Semiconductor NanoMaterials: Ion Beam Processing for opto-Elecronic applications

Anand P Pathak

School of Physics
University of Hyderabad
Central University P O
Hyderabad 500 046

Synthesis and modification of semiconductor nanostructures using low and high energy ion
beams will be discussed and our recent results will be presented. The materials used are
elemental (Ge, Si) as well compound ( GaAs and GaN based) semiconductors. The single layers
as well as multi quantum wells were treated by atoms as well as ion beams in low energy region
in sputtering and ion implantation mode. These were finally irradiated with Swift Heavy Ions
(SHI) and in some cases subjected to Rapid Thermal Annealing (RTA), to produce
nanostructures. The characterizations were carried out by RBS/Channeling, HRXRD, Raman and
PL. Some interesting effects of SHI irradiation and the underlying mechanisms will be discussed.