz

PTS300

50Hz

10

0
101

14700
14704
14701
14702

100

101
102
Inlet Pressure [Pa]

103

104

105

PTS03001UNIV

PTS300 ( )

1 100V ( 200V )

PTS03003UNIV

PTS300 (3 )

3 200V

PTS06001UNIV

PTS600 ( )

1 100V ( 200V )

PTS06003UNIV

PTS600 (3 )

3 200V

Vol.8.8

205

SH-110

SH110 Varian

1.

5.

RP

6. 56dBA

2.

3.

PVD

4.

206

Vol.8.8


1/8"
NPT
GAS
BALLAST

122.5
4.82 to
INLET q
ALTERNATE
EXHUASTPOSITION
NW16

154.8
6.09

NW25 INLET

NW16
EXHUAST
239.6
9.44

111.7
4.40

257.2
10.13

111.7
4.40

48.3
1.90 TO
MOUNTING
SLOT q

43.7
4X 1.72
7.2
4X .28

80.9
3.19

48.3
1.90

DETAIL A
SCALE 1 : 1

384.3
15.13

74.2
2.92 TO
INLET

7.6
.30
163.6
6.44

137.7
5.42

81.8
3.22

89.3
3.52

132.6
5.22
147
5.79

1.
SH 110
2.
SH 110

SH-110
6.6m3/hr110l/m@60Hz

5.4m3/hr90l/m@50Hz

6.6Pa

/50-60Hz/100-115200-230VAC

0.48kW

19.5kg

1000

L/min

50Hz

60Hz

100

10

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

Pa

14705
14710

SH01101UNIV

SH-110

1 100V ( 200V )

656494265

SH-110 AC100V

3P 2.4m

Vol.8.8

207

Memorandum

208

Vol.8.8

Vol.8.8

209


SDE 90/120
SDE

SDE120

SDE603A

40 Low
Down

Ar

CVD

CESEMINRTLS-Mark
50/60Hz
0.5sec/1sec/2sec
0.5sec

210

Vol.8.8


SDE90

L/min

SDE120

1,300

Pa

2,000
1.3

NW40

MPa

0.5IN-OUT 0.2

L/min

4 810 25

NW50
NW40

Rc3/8

MPa

L/min

0.1 0.7
0 60

1/4"

AC200 220V50/60Hz

kVA

kW

kg

6.5
2.8

3.2
5 30

150

151

14720
14721
14726

SDE90

SR-11

SDE120

SR-11

SR19+CV2U

Vol.8.8

211


SDE303A/603A/1203B/2003B
SDE

SDE120

SDE603A

(SDE90/120)

(SDE90/120)

40
Low Down

Ar

CVD

50/60Hz
0.5sec/1sec/2sec
0.5sec

212

Vol.8.8

SDE303A
SDE90
KMB303
5,000

L/min
Pa

NW50

SDE2003B
SDE120
KMB2003
30,000

NW100
NW40
0.5IN-OUT 0.3
4 810 25
Rc3/8
0.1 0.7
0 60
1/4"
AC200 220V50/60Hz
10.5
11.0
3.0
3.1
3.6
5 30
280
320
760 400 945
900 400 945

kVA
kW

kg
mm

NW80

NW160

17.6
4.2
495
1000 500 1165

SDE303A/603A

14722
14723
14724
14725
14726

SDE303A

SDE603A

SDE1203

SDE2003

SR19+CV2U

Vol.8.8

213

SDE1203B
SDE120
KMB1203
20,000
0.5

MPa

L/min

MPa
L/min

SDE603A
SDE90
KMB603
10,000


MU100N/300
MU

MU300

MU100N

230mm 450mm0.1m 1660L/min

(RD90) 100%

MU100N
35 %
25 %
46 %

MU100N 0.7kW
( 46 )
2L/min 43

(Ar )

214

50/60Hz
0.4sec

Vol.8.8

MU100N
AC250V
15A
15mA

MU300
AC250V
20A
15mA

L/min

Pa

MU100N

MU300

1,660

5,000

1.5

0.5

NW50

NW25

MPa

L/min

2 310 25
Rc1/4

MPa

0.5IN-OUT 0.2
Rc3/8

0.1 0.7

L/min

0 5

0 10

1/4"

AC200 220V50/60Hz

kVA

4.0

kW

0.7

7.0
0.9

kg

60

100

mm

450 230 275

450 230 550

5 30

MU100N

14727
14728

MU100N-2

Version

MU300-005

Vol.8.8

215

Memorandum

216

Vol.8.8

MEASUREMENT INSTRUMENTS &

CONTROLLERS

Vol.8.8

217

 PC

M-101QA-TDFM-101/201QA-TDM

M-101QA-TDFM-101/201QA-TDM
PC

4. QUADVISION 2
/

1.

Windows

CSV

2.

5.

3.

218

Vol.8.8

M-101QA-TDF

M-101QA-TDM

M-201QA-TDM

&

U+Vcost
UVcost



Vol.8.8

219

M-101QA-TDF

M-101QA-TDM

M-201QA-TDM

1 100amu

1 100amu

1 200amu

M/ M 2M

N2 FC
SEM

7.0 10

A/Pa

5.0 10

10

Pa

2.5 10 6A/Pa

1.8 10 6A/Pa

2.5A/Pa

1.8A/Pa

1.0 10

FC

EM

2
2

80

250

70ICF

1.0 10 12Pa

Pa

.3 10 2Pa

12

AC100V 0.9A

1.4kg

2.2kg

RS-232C/485

1.6kg

QUADVISION2
PVD
PVD

12

M-101QA-TDF

220

M-101QA-TDMM-201QA-TDM

Vol.8.8

M-201QA-TDM
W

200amuM W-FILAC

M-201QA-TDMY

200amuM Y-FILAC

M-101QA-TDMW

100amuM W-FILAC

M-101QA-TDMY

100amuM Y-FILAC

M-101QA-TDFW

100amuF W-FILAC

M-101QA-TDFY

100amuF Y-FILAC

M-201QA-TDM
Re

200amuM Re-FILAC

M-101QA-TDMRe

100amuM Re-FILAC

RS-232C
1.5m
RS-232C 3m
RS-232C 5m
RS-232C
10m
RS-485 5m RS-485 5m Y
RS-485 10mRS-485 10m Y
RS-485 15mRS-485 15m Y
RS-485 20mRS-485 20m Y
RS-485
RS-485
COM-1PDUSBH

USB-RS485

AC 5m

M-101/201QA

AC 10m

M-101/201QA

AC 15m

M-101/201QA

AC 20m

M-101/201QA

M-066QG

M-066QG

20090
20091
20092
20093
20094
20095
20190
20191
20290
20291
20292
20293
20296
20297
20298
20299
20390
20391
20392
20395
20396
20397
20398
20417
20418
20490
20491
20492
30111

M-QA NIST M-100/200/400QA

TD-W-FIL

M-101/201

TD-Y-FIL

M-101/201

TD-Re-FIL

Re
M-101/201

V-040LV-MMI

DN40 L MSB

M-101/201

QUADVISION QUADVISION2CD

Vol.8.8

221


M-400QA-MU/G
M-401QA-MU/G

410a.m.u.

M-401QA-MU/G

10

M-401QA-MU/G

M/e 1 400 1

UHV

M-400QA-MU

M-400QA-MG

M-401QA-MU

M-401QA-MG

&

222

Vol.8.8

M-400QA-MU

M-400QA-MG

M-401QA-MG

1 410amu

M/ M 2M@50 PH
410 6A/Pa

N2 FC
SEM

4A/Pa

1 10

410 7A/Pa

410 6A/Pa

4 10 1A/Pa

4A/Pa

12

Pa
.3 10

Pa

Pa

EM

UHV

UHV

3 Re-W 2

3 Re-W 1

3 Re-W 2

3 Re-W 1

100

300

114ICF

12

FC
1

410 7A/Pa
4 10 1A/Pa

5 10

M-401QA-MU

AC100V 3.0A

5.1kg

5.7kg

6.2kg

RS-232C/485

RS-485/USB

QUADVISION

QUADVISION2 401

RoHS

GC-MS

1 UHV

2 3

A
209

ELV

M-400QA-MU/G

286

M-401QA-MU/G

291

AN

18

35

50cm

20010

M-400QA-MG

( )

410amuSEMtypeRe-W-FIL

20011

M-400QA-MU

(UHV )

410amuSEMtypeRe-W-FIL

20017

M-401QA-MG

( )

410amuSEMtypeRe-W-FIL

20018

M-401QA-MU

(UHV )

410amuSEMtypeRe-W-FIL

20296

RS485 Y 5M

20297

RS485 10M

20298

RS485 15M

20299

RS485 20M

Vol.8.8

223

QUADVISION 2

MPM

224

Vol.8.8

SIM)

PPM)

16CH

10

CO N2

LT)

QUADVISION

M-101QA-TDF
RS-232C 485
M-101 201QA-TDM
SIM
16
MPM
LT

PPM
10 H2,He,CH4,NH3,H2O,CO,N2,O2,Ar,CO2,

CSV

0 10V

RS-232C QUADVISION2 2

RS-232C QUADVISION2 3
NIST
NIST
OS
Windows 2000 Xp

128MB HDD5.0GB

RS-232C 485

1M-101/201QA-TDM/F
2
3

Vol.8.8

225

 D
M-101/201/400GA-D

M- -

3.

1.

M-101/QA-TDFM-101/201 QA-TDM
M-400QA-M 4

4. Windows

2.

QUADVISION

226

Vol.8.8

- -

- -

- -

- -

- -

- -

- -

- -

a.m.u.

100ppm
5 10

10

10ppm

12

12

1.5 10 12

3 Re-W

FC

FC
CEM

FC
CEM

1141CF

- - -/ -
- -

N2 1/8
1.5
5

FC
CEM

-M

1.5 10

a.m.u.

10ppm

1.0 10

a.m.u.
10ppm

-
-

Vol.8.8

227

M-101GA-DF
M-101GA-DM
M-201GA-DM
M-400GA-DM

OPTION
None
0

OPTION
VLV
SS-1M
1
2

3VLV
3

OPTION

None

M-431HG

M-832HG
GPIB

None
0

OPTION

None
0

OPTION

1
2

PC

228

Vol.8.8

MG-2F

ATP80
START/STOP SW
ATC-200T

746

991

M-430HG

530

100

M-201GA-DM

M-101QA-TDF
M-101/201QA-TDM
M-400QA-M

SS-1M

G1

VLV

TMP
3VLV

RP

Vol.8.8

229

8Pa
1ch3ch

Pa 108

133kPa

13.3kPa

M-340DG
M-341DG

1.33kPa
133Pa
33Pa

M-350PG
M-351PG

M-360CP

M-336MX

M-341DG

230

Vol.8.8

RoHS

10

10

102

102

104

Vol.8.8

231


M-340DG

MEMS

Pa

M-340DG-QA

M-340DG-01

M-340DG-11

M-340DG-12

M-340DG-13

33

133

1.33k

13.3k

133k

of reading

1.0at 25

of F.S./

0.06

of reading/

Pa

VDC

0.5
at 25
0.04

0.02
0.06

200kPa NW16NW2515
+13.5 26.4
0.8 30

VDC

0 10

ms

20

15 35

20 70

200.13mm2

D-sub9
SUS304SUS316Al2O3 Si
NW16210
NW25220
70540
8VCR 250
15 220

CE IP40

NW16

70I CF

8VCR

15

NW25

232

Vol.8.8

M-340DG-QA/N16

(33.3Pa)

NW16

M-340DG-QA/N25

(33.3Pa)

NW25

M-340DG-QA/C70

(33.3Pa)

70ICF

M-340DG-QA/VCR

(33.3Pa)

8VCR

M-340DG-QA/P15

(33.3Pa)

15

M-340DG-01/N16

(133Pa)

NW16

M-340DG-01/N25

(133Pa)

NW25

M-340DG-01/C70

(133Pa)

70ICF

M-340DG-01/VCR

(133Pa)

8VCR

M-340DG-01/P15

(133Pa)

15

M-340DG-11/N16

1.33kPa

NW16

M-340DG-11/N25

1.33kPa

NW25

M-340DG-11/C70

1.33kPa

70ICF

M-340DG-11/VCR

1.33kPa

8VCR

M-340DG-11/P15

1.33kPa

15

M-340DG-12/N16

13.3kPa

NW16

M-340DG-12/N25

13.3kPa

NW25

M-340DG-12/C70

13.3kPa

70ICF

M-340DG-12/VCR

13.3kPa

8VCR

M-340DG-12/P15

13.3kPa

15

M-340DG-13/N16

133 Pa

NW16

M-340DG-13/N25

133 Pa

NW25

M-340DG-13/C70

133 Pa

70ICF

M-340DG-13/VCR

133 Pa

8VCR

M-340DG-13/P15

133 Pa

15

Vol.8.8

22600
22601
22602
22603
22604
22605
22606
22607
22608
22609
22610
22611
22612
22613
22614
22615
22616
22617
22618
22619
22620
22621
22622
22623
22624

233


M-341DG

RoHS

RoHS
ZERO LED

Pa

of reading

of F.S./

of reading/

Pa

M-341DG-01

M-341DG-11

M-341DG-12

M-341DG-13

133

1.33k

13.3k

133k

0.25
at 25
0.015

0.005
0.01

200kPa NW16NW2515

VDC

0.5

VDC

0 10

+13.5 26.4

ms

40

5 50

20 70

200.13mm2

D-sub9
SUS304SUS316Al2O3 Si
NW16210
NW25220
70540
8VCR 250
15 220

CE RoHSIP40

NW16

70I CF

8VCR

15

NW25

234

Vol.8.8

22645
22646
22647
22648
22649
22650
22651
22652
22653
22654
22655
22656
22657
22658
22659
22660
22661
22662
22663
22664

M-341DG-01/N16

(33.3Pa)

M-341DG-01/N25

(33.3Pa)

NW16
NW25

M-341DG-01/C70

(33.3Pa)

70ICF

M-341DG-01/VCR

(33.3Pa)

8VCR

M-341DG-01/P15

(33.3Pa)

15

M-341DG-11/N16

(133Pa)

NW16

M-341DG-11/N25

(133Pa)

NW25

M-341DG-11/C70

(133Pa)

70ICF

M-341DG-11/VCR

(133Pa)

8VCR

M-341DG-11/P15

(133Pa)

15

M-341DG-12/N16

(1.33Pa)

NW16

M-341DG-12/N25

(1.33Pa)

NW25

M-341DG-12/C70

(1.33Pa)

70ICF

M-341DG-12/VCR

(1.33Pa)

8VCR

M-341DG-12/P15

(1.33Pa)

15

M-341DG-13/N16

(133KPa)

NW16

M-341DG-13/N25

(133KPa)

NW25

M-341DG-13/C70

(133KPa)

70ICF

M-341DG-13/VCR

(133KPa)

8VCR

M-341DG-13/P15

(133KPa)

15

Vol.8.8

235


M-392

DIN
1ch

DIN
RS232C
/
5 /4

M-392

108
90

1
M 340DG

LED

43

5 (4 )

15VDC(D-sub15 )

-0.5 10.5V

162

kPa
Pa

48

2
1

AC100 230V50/60Hz

SP1

SP2
M-392

PROG

DC24V0.5A

ZERO

ZERO

96

40VA MAX

10 40

0 50

DIN

0.5kg

RS232C

AC

3m

CE

22635
22636
22637
22638
22639

236

M-392

392-05CA

M-392 5m

392-10CA
392-15CA
392-20CA

M-392 10m
M-392 15m
M-392 20m

AC

Vol.8.8

61


M-350PG

RoHS

-2

Pa

M-350PG-RS
M-350PG-SD M-350PG-SP

RS485

5 10-2 1 105(Pa)
50 5 10-2 1 10-1
Pa
15 1 10-1 1 104
50 1 104 1 105

2 1 10-1 1 104Pa

DC+14 30V

1W

0 10V

13K D-sub5-9

2 1A30V,DC

RS485

Dsub9

200m0.34mm2) 1

5 60

-20 70
150O

300

1MPa
NPT

MP-1
NW16NW25 34ICF1/8NPT15

18

CE RoHSIP40
1 M-601/603GC 100

22500
22501
22502
22503
22504
22505
22506
22507
22508
22509
22510
22511
22512
22513
22514
22515
22516
22517
22527
22528
22529
22530
22531
22532

M-350PG-SD/N16
M-350PG-SD/N25
M-350PG-SD/P15
M-350PG-SD/P18
M-350PG- /C34
M-350PG-SD/NPT
M-350PG-S /N16
M-350PG-S /N25
M-350PG-S /P15
M-350PG-S /P18
M-350PG- /C34
M-350PG-S /NPT
M-350PG- /N16
M-350PG- /N25
M-350PG- /P15
M-350PG- /P18
M-350PG- /C34
M-350PG- /NPT
MP1/N16
MP1/N25
MP1/C34
MP1/
MP1/P15
MP1/P18

RS485
RS485
RS485
RS485
RS485
RS485
PIRANI GAUGE HEAD
PIRANI GAUGE HEAD
PIRANI GAUGE HEAD
PIRANI GAUGE HEAD
PIRANI GAUGE HEAD
PIRANI GAUGE HEAD

NW16
NW25
15
18
34ICF
1/8"NPT
NW16
NW25
15
18
34ICF
1/8"NPT
NW16
NW25
15
18
34ICF
1/8"NPT
NW16
NW25
34ICF
1 8NPT
15
18

Vol.8.8

237


M-351PG

Ni RIECVD

RoHS

CVD LD-CVD

Ni

-2Pa

M-351PG-SP

5 10-2 1 105Pa
50 5 10-2 1 10-1
15 1 10-1 1 104
Pa
50 1 104 1 105

2 1 10-1 1 104Pa

DC+14 30V

2W

010V

13K D-sub5-9

2 1A30V,DC

D-sub

200 (0.34mm2) 1

560

-2070
150O

300

1MPa
NPT

MP-2

NW16
NW25
1/8NPT

Al2O3

CE RoHSIP40

1 M-601/603GC100

238

22665

M-351PG-SP/N16

Ni

NW16

22666

M-351PG-SP/N25

Ni

NW25

22668

MP2/N16

PIRANII GAUGE HEADNi-FIL

NW16

22669

MP2/N25

PIRANII GAUGE HEADNi-FIL

NW25

Vol.8.8


M-360CP

RoHS

-7Pa

M-360CP-SP

M-360CP-RS
RS485

5 10-7 1 105(Pa)

DC+15 30V

3W

0 10V

2 DC30V,1A

RS485

Dsub9

300m1mm2) 1

IP40

5 55

-20 70

P-1

W MoSUS304
mm

116 70 70(NW25)
NW25NW4070ICF
CE RoHSIP40

1 M-601/603GC 100

22533

M-360CP-SP/N25

NW25

22534

M-360CP-SP/N40

NW40

22535

M-360CP-SP/C70

70ICF

22536

M-360CP-RS/N25

RS485

NW25

22537

M-360CP-RS/N40

RS485

NW40

22538

M-360CP-RS/C70

RS485

70ICF

Vol.8.8

239


M-336MX

RoHS

B-A

B-A

M-336MX-SP

DC+20 28V

12W

0 10V

4 10-8 1 105(Pa)

M-336MX-RS
RS485

RS485

Dsub9

300m1mm2) 1

IP40
2

5 50

-20 70

MX-1
Y2O3/IrSUS304

mm

-
C10-7Pa
10-6Pa
2

149 70 50(NW25)
NW16NW25NW4070ICF
CE RoHSIP40

1 M-601/603GC 100

21242
21243
21244
21245
22545
22546
22547
22548
22549
22550
22551
22552

240

MX-1/N16

CRYSTAL ION GAUGE HEAD

NW16

MX-1/N25

CRYSTAL ION GAUGE HEAD

NW25

MX-1/N40

CRYSTAL ION GAUGE HEAD

NW40

MX-1/C70

CRYSTAL ION GAUGE HEAD

70ICF

M-336MX-SP/N16

NW16

M-336MX-SP/N25

NW25

M-336MX-SP/N40

NW40

M-336MX-SP/C70

70ICF

M-336MX-RS/N16

RS485

NW16

M-336MX-RS/N25

RS485

NW25

M-336MX-RS/N40

RS485

NW40

M-336MX-RS/C70

RS485

70ICF

Vol.8.8

1ch 3ch
M-601GC/603GC

RoHS

LCD

1ch3ch

232

1ch

3ch

3ch

18H

M-601GC
1Ch

M-603GC
3Ch

50VA

100VA

5 50

5 40

-20 60

AC90 250V50/60Hz

1Ch

3Ch

CC
2

2 /Ch
IP30

1/

1/

M-603G C
The power cor d pr ot ect i ve gr oundi ng conduct or
must be connect ed t o gr ound.
No user ser vi ceabl e par t s i nsi de.
R ef er ser vi ci ng t o qual i ed per sonnel .

RS232C

WARNING

PROG

CH

mm

84 106.3 212

128.5 106.3 212

LCD

TFT LCD

9 0 -2 5 0 V A C
5 0 -6 0 Hz
1 0 0 VA

F1

F2

F3

F4

CE RoHSIP30

22563

M-601

1ch AC

AC

22564

M-603

3ch AC

AC

22567

601-005

M-601/603GC 5m

22568

601-010

M-601/603GC 10m

22569

601-015

M-601/603GC 15m

22570

D-sub9P

22571

M601/M603GC AC

3m

22572

10E

22573

M601/M603GC I/O D-sub15P

Vol.8.8

241

Pa

242

M-320XG

M-310HG

B-A MG-2

M-431HG
M-420HG

B-A
MG-2

M-833HG

B-A
MG-2
TG-550C

M-723HG

B-AUGD-1S
TG-550C

M-823HG

B-ABRG-1B
TG-550C

M-923HG

NIG-2FNIG-2TF
TG-550C

M-012DM

TG-550C

Vol.8.8

108

10

104

102

10 2

104

Vol.8.8

243

M-320XG

110 1Pa

1.
110 1Pa

78

78

5 6

MANT

EXP
789

SP2

5 6

SP1

ATM

44.5

789

78

MANT

EXP
CD
AB E

5 6

CD
AB E

0 1
23

23

D/A

F01

0 1

ZERO

F01

4
23 5 6

0 1

23

4
23 5 6

POWER
/ALM
REMOTE I/O

CRYSTAL GAUGEM-320XG

3.

102

200g

72.5

4. 2W

2.

10 2Pa

244

Vol.8.8

A
NW16, NW25 23
34 ICF
36
70 ICF, VG70 30

Gas

I/O

mm

M-320XG
XG-1
10 2Pa
1 10 Pa
N2ArH2Air
DC 0-10V
Log

11011102110311041105Pa
INPUT 2bit

ATM
OUTPUT 2
2
SP1SP2
5 50
150 MAX
PUSH I/O

Dsub 15P
LED 3 PWR ALM 2 SP1-Status SP2-Status
DC 22V 33V
2W
72.5H 102W 44.5D
200g
NW16NW25 34ICF70ICF

21561
21562
21580
21581
21582
21575
21576
21577
21578
21579

M-320XG/N16

A-NET

NW16

M-320XG/N25

A-NET

NW25

M-320XG/C34

A-NET

PY34ICF

M-320XG/C70

A-NET

PY70ICF

M-320XG/VG70

A-NET

PY70 VG

XG-1/NW16

NW16

XG-1/NW25

NW25

XG-1/ICF34

PY34ICF

XG-1/ICF70

PY70ICF

XG-1/VG70

PY70 VG

Vol.8.8

245

A-NET
M-310HG

1/20 1/10

A-NET

100

65

100

14

2
M-431HG

1/3

A
NW16, NW25
34 ICF
70 ICF

3
M-431HG
1/4 10W

29.5
32.7
28

4 1

1
5

34

70

34ICF

65.5

70.2

70ICF

MG-2C34

MG-2C70

30

40

NW16

MG-2N16

246

Vol.8.8

67

67

110 7Pa 10Pa

NW25

MG-2N25

M-310HG

MG-2

1 10 6 10Pa 100A
1 10 7 1Pa 1mA

100 A1mA

GRID

LOG 0 10

I/O

INPUT ON/OFF ON/OFF

OUTPUT 2

50%

Dsub 15P

LED

POWERFILSP1SP2

0 4070%

20 70

mm

100H 100W 65D

DC22 33V 12W

550g

MG-2 /NW16NW25

MG-2/CF34CF70

SUS304

13 Pa

10 6Pa

10 7Pa
0.045 Pa 1

MG-2150 MG-2F

21550
21163
21164
21165
21166

M-310HG
MG-2I/NW16
MG-2I/NW25
MG-2I/ICF34
MG-2I/ICF70

A-NET
B-A NW16
B-A NW25
B-A 34ICF
B-A 70ICF

Vol.8.8

247

A-NET
M-390M-391

M-390 M-391 A-NET M-310HGM-320XG
M-330MXIKR-251/261PKR-251/261

1 1

M-390

M-391

M-330MX
M-310HG

M-320XG
IKR-251/261
PKR-251/261

1/8JIS

DIN

2 1

2 1

DC24V

AC250V

0.5A

1A

M-390

51.5

OUT

AC85 132V

DC21.6 26.4V

70W MAX

160mA MAX

99H 51.5W 253D

48H48W100D

1300g

340g

AC

2m

5m

M-391
48

9.2

48

mm

253

44.8

DC24V

44.8
61.6

2 1

A-NET

77

99

(1)
100

8.2

21563
21583
21567
21564
21568
21569
21570
21571
21565
21572
21573
21574
21566
21587
21588
21589

248

M-390

A-NET

M-391

A-NET

A-NET
A-NET

390-03BA

A-NET

3M

390-05BA

A-NET

5M

390-10BA

A-NET

10M

390-15BA

A-NET

15M

390-20BA

A-NET

20M

390-03CR

A-NET

3M

390-05CR

A-NET

5M

390-10CR

A-NET

10M

390-15CR

A-NET

15M

390-20CR

A-NET

20M

390-05CC

A-NET

CC5M

390-010CC

A-NET

CC10M

390-015CC

A-NET

CC15M

390-020CC

A-NET

CC20M

Vol.8.8

M-431HGM-420HG

RoHS

M-431 HG
M-420 HG M-430 HG

M420 HG
1/8 JIS

M-431 HG

1CE

UL
2RS-232C
3M-431 HG
4 /DC 24 V 1 AmaxM-420 HG
5 0.7 kgM-420 HG

M-420 HG

M-431HG
-7

0.1 10-7 1.3 10-1 Pa

0.01 10 13.2 10 Pa

M-420HG
0

/
/

/
/

9600480024001200bps

(mm)

104W X 99H X 296D 1.2Kg

51.5W X 99H X 296.2D 700g

50VA AC90 240V 50/60Hz

30VA DC+23 25V

10 A100 A1mA

RoHS

/
0

13.3 10 Pa

1.3 10+1 Pa OFF

M-431HG AC 100 200V

Vol.8.8

249

60
5m10m15m20m
250

5m10m15m20m

250

21672

430-901

21673
21674

B-A 5M

MG-2/2F

430-902

B-A 10M

MG-2/2F

430-903

B-A 15M

MG-2/2F

21675

430-904

B-A 20M

MG-2/2F

21676

430-911

MG-2 5M

250

21677

430-912

MG-2 10M

250

21678

430-913

MG-2 15M

250

21679

430-914

MG-2 20M

250

21685

M-431HG

MG-2

21687

M-420HG

MG-2

Vol.8.8

RoHSCE

M-833HG

RoHS

M-833HG
B-A

B-A
TC

2
3
4 2
5

GP-IB
6RoHSCE

M-833HG
MG-2
0.1 10 7 9.9 100 Pa

D/A

2
0 10V
0 11V LOG
APC 0.1 2.5V
0.1 1.6V
INPUT

ON/OFF
ON/OFF
6
OUTPUT 6
APC

H99 W209 D3301.9kg

100 240VAC
100VA 50 60Hz
10 A100 A1mA

I/O

50%

RoHSCE

Vol.8.8

251


200

4-5

78
87

99

330
3.2

105
209

60
5m10m15m20m

250
5m10m15m20m

M-723HGM-823HGM-923HG

TC

B-A

TG-550C TG550B

BCD

BCD

CM

RS232C

600120024004800960019200bps

2 B-A

21734
21482
21483
21481
21480
21485
21776
21775
21672
21673
21674
21675
21676
21677
21678
21679

252

M-833HG

722-TC

TC

M-723HG823HG833HG923HG TG550C, 5M

722-BCD

BCD

M-723HG823HG833HG923HG

722-CM

CM

M-723HG823HG833HG923HG

722-SPB

M-723HG823HG833HG923HG

722-232C

RS-232C

M-723HG823HG833HG923HG

831-331

M-832HG

MG-2

831-323

MG-2

M-832HG 5 2M

430-901

B-A 5M

MG-2/2F

430-902

B-A
10M MG-2/2F

430-903

B-A
15M MG-2/2F

430-904

B-A
20M MG-2/2F

430-911

MG-2 5M

430-912

MG-2 10M

250
250

430-913

MG-2 15M

250

430-914

MG-2 20M

250

Vol.8.8


M-723HGM-823HGM-923HG

B-A

B-A

APC

9AC100V AC115/200/230V

M-823HG B-A

10.

2
3
4 2
5D/A
LOG 4
6APC

APC D/A

Vol.8.8

253

7M-823HG TCCM

Pa

M-723HG

M-823HG

UGD-1S B-A

BRG-1B B-A

10

10

10

10

10

M-923HG

10

10

10

10

10

10

10

NIG-2F/NIG-2TF

10

10

10 310 410 5

10 710 8 10 9

M823HG

OFF

D/A D/A D/A D/A

INPUT

ON/OFF ON/OFF 1
2 1/2

I/O

OUTPUT ON/OFF ON/OFF / 2

1/2
ON/OFF 1/2

mm

H99 W209 D330

AC100V 10 2A50/60HzAC115/200/230V

5.4kg

200

4-5

78
99
6
330
3.2

105
209

254

Vol.8.8

CM

TC

BCD

RS-232C

CM

TC

BCD

RS-232C

M-723HG823HG833HG923HG

AC100V 1A, DC30V 1A

CM

TC

B-A
TG550C

BCD

BCD

RS-232C

600120024004800960019200bps

2 B-A

5m10m15m20m

Vol.8.8

255

21701
21721
21741
21745
21764
21482
21481
21483
21480
21485
21484
21645
21646
21647
21648
21750
21751
21752
21753
21754
21755
21756
21757
21765

256

M-723HG

M-823HG

JIS
JIS

M-923HG

JIS

921-303

M-923HG 5M 2M

721-303

M-723HG

M-723HG/M-823HG 5M 2M

722-TC

TC

M-723HG823HG833HG923HG TG550C 5M

722-CM

CM

M-723HG823HG833HG923HG

722-BCD

BCD

M-723HG823HG833HG923HG

722-SPB

M-723HG823HG833HG923HG

722-232C

RS-232C

M-723HG823HG833HG923HG
M-723HG823HG833HG923HG

722-GPIB

GPIB

820-901

B-A

M-723HG823HG 5M

820-902

B-A

M-723HG823HG 10M

820-903

B-A

M-723HG823HG 15M

820-904

B-A

M-723HG823HG 20M

921-901

M-923HG 5M

921-902

M-923HG 10M

921-903

M-923HG 15M

921-904

M-923HG 20M

921-911

M-923HG 5M

921-912

M-923HG

921-911 5M

921-913

M-923HG

921-911 10M

921-914

M-923HG

921-911 15M

921-801

M-723HG823HG833HG923HG

Vol.8.8

CC-Link

M-723HG-CCM-823HG-CCM-833HG-CCM-923HG-CC

M-723-HG M-823HG M-833HG
M-923HG
CC-Link
CC-Link CC-Link
FA CCLink

CC-Link

PLC

CC-Link

IO

MFC

1
TC

CM

BCD

RS-232C

GP-IB

CC-Link

21702

M-723HG-CC

CC-Link

UGD-1S

21722

M-823HG-CC

CC-Link

BRG-1B

21735

M-833HG-CC

CC-Link

MG-2

21742

M-923HG-CC

CC-Link

NIG-2F

Vol.8.8

257

M-012DM

2

M-012DM

LED 2

1. LED

M-012DM

LED

TG-550C

5 10 1 200 Pa

2.

LED

5 10 Pa 200Pa

DC0 10mV

3.

2 NONC
DC30V2AAC250V2A

AC90 200V 50/60Hz 5W

0.25kg
M-012DM 1

1.8m1
TG-550C

5m1

5m
80

12.2

81

19
2

10m15m

65

80

Pa

TG-550C

M-012DM

16

21538

M-012DM

21537
21526

TG550C

TG550C 5

M-012DM

TG550C

012DM-05

M-012DM 5m

21527

012DM-10

M-012DM 10m

21528

012DM-15

M-012DM 15m

258

Vol.8.8


MG-2/MG-2M/MG-2F

MG-2/WF

B-A MG-2/MG-2M/MG-2F

MG-2F 70ICF

1/20
1Pa
1
MG-2 MG-2M O-

MG-215mm
MG-2M18mm

34

34ICF

70ICF

MG-2F

30

70
30

MG-2F

26

26

MG-2

MG-2M

70ICF

NW16

NW25

67

MG-2M

MG-2

26

40

67

38.5

69.5

63.5

65.5

18

70.2

MG-2M

15
24

MG-2MG-2/WF

70

MG-2I/NW16,25

MG-2F

MG-2/WF

SUS304

1.3 10 1 3Pa

13Pa

10

Pa

10

0.045Pa

1.0 10 5 4Pa

Pa

12cc

2.3W
1.0W

MG-2I/34ICF,70ICF

2.5W
1.0W

15

18

NW25NW16

34ICF70ICF

70ICF

15

1
210 7Pa MG-2F
3 13Pa
4MG-2W/F MG-2 1

21160

MG-2

B-A

15

21161

MG-2F

B-A

70ICF

21162

MG-2M

B-A

18

21163

MG-2I/NW16

B-A

NW16

21164

MG-2I/NW25

B-A

NW25

21165

MG-2I/ICF34

B-A

34ICF

21166

MG-2I/ICF70

B-A

70ICF

21170

MG-2WF

B-A

15

Vol.8.8

259

LG-11S
100Pa 102Pa
20

LG-11S

75

110

15

37

1.5

15

70ICF

B-A UGD-1S
10 2Pa B-A

120

60

UGD-1S B-A

100

15

B-A BRG-1B
B-A

19

129

21.6

64

60

B-A UGD-1S

15

15 70ICF

1623097

LG-11S

UGD-1S

BRG-1B

B-A

B-A

15 O
10 2 100 Pa

10 6 0.1 Pa

10 6 10 Pa

0.0038Pa 1

0.075Pa 1N2

10 4Pa

1.3 10 8Pa

400O 150
1

NI-10D

M-722HGNI-10D

100Pa 10 Pa

M-823HG
10Pa
B-A

2008 6

UGD-1SBRG-1BLG-11S70ICF

260

Vol.8.8

21225

BRG-1B

BRG-1B B-A

15

21133

952-7860

BRG-1 B-A

70ICF

21132

952-7861

BRG-1 B-A

70ICF

21121

UGD-1S

B-A

21130

952-7850

UGD-1S

70ICF

21131

952-7851

UGD-1S

70ICF

21100

LG-11S

NIG-2F/NIG-2TF
B-A

2-18UNS

70

NIG-2F
692

NIG-2TF

40

752

NIG-2F
954-7902

NIG-2TF
954-7903

B-A

70ICF
10 9 10 2 Pa

0.19Pa 1N2

2.7 10 9Pa

400

2
M-923HGNI-10D

10 9Pa

2008 6

21120

954-7902

NIG-2F

21119

NIG-2TF

NIG-2TF

21142
21140

954-7905

NIG-2TF

NIG-2F

Vol.8.8

261

PG-150
SUS-304
15

80

200

106

20

15

48

14.2

TG-550C

52
29.5

15

SUS-304
15
150

TG-550C

15 O

15
O

10 1 133 Pa

10 1 200 Pa

SUS-304

SUS-304

MPG-011
MPG-012

M-012DM
M-722HG/822HG/833HG/922HG

PG-150

21040

PG-150

15

21041

PG-150/ICF70

70ICF

70ICF

21042

PG-150/ICF34

34ICF

34ICF

21015

TG-550C

15

21009

TG-550B

15

SUS-304

30

30

41.3

15
952-7806

70 ICF

16

NW16

954-7832

30

52

NW25

954-7833

40

52

NW40

954-7834

55

52

ICF

48.3

32150

952-7806

15

70ICF 15

32650

954-7832

NW16

15

32651

954-7833

NW25

15

32652

954-7834

NW40

15

262

Vol.8.8

Memorandum

Vol.8.8

263


HELEN

Model:

M-212LD (-D)

Model:

M-222LD(-D)

212

Model:

M-232LD

264

Vol.8.8

Model:

M-310LD-D

Model:

A-240M-LD

Model:

A-250M-LD

Vol.8.8

265

Portable

HELEN
HELEN M-212LD(-D)/M-222LD(-D)/M-232LD

HELEN

M-212LD(-D) Compact!

M-212LD

M-212LD-D
M-222LD High Power!

M-222LD

M-222LD-H

M-222LD-D

M-222LD-D High Power! and DRY!

M-232LD

M-232LD Snier!

266

Vol.8.8

24

2
180

MCP2

-12

10 Pam /s

3.8

320 240

Vol.8.8

267

(Pam3/sec)
1.01011

12

5.010

12

4.010

12

3.010

2.01012

1.01012

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 (min)

M-212/222LD

/
(Pam3/sec)

Standard Leak
510-9Pam3/s

Standard Leak Valve

**CLOSE**

1.010-7

1.010-8

(510-9Pam3/sec)
1.010-9

Standard Leak Valve

**OPEN**

1.010-10

1.010-11

1.010-12

10 15

20 25 30

35

40

45 50

55

60

65

70 (sec)

M-212/222LD

RP RGA

M-222LD

268

10
9
Measured pressure : 5.8E-5 Pa
AQA-100 mass
8
Emission current : 5mA
7
6
5
4
3
2
1
0
0 10 20 30 40 50 60 70 80 90 100
M/e

1.0E-11 A/DIV

1.0E-12 A/DIV

10
9
Measured pressure : 6.7E-5 Pa
AQA-100 mass
8
Emission current : 5mA
7
6
5
4
3
2
1
0
0 10 20 30 40 50 60 70 80 90 100
M/e

M-212LD-D/M-222LD-D

Vol.8.8

Pam /s

M-212LD

M-212LD-D

M-222LDH

M-222LD-DH

10 12 10 2
H10 13

10 11 10 2
H10 12

10 8 10 1
10 2 105ppm

10

12

10

0.5Gross Mode

10

12

10

0.2Gross Mode

1.8Gross Mode 2.0Gross Mode

M-232LD

0.5Pam3/s

He 2.0Middle Mode 0.3Middle1 Mode 2.0Middle Mode 2.0Middle Mode

1.3Middle2 Mode
5.0-H:Fine Mode
5.0-H:Fine Mode
3.0Fine Mode

L/s

NW25ISO

NW25

NW25ISO

RP 30L/min

20L/min

RP 142L/min 1

250L/min

RP30L/min
DRP

RS-232C
Analog I/O

RS-232C

AC 100V 10A

W
W H Dmm

NW25ISO

TMP 50L/s

kg

AC 100A-115V, 6.3A

435 487 363

42

39

AC 100V 15A

AC 100V 10A

AC 100V 8A

462 867 715

435 487 363

75

42

1 275L/Min RP

11

363

435

Helium Leak Detector

M-232LD

470

M-232LD

Vol.8.8

269

Console

HELEN
HELEN A-240/250M-LD

A-240M-LD

A-240M-LD
A-250M-LD
A-250M-LD

1
2 MCP

4 I/O

RS-232C

10 12Pa.m3/s
, 1

2 6

110 9Pa.m3/s 6

3
2
7

270

Vol.8.8

GOOD
NO GOOD

GOOD/NO GOOD

Vol.8.8

271

A-240M-LD

A-250M-LD

SAW

HELEN A-250M-LD

1.0E-08

HELEN A-250M-LD

1E-06

A
B
C

CLOSE

1E-07

Pa m3/ s

Pa m3/ s

1.0E-09

1.0E-10

1E-08

1E-09

1E-10

1.0E-11

1E-11

1.0E-12

-1

OPEN

10

11

(sec)

272

1E-12

-2

-1

Vol.8.8

10

11

(sec)

A-240M-LD

A-250M-LD

Pam3/sec

2 10 11

Pam3/sec

10 11 10 5

180

MCP

6sec 10 9Pam3/sec
/ 0 9999sec

TMP50 L/s

350 L/min2021I

TMP

170 L/min2010I
1 70cm3 260cm3

NW25 NW40

/CAL /

0 10V1dec/1V

RS232C/

/ /

12 40C

AC200V 15A

mm

700 700 900

kg

165

20
11

80

700

760

A-250LD
70 cm3

38
48.5

1002
935.3

900

83.1

500

A-240/250M-LD

A-250LD
260 cm3

Vol.8.8

273

5 10-9 2 10-3Pam3s

PC

26610
26611
26620
26621
26622
26623
26630
26541
26551
26801
26802
26810
26811
26830
26850
26851
26681
26682
26884
26680

274

M-212LD
M-212LD-D
M-222LD
M-222LD-D
M-222LD-H
M-222LD-M1
M-232LD
A-240M-LD
A-250M-LD
981-9361
981-9370
981-9371
981-9790
981-9351
981-9350

(HELEN212)
(HELEN212D)
(HELEN222)
(DRY HELEN222D)
(HELEN222H)
(HELEN222M1)
(HELEN232)
(HELEN240)
(HELEN250)
ASL25V
ASL25N2
HELEN 212/210
HELEN 222/220
HE
HELEN
HELEN
HELEN212
HELEN222
HELEN230
HELEN2

AC100V ,
AC100V ,
AC100V ,
AC100V ,
AC100V ,
AC100V , M1
AC100V ,
NW25 ( )

NW25, , :5X10-9 2X10-8PAM3/S

NW25, , :5X10-9 2X10-8PAM3/S
:0.1PAM3/S(HELEN/ALD )
:0.3PAM3/S(HELEN/ALD )
: 1(HELEN/ALD )
(HELEN/ALD )

HELEN

Vol.8.8


M-310LD-D

HELEN M-310LD-D

21

1 21kg

10-12Pa m3/sec
3
TMP+

4
HeH2
SD
5

Vol.8.8

275

M-310LD-D

Pam /sec

He

10-12 10-2
1.1L/SHi sense/Normal leak mode
0.2L/SGross leak mode

NW25ISO

30L/S

1.7m3/h

2minwithout auto calibaration

Pa

1500

1m

RS-232CAnalog I/O

AC100 240V50/60Hz

300

W H D mm

350 450 245

21

kg

276

26300

M-310LD-D

26302

SNC1E1T1

CAN,5 SR9 NIPPLE PENCIL

26303

114820

SHELEN310

26304

115191

HELEN310

Vol.8.8

Vol.8.8

277

 5 + 95

H2000

5 + 95

5 95
ISO 10156:1990

0.5ppm

-8

10 Pam /Sec

278

Vol.8.8

H2000PLUS

Pam3/sec

5 10-8 H50
1 10-6 AP55

FRONT PANEL

256 64LCD

REAR PANEL

/ D-Sub 25pin

AC100 240 50/60Hz/1A 2A

mm

kg

275 155 170

4.1

26010
26011
26012
26218
26219
26220
26221
26222

AS90531
AS90536
AS90541
AS90420
AS90421
AS90422
AS90427
AS90428

H2000PLUSHYDROGEN LEAK DETECTOR

H2000-C PLUS HYDROGEN LEAK DETECTOR
H2000-P PLUS HYDROGEN LEAK DETECTOR
REFERENCE LEAKS A5 10-2 L/S
REFERENCE LEAKS A5 10-3 L/S
REFERENCE LEAKS A5 10-4 L/S
REFERENCE LEAKS A76 10-5 L/S
REFERENCE LEAKS A76 10-6 L/S

H50 3m
H50 3m
H50 3m

Vol.8.8

279

Memorandum

280

Vol.8.8

THIN FILM DEPOSITION

CONTROLLER and MONITOR

Vol.8.8

281

6MHzCRYSTAL

M-600CR

1.

5990KHz 5KHz

2.

KH KH

/ 1

22071

282

M-600CR

6MHz

10 1 XTM/2XTC/3IC/5CYGNUS

Vol.8.8

PVD

Vol.8.8

283

Cygnus

EL

Z
EL

2ppm

EL RGB

0.001 /s

Cygnus

D/A
)PID 0 100 50 2.5V

0 10V
Z

10V

RS232C

Z
MODELOCKTM

Z EL

Cygnus

Cygnus

284

Vol.8.8

3.5 1.44 (2HD)

Cygnus /

Windows 2000 Windows XP

RS232C
GPIB

Soak2
Ramp2

Soak1

Ramp1

102

448
DAC
D-sub

I/O

435

DAC

1
IEEE
RS232C

SENSOR
PRINTER

DAC
BNC

R
E
L
A
Y

R
E
L
A
Y

R
E
L
A
Y

I
N
P
U
T

I
N
P
U
T

O
U
T
P
U
T

DC24V

CH 1
CH 2

24V

CH 3
CH 4

CH 5
CH 6
DAC

8/14/0 8/14/0 8/0/14

I/O

133

IEEE488
RS232C

483

Vol.8.8

285

IC/5

Z
Z

Z Z

IC/5

PID

Z
Z MODTM

ELOCK

286

Vol.8.8

 2 /

IC/5

RnWn/ Wn

Rn

1 2

Wn

PLC

PLC

IC/5 100 IF/THEN

IF THEN
IF/THEN

IC/5 1set

I/O
IF/THEN

IC/5 THEN
6 2
6

IC/5

IC/5

D/A
6

Vol.8.8

287

I/O I/O

IC/5 50 1

250

IC-6000,IC/4PLUS

3.5
720K(2DD)1.44M(2HD)

102

I/O

IEEE488

6D/A
24V

435

448

R
E
L
A
T

R
E
L
A
T

R
E
L
A
T

I
N
P
U
T

I
N
P
U
T

O
U
T
P
U
T

CH 1
CH 2

24V

CH 3

CH 4
CH 5
IEEE

2-R3.6

PRINTER

CH 6
DAC

8/14/9 8/14/9 8/3/14

133

88.9
127

RS232

SENSOR

483

133

RS-232

I/O

10.9

288

Vol.8.8

XTC/3

XTC/3
ModeLock

Windows

/2

INFICON Crystal12TMCrystalSixR

/2

XTM/3M 99
999 32
2 2
XTC/3S 9
2 2
TFTLCD

Vol.8.8

289

IC/5

Cygnus

XTC/3M

XTC/3S

6.0 4.5

6.0 4.5

1
6MHz

0.005Hz 0.006 0.005Hz 0.006

Hz

10

6.0 5.0

6.0 5.0

0.028Hz or 0.03

0.028Hzor0.03

10

/s

0.10.0 99.9 /s
1100 999 /s

64

64

250

999

24

32

50

99

0 100 5 0 2.5

0 +10

I/O

14
14 14
14

TTL

8 16

12

12

DC30V,2.5A
DC30V,2.5A

14TTL
14TTL

DC30V,2.5A

DC30V,2.5A

8 16

IEEE488

Ethernet

RS232C

USB

VAC
50/60Hz3Hz
H W D

kg

Windows

290

100 10%
120 10%
220 10%

100 10%
120 10%
220 10%

100 230

100 230

133 447.7 470

133 447.7 470

89 203 305

13.2

13.2

2.7

Cygnus Editor Sortware

XTC/3M or S Editor Software

Vol.8.8


SQC310

SQC-310
SQC-310

SQC310C

USB RS232C
USB RS232C

CD ROM

I/O
2ch 2
8 8 4ch
2 SQC310C
4ch 4ch 16
16

BNC

m
m

Vol.8.8

291


SQM160

(SQM160)
/
()
(ng) (Hz)

2ch( )
8ch

RS232

BNC

m
m

292

Vol.8.8

R&D

SQC310

SQC310C

SQM160

1
6MHz

Hz

6.0 4.0
0.03Hz

0.03Hz

0.12Hz
4Hz

0.03Hz
10Hz

1 10

1 10

0.5 10

/s

0.010.1

1000

1000

50

50

100

100

22

26

13

22

0 10

0 10

2 0 +5V

8 8

16

11

I/O

TTL

8 8

16

DC30V,2A

DC30V,2A

DC30V,2A

RS232C

IEEE488

Ethernet
USB

VAC
50/60Hz3Hz
H W D

kg

Windows

100 240

100 240

100 120 / 200 240

132.8 213.4 254

88.5212.7196.9

1.8

2.7

Vol.8.8

293

983-9071

983-9073

983-9075

983-9090

983-9091

983-9076
L=305mm

983-9079

( ICF70 )

983-9077
L=508mm

( 1)

983-9072

983-9074

983-9078
L=762mm

983-9080

( 70ICF)

70ICF

983-9085L=305mm

( 70ICF)

983-9081

983-9083

983-9088

( 1
)

983-9082

983-9084

983-9086L=508mm ( 1
)

(0ICF
) (70ICF
)

983-9089

983-9087
L=762mm(70ICF
)

max130

max130

max130

max130

max130

max450

max105

27 34 18

28 27 27

34 27 27

89 51

102 84

35 35 25

34.5 18

(35 38 31)

58 95 40

min190max760

min230max760

min300max760

305, 508, 762

min200max760

mL/min

mm

(43 55 50)

(42 53 47)

min160max760

min160max760

( ICF70 )

( ICF70 )

min200max760

min200max760

( ICF70 )
min250max760

( 1)

( 1)

( 1)

I CF

I CF

150 200
30 max

ICF

ICF

I CF

150 200

150 200

150 200

150 200

150 200

150 200

30 max

30 max

30 max

30 max

30 max

30 max

MPa/cm2

MPa/cm2

MPa/cm2

MPa/cm2

MPa/cm2

MPa/cm2

MPa/cm2

R15

R15

R15

R15

R15

------

R15

008-010-G10
008-010-G10
008-010-G10
008-010-G10
008-010-G10
008-010-G10
008-009-G10

750-420-G1

294

Vol.8.8

9.7

51

127

5.1

23.4

25.4

26.9

33.8

19

4.8

127

983-9071

26.4
17.5

88.9

12.7

70 ICF
127
4.8

983-9072

10.2

5.1

5.1

5.1

4- # 4-40

3.3

18.8

50.8

25.4

23.2
L

17.5

70 ICF

983-9074

8.9

4.8

3.3

8.9

127

5.1

17.8

5.1

24.9

27.0

18.8

19

11.7

2-#4-40

127

5.1

13.2

26.4

983-9073

5.1
10.2

Vol.8.8

295


54.5
88.9

983-9075

2-3.5

4.8

10.2

1.9
10.2

16.9

39.2

11.5

127

49.5

56.0
82.1

810.3

983-9081983-9082

983-9083983-9084

54.6

57

41.1

42.5

46.5

49.5

52.8

35.2
61.4

296

Vol.8.8

983-9090
L

17

50.7
25

25.4

B'

A'

127
152.4

50.8

77.2

12.7

96.8

25.4

23.83

88.9

A-A'

B-B'

12

983-9091
L

9.5

74.3
48.9
A

25.4

B'
A'
127
50.8

A-A'

12.7

93.78

25.4

31.75

101.6

152.4

B-B'

Vol.8.8

297

BNC.

45

87

70 ICF

6.4

127

25

25

34

35

70

35

20.5
L

139.5

50.8

127

4.8

983-9079

34.5

5.1

25.4

70 ICF

5.1

5.1

17.5

127

4.8

983-9080

983-9088983-9089

35

30.7

95

23

35

39.1

37.1

20

298

Vol.8.8

19


2 IC/5

RS-232CGP-IB.

CRYSTAL6
IC/5

EB -GUN
K-

Air

EB -GUN
POWER
SUPP LY

OSC.

OSC.

K-
POWER
SUPP LY

CR
YS
TALSWITCH

Air
I/O
1

I/O

1
I/O
164 PID
I/O

3
3
4

I/O CR
YSTAL SWITC
H

Cygnus

12
12
6

RS-232CGP-IB.
Cygnus

Air

Air

Air
OSC

P.S P.S

OSC

P.S

OSC

I/O

I/O

1
1
CRYSTAL SW
ITCH
2
2
CRYSTAL SW
ITCH
3

I/O
I/O

Air
OSC

P.S

CRYSTAL SWITCH

P.S:

CRYSTAL SW
ITCH

Vol.8.8

299

25607

IC/5-11111200

IC/5 (FD )

100V,50/60HZ

25700

ODC/5-12020210

CYGNUS (4 )

100V,50/60HZ

25701

ODC/5-13020210

CYGNUS (6 )

100V,50/60HZ

25686

760-1132-G1

IC/5Cygnus

25687

760-142-G2

IEEE-488

IC/5Cygnus

25688

760-162-G1

I/0

IC/5Cygnus 8 ,14TTL

25689

760-162-G2

TTL

IC/5Cygnus 8 ,14TTL

25702

779-220-G1

Cygnus-

25690

750-132-G2

IC/5 INFICON

25685

035-0013

3.5

IC/5 3.5 INFICON

25610

760-025-G15

(15 )

IC/5Cygnus -OSC (4.6m)OSC-FS

25611

760-025-G30

(30 )

IC/5Cygnus -OSC (9.1m)OSC-FS

25613

760-025-G50

(50 )

IC/5Cygnus -OSC (15.2m)OSC-FS

25612

760-025-G100

(100 )

IC/5Cygnus -OSC (30.5m)OSC-FS

25521

XC3M-1000

XTC/3M 100V

25524

XC3S-1000

XTC-3S 100V

25560

780-611-G15

XTC3,15

25561

780-611-G30

XTC3,30

25563

780-611-G50

XTC3,50

25562

780-611-G100

XTC3,100

25510

755-262-G1

XTC/2XTC/3SXTC/3M

25124

SQM160-S-2-R

SQM160 2CHRS232C

2ch

25125

SQM160-S-6-R

SQM160 6CHRS232C

6ch

25130

SQC310-2-R-1

SQC310
2CHRS232CUSB

25131

SQC310-2-E-1

SQC310
2CHRS232CEthernet

25132

SQC310-4-R-1

SQC310
4CHRS232CUSB

25133

SQC310-4-E-1

SQC310
4CHRS232CEthernet

25134

782-900-017

Handheld Power Control,25ft7.6m

coiled cable

25135

782-900-010

Oscillator (SQM/SQC)

25136

782-902-011

BNC150mmCableSQM/SQC

25137

782-902-012-10

BNC Cable 3m

25138

782-902-012-25

BNC Cable 7.7m

25139

782-902-012-50

BNC Cable 15.4m

25140

782-902-012-99

BNC Cable 30.7m

300

Vol.8.8

25530

983-9071

1"

10 ,

25531

983-9072

70ICF

10 ,

25532

983-9073

1"

10 ,

25533

983-9074

70ICF

10 ,

25534

983-9075

70ICF

10 ,
10 ,

25535

983-9076

70ICF (L=305mm)

25536

983-9077

70ICF (L=508mm)

10 ,

25537

983-9078

70ICF (L=762mm)

10 ,

25538

983-9079

1"

10 ,

25539

983-9080

70ICF

10 ,

25540

983-9081

1"

10 ,

25541

983-9082

70ICF

10 ,

25542

983-9083

1"

10 ,

25543

983-9084

70ICF

10 ,

25544

983-9085

70ICF (L=305mm)

10 ,

25545

983-9086

70ICF (L=508mm)

10 ,

25546

983-9087

70ICF (L=762mm)

10 ,

983-9088

1"

10 ,

983-9089

70ICF

10 ,

25549

983-9090

1" 6

25072

008-010-G10

1 10 6MHz

25073

008-009-G10

1 10 6MHz

750-225-G2

1 10 5MHz

750-226-G2

1 10 5MHz

25511

983-9064

XTC/2 ,1 ,JIS ( )

25520

750-420-G1

6/12

25212

007-023

CERAMIC RETAINER

Vol.8.8

301

25547
25548

INFICON

Transpector XPR3

TranspectorXPR3

PVD

1.

2.
2.6Pa 1.3Pa
1 100a.m.u.
EM 2.6Pa
EM
3.
Ar Ar 2
m/z=18 H2O
4. TM 32 TM

5.

302

MONITOR MODE
LEAK CHECK MODE
TUNE MODE
RECIPE EDITOR

PVD

Vol.8.8

1 100 a. m. u

1 a. m. u 10

FC/EM

(40eV/200 A)

FC1.3 10 7 Pa
EM8.0 10 10 Pa

(40eV/200 A)

FC3.0 10 9 A/Pa
EM3.0 10 5 A/Pa

FCEM2.6 Pa
1.3 Pa
FCEMlinear operation

150

ppm

10 ppm

70

90-260VAC40W

2.73 [69.3]

RS232

AUX

CFGR

RS485

2.60 [66.1]

CPU
POWER

1.80 [45.7]

5.62 [142.7]

STATU

FRONT

REF
2.60 [66.0]

BACK

4.9 [124]

SIDE
9.34 [237.4]

1.83 [46.5]

1.7 [43]
6.9 [175]

Vol.8.8

303

INFICON
Transpector

TWare32TM

TM

TWare32 Transpector

1.

MONITOR MODE

1.

2. TWare32

2.

3.
4.

3. Selected
Peaks
4. ( )

5. TCA-485 RS232C

LEAK CHECK MODE

TUNE MODE

RECIPE EDITOR

304

Vol.8.8

Transpector

TranspectorXPRXPR2XPR3 Transpector

4800 9600default
57,600

. 100ft
100ft

Transpector

Transpector

166MHz

233MHz

32MB

64MB

TWare32

5MB

5MB

500MB

500MB

800 600

800 600

RC232C 1

TCA-485

RC232C 1

TCA-485

24410

XPR3-0211000000

XPR3 Package FC/EM Pirani

Yttria Coated Iridium Filament

24454

911-339-G3

TWare32 SingleCD-ROM

Win
Win

24455

911-339-G4

TWare32 MultiCD-ROM

24470

600-1001-P15

RS232C 4.5m

24471

600-1001-P30

RS232C 9.0m

24472

600-1001-P70

RS232C 20.0m

24473

600-1001-P40

RS232C 12.0m

24474

600-1001-P50

RS232C 15.0m

24421

916-600-G4

TCA-485 Communication KIT

RS485 4.5m

24475

911-040-G15

24476

911-040-G30

RS485 9.0m

24477

911-040-G40

RS485 12.0m

24478

911-040-G50

RS485 15.0m

24484

911-040-G70

RS485 20.0m

T-Ware32 RS232-RS485

24431

911-261-G2

Digital I/O BD 8Input/Output for T-Ware32

TWare32 8 DI/O PCI

24432

911-261-G4

Digital I/O BD 16Input/Output for T-Ware32

TWare32 16 DI/O PCI

24441

914-022-G2

YI-Filament Assy

Transpector2

Vol.8.8

305

Memorandum

306

Vol.8.8

CONSTRUCTION COMPONENTS
& EB GUN

Vol.8.8

307

ICF

ICF

ICF

ICF

1. "Capturing"

10

BC

2. 10

Pa

3. 196 450

4.

"Capturing"

5.

6.
ICF

7. SUS304
C

Capturing
ICF "Capturing"

308

Vol.8.8

1.

30

70ICF 7.8 9.8Nm

2 60

400

2.
70ICF 7.8Nm

3 30

100

3.

60

70ICF 9.8Nm

450

150
4.

30

150

1
5.
2

196

N/cm)

ICF

3528

34ICF

M4

23

70ICF

M6

6.9 9.8

114ICF

M8

9.8 14.7

152ICF

M8

9.8 14.7

203ICF

M8

9.8 14.7

253ICF

M8

9.8 14.7

305ICF

M8

9.8 14.7

356ICF

M10

19.6 24.5

406ICF

M10

19.6 24.5

3675

4381

1
Nm)

Vol.8.8

309

 34 ICF
34ICF 34mm
16mm
3 4 34ICF

34mm 70mm ICF

38mm

3 34 ICF

No.

B1

B2

P.C.D

954-9401

4.5

27

953-9120

M4 20L

953-9210

954-9402

4.5

27

953-9120

M4 20L

953-9210

954-9403

4.5

27

953-9120

M4 20L

953-9210

8 5.6

954-9404

10

4.5

27

953-9120

M4 20L

953-9210

10 8

954-9405

12.8

4.5

27

953-9120

M4 20L

953-9210

12.7 10.7

954-9427

19.2

16

4.5

27

953-9120

M4 20L

953-9210

19.116.7

954-1091

19.2

16

27

953-9122

M4 16L

953-9210

19.116.7

954-9420

16

19.2

4.5

27

953-9120

M4 20L

953-9210

M4

6 4

954-1052

16

19.2

4.5

27

953-9120

M4 20L

953-9210

6 4

10

954-1053

8.2

16

19.2

4.5

27

953-9120

M4 20L

953-9210

8 5.6

11

954-1051

19.2

16

4.5

27

953-9120

M4 20L

953-9210

19.116.7

n-H

4 34 ICF

310

Vol.8.8

B1

B2

34

13.2
7.5

B1

14
7.5

34

14
7.5

B1

34

34

B1

7.5

B 0.2
0.1

34

34

P.C.D

7.5

B2

13.2
7.5

 ICF
4 5

203mm

5 6

4 ICF

No.

T1

P.C.D

954-7051

70

12.7

6.7

58.7

953-9107

M6 35L

953-5014

954-1101

70

20

17

12.7

5.3

6.7

58.7

953-9107

M6 35L

953-5014

19.116.7

954-1102

70

26.5 23.5 12.7

954-1103

70

33

954-1104

70

954-1105

954-1191

954-7052

114

17.5

954-1201

114

64.5

61

17.5

9.5

10

954-1291

114

64.5

61

17.5

9.5

11

954-7053

152

20

12

954-1301

152

103

97

20

11

13

954-1391

152

103

97

20

11

14

954-7054

203

22

15

954-1401

203 155.5 148.5

22

12.5

16

954-1491

203 155.5 148.5

22

12.5

5.3

6.7

58.7

953-9107

M6 35L

953-5014

25.4 23

12.7

5.3

6.7

58.7

953-9107

M6 35L

953-5014

32 29.6

39

35.5 12.7

5.3

6.7

58.7

953-9107

M6 35L

953-5014

38 35

70

42

38.5 12.7

5.3

70

42

38.5 12.7

5.3

30

58.7

953-9107

M6 35L

953-5014

41 38

58.7

953-9105

M6 22L

953-5014

41 38

8.4

92.2

953-9101

M8 45L

953-5015

8.4

92.2

953-9101

M8 45L

953-5015

63.5 60.2

92.2

953-9111

M8 30L

953-5015

63.5 60.2

8.4

16

130.3

953-9106

M8 50L

953-5016

8.4

16

130.3

953-9106

M8 50L

953-5016

101.6 95.6

16

130.3

953-9100

M8 40L

953-5016

101.6 95.6

8.4

20

181.1

953-9102

M8 55L

953-5017

8.4

20

181.1

953-9102

M8 55L

953-5017

153 147

20

181.1

953-9100

M8 40L

953-5017

153 147

6.7

M6

M8

M8

M8

17

954-7055

253

25

8.4

24

231.9

953-9103

M8 60L

953-5048

18

954-1501

253 205.5 198.5

25

12.5

8.4

24

231.9

953-9103

M8 60L

953-5048

203 197

19

954-1591

253 205.5 198.5

25

12.5

24

231.9

953-9101

M8 45L

953-5048

203 197

M8

n-H

T
T1

T
T1

T1
n-H

n-H

n-H

1.5

P.C

C
B
P.C.D.

P.C.D.

+0.2
0

A
C

C
B
P.C.D.

P.C.D.

2.0

.D.

5 ICF

Vol.8.8

311

 5 ICF
No.

954-1150

954-5110

954-5111

954-1151

954-5110

954-1171

70

20

17

12.7

5.3

6.7

58.7

19.116.7

954-1152

954-5110

954-1172

70

26.5

23.5

12.7

5.3

6.7

58.7

25.4 23

954-1153

954-5110

954-1173

70

33

30

12.7

5.3

6.7

58.7

32 29.6

954-1154

954-5110

954-1174

70

39

35.5

12.7

5.3

6.7

58.7

38 35

954-1250

954-5120

954-7062

114

19

8.4

92.2

954-1251

954-5120

954-1271

114

64.5

61

19

9.5

8.4

92.2

63.5 60.2

954-1350

954-5130

954-7063

152

21

8.4

16

130.3

954-1351

954-5130

954-1371

152

103

97

21

11

8.4

16

130.3 101.6 95.6

10

954-1450

954-5140

954-7064

203

11

954-1451

954-5140

954-1471

203

155.5 148.5

12

954-1550

954-5150

954-7065

253

13

954-1551

954-5150

954-1571

253

205.5 198.5

T1

P.C.D

70

12.7

6.7

58.7

24

8.4

20

181.1

24

12.5

8.4

20

181.1 153 147

25

8.4

24

231.9

25

12.5

8.4

24

231.9 203 197

T1

T1

n-H

6 ICF

312

Vol.8.8

B +0.2
0

C
B

P.

.D

 ICF
ICF 6

6 7

3 350mm

7 8

6 ICF
No.

954-1611

305

B
2

1115

T1

P.C.D

8.4

32

284

953-7801

M8 70L

953-7131

28

954-1612

305

250

1115

28

150

8.4

32

284

953-7801

M8 70L

953-7131 250 244

954-1622

305

250

1115

28

150

M8

32

284

953-7811

M8 50L

953-7131 250 244

954-1701

356

12

28.5

10.5

30 325.4 953-7802

M10 70L 953-7132

954-1712

356

295

12

28.5

150

10.5

30 325.4 953-7802

M10 70L 953-7132 295 289

954-1722

356

295

12

28.5

150

M10

30 325.4

953-7812

M10 50L 953-7132 295 289

954-1801

406

12

28.5

10.5

30

381

953-7802

M10 70L 953-7133

954-1812

406

350

12

28.5

150

10.5

30

381

953-7802

M10 70L 953-7133 350 344

954-1822

406

350

12

28.5

150

M10

30

381

953-7812

M10 50L 953-7133 350 344

1. No.1 No.3 JVIS 003

2. B D 30mm 3mm
3. T1 150mm
4.
5. ICF
3mm
6. ICF 250

T1
2-M810

n-H

n-H

P.C.D.

P.C.D.

P.C.D.

P.C.D

2.0

n-H

14

T1

2-M8

7 ICF

Vol.8.8

313

 7 ICF
No.

1
2

T1

P.C.D

28

8.4

32

284

1115

28

150

8.4

32

284

250244

12

28.5

10.5

30

325.4

295

12

28.5

150

10.5

30

325.4 295 289

954-1661

954-1670

954-1681

954-1662

954-1670

954-1682

305

250

954-1751

954-1760

954-1771

356

954-1752

954-1760

954-1782

356

305

1115

954-1851

954-1860

954-1871

406

12

28.5

10.5

30

381

954-1852

954-1860

954-1882

406

350

12

28.5

150

10.5

30

381

350 344

1.

2. No.1No.2 JVIS 003

3. B D 30mm 3mm
4. T1 150mm
5. ICF 250

T1
T

n-H

P.C.D.

P.C.D

R
2-M8

8ICF

ICF

3 7

SUS-304 ICF

314

Vol.8.8

 953-7601
ICF

34ICF ICF

19.5 3.5

51

10

ICF

2 1

Vol.8.8

315

 ICF

ICF ICF

15
11
8
B

II M

II

11
8 ICF
ICF

No.

I
ICF

II

ICF

952-7010

70ICF

953-5014

M6 35L

34ICF

953-9210

M4 12L

70

17

12.7

6-M4 6

952-7020

114ICF

953-5015

M8 45L

34ICF

953-9210

M4 14L

114

17

17.5

6-M4 9
6-M6 10

952-7021

114ICF

953-5015

M8 45L

70ICF

953-5014

M6 22L

114

38

17.5

952-7030

152ICF

953-5016

M8 50L

34ICF

953-9210

M4 14L

152

17

20

6-M4 9

952-7031

152ICF

953-5016

M8 50L

70ICF

953-5014

M6 22L

152

38

20

6-M6 10

952-7032

152ICF

953-5016

M8 50L

114ICF

953-5015

M8 25L

152

65

20

8-M8 10

952-7040

203ICF

953-5017

M8 55L

34ICF

953-9210

M4 14L

203

17

22

6-M4 9

952-7041

203ICF

953-5017

M8 55L

70ICF

953-5014

M6 22L

203

38

22

6-M6 10

952-7042

203ICF

953-5017

M8 55L

114ICF

953-5015

M8 25L

203

65

22

8-M8 10

10

952-7043

203ICF

953-5017

M8 55L

152ICF

953-5016

M8 30L

203

103

22

16-M8 10

11

952-7050

253ICF

953-5048

M8 60L

34ICF

953-9210

M4 14L

253

17

25

6-M4 9

12

952-7051

253ICF

953-5048

M8 60L

70ICF

953-5014

M6 22L

253

38

25

6-M6 10

13

952-7052

253ICF

954-5048

M8 60L

114ICF

953-5015

M8 25L

253

65

25

8-M8 12

14

952-7053

253ICF

953-5048

M8 60L

152ICF

953-5016

M8 30L

253

103

25

16-M8 12

15

952-7054

253ICF

953-5048

M8 60L

203ICF

953-5017

M8 30L

253

154

25

20-M8 12

ICF
ICF TIG 12

ICF

ICF

ICF
34 ICF

34 ICF

TIG

TIG

TIG

TIG
a)

b)

12

316

Vol.8.8

34000

954-9401

34ICF

34001

954-9402

34ICF

6 4

34002

954-9403

34ICF

8 5.6

34003

954-9404

34ICF

10 8

34004

954-9405

34ICF

12.7 10.7

34005

954-9427

34ICF

19.116.7

34020

954-1091

34ICF

19.116.7M4

34040

954-9420

34ICF

34041

954-1051

34ICF

19.116.7

34042

954-1052

34ICF

6 4

34043

954-1053

34ICF

8 5.6

34100

954-7051

70ICF

34101

954-1103

70ICF

32 29.6

34102

954-1104

70ICF

38 35

34103

954-1105

70ICF

41 38

34106

954-1101

70ICF

19.116.7

34107

954-1102

70ICF

25.4 23

34110

954-1191

70ICF

41 38M6

34140

954-1150

70ICF

34143

954-1153

70ICF

32 29.6

34144

954-1154

70ICF

38 35

34145

954-1151

70ICF

19.116.7

34146

954-1152

70ICF

25.4 23

34200

954-7052

114ICF

34201

954-1201

114ICF

63.5 60.2

34210

954-1291

114ICF

63.5 60.2M8

34240

954-1250

114ICF

34241

954-1251

114ICF

34300

954-7053

152ICF

34301

954-1301

152ICF

101.6 95.6

34310

954-1391

152ICF

101.6 95.6M8

34340

954-1350

152ICF

34341

954-1351

152ICF

34400

954-7054

203ICF

34401

954-1401

203ICF

153 147

34410

954-1491

203ICF

153 147M8

34440

954-1450

203ICF

34441

954-1451

203ICF

34500

954-7055

253ICF

34501

954-1501

253ICF

203 197

34510

954-1591

253ICF

203 197M8

63.5 60.2

101.6 95.6

153 147

Vol.8.8

317

318

34540

954-1550

253ICF

34541

954-1551

253ICF

34602

954-1611

305ICF

34603

954-1612

305ICF

250 244

34604

954-1622

305ICF

250 244M8

34612

954-1661

305ICF

34613

954-1662

305ICF

34620

954-1701

356ICF

34622

954-1712

356ICF

295 289

34623

954-1722

356ICF

295 289M10

34630

954-1751

356ICF

34631

954-1752

356ICF

34640

954-1801

406ICF

34642

954-1812

406ICF

350 344

34643

954-1822

406ICF

350 344M10

34650

954-1851

406ICF

34651

954-1852

406ICF

34900

952-7010

ICF

34 ICF- 70 ICF

34901

952-7020

ICF

34 ICF- 114 ICF

34902

952-7021

ICF

70 ICF- 114 ICF

34903

952-7030

ICF

34 ICF- 152 ICF

34904

952-7031

ICF

70 ICF- 152 ICF

34905

952-7032

ICF

114 ICF- 152 ICF

34906

952-7040

ICF

34 ICF- 203 ICF

34907

952-7041

ICF

70 ICF- 203 ICF

34908

952-7042

ICF

114 ICF- 203 ICF

34909

952-7043

ICF

152 ICF- 203 ICF

34910

952-7050

ICF

34 ICF- 253 ICF

34911

952-7051

ICF

70 ICF- 253 ICF

34912

952-7052

ICF

114 ICF- 253 ICF

34913

952-7053

ICF

152 ICF- 253 ICF

34914

952-7054

ICF

203 ICF- 253 ICF

38000

953-9210

34 ICF 5

38002

953-5014

70 ICF 5

38003

953-5015

114 ICF 5

38004

953-5016

152 ICF 5

38005

953-5017

203 ICF 5

38006

953-5048

253 ICF 5

38024

953-7131

305 ICF 1

38025

953-7132

356 ICF 1

38026

953-7133

406 ICF 1

38029

953-7601

70 ICF 406 ICF 1

203 197

250 244

295 289

350 344

Vol.8.8

Memorandum

Vol.8.8

319

ICF

ICF

1.
2. ICF

ICF
SUS-304450

ICF

450
D

1.33 10 11Pam3/sec

952-7100

70

38

35

120

952-7104

70

38

35

210

952-7103

34

19

16

76

SUS-304

SUS-304

ICF
D

ICF
ICF

70

48

32

94

2 3

952-7201

34

22

15

76

4 6

ICF

952-7200

B
C

SUS-304

952-7305

70

38

35

54.2

54.2

952-7306

70

38

35

54.2

189

952-7307

34 21.7 17.5

51.3

51.3

ICF

ICF

320

Vol.8.8

SUS-304
A

70

38

35

54.2

952-7606

34

19

16

38.6

ICF

952-7605

D
ICF

SUS-304

952-7500

70

38

35

60

952-7501

34

19

16

38

A
ICF

ICF
D

ICF
SUS-304450

450
1.33 10 11Pam3/sec
SUS-304
A

70

38

35

114.8

952-7801

70

41

38

33

952-7802

114

50.8

46.8

49.5

952-7825

114

60.5

54.9

49.5

952-7803

152

101.6

95.6

61

952-7804

203

153

147

60

952-7801 ICF M6

B
C

952-7800

Vol.8.8

321

ICF
2

300
25 /min
7 10 11Pam3/sec
0.1MPa

B
t

952-7810

70

32

155

1.5

27

952-7820

114

60

210

1.5

49

952-7822

34

19

145

1.2

15.5

B
t

51.5

0.8

4.4

110

200

1.5

96

34
152

952-7823
952-7840

952-7811

70

32

155

1.8

43

27

952-7824

34

20

145

1.2

53.2

15.5

952-7821

114

60

200

2.4

47.5

49

952-7841

152 110

200

2.6

67

96

A
ICF

952-7805SUS-304

22

24

75

70 ICF

322

Vol.8.8

 952-780615

SUS-304

30

B-A

48.3

41.3

15

125
6.7 10 11Pam3/sec

15

952-7100

70

70 ICF

32001

952-7104

70

70 ICF

32002

952-7103

34 ICF

32010

952-7200

70

70 ICF

32011

952-7201

34 ICF

32030

952-7305

70

70 ICF

32031

952-7306

70

70 ICF

32032

952-7307

34 ICF

32040

952-7605

70

70 ICF

32041

952-7606

34 ICF

32050

952-7500

70

70 ICF

32051

952-7501

34 ICF

32100

952-7810

32

70 ICF

32101

952-7811

32

70 ICF

32102

952-7820

60

114 ICF

32103

952-7821

60

114 ICF

32104

952-7840

110

152 ICF

32105

952-7841

110

152 ICF

32106

952-7822

19

34 ICF

32107

952-7823

34 ICF

32108

952-7824

20

34 ICF

32120

952-7800

38

70 ICF

32121

952-7801

41

70 ICF M6

Vol.8.8

32000

323

32122

952-7802

50

114 ICF

32123

952-7825

60

114 ICF

32124

952-7803

102

152 ICF

32125

952-7804

153

203 ICF

32140

952-7805

70 ICF

32150

952-7806

15

70 ICF 15

324

Vol.8.8

Memorandum

Vol.8.8

325

ISO

ISO Quick-release Coupling

10162540 4

1.
2.
3.

4.
5. A Ni

6.
O

70150

1.3 10 9Pam3/sec

O
O

326

Vol.8.8


SUS-304
A

NW10

954-7731

30

12.2

10

13.0

NW16

954-7732

30

17.2

16

19.1

NW25

954-7733

40

26.2

24

28.0

NW40

954-7734

55

41.2

38.5

42.7

NW50

954-7895

75

52.2

47

51.0

10

NW1013.011.0NW1619.116.7NW2528.025.0
NW4042.739.4NW5051.047.0

B
A

SUS-304
A

954-7741

30

12.2

NW16

954-7742

30

17.2

NW25

954-7743

40

26.2

NW40

954-7744

55

41.2

NW50

954-7745

75

52.2

NW10

SUS-304
A

954-7781

30

13.8

10.5

60

NW16

954-7782

30

20

16

80

NW25

954-7783

40

27.2

23

100

NW40

954-7784

55

42.7

37.1

130

C
B

NW10

NW-ICF SUS-304
A

NW10

34ICF

12.7

9.7

NW10- 70ICF

954-7462

NW10

70ICF

13.8

10.5

NW16- 34ICF

954-7463

NW16

34ICF

19

16

NW16- 70ICF

954-7464

NW16

70ICF

19

16

NW25- 70ICF

954-7465

NW25

70ICF

27.2

24

NW40- 70ICF

954-7466

NW40

70ICF

38

35

D
C

50

954-7461

NW10- 34ICF

NW SUS-304
A

954-7451

NW10

NW16

13.8

10.5

NW10-25

954-7452

NW10

NW25

13.8

10.5

NW10-40

954-7453

NW10

NW40

13.8

10.5

NW10-50

954-7454

NW10

NW50

13.8

10.5

NW16-25

954-7455

NW16

NW25

20

16

NW16-40

954-7456

NW16

NW40

20

16

NW16-50

954-7457

NW16

NW50

20

16

NW25-40

954-7458

NW25

NW40

27.2

23

NW25-50

954-7459

NW25

NW50

27.2

23

NW40-50

954-7460

NW40

NW50

42.7

37.1

Vol.8.8

50

NW10-16

327

SUS-304
A

NW10

954-7771

30

24 2 15.5 2

60

64

54

10

NW16

954-7772

30

22 2

80

84

76

15

NW25

954-7773

40

48 2 32.0 2 100

102

97

24

NW40

954-7774

55

48 2 32.0 2 130

132

127

32

15 2

MAX

MIN

30

13.8

30

10.5

NW16

954-7792

30

20

40

16

NW25

954-7793

40

27.2

50

23

NW40

954-7794

55

42.7

65

37.1

954-7791

NW10

SUS-304

954-7811

30

13.8

30

30

10.5

NW16

954-7812

30

20

40

40

16

NW25

954-7813

40

27.2

50

50

23

NW40

954-7814

55

42.7

65

65

37.1

NW10

954-7821

30

13.8

30

30

10.5

NW10

SUS-304
B

SUS-304

30

20

40

40

16

954-7823

40

27.2

50

50

23

NW40

954-7824

55

42.7

65

65

37.1

954-7822

SUS-304
A

954-7761

30

13.8

10.5

70

NW16

954-7762

30

20

16

70

NW25

954-7763

40

27.2

23

70

NW40

954-7764

55

42.7

37.1

70

NW10

SUS-304
NW10

954-7751

30

19

60

19

NW16

954-7752

30

19

60

19

NW25

954-7753

40

22

80

24

NW40

954-7754

55

38.0

80

38

328

Vol.8.8

NW16
NW25


SUS-304 Ni

16

NW16

954-7832

30

52

NW25

954-7833

40

52

NW40

954-7834

55

52

30

B-A
15

SUS-316

D 1000

D 1500

954-7475

954-7476

954-7477

D 2000
954-7478

NW16

954-7480

954-7481

954-7482

954-7483

NW25

954-7485

954-7486

954-7487

954-7488

NW40

954-7490

954-7491

954-7492

954-7493

D 500
NW10

NW10

30

19.4 2

15 2

30

80

NW16

30

24.8 2

20 2

35

115

NW25

40

31.5 2

25.4 2

60

125

NW40

55

48.2 2

40 2

90

150

O AL
O SUS-304
B
10

954-7871

954-7841

12

NW16

954-7872

954-7842

17

16

NW25

954-7873

954-7843

26

24

NW40

954-7874

954-7844

41

39

NW50

954-7717

954-7847

52

50

NW10

A
B

3.9

O
O

954-7885

42.5

63.0

16.0

22.0

NW20/25

954-7886

54.0

72.0

16.0

33.0

NW32/40

954-7887

70.0

90.0

16.0

46.0

NW50

954-7888

90.0

114.0

20.0

62.0

Vol.8.8

NW10/16

ALNi

329


1. NW50 JIS

3.9

2.
O

1.

2.

330

35000

954-7741

NW10

SUS

35001

954-7731

NW10

SUS

35010

954-7742

NW16

SUS

35011

954-7732

NW16

SUS

35020

954-7743

NW25

SUS

35021

954-7733

NW25

SUS

35030

954-7744

NW40

SUS

35031

954-7734

NW40

SUS

35040

954-7745

NW50

SUS

35041

954-7895

NW50

SUS

32500

954-7781

NW10

SUS

32501

954-7782

NW16

SUS

32502

954-7783

NW25

SUS

32503

954-7784

NW40

SUS

32470

954-7461

NW10- 34 ICF

SUS

32471

954-7462

NW10- 70 ICF

SUS

32472

954-7463

NW16- 34 ICF

SUS

32473

954-7464

NW16- 70 ICF

SUS

32474

954-7465

NW25- 70 ICF

SUS

32475

954-7466

NW40- 70 ICF

SUS

32483

954-7451

NW10-16

SUS

32484

954-7452

NW10-25

SUS

32485

954-7453

NW10-40

SUS

32486

954-7454

NW10-50

SUS

32487

954-7455

NW16-25

SUS

Vol.8.8

954-7456

NW16-40

SUS

32489

954-7457

NW16-50

SUS

32490

954-7458

NW25-40

SUS

32491

954-7459

NW25-50

SUS

32492

954-7460

NW40-50

SUS

32510

954-7771

NW10

SUS

32511

954-7772

NW16

SUS

32512

954-7773

NW25

SUS

32513

954-7774

NW40

SUS

32530

954-7791

NW10

SUS

32531

954-7792

NW16

SUS

32532

954-7793

NW25

SUS

32533

954-7794

NW40

SUS

32540

954-7811

NW10

SUS

32541

954-7812

NW16

SUS

32542

954-7813

NW25

SUS

32543

954-7814

NW40

SUS

32550

954-7821

NW10

SUS

32551

954-7822

NW16

SUS

32552

954-7823

NW25

SUS

32553

954-7824

NW40

SUS

32620

954-7761

NW10

SUS

32621

954-7762

NW16

SUS

32622

954-7763

NW25

SUS

32623

954-7764

NW40

SUS

32640

954-7751

NW10

SUS

32641

954-7752

NW16

SUS

32642

954-7753

NW25

SUS

32643

954-7754

NW40

SUS

32650

954-7832

NW16

SUS 15

32651

954-7833

NW25

SUS 15

32652

954-7834

NW40

SUS 15

32660

954-7475

NW10

D 500mm

32661

954-7476

NW10

D 1000mm

32662

954-7477

NW10

D 1500mm

32663

954-7478

NW10

D 2000mm

32664

954-7480

NW16

D 500mm

32665

954-7481

NW16

D 1000mm

32666

954-7482

NW16

D 1500mm

32667

954-7483

NW16

D 2000mm

32668

954-7485

NW25

D 500mm

32669

954-7486

NW25

D 1000mm

32670

954-7487

NW25

D 1500mm

Vol.8.8

32488

331

32671

954-7488

NW25

D 2000mm

32672

954-7490

NW40

D 500mm

32673

954-7491

NW40

D 1000mm

32674

954-7492

NW40

D 1500mm

32675

954-7493

NW40

D 2000mm

32820

954-7871

NW10

AO

32821

954-7872

NW16

AO

32822

954-7873

NW25

AO

32823

954-7874

NW40

AO

32824

954-7717

NW50

AO

32830

954-7841

NW10

SUS O

32831

954-7842

NW16

SUS O

32833

954-7843

NW25

SUS O

32835

954-7844

NW40

SUS O

32836

954-7847

NW50

SUS O

32870

954-7885

NW10/16

32871

954-7886

NW25

32872

954-7887

NW40

32873

954-7888

NW50

332

Vol.8.8

Memorandum

Vol.8.8

333

ONOFF2

SUS-304

5. 954-7720 15

1.
ONOFF2

6. 954-7730 250

2. SUS-304

3. 10,000

4. 0.2MPa

954-7700

10 8Pa

1.33 10

11

Pam /sec

SUS-304

0.2MPa

40

250
10 40

SUS-304

10,000
954-7806 15
954-7832
954-7833
954-7834
220g

954-7730
OFF
2.7 2.7 103Pa
ON
14 2.7 103Pa

10 7Pa

954-7720

OFF
2.7 2.7 103Pa
ON
16 2.7 103Pa

70ICF
510g

954-7720 15

334

Vol.8.8

70ICF
580g

954-77007720
A

954-7730

DC125

0.6

0.1

0.6

0.1

DC125

0.4

0.05

0.4

0.05

DC250

0.3

0.05

0.3

0.05

AC125

0.45

0.75

AC125

15

10

AC250

0.3

0.3

AC250

15

10

0.5
7msec
10
6

12

12

1005

1005

12
4

COM

N.O

N.C

COM

N.O

N.C

COM

N.O

N.C

461

72.11

18.8
61.52
12.7
932

1005

69.53

471
18.51
78.22

150.1

70

ID12

70

70 ICF

1954-7700

2954-7720

N.O

3954-7730

N.C

N.C

N.O

COM

N.O

COM

COM

70 ICF

954-77007720
13.3 103Pa
954-7730 11.3103Pa

954-770077207730
5.4 103Pa

410.5

501

410.5

12.7

410.5

119.53

461

N.C

N.C

N.O

COM

29200

954-7700

70ICF

29201

954-7720

15

29202

954-7730

250

Vol.8.8

335

953-7000

1.

2. 1.3310 9Pa
m3/sec cm2
3. 130 60
4. 1 2 24
10030 2

5.

6.
7. 1 7g 5

336

Vol.8.8

1.26

90

60 130

66.8MPa

121.9MPa

90

5.5 10 5cm/

1KHz25

1KHz25
1KHz100

4.5
0.011
0.023

16.3KV/mm

25
100

6 1013 cm
10 109 cm

1.

2.

3.

Vol.8.8

337

MoS2

1.

2.
3.
4.

50g

75 400
MoS2 1901
500g

338

Vol.8.8

AC100V AC200V

944-9150

944-9151

944-9153

944-9154

100V 380W

100V 589W

200V 1180W

200V 1860W

AC100V

AC200V

380W

589W

1180W

1860W

4.8mm

6.9mm

6.9mm

9.6mm

NiSUS316MgO

40

40

100

100

944-9150

1.6

1.0

2400

944-9151

2.3

1.2

4080

944-9153

2.3

1.2

8160

944-9154

3.2

1.5

9100

Vol.8.8

339

S
L

JIS B1180

SUS304

SUS304

S
18

953-9120

M4

20

14

953-9104

M6

18

953-0085

M6

32

18

953-9105

M6

22

18

953-9107

M6

35

18

953-9110

M8

25

22

953-0088

M6

45

18

953-9111

M8

30

22

953-0091

M6

55

18

25

953-9122

M4

16

16

953-9100

M8

40

22

953-7811

M8

50

35

953-9101

M8

45

22

953-7812

M10

50

35

953-9106

M8

50

22

953-9102

M8

55

22

953-9103

M8

60

22

953-7801

M8

70

35

953-7802

M10

70

35

25 2
1

35 2
1

2 1 1

35 1
1

1
1 2 1

39020

953-7000

38720

5g g/1

NET50g

39030

944-9150

100V 380W

1.6 2.4M

39031

944-9151

100V 589W

2.3 4.08M

39032

944-9153

200V 1180W

2.3 8.16M

39033

944-9154

200V 1860W

3.2 9.1M

38700

953-9120

M4 20

M4 2025
34 ICF

38701

953-0085

M6 32

M6 3225

38703

953-9107

M6 35

M6 3525
70 ICF

38704

953-0088

M6 45

M6 4525

38705

953-0091

M6 55

M6 5525

38706

953-9100

M8 40

M8 4025
152 ICF

38707

953-9101

M8 45

M8 4525
114 ICF

38708

953-9106

M8 50

M8 5025

38709

953-9102

M8 55

M8 5525
203 ICF

38710

953-9103

M8 60

M8 6025
253 ICF

340

Vol.8.8

38716

953-7801

M8 70

M8 7035
305 ICF

38717

953-7802

M10 70

M10 7035
356 ICF 406 ICF

38711

953-9104

M6 18

M6 1825

38712

953-9105

M6 22

M6 2225
70 ICF

38713

953-9110

M8 25

M8 2525

38714

953-9111

M8 30

M8 3025

38715

953-9122

M4 16

M4 1625
34 ICF

38718

953-7811

M8 50

M10 5035
305 ICF

38719

953-7812

M10 50

M10 5035 356 ICF 406 ICF

Vol.8.8

341

951-7152
951-7150

951-7148

10 8Pa

Capturing

400 450

ICF

1.
10 8Pa

5.

951-7148

2. Capturing
ICF

Capturing
1

3.
400 450

4.

342

Vol.8.8

951-7148

10 8Pa

6.7 10 11Pam3/sec

4L/sec

400

15.7Nm

23.5Nm

34ICF

0.7kg

2
460 9.53mm
JIS B4650 450

SUS-304
SUS-304

SUS-321
O

2.5
4

1S
1
1
1
1
1 2
1

Ar

9.7

46
16

381

19.2

36

1263
1103

34 ICF

19.2

381

34 ICF

2 951-7148

Vol.8.8

343

951-7150

951-7152

10 8Pa

6.7 10 11Pam3/sec

30L/sec

100L/sec

450

29.4 34.3Nm

78.4 127.4Nm

127.4Nm

225.4Nm

70ICF

114ICF

1.6kg

7kg

SUS-304

SUS-304

1300F 12.7mm

2800F 19.05mm

JIS B4650 1300

JIS B4650 2800

2.5
6

1
1
1
1
1 2
1

1
10 1
BS 1

1 2

Ar

12.9

23

70 ICF

621

38

38

50

1673
1423

70 ICF

38

621

621

70 ICF

3 951-7150 38

344

Vol.8.8


19.2

84
35

77

114 ICF

2475

114 ICF

90

76

75

63.5

63.5

1002

2975

50

50

63.5

4 951-7152 2.5
1002

114 ICF

2004

3/4 1.5 2.5

1901

951-7148

951-9150

951-7152

951-7148

951-9150

951-7152

951-7148

951-7150

951-7152

Ar

1.

2.

30010

951-7150

38

70ICF 450

30020

951-7152

2.5

114ICF 450

30030

951-7148

34ICF 400

39730

1901 500g

951-7148/7150/7152

30800

951-9150

951-7150

30801

951-9150

951-7150

30802

951-9150

951-7150

30803

951-7152

951-7152

30804

951-7152

951-7152

30805

951-7152

951-7152

30814

951-7148

951-7148

30815

951-7148

951-7148

30816

951-7148

951-7148

460F

951-7148

38634

1300F

951-7150 38

38635

2800F

951-7152 2.5

Vol.8.8

345

10 8Pa
L

150

951-7145

951-7120

10 8Pa

1.

12

3.

300

2.

8
6
4

8
6
4

PRESSURE
Pa

10

2
POLYIMIDE

10

10

8
6
4

10 9

2
11

10

8
6
4
2

1012
0

100

200

TEMPERATURE

346

10 7

10 6

VITON

10 8

10 10

OUTGASSING RATE
Pa m 3/sec-cm 2

10 5

10

300

8
6
4
2

Bakeout O

8
6
4
2

VITON
Unbaked
VITON
Baked
POLYIMIDE
Unbaked
POLYIMIDE
Baked
EMPTYCHAMBER
COPPER GASKETS
Baked

8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
0

100

200

300

400

500

TIME
Minutes

Vol.8.8

600

951-7145

951-7120
10 8Pa

12

300

300

1225 1921N2 3.4Nm

3920 4900N4.9 5.9Nm

2626N5.9Nm

7840N14.7Nm

30L/sec

1L/sec

6.7 10 11Pam3/sec

6.7 10 11Pam3/sec

SUS-304
SUS-304L
AL

34ICF
0.41kg

1.
2.
3.
4.
5.

SUS-304
SUS-304L
AL

70ICF
1.6kg

Ar
260

SUS321O

51

24

64

38

28

112.5

12.8

12.8

621

51

381

1052

34 ICF

1654
1404

30

70 ICF

38

381

621

70 ICF

34 ICF

951-7145

951-7120 38
3

Vol.8.8

347


951-7145

951-7120 38

951-7145

951-7120

951-7145

951-7120

1.

2.

30200

951-7145

34 ICF

30210

951-7120

38

70 ICF

30806

951-7145

951-7145

30807

951-7145

951-7145

30809

951-7120

951-7120

30810

951-7120

951-7120

348

Vol.8.8

Memorandum

Vol.8.8

349

V
V-025RV

10-4Pa L O

1.
10-4Pa

V-025RV- N

2 .

350

Vol.8.8

+ 2

V-025RV-CN

V-025RV-MN
10-4Pa

He 1

6.7 10-11Pa m3 /sec

10-5Pa m3 /sec

7L/sec

60

SUS-304

AL

66,

O , ,

0.4 0.6 MPa

0.024

M5

L / 2

0.63kg

0.58kg
NW25

1.
O
2. 0.5MPa 1
3. NW25
Vacuum Components

,2
DC12 24V

5 50mA

AC100V
7 20 mA
2.4 V

ON

0mA

1m
2 0.2 2

294m/s230G

DC500V 20M

AC1000V1

10 60

IEC IP67JIS C0920

1 .
2 .
3 . OFF
DC ,AC :CRC 0.033 0.1F,R 1 3K
4 . DC + -

Vol.8.8

351

30000

V-025RV-CN

NW25 L

:25 + 2

30001

V-025RV-MN

NW25 L

:25

352

Vol.8.8

Memorandum

Vol.8.8

353

V L
V-040LV/V-065LV/V-100LV

L 100
SUS316
MSB O
,

4.

1.
-7

-8

STD 10 Pa MSB 10 Pa

NC

120

STD

150 ,MSB 200

STD

60

MSB

5.

2.
100

SUS316L
,

6.

3.
NC

354

Vol.8.8

040

4070ICF,NW40, JIS40A

065

65114ICF,NW63, JIS65A

100

100152ICF,NW80, JIS

STD :

MSB : O SUS321+

+ 1

NC + 1

ICF

NW

JIS

JIS

1.

2. ICF
MSB

M
1. : ,
2.NC :
MSB NC
3.

V-040LV-SCN
: 40, STD , , NW40 ,
2

STD

40

MSB

65

100

10-7Pa

10-8Pa

6.7 10-11Pam /sec

19

1.3 10-11Pam3/sec

74

176

19

150 2

176

200 2

125

SUS-304

C-22

L/ 3

100 1

0.4 0.6MPa
0.12
Rc1/8

0.47

1.22
Rc1/4

0.12

0.47

Rc1/8

1.22
Rc1/4

74

1 106

100

6.7 10-11Pam3/sec 1

L/sec

65

He

40

40

65

100
152ICF

ICF

70ICF

114ICF

NW

NW40

NW63

NW80

JIS

JIS 40A

JIS 65A

JIS 100A

1.
O
2. NC 120 , 60
3. 0.5MPa 1NC
4. , ,

Vol.8.8

355

,2

DC12 24V

AC100V

5 50mA

7 20mA

2.4V
ON

0mA

1m 2 0.2 2

294m/s230G

DC500V 20M

AC1000V1

10 0

IEC IP67JISC0920

1.
2.
3. OFF
DC ,AC :CRC 0.033 0.1F,R 1 3K
4. DC + -

mm

B
54

V-040LV- L

V-040LV-M I

70ICF

70ICF

63
65

V-040LV-S N

NW40

NW40

V-040LV-S B

JIS 40AVF

JIS 40AVG

V-040LV-S A

JIS 40AVG

JIS 40AVF

V-065LV-M I

114ICF

114ICF

102.5

NW63

NW63

88

V-065LV-S B

JIS 65AVF JIS 65AVG 102.5

V-065LV-S A

JIS 65AVG JIS 65AVF

V-100LV-M I

152ICF

152ICF

135

NW80

NW80

105

V-100LV-S B

JIS 100AVF JIS 100AVG

V-100LV-S A

JIS 100AVG JIS 100AVF

135

D2

162

150

1.5

171

159

173

161

171

159

235

60.5

220.5 186.5

60

86

89.2

1.6
2.7
4
6

114

70

232.5 198.5

4.5
6

278

234

7.8

327

283

11.5

297

253

327

283

NW40

NW63

NW80

356

78

201

1. JIS

D1

216.5 182.5

84

V-100LV- L
V-100LV-S N

34

63

V-065LV- L
V-065LV-S N

Vol.8.8

150

100

8.7
11.5


ICF
ICF JVIS-003
Vacuum Components
NW
NW
NW40 Vacuum Components

JIS
JIS JISB2290:1968
1998O VG
O VF

Vol.8.8

357

30100

V-040LV-SCL

DN40 L

STD , 1 ,

30101

V-040LV-SCB

DN40 L

STD , 1 , JIS

30102

V-040LV-SCA

DN40 L

STD , 1 , JIS

30103

V-040LV-SCN

DN40 L

STD , 1 ,NW40

30104

V-040LV-SDL

DN40 NC L

STD ,
NC 1 ,

30105

V-040LV-SDB

DN40 NC L

STD , NC 1 , JIS

30106

V-040LV-SDA

DN40 NC L

STD , NC 1 , JIS

30107

V-040LV-SDN

DN40 NC L

STD , NC 1 ,NW40

30108

V-040LV-MCL

DN40 L MSB

MSB , 1 ,

30109

V-040LV-MCI

DN40 L MSB

MSB , 1 ,ICF70

30110

V-040LV-MML

DN40 L MSB

MSB , ,

30111

V-040LV-MMI

DN40 L MSB

MSB , ,ICF70

30112

V-040LV-SML

DN40 L

STD , ,

30113

V-040LV-SMB

DN40 L

STD , , JIS

30114

V-040LV-SMA

DN40 L

STD , , JIS

30115

V-040LV-SMN

DN40 L

STD , ,NW40

30120

V-065LV-SCL

DN65 L

STD , 1 ,

30121

V-065LV-SCB

DN65 L

STD , 1 , JIS

30122

V-065LV-SCA

DN65 L

STD , 1 , JIS

30123

V-065LV-SCN

DN65 L

STD , 1 ,NW63

30124

V-065LV-SDL

DN65 NC L

STD , NC 1 ,

30125

V-065LV-SDB

DN65 NC L

STD , NC 1 , JIS

30126

V-065LV-SDA

DN65 NC L

STD , NC 1 , JIS

30127

V-065LV-SDN

DN65 NC L

STD , NC 1 ,NW63

30128

V-065LV-MCL

DN65 L MSB

MSB , 1 ,

30129

V-065LV-MCI

DN65 L MSB

MSB , 1 ,ICF114

30130

V-065LV-MML

DN65 L MSB

MSB , ,

30131

V-065LV-MMI

DN65 L MSB

MSB , ,ICF114

30132

V-065LV-SML

DN65 L

STD , ,

30133

V-065LV-SMB

DN65 L

STD , , JIS

30134

V-065LV-SMA

DN65 L

STD , , JIS

30135

V-065LV-SMN

DN65 L

STD , ,NW63

30140

V-100LV-SCL

DN100 L

STD , 1 ,

30141

V-100LV-SCB

DN100 L

STD , 1 , JIS

30142

V-100LV-SCA

DN100 L

STD , 1 , JIS

30143

V-100LV-SCN

DN100 L

STD , 1 ,NW80

30144

V-100LV-SDL

DN100 NC L

STD , NC 1 ,

30145

V-100LV-SDB

DN100 NC L

STD , NC 1 , JIS

30146

V-100LV-SDA

DN100 NC L

STD , NC 1 , JIS

30147

V-100LV-SDN

DN100 NC L

STD , NC 1 ,NW80

30148

V-100LV-MCL

DN100 L MSB

MSB , 1 ,

30149

V-100LV-MCI

DN100 L MSB

MSB , 1 ,ICF152

30150

V-100LV-MML

DN100 L MSB

MSB , ,

30151

V-100LV-MMI

DN100 L MSB

MSB , ,ICF152

30152

V-100LV-SML

DN100 L

STD , ,

30153

V-100LV-SMB

DN100 L

STD , , JIS

30154

V-100LV-SMA

DN100 L

STD , , JIS

30155

V-100LV-SMN

DN100 L

STD , ,NW80

358

Vol.8.8

Memorandum

Vol.8.8

359

951-7172

450

6.7 10

Pam /sec

1.

WC

2.
6.7 10 9Pam3/sec He

1 0.2MPa

450
4.

3.

OUTLET
INLET

5.

360

10 8Pa
6.7 10 9Pam3/sec
6.7 10 11Pam3/sec
450
1MPa
300
30

SUS-304
WC

Cu
70ICF
8 6SUS-304 (951-7170)
34ICF (951-7172)
951-9160 2
951-9160 2
951-9160 1
5 1
8 1
1.3kg

1. 2k g /cm2 He 70ICF

2. 70ICF Ar

Vol.8.8

951-7170 8SUS
951-7172 34ICF

951-9160

1
1

951-9160

951-9160

442

1125

513
951-7172

70
70 ICF

333

34
12.7

255

44.50.5

502
951-7170

7.5

34 ICF

1.

2.

3.

1901

4.

70ICF

Ar

31000

951-7170

70ICF 8SUS

31001

951-7172

70ICF 34 ICF

30824

951-9160

951-7170/7172

30825

951-9160

951-7170/7172

31802

951-9160

951-7170/7172

1901 500g

951-7170/7172

39730

Vol.8.8

361

951-7179
951-7180
951-7177
951-7178
951-7190
951-7192

951-7179

1.
10 7Pa
2.
951-7179

3.
150

951-7179
(38)

Pa

10

11

6.7 10

Pam3/sec 1

612

8.5mm
150
125

3
SUS304
SUS304L

70ICFNW25
0.5kg
12

1.

2.
3.

951-7180
(38)

(30)

612

362

Vol.8.8

25.33

(30)

951-7179951-7180

(10)

303

(10)

864

814

864
914

4.

 951-7177
951-7178

1.
10 7Pa
2.
125
3.
4.
951-7177

10 7Pa

6.7 10 11Pam3/sec 1

3.5mm

125 2

SUS304

Ni

70ICFNW25
0.4kg
34

(38)

(22)

951-7177

(10)

951-7177951-7178

27.33

572
70ICF

1.

2.

951-7178

84.54
91.54

(38)

(10)

(22)
323

874

804

572

NW25

Vol.8.8

363

 951-7190
951-7192

951-7190

1.
10 7Pa
2.

951-7190

125
3.

38

951-7190951-7192

10 7Pa

6.7 10 11Pam3/sec

10mm

125

25.4

O
SUS304

SS34
Ni
70ICFNW25
0.5kg
56

70 ICF

951-7192
38

67.73

633

25.4

NW25

31030

951-7190

70 ICF
O

31010

951-7177

70 ICF
O

31020

951-7179

70 ICF

364

Vol.8.8

31031

951-7192

NW25
O

31011

951-7178

NW25
O

31021

951-7180

NW25

Vol.8.8

365

 1 2

V 025SV

1.

2.

1.
2.

3.

366

Vol.8.8

AC200V
AC100V

V-025SV-100

V-025SV-200
10-2Pa

<10-6Pa.m3/sec

420L/min

15sec

1
2

0.5sec

10,000 1

O
O

SUS-304

NW25

10 40 90

1AC100V50/60Hz3.1W

1AC200V50/60Hz3.4W

1kg

1. 20
3.

2.
4.

102

58

300mm
AWG24

73

NW25

15

50

41

40

NW25

50

91

47

141

31092

V-025SV-100

V-025SV-100

NW25 ,AC100V

31093

V-025SV-200

V-025SV-200

NW25 ,AC200V

Vol.8.8

367


MSB

951-7788

1506

200

10 8

Pa

1.5 81012

1.

10

Pa

2.

3.
4.

5.

368

Vol.8.8

10 8Pa

6.7 10 11Pam3/sec 1
150 125

23

1 133Pa

10,000 5,000 1

O
SUS321 O

SUS304
SUS304

ICF

1.54 0.30.5MPa
612 0.40.5MPa

4 AC200V 50/60Hz4

5
1.
2.
3.
4.
5.

Rc1/4 PT1/4

O
50
6 200
AC100V 50/60Hz DC24V

1.5
2.5

3 kg

3.5kg

7.9kg

8.4kg

12.6kg

13 kg

19.8kg

20.6kg

30.8kg

31.8kg

10

54 kg

12

74 kg

1.5

65L/sec

2.5

203L/sec

600L/sec

1,450L/sec

2,730L/sec

10

4,350L/sec

12

6,420L/sec

Vol.8.8

369

O
A

H
I

Rc1/4

AC200V
50/60Hz
4

1.5

ICF 0

ICF

1.5

70

38

12.7

6-M6

951-7733
951-7738

2.5

114

64

17.5

8-M8

12

951-7743
951-7748

152

102

20.0

16-M8

15

951-7753
951-7758

203

152

22.0

20-M8

15

951-7763
951-7768

253

203

25.0

24-M8

17

951-7778

10

305

254

28.0

32-M8

19

951-7788

12

356

305

28.5

30-M10

19

951-7723
951-7728

1.5

138

103

51.4

951-7733
951-7738

2.5

216

159

951-7743
951-7748

284

951-7753
951-7758

951-7763
951-7768

62

105

105

71

78

206

208

78

80

380

278

90

485

358

951-7778

10

601

951-7788

12

700

951-7723
951-7728

108

18

70

51

53

48.5

103

156

156

27

114

64

64

47.5

103

225

180.5

190

39

148

74

74

46.5

103

70

88

225

184

246

67

204

74

90

41.5

103

84

100

92

258

224.5

296

83

254

86

100

44.5

103

100

443

116

102

227

358

113

316

110

44

103

100

518

127

114

241

414

138

370

137

40.5

103

110

3 8

370

Vol.8.8

125AC

5
8VDC

14VDC

30VDC

115VDC

0.3

300mm
COM
COM

AOUT 2
BOUT 1

PIN

PIN AOUT 2

B OUT 1

R EXH

BOUT 1 AOUT 2

REXH

AC200V, 50/60Hz

31212

951-7723

1.5

70 ICF

31222

951-7733

2.5

114 ICF

31232

951-7743

152 ICF

31242

951-7753

203 ICF

31252

951-7763

253 ICF

31312

951-7728

1.5

70 ICF

31322

951-7738

2.5

114 ICF

31332

951-7748

152 ICF

31342

951-7758

203 ICF

31352

951-7768

253 ICF

31362

951-7778

10

305 ICF

31372

951-7788

12

356 ICF

Vol.8.8

371


STD

951-7755

951-7750

150

1.5 810

12

10

Pa

1.

10

Pa

2.

3.

4.

5.

372

Vol.8.8

10 7Pa

6.7 10 11Pam3/sec

150 125

1 133Pa

10,000 5,000 1

O
SUS304
SUS304

ICF JIS

4
1.
2.
3.
4.

1.54 0.3 0.5MPa

612 0.4 0.5MPa

4 AC200V 50/60Hz3

Rc1/4 PT1/4

O
50
AC100V 50/60Hz DC24V

ICF

1.5

JIS

2.3kg

2.5

3.0kg

ICF
2.8kg

JIS
3.5kg

6.4kg

6.6kg

6.9kg

7.1kg

10.3kg

10.8kg

10.7kg

11.2kg

17.8kg

18.3kg

18.6kg

19.1kg

28.6kg

31.8kg

29.6kg

32.8kg

10

50kg

52kg

12

70kg

72kg

1.5

ICF

JIS

65L/sec

69L/sec

2.5

203L/sec

225L/sec

600L/sec

649L/sec

1,450L/sec

1,560L/sec

2,730L/sec

2,870L/sec

10

4,350L/sec

4,610L/sec

12

6,420L/sec

6,740L/sec

Vol.8.8

373

 ICF

O
A

H
I

Rc1/4

1.5

ICF 0

AC200V
50/60Hz
4

ICF

1.5

70

38

12.7

6-M6

2.5

114

64

17.5

8-M8

12

152

102

20.0

16-M8

15

203

152

22.0

20-M8

15

253

203

25.0

24-M8

17

951-7775

10

305

254

28.0

32-M8

19

951-7785

12

356

305

28.5

30-M10

19

951-7720
951-7725
951-7730
951-7735
951-7740
951-7745
951-7750
951-7755
951-7760
951-7765

51

105

71

64

208

78

380

278

485

951-7775

10

951-7785

12

951-7720
951-7725
951-7730
951-7735
951-7740
951-7745
951-7750
951-7755
951-7760
951-7765

1.5

138

103

51.4

2.5

216

159

284

105

96

18

70

51 53

206

156

144

27

114

74

225

180.5

182

39

90

82

225

184

240

358

100

86

258

224.5

601

443

116

97

700

518

127

107

48.5

103

64 64

47.5

103

148

74 74

46.5

103

70

67

204

74 90

41.5

103

84

295

83

254

86 100

44.5

103

100

227

354

113

316

110

44

103

100

241

407

138

370

137

40.5

103

110

0 5

374

Vol.8.8

AC125

1.5

0.7

2.5

1.3

250

0.5

1.5

0.8

DC

14

30

125

0.4

0.05

0.4

0.05

250

0.2

0.03

0.2

0.03

300mm
/ COM
/ COM

AOUT 2
BOUT 1

PIN

REXH

PIN AOUT 2
BOUT 1 REXH

BOUT 1 AOUT 2

AC200V, 50/60Hz

Vol.8.8

375

ICF
31210

951-7720

1.5

70 ICF

31220

951-7730

2.5

114 ICF

31230

951-7740

152 ICF

31240

951-7750

203 ICF

31250

951-7760

253 ICF

ICF
31310

951-7725

1.5

70 ICF

31320

951-7735

2.5

114 ICF

31330

951-7745

152 ICF

31340

951-7755

203 ICF

31350

951-7765

253 ICF

31360

951-7775

10

305 ICF

31370

951-7785

12

356 ICF

376

Vol.8.8

Memorandum

Vol.8.8

377

954-7620

954-7605

10 8Pa

(954-76037604760576067607

1.
3kgcm 100kgcm

2.

954-7640

3.

500rpm

4.

5.
2
(954-7630

378

Vol.8.8

T 40 T

954-7603

80

954-7604

II

40

954-7605

954-7606

954-7607

II

II

II

II

80

40

60

10

40

40

40

40

120

40

480

40

60

20

400

40

400

40

160

40

500

40

60

20

400

40

400

40

600

80

600

80

60

30

400

40

560

120

600

80

600

80

60

30

400

40

560

120

600

80

600

80

60

30

400

40

560

120

200

40

200

40

60

10

200

40

300

20

I
II 5mm

954-7604

954-7605

954-7606

954-7607

34ICF

70ICF
8

12

0.5Nm

1.6Nm

1.6Nm

5.9Nm

9.8Nm

0.44Nm

1.42Nm

1.42Nm

5.3Nm

8.8Nm

954-7603

500RPM

100

100

1.3 10

0.72kg

100

11

100

Pam /sec

2.6kg

2.5kg

300150400

ICF

954-7603

954-7604

954-7605

954-7606

954-7607

SUS 304

SUS304

Vol.8.8

379


(954-7620954-7630954-7640

954-7620

954-7630

954-7640

70ICF

34ICF

2Nm

1.2Nm

0.3Nm

1Nm

0.6Nm

200rpm

200

100rpm

1.3 10 11Pam3/sec

1.3 10 11Pam3/sec
SUS-304
SUS-304

1.15kg

0.33kg

0.74kg

ICF

954-76037604

38

420.5

34ICF

19

0.01
0.03
151

27.5

90.5

501.5

1182
168

380

Vol.8.8

8.5

954-7605

32

70 ICF
0.05
8 0.1

3
aa

62

58

57.2

20
R2.4O

29

3.5

135
9

155

571

954-76067607

70 ICF

14

30

58

36

620.5

12 0.02
0.05
201
20.5

10

136.5

501.5

1572

207

954-7620

502

125
50

70 ICF

2
70
93

Vol.8.8

10

55.2
60

47

38

20

32

0.05
0.1

34 0

2.4R

20 10
66

381

954-7630
34 ICF

15

40

32

16

32

5.9

0
0.1

10

35

15
502

91

954-7640

61

60

42

200

60

10

0.5

22

15

6 0
0.1

19.5

19.2

34 ICF

38

18.8

56.5

502

104.5

154.5

954-7603 7604760576067607
O

954-7620

954-7640

50rpm

382

Vol.8.8

1. SUS304

33.5

11.52

20

34

0.01

15

72

42

6 0.03

25

R2
B

20

1
954-76037604

0.02

25

(33)
(6)

15

62

12 0.05

R2
-0.05

8-0.1

1.6

15

(62)

20

2
954-76067607

R2

954-7605H

A
B

2.
MoS2 954-7640 Ag

36500

954-7630

34 ICF

36501

954-7640

34 ICF

36520

954-7620

70 ICF

36502

954-7603

34 ICF

36503

954-7604

34 ICF

36521

954-7605

70 ICF

36522

954-7606

70 ICF

36523

954-7607

70 ICF

Vol.8.8

383

954-7621

10

Pa

1.

5. 1 1mm

2.

20
6. 954-76267627

3.

4.

954-7621

70ICF

20mm

196N

300

0.6kg

954-7622

70ICF

40mm

196N

300

0.7kg

954-7623

34ICF

20mm

147N

300

0.48kg

954-7626

34ICF

25mm

147N

200

0.9kg

954-7627

34ICF

40mm

147N

200

1.1kg

1.3 10 11Pam3/sec

954-762176227623

384

954-76267627

Vol.8.8

70 ICF

954-7621

6 0.2

0.1

44

10
5
0

38

3 0

40

39

Max50
Min30

1392

954-7622

70 ICF
2

0.1

44

10
5
0

20
15

38

70

3 0

6 0.2

6
60max80
min40

73
2052

954-7623

40max50
min30

38.5

5
0

10

34

2.5

32

6 0.05

34 ICF

70.5
160.52

60
3

954-7626

37

26

2 M3

0
2

42

10

15

25

20

0.1
0

16

6 0.05

34 ICF

20

42.5
max55 min30

23 17.5

107.5

max30 min5

60
3

954-7627

1
37

26

2 M3

42

10

15

20

25

30

40

35

0.1

3 0

16

6 0.05

34 ICF

5
50
max70 min30

20
140

2.5

23

max45 min5

36600

954-7623

34 ICF 20mm

36620

954-7621

70 ICF 20mm

36621

954-7622

70 ICF 40mm

36622

954-7626

34 ICF 25mm

36623

954-7627

34 ICF 40mm

Vol.8.8

385

R/L

1.

2.

3.

954-7670

954-7671

954-7672

70ICF

0.4Nm

29.4N
100

386

250mm

750mm

1000mm

200g

500mm

954-7673

1.33 10
2.3kg

11

Pam /sec1 10 10TorrL/sec

2.6kg

2.9kg

Vol.8.8

3.2kg

M4

60

27.2

24

M6

32

17.3

70 ICF

10
33.533.5

305

30

10 10

100

150

M6

954-7670

250

954-7671

500

954-7672

750

954-7673

1000

954-7670

R/L

250mm

36641

954-7671

R/L

500mm

36642

954-7672

R/L

750mm

36643

954-7673

R/L

1000mm

36640

42

60.8

42

155

Vol.8.8

387

954-7210
100A 2P

ICF

954-7276
MHV

1. ICF

3.

4.

2.

388

Vol.8.8

954-7245
5A

5A

5A

3A

954-7238
37
HF

1.57
954-7276
2.4 5.5
MHV
19.5
1.2 115 2
954-7227
1.2 0.9 115
2W2T
2

953-9900953-9901

954-7209
6 130

100A 6.2 Ni
1.5 91

100A

DC7kV

953-9910
100A
100A

93g

100AL

DC1kV

954-7326
#16

50g

AC1.5kV
r.m.s

60g

DC5kV

50g

5A/
2
DC1kV
2

50g

N-P-3-AS
HF

34ICF

UG-932/U
MHV

953-9900953-9901

954-7203
6 130

100A 6.2 Ni

954-7210
6 130

100A2P 6.2 Ni

100A/

DC7kV

380g

953-9910
100A

954-7260
4P

6.1 125

50A/

DC1kV

510g

954-7261
4P
MS

954-7207
400A

15.8 140

Ni

400A

DC3kV

540g

954-7241
15.8 11.5
400A 190
Ni

400A

DC3kV

450g

100A

DC7kV

953-9910
100A
100A 953-9916

330g

100AL

70ICF
1.6 64.5 4

1.6 68 2

954-7221
8W

1.2 250

5A/

DC1kV

235g

5A/

DC1kV

270g

954-7225
8T

1.2 0.9

250

DC1kV

270g

954-7223
4W4T

1.2 250 4
1.2 0.9 250
4

DC1kV

270g

954-7252
13P

1 24

5A/

953-9900953-9901
100A
953-9916
100AL

953-9907
400A F
953-9917
400A L
953-9907
400A F
953-9917
400A L

954-7291
6P
MS

954-7326 16

954-9254
13P
MS

954-7256 20

12

5A/

DC1.5kV

300g

MS

300

25 /min

954-7276MHV 954-7238 HF 1000M

5000M

1.3 10 11Pam3/sec

Vol.8.8

389

954-7290
6P

954-7326 16


954-7209
100A

4
49.82

6.2

19

34 ICF

80.2
130

954-7245
5A
91
51

1.5

401

34 ICF

954-7238
HF

34 ICF

34

13.5

M2
15.9

5/8-24-NEF-2A
1.65

8
7.5

2.5

33.5
72

7.5

5.5

2.4

1.57

3.5

9.6

954-7276
MHV

19.52

27.5

34 ICF

390

Vol.8.8

19.11

954-7227
2W2T
34 ICF

1.20.9

151

10

45

702
1151

1.2

954-7203
100A

70 ICF

6.2
19

4
57.72

72.3
130

954-7210
100A2P

ICF

19

26

19

6.2

70

52.32

6.2

77.7
130

954-7260
4P

1251

50

12.7

5.71

45
34

10

6.1

.5
3.2

47.5

3.5

14

.5

14

45

21

2-18UNS-2A

70 ICF

Vol.8.8

391

954-7207
400A

140

33

15.8

70.6

15.8

69.42

70 ICF

954-7241
400A

190

33

15.8

15.8

120.2
11.5

69.82

.8

C0

70 ICF

954-7290
6P

70 ICF

2-18UNS-2A

MAX DIA
36.5

5
26.52

30

401

702
70ICF 38

7.4

954-7225
8T

20
1.2x0.9

954-7223
4W4T

250
203.2 26.8

31.3

954-7221
8W

70ICF

392

Vol.8.8

954-7252
13P

121

41.7

7.1

42.5

20

5.6

9.35

1 3/4-18NS-2A

70 ICF

954-7326

16

954-7276
MHV
954-7245
5A
954-7290
6P
MS

AWG16-18

5A

Be-Cu

250

M22520/1-01
M22520/1-02
( )

0.8g

954-7256

20

954-7252
13P

AWG20-24

5A

250

M22520/1-01
M22520/1-04
( )

0.15g

954-7326
16

2.87

3.7

2.59

1.73

21.44

6.35

8.3

954-7256
20

6.7

1.2

1.8

2.3

13.3

Vol.8.8

393

UG-932/U

20 160

RG-5962/U
AC5000V/1
25g

MHV

954-7276 MHV

BNCH-CS

954-7276 MHV

N-P-3-AS

HF

954-7238 HF

951-7261

4P

954-72604P

AC 900V
DC1250V

80A

50 125

951-7291

6P

954-72906P

AC 500V
DC 700V

13A

50 125

951-9254

13P

954-725213P

AC 500V
DC 700V

13A

50 125

20 160

: 3C2V
3D2V
MS
#4
MS
#16-18
MS
#16-18

10.3
38.5

BNCH-CS

12.7

6.6

14.5

UG-932/U
MHV

57

14.5

18

4.5

N-P-3-AS
HF
43

21

6.2

394

Vol.8.8

954-7261
4P

71.4

61.4

52.2

34

56.4

19
31.5

954-7291
6P
112

C
E

31.5

56.33

A
G H

19

BG

954-9254
13P

11

10

9
6 7

50

1 12

57.7

Vol.8.8

395

19
31.5

953-9900

100A

953-9901

100A

953-9910

100A

954-7209
954-7203
954-7210

100A
100A
100A2P

953-9916

100AL

953-9903

400A

954-7207

400A

953-9917

400AL

954-7241

400A

953-9900
100A

35
23

1.5

17

M6

6.2

953-9901
100A

45
10
12

20

2-6.5
1.5

953-9910
100A
30
15

1.5

20

2-6.5

6.2

396

Vol.8.8

953-9916
100AL

1.5

23
17

10

9
5

1.5

17
23

2-6

10

45

2-6.2

35

953-9903
400A

45
36

22

1.6

20

6.5

953-9917
400A L

15

7.5

10 16

10
2

15
7.5

58
40

15
7.5

52

16.2

37
43

20
10
2

25

16.2

Vol.8.8

397

MS

954-7911

3P

4P

6P

954-7942

10P

954-7952

14P

954-7912
954-7921
954-7922
954-7931
954-7932

70g

34ICF

340g

70ICF

70g

34ICF

340g

70ICF

954-7915 3P
954-7925 4P

70g

34ICF

340g

70ICF

10

340g

70ICF

954-7945 10P

14

340g

70ICF

954-7955 14P
954-7965 19P

954-7935 6P

954-7962

19P

19

340g

70ICF

954-7972

24P

24

320g

70ICF

954-7975 24P

954-7982

37P

37

330g

70ICF

954-7985 37P

954-7993

48P

48

1140g

114ICF

954-7995 48P

3A/1

AC350Vr.m.s
DC500V

1000M

350

15 /min

1.3 10 11Pam3/sec

954-7326954-7327 16

1.57

398

Vol.8.8


A
B
A

1.57

1.57

954-7911
954-7912

3P

954-7921
954-7922

4P

954-7931
954-7932

6P

10P

954-7952

14P

954-7962

19P

954-7972

24P

48.2

40.3

37.5

37.5

48.2

40.3

37.5

37.5

48.2

40.3

37.5

37.5

45.3

42.5

45.3

42.5

45.3

42.5

45.3

42.5

35

20.1

11.2

34ICF

3.3

70ICF
NW25

7/8-20UNEF

NW40
35

20.1

11.2

34ICF

3.3

70ICF
NW25

7/8-20UNEF

NW40
35

20.1

11.2

34ICF

3.3

70ICF
NW25

7/8-20UNEF

NW40
40

26.1

3.3

70ICF
NW40

40

29.6

3.3

70ICF
NW40

40

32.6

3.3

70ICF
NW40

40

36.6

3.3

70ICF
NW40

954-7942

11/8-18UNEF
11/4-18UNEF
13/8-18UNEF
11/2-18UNEF

954-7982

37P

45.3

40

41.1

3.3

70ICF

13/4-18UNS

954-7993

48P

49.5

40

53.1

7.5

114ICF

21/4-16UN

A
B

A
D

M
E

E
c
a

55

55

40

1.57

1.57

Vol.8.8

399

3P
954-7911
954-7912

R
F

J
Q
V

H
P
U
Z

G
N

K
R

U
S

T
a

b
j

37P
954-7982

K
Y
g

h
w

48P
954-7993

Vol.8.8

W
e

d
m

n
u

C
J

R
Z

E
L

400

19P
954-7962

24P
954-7972

E
G F
P N M
L K
R
X W
Z
V U T
f e d c b a
m k
j h g
s r q n
J

B
D

K
T

14P
954-7952

10P
954-7942

I
N

6P
954-7931
954-7932

K
L

J
D

4P
954-7921
954-7922

16
954-7326

AWG16-18

5A
Be-Cu

3A

250

M22520/1-01
M22520/1-02

0.8g

ACr.m.s

DC

954-7915

3P

3P

500V

700V

108

54.8

7.9

27

24.6

954-7925

4P

4P

200V

250V

108

54.8

7.9

27

24.6

954-7935

6P

6P

200V

250V

108

54.8

7.9

27

24.6

954-7945

10P

10P

200V

250V

108

63

14.3

31.8

30.2

500V

700V

111

69.1

15.9

36.7

34.9

500V

700V

111

69.1

15.9

36.7

34.9

200V

250V

113

75.5

15.9

42.4

42.1

954-7955

14P

14P

954-7965

19P

19P

954-7975

24P

24P

13A/

3A

954-7985

37P

37P

200V

250V

113

75.5

15.9

42.4

42.1

954-7995

48P

48P

500V

700V

111

79.8

23.8

57.9

56.4

55 125
5,000M

1.76
A.W.G 16 22

A2

B3

Vol.8.8

401


1.6

15

952-780615
954-7832
954-7833
954-7834

AB
A100, 200, 300, 400, 500
B1000, 2000

60

40

B
2
20

1.6

150.1

M3

1 1

402

Vol.8.8

 MS

954-7917
954-7918

70g

34ICF

340g

70ICF

954-7928

10

340g

70ICF

954-7938

14

340g

70ICF

954-7948

12

24

12

320g

70ICF

954-7328

954-7329

954-79142
954-79245
954-79347
954-794412

AC350Vr.m.s
DC500V

1,000M

350

15 /min

1.3 10 11Pam3/sec

954-7328 16
954-7329 16

1.57

Vol.8.8

403


A
B
A
B

1.57

1.57

954-7918

954-7917

48.2

40.3

35

20.1

11.2

34ICF

3.3

70ICF

7/8-20UNEF

954-7928

45.3

40

26.1

3.3

70ICF

11/8-18UNEF

954-7938

45.3

40

29.6

3.3

70ICF

11/4-18UNEF

954-7948

12

45.3

40

36.6

3.3

70ICF

11/2-18UNEF

2
954-7917
954-7918

I
J
D

5
954-7928

J
K I
L N
H

B
C

G
E

7
954-7938

2. ( ) ( )

404

Vol.8.8

H
P

D
J

U
Z

E
G F
N M L K

12
954-7948

954-7328

16

954-7329

16

AWG16-18

125

954-7328
16
954-7329
16

M22520/1-01
M22520/1-02

0.86g
0.87g

24.5

1.8

2.6

8.3

12

3.2

3.2

954-7914

103

49

27

25

954-7924

108

64

14

32

30

954-7934

108

66

16

37

35

954-7944

12

12

113

73

16

43

42

A2

B3

55 125

#16

AWG16-18

Vol.8.8

405

954-7209
100A
954-7245
5A
954-7238
HF
954-7276
MHV

954-7227
2W2T
954-7203
100A

954-7210
100A2P
954-7260
4P

954-7207
400A
954-7241
400A

954-7290
6P
954-7221
8W

954-7225
8T
954-7223
4W4T
954-7252
13P

954-7911
3P

954-7921
4P

954-7931
6P
MS

34 ICF

954-7912
3P

954-7922
4P

954-7932
6P

954-7942
10P

954-7952
14P

954-7962
19P

954-7972
24P

954-7982
37P
MS

70 ICF

114 ICF

954-7993
48P

36400

954-7917

34ICF,KCA

36405

954-7918

70ICF,KCA

36410

954-7928

70ICF,KCA

36415

954-7938

70ICF,KCA

36420

954-7948

12

70ICF,KCA

406

Vol.8.8

954-7914

2 ,KCA

954-7924

5 ,KCA

954-7934

7 ,KCA

954-7944

12

12 ,KCA

954-7328

#16

954-7329

#16

954-7227

2W2T

34ICF ,DC1KV,W 5A,

954-7223

4W4T

70ICF ,DC1KV,W 5A,

954-7221

8W

70ICF ,DC1KV,5A,

954-7225

8T

70ICF ,DC1KV,

954-7245

5A

34ICF ,DC1KV,5A,

954-7290

6P

70ICF ,DC1KV,5A,

954-7291

6P

954-7290

954-7252

13P

70ICF ,DC1.5KV,5A,

954-9254

13P

954-7252

954-7256

#20

954-7252

954-7276

MHV

34ICF ,DC5KV,3A,

UG-932/U

MHV

954-7276

954-7238

HF

34ICF ,DC3KV,5A,

BNCH-CS

954-7276

NP-3A-S

HF

954-7238

954-7260

4P

70ICF DC1KV,50A,

954-7261

4P

954-7260

954-7209

100A

34ICF ,DC7KV

954-7203

100A

70ICF ,DC7KV

954-7210

100A2P

70ICF ,DC7KV

953-9900

100A

954-7209,7203,7210,

953-9901

100A

954-7209,7203,7210,

953-9916

100AL

954-7209,7203,7210

953-9910

100A

954-7209,7203,7210

954-7207

400A

70ICF ,DC3KV,400A

954-7241

400A

70ICF ,DC3KV,400A

954-7911

3P

34ICF

954-7912

3P

70ICF

954-7921

4P

34ICF

954-7922

4P

70ICF

954-7931

6P

34ICF

954-7932

6P

70ICF

954-7942

10P

70ICF

954-7952

14P

70ICF

954-7962

19P

70ICF

954-7972

24P

70ICF

954-7982

37P

70ICF

954-7993

48P

114ICF

954-7915

3P

954-7911,954-7912

954-7925

4P

954-7921,954-7922

954-7935

6P

954-7931,954-7932

954-7945

10P

954-7942

954-7955

14P

954-7952

954-7965

19P

954-7962

954-7975

24P

954-7972

954-7985

37P

954-7982

954-7995

48P

954-7993

954-7326

#16

954-7245,7290,7276,

Vol.8.8

36235
36237
36239
36242
36260
36265
36100
36101
36102
36103
36110
36111
36200
36112
36201
36250
36120
36203
36121
36206
36204
36130
36205
36140
36141
36142
36270
36271
36275
36276
36150
36151
36160
36163
36166
36169
36172
36175
36178
36181
36184
36187
36190
36193
36210
36213
36216
36219
36222
36225
36228
36231
36232
36251

407

ICF
10 8Pa

1.
952-70427043

5.

AL2O3

2.

ICF

954-7042

7043

3.

0.1MPa

350

25 /min

1.3 10 11Pam3/sec

100
80

350
4.

60

40

20

0.1

0.15

0.2

0.3 0.4

0.7

1.0

2.0

4.0

408

Vol.8.8

6.0

8.0

w
q
A
C

SUS-304

954-7001

34ICF

34ICF

20

15

2.9

D
34

10

1.8

0.05kg

70ICF

70ICF

43

32.6 70

14

3.5

0.25kg

114ICF

114ICF

72.5 3

60

114

19

4.5

0.85kg

954-7004

152ICF

152ICF

113 5

98

152

22

6.1

1.4kg

954-7005

203ICF

203ICF

163 0

143 203

24

8.6

2.5kg

954-7002
954-7003

B
B

954-704270ICF

954-7043114ICF

SUS-304

954-7042

70ICF

954-7043

114ICF

70ICF

40

33

70

12.7

2.5

0.25kg

114ICF

56

62

114

17.5

3.0

0.97kg

Vol.8.8

409

SUS-304

954-7012

954-7013

1.

954-7014

2. 4

954-7015

954-70027042
70ICF

954-70037043
114ICF

954-7004
152ICF

954-7005
203ICF

72.7

20

0.4

116.7

25

0.4

154.7

29

0.6

205.7

32

0.6

SUS-304

1.

954-7022

38

954-7023

54.9

954-7026

60.2

954-7025

147

2.

410

954-7032

954-7022

35

954-7033

954-7023

51

954-7036

954-7026

56

954-7035

954-7025

142

954-7034

954-7024

91

Vol.8.8

954-7001

34ICF

34ICF

36301

954-7002

70ICF

70ICF

36302

954-7003

114ICF

114ICF

36303

954-7004

152ICF

152ICF

36304

954-7005

203ICF

203ICF

36311

954-7042

70ICF

70ICF

36312

954-7043

114ICF

114ICF

36340

954-7012

70

70ICF 70ICF

36341

954-7013

114

114ICF 114ICF

36342

954-7014

152

152ICF

36343

954-7015

203

203ICF

36350

954-7032

35

70ICF

36354

954-7036

56

114ICF

36370

954-7022

38

70ICF

37374

954-7026

60.2

114ICF

36372

954-7024

95.6

152ICF

Vol.8.8

411

36305

E 1964

4.

X Y

1. AL

5.

WTaMo

20010 8Pa

2.

3.

980-7100980-7300980-7250

250
980-7102980-7104
980-7302980-7311
6.

1.

7.

980-7110

2.

6keV
8. E

EB

3.
10kW

EGP-210RS

EB

1/2 1/3

412

Vol.8.8

 E
E

EB

2kW
0

2
0

2
0

2
1 250

98071
2kW3 04

980
98 -7300
0-73
3kW 02

98074
3kW4 01

980
98 -7310
0-73
10kW 11

98071
6kW5 10

98072
10kW 50

98071
10kW 14
4

BE
Si-M

10kW
0
2

2
0

20

250

200

3.7

53

22

11

150

200

150

220

6kW

270

270

270
150

10kW

10kW

kW
10

3.8

10

3kW
4

220

2kW

98071
10kW 14SH
6

3kW
0

2
0
2
0
2

2.5 250

220
250

980
98 -7100
0-71
2kW 02

AX
M

L
m

980-710273027311

Vol.8.8

413

E
980-7100/980-71022kW E

1. 980-7100

2.
3.
4. 10-8Pa
5.

980-7100

980-7100

980-7102

4kV

4kV

0 500mA

0 500mA

10V 25Amax

10V 25Amax

1Amax

8mm

18 12 6mm

18 12 6mm

1mL

1mL

220

2L/min

220

6.7 10 3Pa

6.7 10 3Pa

200max

250max

1.3kg

1kg

10

922-9203 2kW E
EGP-230 EGP-212S-C

922-9203 2kW E
EGP-230

2L/min

AD B 320B C 76

0 50 180

414

0 50 180

119 329 69 329A = D = 0

43 260

Vol.8.8


46

1975
C

8.5

1115

980-7102E
980-7301
980-7100E

2.3

34

48

19.5
70

980-7301

13

120.5

7.8

98.1

60.3

180.5

48.1

2922

70ICF

L=2M
953-9904 100A

980-7100 2kWE

954-7830

954-7210 100A2P

954-5110

922-9203

S SUS304 WA6

S SUS304 WA6

H SUS304 MS622

R1/8

H SUS304 MS630

953-5014

Rc1/8
952-9830

953-9230

L=5004
A HEX SUS304 N6
954-7922 4P
S SUS304 WA6
HEX SUS304 MS622

980-7100E

Vol.8.8

415

 980-7104 2kW 3 E

980-7104

4kV

0 500mA

10V 25Amax

400

18 12 6mm

1mL

220

2L/min

1. 10 8Pa

6.7 10 3Pa

250max

2. 3

4.4kg

3.

10

922-9203 2kW E
EGP-230

381
1462

61

802

3425 38

381

30.52

31.51

92

1783
39.92

34.12

3925 38
146.52

7.51

181

2513 38
121

416

67.52

112.52

962

941
341

980-7104E
300

451

34.51

1783

192.51

Vol.8.8

381

1462
301.53 38

61

802

2915 38

381

30.52

34.12

31.51

7.51

2283
39.92

92

3415 38
146.52

181

121

67.52

242.51

112.52

962

941
341

980-7104E
400

451

34.51

2283

400

350mm

67mm 300
980-7100 2kW
E 70ICF

Vol.8.8

417

 980-7300/7302 3kW E

1. 980-7300

2.
2kW
2.5mL
3.
4. 10 8Pa

5.
980-7001
980-7300E

980-7300

980-7300

980-7302

5kV 4kV

0 500mA4kV
0 600mA5kV

0 500mA0 600mA5kV

5kV 4kV

10V 25Amax

10V 25Amax

1Amax

8mm

22 18 8mm

22 18 8mm

2.5mL

2.5mL

220

3L/min

220
2

3L/min 2

6.7 10

Pa

200max

250max

1.3kg

1kg

10

EGP-230
EGP-212S

EGP-230

1 5kV
2

AD B 320B C 76

0 50 180

0 50 180

119 329 69 329A = D = 0

43 260

418

Vol.8.8


44

1975

10.5

1115

980-7302E 980-7301
980-7300E

2.3

34

50

70

19.5

980-7301

13

180.5

7.8

98.1

80.3

220.5

48.1

3120

70ICF

L=2M
953-9904 100A

980-7300 3kWE

954-7830

954-7210 100A2P

954-5110

922-9203

S SUS304 WA6

S SUS304 WA6

H SUS304 MS622

R1/8

H SUS304 MS630

953-5014

Rc1/8
952-9830

953-9230

L=5004
A HEX SUS304 N6
954-7922 4P
S SUS304 WA6
HEX SUS304 MS622

980-7300E

Vol.8.8

419

 980-7401 3kW 4 E

1. 171 100mm
YBaCu
4
2. 60mmMin.42mm

3. 1
2

4.

5.

980-7401

5kV

0 600mA

10V 30Amax

6.
980-7006

DC 2A

AC5Ap-p400/40Hz

24 20 10mm

3.8mL

225

14L/min
0.5L/min

10 2Pa 10 8Pa

200max

5kg

10

EGP-230 4
EGP-212S-D 1

12

Patent Number 5034590

044859

420

Vol.8.8

60

60

155

SS-4-VCR-4
CAJON

443

692

20

100.5

171

36

70ICF

78

50

60

2255

39

SS-4-VCR

175

30
15

240.5
200.5

54
75
88

10

954-74224P
980-74013kW4

954-7210
100A2P4
953-9910
12kV8

L=5008

Vol.8.8

421

 980-7110 6kW 5 E
/ /

980-7110

6kV

0 1A

9V 35Amax

1A

30 12 10mm

3.7mL

220

12L/min

6.7 10 3Pa

1.

150max

9.2kg

10

EGP-210RS-B

2.

3.

4. 5
5. 6kV

6.

7.

980-7005

954-7248
12kV
953-9910
12kV
A

70 ICF
953-5014

954-5110

954-7830

10

70 ICF

M6

954-7922

980-7110
E

16

954-7248
12kV

M6

980-7101

953-9230

980-7110E

954-7912 3P
980-7110
E

953-9910
12kV

980-7110E

422

954-7922

954-7605

Vol.8.8

160.6
94.5
43

1.8

8f8

.5
R1

14

18

66

98.9

70ICF

111
178.5

21.8

98

112

30

10

31.5

100

147.2

108.5

177.2

89.2

2255

3.5

060

260

60 A=0

-200

7
70

19.5

Vol.8.8

423

 980-725010kW E /

980-7250

8kV

0 1.25A

6V 35Amax

2.5A

20mm

50 48.5 28mm

53mL

270

14L/min

1. 50mL

6.7 10 3Pa

2.

200max

8kg

10

EGP-210RS-B

3. 10

Pa

4. Si-MBE
5.

Si-MBE

140

128
104
40

118

47

80 30
7
2-4.5

2255

33

91

52

102

177mm

=0 127mm
60mm
-137mm

424

0 60mm

Vol.8.8

10

 980-7310/7311 10kW E /

1. 980-7101
10mL
980-7311
2. 980-7311
980-7310
3. 108Pa
4.
980-7002
980-7310E

980-7310

980-7311

8kV

8kV

0 1.25A

0 1.25A

9V 35Amax

9V 35Amax

1A

34 18 18mm

34 18 18mm

10mL

10mL

220

220

12L/min

12L/min

6.7 10 3Pa

6.7 10 3Pa

200max

250max

2.9kg

2.5kg

10

10

EGP-210RS-B

EGP-210RS-A

X: 15mmY: 8mm

980-7310

AD B 420B C 75

300

300

450

118

350

40

Vol.8.8

425

980-7310

54

18

77

10

13

980-7301

980-7311E
980-7301
980-7310E

0 60mm
134mm
=0 84mm
60mm
-94mm

2255

73

103

12

33

180.5

130

340.5

180.5

53 30

70ICF

954-7248 12kV2
L=5002

953-9910 12kV2
954-7922 4P
L=5004

980-7310
10kWE

426

Vol.8.8

 980-7114 10kW4 E /980-7114SH 10kW6 E

1. 270
180 E

2.
3.

4.

5.

980-7114 10kW4

6. 4
980-7114
980-7114SH 6

7.

8.
980-7004

10kW 4 E

980-7114

980-7114SH
8kV 10kV

8kV 10kV

0 1A10KV
0 1.25A8KV

0 1A10KV
0 1.25A8KV

6V 35Amax

6V 35Amax

2.5A

2.5A

40 35 H20mm

29 24 H20mm

22mL

11mL

270

270

14L/min

14L/min

1.3 10 2Pa

1.3 10 2Pa

150max

150max

14.5kg

14.5kg

EGP-210RS-B

EGP-210RS-B

8kV

Vol.8.8

427

980-7114

117

IN
112

OUT

8
f8

43.5

2255

191.5
4-6.5

76.5

26.8

10

70ICF

IN

150mm
260mm

60mm
-200mm

33

134

120

OUT

(87)

77.9

104

184.6

258
182
76

980-7114
980-7114
E

953-9230

953-5014

954-5110

954-7830

10

954-7248
12KV
953-9910
12KV

954-7922

16

980-7114
E

980-7101

980-7101

954-7912 3P

954-7248
12KV

953-9910
12KV

980-7101

954-7922

954-7605

980-7114E

980-7114E

428

Vol.8.8

1
E

980-7003

110

80

980-7001

330

230
250

64SUS304-T
954-7210
100A2P

40

8.5

954-79214P
980-7300 E
203 ICF

203ICF

980-73003kW

5kg/cm2

954-7210100A2P 1E

954-79214P 1E

62

0.5MPaAir

AC100V
DC24V
4.5VA
1W 5 60

EGP-230
EGP-212S-B

Vol.8.8

429

160

180

980-7002

340

230
250

12 40

980-7310 E

108,
SUS304T-BA
954-7248
12kV
954-7921

4P

253 ICF

253ICF

980-731010kW

5kg/cm2

954-724812kV 2E

954-79214P 1E

102

0.5MPaAir

AC100V
DC24V
4.5VA
1W 5 60

EGP-212S-B

430

Vol.8.8

104

140

120

980-7003

230

340

250

40 11 40

954-7248
12kV
954-7921
4P

253 ICF

980-7250 E

253ICF

980-725010kW

5kg/cm2

954-724812kV 2E

954-79214P 1E

102

0.5MPaAir

AC100V
DC24V
4.5VA
1W 5 60

EGP-212S-B

Vol.8.8

431

170

120

980-7004

405

250

320

63

954-7911 3P

29

954-7640

954-7248
12kV
980-7114 E

954-7921 4P
305 ICF

305ICF

980-712010kW4

5kg/cm2

954-724812kV 2E

954-79214P 1E

954-7640
1100V 0.25A

102

954-79113P

954-79113P

30 100V 50/60Hz 0.25A

0.5MPaAir

AC100V
DC24V
4.5VA
1W 5 60

EGP-212S-B

432

Vol.8.8

160

120

980-7005

330

250

320

38

79

954-7911 3P

954-7640

980-7110 E

954-7248
12kV

954-7921 4P
305 ICF

305ICF

980-71106kW5

5kg/cm2

954-724812kV 2E

954-79214P

954-7640
1100V 0.25A

102
954-79113P

954-79113P

30 100V 50/60Hz 0.25A

0.5MPaAir

AC100V
DC24V
4.5VA
1W 5 60

EGP-212S-B

Vol.8.8

433

 980-7006
40
4E
4P1E

2420t10
3.8cc 4E

10

25.4

139

4P

171

40

2P4E
B

B
20
42
A

1E

I.C.F
253

130

12.7
25 20 30
163

AA

BB

4E

253ICF

980-74013kW4

954-7210 100A2P 4E

4P

102 / 14L/min
62 /
0.5L/min

980-7006

0.15 0.7MPa

M5 0.8

EGP-230 4
EGP-212S-B 1

19kg

980-7008

980-7008

434

Vol.8.8


922-92032kW E
E

1.

2.

DC 3.5kV 4.6kV

DC0 500mA

AC10V 30A

AC200V 15A 1 50/60HzA

500 500 1200

130kg

980-7100980-7102
980-7104

3m

3m

5m

5A

5m

1000

500

EGP-230 EGP-210RS

95

500

5m

Vol.8.8

435

 EGP-230 3kWE
2kW 3kW E

AC200V 10 11A
3 50/60HzA

3810VA 78

DC0 5kV3kW

0 600mA
High0 600mA Low0 60mA

AC8V/6V 35A

HV

780mA

0 10V
0 10V

HV ON/OFF

W467 H691 D701mm

1.

150kg

980-7100980-7102
980-7300980-7302
980-7104980-7401

XTC/2

2. 0
10V 0 10V
3. HV ON/OFF

467

5m

5m

2A

0.5A

701

436

2A

691
624

5m

OUT
AC/200V
SGFG

67

4.

Vol.8.8

 EGP-210RS
E

0 1.25A 8kV/0 1.0A 10kv

20kHz

SCR

2 p-p

FS 1.5A/FS 150mA

HV
DoorWaterVacuum

mm

W560 D550 H1587

190kg

INPUT
FIL 1 MAX CURR LOW/HI
FIL 2 MAX CURR LOW/HI
PROTECTION I) WATER
II) VACUUM
III) AUX
HV ON
HV OFF
HV SET H/L(6kV/8kV)
FIL 1 ON/OFF
FIL 2 ON/OFF
EMISSION EXT VR SW1
EMISSION EXT VR SW2
EMISSION SET 1
EMISSION SET 2
OUTPUT
HV ON ACK
ALM
EXT HV m
EXT 11 m
EXT 12 m

10kW
1/2 1/2 1/2
2.
20 30 sec 1/7
1/20
1
2 p-p
4.

5. 2 2

6. EGP-212

0 8kV/ 0 10kV

1. 20kHz

AC200V 10 60A 3 50/60Hz

A

3.

8kV1.25A

EGP-210RS-A
EGP-100 5m

5m

5m

1S

Vol.8.8

437

1287

550

1200

510

EGP-210RS
EGP-210RS EGP-210RS-A 210RS-E
1ch /2ch
2

EGP-210RS

EGP-211
EGP-212

1CH/2CH

EGP-210

EGP-211

EGP-210RS-A

1ch

EGP-210RS-B

1ch

EGP-210RS-C

2ch

EGP-210RS-D

2ch

2
1

EGP-210RS-E

2ch

2
2

438

EGP-212

Vol.8.8

EGP-212

NCS-254-PM

 EGP-212
EGP-210RS E

EGP-210RS

AC200V 2A 1 50/60Hz

DC

AC

2.5A

2Ap-p

50 100Hz

2.5A

2Ap-p

5 10Hz

mm

W265 D549 H149

14kg

INPUT
X WIDTH
X POSITION
Y WIDTH
Y POSITION

10k

OUTPUT
X CURRENT MON OUT2.2V/1A
Y CURRENT MON OUT2.2V/1A
SWEEP ALARM OUT
DC24V
EGP-212S-A980-7114980-7250
EGP-212S-B980-7110
EGP-212S-C980-7100980-7300980-7310
EGP-212S-D980-7401
EGP-212S-E980-7006980-7007980-7008

1. EGP-210RS
980-7110980-7300980-7100

2. ROM

EGP-212 EGP-210RS
EGP-210RS EGP-212S

3m EGP-212S 5m

3.

A
25

190

25

6.5

2.5

2A
COIL

240

CURRENTDC

24.5

225

140

P1
EXT

15

549

15

SWEEP CONTROLLER
WIDTH POSITION

FREQ
EXT

ALARM

POWER

149

MIN MAX
MODE
X

100

MIN MAX
Y

INT

4613U

24.5

Vol.8.8

439

E EGP-101 21P

2kW
3kW E 922-9203 12P

50

38

85

70

12

123
24
117

922-9203

EGP-101

980-7100 2kW E

954-7922
4P
16

980-7100
2kW E

953-9230

70 ICF

MIN200

953-5014

M6

2.3

922-9203

M6

953-9904
100A
952-9830

954-7210
100A2P

440

954-5110

70 ICF
954-7830

Vol.8.8

980-7112 14kW

EGP-210RS-B

XTC/2XTC/C

XTC/2XTC/C

EGP-210RS-BEGP-210RS 1 EGP-211
EGP-212 1

OSC

4.6 m9.1 m 30.5 m

EGP-210RS

XTC/2

EGP-210RS-B

HV

EGP-210RS

Vol.8.8

441

 2kW

2kW

BHBY
[mT]

BwBx
[mT]
W

BH

30

30
S

BY
Y

BH
20

20
X
Bw

10

10
Bx

BY

50

100

150mm

50

100

W.Xmm

150mm

H.Ymm

980-7102
980-7302

a L 50mm
L

B1, B2, B3
[mT]
B1
30

B1

X
X

B2

X N

S
B3

B2
20
S

B3

B1
B2
B3

10

50

b L 50mm

N
B2
B1

150

B1, B2, B3
[mT]

B3

100
Lmm

B1

30

X
X

B2
S

B1
B2
B3
980-7102980-7302 2 a
b
L 50mm

442

20
B3
10

50

100
Lmm

Vol.8.8

150

B1
[mT]

30

12

120

R60mm

20
N

S B

10
B1

50

100
Rmm

150

980-7102980-7302R R 60mm

B1
[mT]

EB

30

EB
980-7104
L60mm
B1

20

N2

N1
980-7102
980-7302

S1

S2

10

B1

B1

50

100
Lmm

150

980-7104 2kW3 980-7102980-7302L L 60mm

Vol.8.8

443


E 250mm

10,000

SiO()
Ti(7g)
Mo(11g)

SiO2()

ZrO2()

10,000

Au(13.7g)

1,000

TiO2()

( / min)

( / min)

1,000

250mm

100

250mm

E-GUN
100
0

E-GUN
10
0

0.5

1.5
(kW)

980-7110 6kW 5 E
980-7110 E

Hz
mm
SiO
30
15
SiO2
30
20
ZrO2
30
10
TiO2
30
10

Ni(45g)
Mo(45g)
A r (14g)

Cr(21g)

( / min)

1,000
250mm

E-GUN

100
0

(kW)

980-71106kW 5 E
980-7110 E

NiMoALCr

444

2kWE
980-7102 E

10,000

2
(kW)

Vol.8.8

980-73003kW E
980-7300
2.5mL

BiALSiCrMoSiO2

Y
10000

Bi

Ba

Cu
Y2O3
La

1000

/min

100
250mm

E-GUN
10

2
kW

Cr

10000

Si

Al

SiO2
10000

Ni

Al
Mo

1000

1000

/min

/min

100

100
250mm

250mm

E-GUN
10

Si

2
kW

E-GUN

10

Vol.8.8

2
kW

445

6
Si

50,000

Ti
Cu+Ta

20,000

A+Ta
AR

10,000
3

/min

Cr

Ta

Cu

5,000

2,000
/min
1

1,000

60

70

80

90

100

110

500
240mm

980-7112 E

A
10kW
25cm

200
100

E-GUN

10
kW

10kW E
980-7101 E
5mL Si2mL 4mL
1.3 2.7 10 3Pa

TaCr
A 8kW
Ta
Ta

1MIN
Zr

Si

1S

Cu

1S

10

1S

1S

/S

A/S

10

Zr

Ba

4
SiZrCuAR

5
1MIN

3kW 4 E
980-7401 E

446

YBa

Vol.8.8

420

250

20

160

150

7cm

10

100

50

50

100

A/cm2

7rpm

150

mm

10
20

24 cm

0.5

980-7101 E

500L/s

AL15g

8kW
3.3 m
15

100

200

300

400

mA

980-7101 E
8kV

AL
10kWE

10V
10eV

1.0

1.0

t/to

1.2
1.5

0.5

A
h

h/L=2.0

0.5

1.0

1.5

2.0

A
L

tto

Vol.8.8

447

15cm

15cm
SUS

15cm

15cm

40000

980-7102

2kW E

1mL

40001

980-7100

2kW E

980-7102 980-7301 1mL

40010

980-7104

2kW3 E

300 1mL 3

40011

980-7104

2kW3 E

400 1mL 3

40030

980-7302

3kW E

2.5mL

40031

980-7300

3kW E

980-7302 980-7301
2.5mL

40040

980-7401

3kW4 E

4 3.8mL

40101

980-7110

6kW5 E

980-7101 3.7mL

40203

980-7250

10kW E

53mL

40207

980-7310

10kW E

980-7311 980-7312 8mL

40206

980-7311

10kW E

8mL

40211

980-7114

10kW4 E

22mL 4

40214

980-7114SH

10kW6 E

611mL 6

40810

980-7001

203 ICF 980-7300E

40853

980-7002

253 ICF 980-7310E

40859

980-7003

253 ICF 980-7250E

40863

980-7004

305 ICF 980-7120E

40832

980-7005

305 ICF 980-7110E

40820

980-7006

253 ICF

980-7008

253 ICF

448

Vol.8.8

40500

922-9203

2kW 3

40503

EGP-230

3kW

40535

EGP-210RS-A

10kW FC1

40536

EGP-210RS-B

10kW FC1 SC1

40537

EGP-210RS-C

10kW FC2

40538

EGP-210RS-D

10kW FC2 SC1

40539

EGP-210RS-E

10kW FC2SC2

40604

EGP-212S-A

980-7250980-7114980-7112

40605

EGP-212S-B

980-7110

40606

EGP-212S-C

980-7100980-7300980-7310

40603

EGP-212S-D

980-7401

40607

EGP-212S-E

980-7006

40630

EGP-210

EGP-210 -1CH/2CH

40320

980-7301

2kW 3kW

40321

980-7312

980-7311/980-7302 10kW

36163

954-7912

3P

70 ICF

36521

954-7605

Vol.8.8

449

Vacuum Components Vol.8.8

2-5-1
044980-3500
21 8 8 8