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ECSE‐2210, Microelectronics Technology, Prof. E. F.

 Schubert 

BJT – Fabrication

 pnp transistor fabrication

o Diffused epitaxial transistor

o Doping profile

Disadvantage of this process: Collector is p–-doped.


 Low conductivity of collector layer

Chapter 26 – page 1 
ECSE‐2210, Microelectronics Technology, Prof. E. F. Schubert 

o Diffused epitaxial transistor with p+ sub-collector

Advantage: High collector conductivity

o Implanted bipolar transistor

Advantage: Great flexibility by ion implantation n++ and p++ contacts

Today > 95 % of bipolar transistors are fabricated by ion implantation.

Chapter 26 – page 2 

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