DL II Institute of Microsystem Technology

PDMS
(PolyDiMethylSiloxane)
D. Strohmeier, F. Schneider*
University of Freiburg IMTEK, Department of Microsystems Engineering,
Laboratory of Simulation, *Laboratory for Microactuators,

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Outline

Definition: PDMS
Material properties
Application
Processing
Summary

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Physical properties (RTV 615)

Color:
Viscosity:
Poisson Ratio:
Elastic modulus:
Thermal conductivity:
Density:

transparent
4300 mPas
4.8
1.5 MPa
0.2 W/mK
1.05 g/cm3

Dielectric breakdown strength: 20 kV/mm

Dielectric constant:
2.7
Working temperature:
Minimum structure size:
Gas permeability:

Designlab II

DPMS

50C to 200C
< 10 nm
air, water vapor

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Processing

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Application

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

General process
Monomer (M)

Curing agent (C)

10:1

Demolding
(E 2 MPa)

Air

Hardening in
a oven
Mix M & C in a
weight ration of
10: 1

Fill mixture
into the mold

( 4000 mPa s)

Designlab II

DPMS

Debubble
mixture in a
exsiccator

D.Strohmeier, F.Schneider

(24h @ 23C
4h @ 65C
1h @ 100C
15 min @ 150C)

DL II Institute of Microsystem Technology

Multilayer (PDMS bonding on wafer level)

Gluing with thin PDMS interface layer:

Does not work without problems

Adhesion problems

O2-Plasma:

Bond withstand 3.5 bar

Different Monomer:Curing agent weight ratio:

Diffusion of curing agent

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Summary

Positive:

High working temperature range (50C to 200C)

Casting (minimum structure size < 10 nm) ()

PDMS bonding (O2-plasma)
Negative:

No commercial photo-patterable PDMS

Gas permeability (air, water vapor)

Designlab II

DPMS

D.Strohmeier, F.Schneider

DL II Institute of Microsystem Technology

Contact for datasheet

dirk.strohmeier@imtek.uni-freiburg.de
Tel: +49-761-203-7385

Thank you for your atention!

Designlab II

DPMS

D.Strohmeier, F.Schneider