XB, R Control Chart Example

D. W. Parent

We want to learn control charts

We have oxide thickness data generated by the Poison Diffusion Furnace Company. The furnace is a single wafer processor We have taken 5 data points per wafer

1 4 2 3 5
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We will use the first 20 runs to set our trial control limits
Raw data Calculate the average (XB) of each row.

Calculate the Range (R) of each row

Maximum value in the row minimum the minimum value in the row

Calculate the Grand Mean (XBB) on the first 20 data points

Cell J2 calculates the grand mean While cell j3=j2, j4=j3..

Calculate the mean of the Ranges (RB)

Note: K3=K2..

Calculate the Upper and Lower control limits for XB (UCLXB, LCLXB) for a sample size of 5

UCLXB=XBB+RB*.58

LCLXB=XBB-RB*.58
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Calculate the Upper Control limit for R (UCLRB) and the Lower Control limit for R (LCLRB)

UCLRB=2.11*RB

LCLRB=0 by definition

Plot the XB chart

1100 1080 1060 1040 XBAR 1020 1000 980 960 940 920 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Run #

Notice we have one point outside the control limit. Maybe this was a typo when the data was entered. Remove the row that data point was from.
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Re-plot the XB chart

1050 1040 1030 1020 1010 XBAR 1000 990 980 970 960 950 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Run #

Looks good!

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Plot the RB Chart

180 160 140 Average Range 120 R 100 80 60 40 20 0 0 5 10 Run # 15 20 RB UCLR LCLR

Looks like we have one bad point. Remove it and recalculate X and R charts
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Trial Limits look good!

160 140 120 Average Range 100 80 60 40 20 0 0 5 10 Run # 15 20 XB 1040 1030 1020 1010 1000 990 980 970 960 950 0 5 10 Run # 15 20

Now plot for whole data set

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Final Plots?
1040 1030 1020 Average Range 1010 XB 1000 990 980 970 960 950 0 20 40 60 Run # 80 100 120 160 140 120 100 80 60 40 20 0 0 20 40 60 Run # 80 100 120

The control limits seem to work for the XB chart, but not for the R chart. Since We did not use data from runs 21 to 100, maybe the points are not past the 13 control limit, but the control limits are not right. Calcualte control lmits on the whole Set.

Final Plots?
1050 1040 1030 1020 1010 XB 1000 990 980 970 960 950 0 20 40 60 Run # 80 100 120 Average Range 180 160 140 120 100 80 60 40 20 0 0 20 40 60 Run # 80 100 120

At this time it looks like the control limits have been calculated correctly, and we Recommend that these limits be used for this process going forward.
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