&2t; &; {*

f)
D

il Ja"'4i '

y?,4-d,
ftt*.a;'e?r

00?

*iaz,,t z>#, r7'ilna?

""re "o*ri

4;o'
yo ad - .,q
ar.V,

fr-i r>7.a'"t>i "r*-.orai?

Vfu%:?'y**-/r rao ,)
Cq); d4rr*"

-r;7 ' e7?.t*raZ*i**y, frt

/:
F(Xrq&rc)

"?.*"A

26ntzol; f nferdfi0rg)
8rr

Ba(>-

,AF

/fkt' /(

,f ^ *o?Aou,rdorri F, .r .' YY**r*2'A. ? l4ze zzut fr"q,*'.h-dcaaz-1A -

oonil .* // -* :

ax
Y

ry,

.-O?ryfzrt@ f e.V

ldra-\Va'n'ari.L *'u*''5'*i7al*t1) y* *

fl

6:

h lcga)'hna "',P

(r

*'*/

+ cu& zare)Q, k

(pepeaa*hry) ; 7v;,rc,,a" rri

frr*i^r**/a"t: .rrA,-*rZi

r;h

*,)

rt::
- ladr Ttat$ o+/7auT

fi naay ; r4zc,r'/4 t-d'/<A & "y-: 8,/'- dr/, b, b *m#ra'^p,y'*"qay7.ao'nezdio'aay ,

"h,'ro*3#ffi*"
O

f,'n ' a6
t'

ao;,o

*boil;#q *fu-o rrir*;.

fuZ

ar/ caiAe)1 dr.h,/@raq

.

.V'r",h /t-?*??q

/Y/t'@4foror*'%
{a1 -'ayn'Zbt

x0:

ftr-f,2
ry

kz,p.

{aZ

4r*1.

cctci V?,u'd

4'. =hk-Df

No
'Az frn'r'-uAl ta,rfco

tufu.ta.'Z?:tr(.? E*d
V'
.Co-

t?/t)

: u1t- q

dW*f
2,6)
.

6bh aiXt

*Ai Ar*z 7ua' qt cli

>c

-zitttz zaa h

t:

:
-fn)
o

vafa'd*ff 4 .: kcq-y'*d'a; #; h{u) : do 4t ^ ,irn tfoh,

. /Ta)'vh'tue)t
. fu-o n;

*4v?;Z?au*l;ila
*;
*o-

,o{u).

W') tubair

o/ob

rli

rupduZ.

N uti
-*-----t
&ri'ruo*

/a-rr/" ot aaa.tr*fr

@,,

eo@

,7

nltnA drd
.

&<riQryq'qaaq\ @aa?3..

mkA

e";c z*n, vfrrn/fii=.-zy',

9oo

,.ri atar;r'. d"h

rya'rri'W
/Vhre)
n)D

4 -lkv
,,
m,zaagr

Varl ffi

@t

o)'ae>i,

dd

&azc

e*ralni*.6*'
f*;^d;,
n#?/-of

rfrao
.'

&ea &a" ffit'vz -#at

9Eu bit

oEu

bin ffing*

diy

i_ilft
cuot

dAy

'****ti.m chin hin

6ng cich -

m6i

nhiQt

6ng hio v$

-"-**EiQn trd
hin tqo b6n ngoii
Cflu t6o

PhEn

trr

C6'u

bin trong

- fueA fi* Khctc' PZ

%rh.ft)

fr;

-/yh*A &az zA) n*r.Z,ac'dtailc 4;'aaa 7tr dd"r/Ct+z-6a/ al )/ .'pfuza{. rc,n"/* hleas, i /

rcry, V*/y,4y{s2

f7aai

- 6'aa* ,# ni/f
- kd

d; A

yaL .AP)t

^h/"4 ofr ilz ZaJ ., d,;b-12 de'6pi4 /"tr&/,..

de;b';

?z?d

frA* fi*c

16'nadt &d4r.tl cr.d ru'za7'mo2'.?d,?ra?ae ed'*di /Ch-rra Zrtrt *eZ. .ol/-, ) - Kgt; tA. ' haa'b # e -6e2r-u/
-dt*.
da/,(
.

t",r"4?Z k2-'n&Zyz.lrc'.

/ u*,e2)

ry,d*,
g-/ "Bl

da, da)r
A"
'')t---r.^

rnii_*F@affi ?62 ,Ad

rfrr-it crr& irA;hj
-

r;/ati7

U"c2z

| 6' rr;' ezr;'zaa ;rn ofr -/ica- lar*'"ao (qA gg9,Z) + 2tu49? ,, fr
exao
-

hlrr*r*t ffi&,e) lca/*)g .-G;poe*-.fituo-) Pr :RO*'"?r*,Ffrt ft2 u,

o(

dr'dl Rn ,t7-*Z dpcr'aac'trd -;'firrl. ntT.t ti.rtio.a* zfuz,:'.

eocc{ a/a> y'intz,

.: Jtg+o,h-r,/"c / /rs o (a;6@L) )- -, - +. -{o-/4/ocr ,B : - q!. -a-/7 bo

;r; t*

6.fu, e.;

&eA

1*.* *6 dt*c &z^ -zfu dd/47

MZ fn

,tofr/4?

w-t nho-/ fu7.2'rmi, c*' ^4""4

,; &cxa/s @o.vru-a?'%a*e

-/yfqf

t/.'7e tdz..agr
tr

h* Ar, *g&qa uZ:.d*cae /a?Zd/

/realab'faari
te.h*/-:

* d;)d?z^'4"
*0,

e.t/";d

rYti#t %*r.
ca

6
5 4

i Vn' rtrz,eL- drrt a)ob/a.;' Ofrr*

/Gd'q,

3 2 quasi insensible
1

la tenrpiralure

-UanEar,in,

400

6t0

800

imo
oC

45mm

Temprira8res

'*;Vni'd?Z
, ,-.

z>'rrr'

i' t " ar-i *no7,6

Cn

.6a/ . He sO nhiet da cira mot s6 kim loai

Ni
1453

Pnf,* %ff a; t^rcr*a

Pt

w
3380

Tf, ofl

1083

1769

C, JoC-lk-s-i

400

.{.50

135

125

i,,'Wo{'-1rrrl
oC-l

400

90

73

120

ct1,

16.7.10-6

ru"8"10-6

g.g. tr 0-6

6.10-6

p, Om

1,72.10-8

10. 10-8

tr0.6.10-8

5,52.I0-8

' N'& rr/,"4 ""/?re| # v*.(nZ

drr-q
,",/.?/'d

?6oaL)z

fc&t /.rt

Ve

za

aazaZy2

A, -/rofdb;; -/ag b OL) lli *-@ a*ril?l -/ooJ|'d O"o) f dd.da *il *ri Pta.ldb &r^^ lr;

V*Z

14qq4 40 (,aa<;rz.rd e,er,r.a)r

:6q

E-

ean p

%/

A. Bare therrnocouple twisted and welded

S, Thermocouple wires

on a plastic tubular carrier

'.,
C" lnsulated

thernrnesup[* twist*d *nd welded

il. Butt*weld*d thermocauple yrith fish-spine insulator

l \'o bio

ui li

Ciu

tao rap

nhiit

h,loi hirn Jl Day di*n euc

*i

Srl

cieh di*n

5| Bo phpn l:lp dat 6l Vrt aoi tlr}, 7t D;rI nOi 8l *du nd.i driy

aid ac'{rba cu/c (,9 dnil. d,szi:-; nn^u ha;tuulaa /-,a, AaE?zb dD*,nj ? 4*i, ffrV'do ni'f ;; ru ar.rq eo, & rth.f ca;,.o/ni-Al*Vry t1 "d-- r-:,*/ "9 u rfP zaD"'' artr r?, *ir, @' T ^ry aZ nt,o{ry'e; JrrC ,-";err4 d:e /r):4@o, f+'/v hna's di a,* -&2-d riru;* A d, . De!6ri ca{f"eh *t,
- Mi&.ee

. /a*4A ca;',zao *'/*de-da dd;l?re;?rr;nZnrf 'g*"r* 3 Vna'%.o', a,rij -" dt<lc V;-'rto. EE3g ha" ni d* vfr.i / gr;'y'tai 5 A;rr-.A'rea aira;'.4../ i; ois ni *
Tawt /t?rz{aV

ry
?"/"4Yeb

-M2d;r4.4V
-

L4i

0","2

i,'-'/

JAerd
e?A./ye/t'c

*?d7 '

naaa--

,rar' 'd*"C dr;'r;r.-.7

4 /4/Dc t??at

p?

rr-- vrry{ n
freic

-zAartg "2 e;'do

'-

"f2

ZrZ dri -*-i at*.

o* .-*'*u}

E
h : 4
qa/u.

g16,-ful

ft*t f"d;cr-ryd".

p7 '//B
,

dA: "Tfu; r-aai '/ini" (/ ffiOfuv*-zfa na7..fsr{&p) cr"'?r,/-A?fr * I tr, I z ? "?tuu

/rteu Towtozt-*:

,;,

furq e/

rzoot

rcZ

o,

7
^

aToh

: 5o*
tu

+ , flc't6 'Znar*rozt

A -u

AaQ"

f frrarrry

doL f f* yra.*-o76 qc7

*zr.t;tr

4y

/hacl,, &;yr.*o-ef dI ffij zz.l ob orC4,ilc 7fr/.r'c hzca 64i /rreca e;r; / rzt a.il, ru), d2'a'4

tu Z cud& zro!*;*b': *': nSn{i 7t t,) 8r1 te?l?t q q@ary,/ 4?=:JdZ4rrr/ *r2,
to

Aa & . Dd'? ffi * f dZ/ zd u"r/'i'w'az) *z dp tnz"o'*. ,dZt;h*' f,

ntn'* dd& ??r*. ftlqr

CL,co

b bb , ar*,*i n-Ao drr- *4u;;- il$ bryu^rda;ar, -o. ',tnbr*.2^4%

"*'doL & 4v.
/'

no nhn

JIAL( ,'

lo =o

to

rr.ri

.6t'ofif
ptr-uu6d{grr l'tl#l

aPr % Al.t: he 'f./"" ''. td r

lr,
--..r\f -

,lti,rurlrlr{f?p

sf

??"*^!a";a*r*

Jq

6:4rt/

zqa4
,

C_?;r'jro**,

* c;, zad

"

,";i -6X;#A,14q) et
Vha
.

7a['A& r*,#o.n dtt v)"/4

?W
\}

. 4q . -.) v . ,17t, vvruv vq-) Co*r*d?r) vvrq) afe, o .7PbE Pbs, ,...v.. , /h;:' 2a 7.... zfi*a ) ^; di F ZAe .' 4q, ' lYn 7rt"tl ,Ai^',' 6", Je U>*Lmoe)

y\}lt/

#etaa keh&

&, B,

CA"*

lCdkl lP{$l

t. ts

iot

fdTe

*
9'

1o'

rSt lkTer t&

lSil

!m, \
6
r

10"

\ \ \ \
0.1

r0'
I

lStthr

I..lslr I

10'
r

(dHs

10'

0,01

1 r0 '

100

1000

&

rqi s6ng {Lux}

:0

//*gf ??t o,d tua7"4&qc@4tstqfri .A/&or.- cub.2*qr,& 2' 9 /2. -t;a'frn<! *,9 d,ail;';L"V@W - ,g : n'fr*
r7
.
ta

GI

/i, pll}

fo

lzat d# olD,( vrb"@ r4az difu aaf dr47 er*a /cia dd dtdi or{n42

'6e ryierr?
ry^'7ar

%ry d./6 e';, fuA -tu''da,rquaq

'7

xo *o'.

*'4 *h.ay &a. ,*fr1 h4eA ',7'*_ 421

d,h^
,

dffi4Ai-

Chucrn g 3. CAm bi0n do

lgc, bi0n dqng, {ry su6t, hiQu 6p su6t vd luu t6c

3.1. Cdc loai cim bidn dugc sft dung dd do luc

Cim biOn diOn tr& luc cf,ng Cim biOn 6p di0n Cim bi6n dien cim
Cf,m biOn 6p til

85

.+ryt Pbn

.t.ttd*

?-*ffi.

(@l' -..,&Ji,^M
.

nt>

A, Cem bidn diOn tr& luc clng

Nguy6n ly lam vi6c : hi6u fng tenzo (piezoresistive/ strain gauge),

Cim biSn loai niry c6 3 thong sd chinh

. . .

Kich thLrdc cfra dd Gi6 tri diOn tr0 R.o Dong dien tdi da cho phep
a) diQn tr& luc cSng 16 m6ng; b) dien trE lrrc c6ng kidu mang m6ng

8&

JG w

"'*ffiffi 'f,W
qyt Pbc

A, Cim bidn di6n tr& luc cf,ng

rac6
M5t khiic ta

+:rrfl Uhay
rR =
l

c6 (.

A&

_ -AP r "=-.'P''

- S: '' :['::''::
es

Al

AS

'R= 6p * tt -

Trong cs hoc ia c6 e* =*2K*e1 ; Ko he sd Poisson

ER

= tt (1+ 2Ko

* m) = Kgr
rp

Do nhay c0a chuydn gdi: K = e*/e, = 1+ 2Ko +

87

q-f,lt 14.

fiqdniE

(it@f' -",,W
.lfird.< lr'>

7- ffir.

Characteristics uf Some R*:sistance Strain C*uses

htaterirl
Geuge

Fsctor

Resislance.

il

Trmperature coefftcient

Nates

rSol

of resistance

1og-t * 16-6
57fo CUJ-l&Ni
?.0

.I; is cnmlant over

t00
10.8

wide raage cf strain:

for use under 260PC

Platiaurn alloy"r 4"0-6.0 50 ?.160 For high-lemperiture
u5e

Silicon

-ltl0

to +150

200

90.000

High sens itivitS'" good Ior large strain

measurementf

88

q-t'tun tteidd >dF ..rre, I \ I L'wY; r'--ffiffi@ -; IIYT tt9

B. Cim bidn 6p di0n

DLfa tr,on hi6u urng ap dien.

Vat lieu dirng chd tao c*c chuydn Odi ap dien thuong la tinh thd thach anh {SiO2), titanatbari (BaTiOr), muoi Xenh6t, tuarnalin ...

* .

Luc Fxg&y ra hi6u ung ap di*Sn doc vdi di6n tich q=d,F*

Ndu t6c dQng mQt luc theo truc Y, giiy ra hieu tfig ep di6n ngang v6i diQn tfch q, phu thuoc
"lrrn\ ii\ rir

kich tht/dc hinh hgc cria vlo .p-p,

chuYdn d6i: q= -d,,(V/x)Fr.

d, - h5ng sd rip diQn ( goi la m6dun 6p

di6n) y, x - kbh thrJdc cfra chuydn ddi tneo truc X vd Y

@t

: hiQu

img 5p dien tr6n mot tinh th6 thpch anh

0.+
0
(A)

{,

qa#
-...
{B}

'E@Ar r -il os(B

+
fcl

90

B. Cem bidn 6p di6n (2)

4iEd?ira.lrr

(A)

ts)

(c)

[ig. ].13,

Qunrtz l'orce sensnr: (A]

A]cut

crf a quartz cr_vstnll

{Bi

structurrc
I

of tlre sensor: tC}

the out:idt: *ppeftrarx.'{:. {C*urte,sy ol'Quartz-rcIl, Siu'lt:: I}arbara. CA. pil:aelei,trit rtlzwl platt

Q?

.4*jt ddt

WMQI

s6 thuQc tfnh ctra vat hQu 6p diQn

T*ble A.fi. Properties of Piezoelectric }{aterials at 30oC

PVDF
Density {x l0l hgftn3} Dielecrric const*nt, rr El*stic nmdulus {101CI N/*r} Piezoelectric ecustant tpci N)
1.78

BalliOl
5.?

P,ZT

Qu**z

TGS

?.5 1100 s.3

t?
0.3

r700 1l

3.65 1.69 4.5 45 7.7 I

3.3

drt:30
d}z

Pyroelecfic corstant { 1O-+ C/rn3 K} Elsctro'mechtnital *eupli*g constarl t 4c) As:rusfis impedanoe t t06 kg/m2 si

:2 dl: : -3ff
4
2.3

?*

I10

il

t0
?1 35

x30 lfi r0 25 r4.3

92

i du mQt sO th6ng sO cua cim bi6n 6p diQn

Some unique properties of the piezoelectric films are as follows 8: . Wide frequency range: 0.001 Hzto 109 Hz

. Vast dynamic range: 10-8-106 psi or ptorr to Mbar. . Low acoustic impedance: close match to water, human tissue, and
adhesive systems . High elastic compliance . High voltage output: l0 times higher than piezo ceramics for the same force input . High dielectric strength: withstanding strong fields (75 V/pm), where most piezo ceramics depolarize . High mechanical strength and impact resistance: 109-1010 P modulus. . High stability: resisting moisture (<0.02% moisture absorption), most

chemicals, oxidants, and intense ultraviolet and nuclear radiation . Can be fabricated into many shapes . Can be glued with commercial adhesives,

;@
'Iable A,14. Mechanical Properties of Some Crystalline Materials

qef Pkk

Yield
Strength
1x Material

Knoop
Hardness

Young's
Modalus

Density

l0lo

ikg/rnmll
?000
1280 t 3?0

{x

l0lt

Conduetil'ig
(s/cm}l

Thermal Theffflal Expamion 6C} t xl0{/oC} {lv/cm

30.0
3.5 3.3 0.5

dlrdrml)
53

dyn/emz)
10.35 3.5

Dilmonda
SiCA

I,O
-1.3

1l

TiCA

l0
15.4

?.0 4.9?
5.3 3.85 1.96

t.?
.1.9

Al:o:'
Si3N4a

3100
3486

4.0

6.4 5.4
0.8

l4
12.6

3.t
7.8
2.5

0.r9
0.8t)3

Irona SiOz (fibers) sia

Steel {max. strmgth}

400
820 850

r2.0
0.55

8.4 ?.0
'1.2 3.1

0.73
1.9

0.014
1.5?

f.3
7.9 19.3 7.9 10.3

t500
485
660 3?5
130

3"!

4.97
1.78

2.33 12.*
4.5

w
Stainless sleel

4.0
2.1

4.t
2.0
3.43

0.329

t7.1
-5"0

Mo
A_l

L38
2.36

0.t?

0.?0

3.?

35.0

eSingle cryslal.
Scurrcc Fro$r Petersen. K. E" Silicon *s

* mech.mical material. Pmc. IEEE ?t{5}.420-45?, t982.

Y4

,W
aelt dilr

thhts A.9. Physical Propertier of Pymelectriq Materials

Curie

Theunal
{\!nnK}
0.4
4.2 3"0

h{aterial Temperalure Conduclivity

Pernftivity
{e, }

Relatil'e

P-vtuelectric $"rmlestdc
Charge Coel1.

Voltage

{"c}
Single Gystals

tC/nr2

K)

Coeff. *i (qb)
106 106 ?"5

Coupling.

{YftnK} I.3 x
0.5

TCS LiTa03

49 618

30 45 1000 1600

1.5 2.0 4.0 4.3 0.4 2.3

x l0-a x l0+

t.0
0.3

Cerarnics

BaTi0q PZT
Polynwrs

l?0
340 ?05

l.l
0.r3
2

x t0-a x 10-a

0.05 0.03

x x

ld
106
106

0.t4
0.3

pvDF PbTiO3

,l
100

x l0+
x l0-a

0.{0 x
0.13

Polycry;tallire L*yers
474

106

0.39

{monocrystal) lfofe: The *bove figures ma)' vary depending on rn*nufacturing lechnologies. Source: From lfeixner, H., Mader, C., and Kleinschmidt, P. tnfrared sp$sors based on the pyroelecric polymer polyvinl'li&ne fluoride lPVDFi. Siemrns Ftrrtch . Btlv'icL Be r. Bd- I 5t3). t05- I I 4, I986.
95

c. Cim bidn 6p tu
lx t

tr

uren cam cua chuydn edi ap tu

7,)

L_

w2
R

w'.p.s
I

Dudi tic dung cfra bidn d?ng dirn hdi co hoc, d0 tr; thdm lr ve ciic tinh chdt kh*c cfra vdt liOu sdt trt thay ddi.

W- sd vong cuon ddy R- tr-r tr6 c0a mach trl S, I - di6n tich vi chidu diri cfla mach ttt p dQ ttJ thdm c0a l6i thep

96

D. Cim bidn di6n cflm

a)

ffi ffi ffi

__
gv
b)

Xy

Xv / -NF-"

ffi,N

ru
c)

Ndu b6 qua di6n trE thudn cfra cuOn diiy vir ttr tr& cria l6i thep w'.po.S t_

_w2

Rs s7

E. Cim bi6n di6n cim

Nhu vAy d5c tuydn ctia chuydn Cdi Si0n c3rm khi d0 diri khe n6 khong khi S thay ddi Z=f(48) thudng Ia phi tuydn va phu thuoc vio tdn so c*a ngudn kich thich. Tdn sd dong kich thich cirng l6n thi do nhay cirng cao.

dL-9las*4ao
AS

a6

LZIZo q, .,6 _

a6/60

[,.[f)]'
98

E. Cim bien h6 cim

Trr thong t#c thoi
ur. rr --

. iW
Rs

W,poSi
6

i- gi6 tri dong tirc thoi trong cu6n d&y kfch thich W,.

M
ffiNHl

dien dqng ctia cuOn dAy do Wr:

SCIc

99

'.ffi'
rffi

.ryYl Przi

3.z.Dobidnd?ng

:'',lf;,ffif" siend?ns u,=* IHHi:l I ' ddu c6 tfrd Clng do bidn dai d?ng . Chqn vi tri do biSn d?ng va du kien giSr tri bidn dang tai
noi do.

Viec chon vi trf do bidn d?ng dura tr6n sd phin tich vd luc phAn bd tr6n c5c chi ti6t.
Dfrn cim bidn vao chi tiet : Nguy6n t6c d6n cim bidn c*m bidn b5m ch5t vio chi tidt dd cho bi6n d?ng cfra chi tidt truydn vio cAm bi6n.

'

li

Sfr dyng mach cdu

vi khudch d'ai dong do bi6n d?ng.

100

Vi

dr1 t10

do bi6n dang

Dien 6p ra cfia drJdng ch6o cdu cfra cdu 2 nh6rnh hoat dQng dugc tlnh:

2R.02 =!Lk"ur, kcb le do nhay crla cirii bidn ( ndu cim

A,(J

=U cc

LR,,b

bi6n la d6y minh hay lii m6ng k"o=1.8* 2.2 cbn cim bi6n biin d6n k*o c6 thd len tfi 200) Do AU c6 th$ suy ra
l

AU chi c6 gi5 tri c0 mV vi v6ry cdn phii khudch dai tru6c khi viro bo trJ ghi hay bo thu thep sd

ligu

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o) /
4
Bille

airnant permangnt

Di chuydn g6c

IF-e--i
l^ra+ar

rr I

effet Hall

n<
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a --:tCaoteur
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Di chuydn th8ng

H aimant psrmanent

Hi$u ung Hall

:
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r Hr,
/
n

sin rr

Cucrng d0 din trucrng H

srg

> Trong do : N -

s6 di$n tr) tu do; Cucvng d0 dnh sdng c

Mach twcrng dusng cira cfrm bi6n Hall

,=**l

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du: M$t s0 dflc tfnh cfia crim bien Hall

'

.lr.

r'

t -r

Thble 3"L Tlpi*afl Chameteri*tics mf m Llne.ar Hatt Effe*t Ssnxrr; Contral *urreul
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60

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(Courtesy of ADE Technologies, Inc., Newton, MA.)

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