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Micro Electro Mechanical Systems Paper 1
Micro Electro Mechanical Systems Paper 1
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Abstract:
INTRODUCTION TO MEMS:
specializing in their development have already been sold to large network companies for
hundreds of millions of dollars. The promise of MEMS is increasingly capturing the
attention of new and old industrises alike, as more and more of their challenges are
solved with MEMS.
Background:
1. FABRICATION:
Fig: steps
First a sacrificial silicon dioxide is deposited on the wafer
and patterned, then a structural layer of polysilicon is deposited and patterned. This
polysilicon layer will become structural elements such as gears. Other layers are then
deposited and patterned making the rest of the structure. Etching in buffered hydrofluoric
acid, HF, removes the sacrificial layers leaving the gears shown below.
Surface Micro machining is being used in commercial
products such as accelerometers to trigger air bags in automobiles.
Fig: Gears
1.2 Non-Silicon Micro fabrication:
LIGA
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2. Benefits of MEMS:
Because of increase in micromachining technology, hundreds
of MEMS can be made from a single 8-inch wafer of silicon. Below is an image which
shows how small MEMS are in comparison to a dime. Because an entire system can be
made this small and in such quantities, prices are reduced for products which incorporate
this technology. MEMS also have no moving parts, so they are much more reliable than a
macro system. Because of the reduced cost and increased reliability, there is almost no
limit to what MEMS can be used for.
3. APPLICATIONS OF MEMS:
MEMS applications in various fields are as follows.
3.1 Communications:
High frequency circuits will benefit considerably from advent of
the RF-MEMS technology. Electrical components such as inductors and
tunable capacitors can be improved significantly compared to their
integrated counter parts if they are made using MEMS technology. If
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3.2 Biotechnology:
MEMS enabling new discoveries in science and engineering
such as the polymerase chain Reaction (PCR) Microsystems for DNA
amplification and identification, micro machined scanning Tunneling
microscopes (STMs), Biochips for detection of hazardous chemical and
biological agents, and Microsystems for high-throughput drug
screening and selection.
Accelerometers:
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Gyroscopes:
Micro gyroscopes are newer in the market compared to micro accelero
meters. Some devices have appeared on the market for navigation application. The key
point in these devices is sensitivity.
3.4 RF switches:
RF switches have been under development for years, but the commercial
applications just begin to appear. The reason is the difficulty to combine high efficiency,
reproducibility and reliability. RF switches will be preferred to full electronic switches on
applications where security, integration capabilities, power consumption and other
parameters are critical.
3.7 Military:
Tanks
Planes
Equipment for Soldiers
4. CURRENT CHALLENGES:
• Limited options:
• Packaging:
MEMS packaging is more challenging than IC packaging due to the
diversity of MEMS devices and the requirement that many of devices be in contact with
their environment.
CONCLUSION:
MEMS is an emerging technology which will rapidly revolutionize all
the fields in the near future, if the level of fabrication knowledge of current designer of
MEMS devices and the packaging techniques are still improved.
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NOTE:-This work is copywrite to its Authors. This is only for Educational Purpose.