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Commission of the European Communities

ber information
APPLIED METROLOGY

COMPARISON OF ROUGHNESS MEASUREMENTS

IN THE EUROPEAN COMMUNITY

Report
EUR 12180 EN
Blow-up from microfiche original

Commission of the European Communities

ber
APPLIED METROLOGY

COMPARISON OF ROUGHNESS MEASUREMENT S

IN THE EUROPEAN COMMUNITY

W. H I L L M A N N
Physikalisch-Technische Bundesanstalt
Bundesallee, 100
D-3300 BRAUNSCHWEIG
Contract No. 763/1/0/063/82/3/BCR-D (30)

SYNTHESIS REPORT

PARL , " * riMiolh.

Directorate-General Science, Research and Developme it
IM. C . / .

1989

' l\

3EUR 12180 EM

CL K

Published by the
COMMISSION OF THE EUROPEAN COMMUNITIES
Directorate-General
Telecommunications, Information Industries and Innovation
L-2920 LUXEMBOURG

LEGAL NOTICE
Neither the Commission of the European Communities nor any person acting on behalf
of the Commission is responsible for the use which might be made of the following
information

Catalogue number: CD-NA-12180-EN-C

ECSCEECEAEC Brussels - Luxembourg. 1989

III

Summary
Roughness measurements were carried out in 12 i n s t i t u t e s and a t 3 contact
stylus

Instrument

measured
with

makers

in

9 countries

were: one calibration

irregularly

ground

of

standard,

profiles

and

the

three

four

EC. The

objects

PTB roughness

talons

de rugosit

to

be

standards
LCA with

turned profiles. A great v a r i e t y of measuring equipment was used in the 15

laboratories.
The

groove

roughness

depths
standards,

were

measured

the

on

arithmetical

peak-to-valley

height R z

were measured

under well-defined

the

calibration

mean

deviation

standard.
Ra,

and the maximum p e a k - t o - v a l l e y

the

On

the

average

height

R m ax

conditions of measurement according

to

DIN 4768. sheet 1.

The survey of the 375 measurement r e s u l t s shows t h a t the deviations from
the reference values lie within the following ranges:
Calibration standard:

PTB roughness standards:

* 10

Etalons de rugosit:

* 15

This is the

first

extensive

6,5%

international

intercomparison

in the field

of

roughness measurement which has furnished such good r e s u l t s .

A detailed

analysis

of

the

technical

details

of

the

instruments

indicates systematic differences in the measurement of small Rz values.

used

CONTENTS
Pag
1. Preliminary remarks

1.1. Purpose of the comparison measurements

1.2. Participants

1.3. Objects measured

1.4. Measuring instruments

1.5. Measurands

1.6. Conditions of measurement

1.7. Testing of the measuring instruments

2. Measurement results

3. Measurement results with phase-corrected filter

11

4. Discussion of measurement results

11

4.1. Calibration standard, Fig. 9

11

4.2. PTB roughness standards, Figs. 10 to 12

11

4.3. LCA talons, Figs. 13 to 16

12

4.4. Phase-corrected filter

12

4.5. Relative uncertainty of measurement

13

5. Potential causes of the differences between the

measurement results

16

5. Appearance of wear on the standards

15

'. Conclusions

16

. Literature

20

1.

Preliminary remarks

1.1 Purpose of the comp ar i on measurements

The

increasing

exchange

of

products

and

vendor

parts

within

the

EC

presupposes a uniform quality control on the part of industry. Supplier and

purchaser of industrial

products

must carry out the measurements

under

completely uniform conditions.

It is known from earlier comparison measurements / l , 2, 3 / t h a t to date the
complicated roughness measurement technique has again and again led to
quite considerable differences between the results obtained. Some years ago,
international comparisons still showed differences of more t h a n 40% / 4 / . In
contrast

to

this,

Calibration

comparison

Service

show

measurements

differences

carried

of

only

out
a

by

few

the

German

percent.

The

prerequisites for this have been created by the following measures / 5 / :

1. DIN standards

with

absolutely

clear

and

unambiguous

definitions

of

roughness parameters, including well-defined conditions of measurement.

2. Development of contact stylus instruments in accordance with these DIN
standards.
.3. Calibration

and

testing

of

the

contact

stylus

instruments

with

the

calibration standards and roughness standards developed at the PTB.

In order to harmonize roughness measurements, the attempt was to be made
within the scope of an extensive international intercomparison, supported by
the

BCR,

in

measurements
conditions.

the
being

EC

to

carried

obtain
out

results
under

differing
very

clear

only
and

slightly,

the

well-defined

1.2 Participants
12 Institutes and 3 contact stylus instrument makers from 9 countries
(Table 1) took part in the measurements. The Physikalisch-Technische
Bundesanstalt (PTB) was the body responsible for the project.
1.3 Objects measured
1 calibration standard /6/, make Halle, Braunschweig.
3 PTB roughness standards / 6 / with irregularly ground profiles.
1 x 4 talons de rugosit LCA , ETCA, Arcueil, with turned profiles.
The calibration standard (Fig. 1) serves to refer the vertical roughness
parameters to the SI units of length.
The calibration standard is a
40 mm 20 mm 10 mm.
provided with 6 grooves. The
a radius of 1,5 mm. The width

polished plane glass plate of the dimensions

The centre of the measurement surface is
grooves have the shape of circular arcs with
of the measurement surface is 1,2 mm.

The nominal depths of the grooves are the following (in ):

0,25 / 0,6 / 1 / 3 / 6 / 10
The PTB determines the
certificate of calibration.

exact

values

by interferometry

and

issues

The roughness standards (Fig. 2) serve to calibrate and test the complete
contact stylus instrument, from the stylus to the indicating device.
The roughness standards are made of hardened, stainless steel of the
dimensions 40 mm 20 mm 10 mm. They have an irregularly ground
profile which is repeated every 4 mm in the longitudinal direction of the

standard. Normal to the direction of measurement, the grooves produced on

the measurement surface have a constant profile form within the area of
the matt boundary surfaces.
A set consists of 3 roughness standards with the following nominal values
(in im):
Ra:
Rz:

0,2
1,5

0,5
3

1,5
8,5

The uniformity of the roughness standards is given by

deviation s 3% found in 12 measurements of Ra and Rz.

the

standard

Normally, the PTB determines the exact values of the preference roughness
parameters Ra, Rz and Rmax according to DIN 4768, sheet 1 / 8 / and issues
certificates of calibration. Other roughness parameters are determined on
request.
These roughness standards have been accepted all over the world. They
have so far been delivered to 20 countries, with roughness parameters
according to DJN 4768, sheet 1. Due to the irregular profile form, they allow
a rather critical testing of the contact stylus instruments.
The talon de rugosit LCA (F ig. 3) is an electroplated nickel calibration
block comprising 4 geometrical specimens with circular arc profiles.
Dimensions of the block:
Dimensions of the specimens:

120 mm 50 mm
40 mm 15 mm

These 4 specimens have a measurement surface 25 mm in length which is

flanked on both sides by a 7,5 mm long zone with high-quality surface
finish; this zone shows the general direction of the profile and serves to
position the measurement reference.

The specimens are laid out in a geometrical series of ratio 2 for the
nominal values of the roughness parameters and the spacing between the
circular arc profiles is 250 and 800 mi.
For each specimen, the actual values of the different parameters and the
physical and statistical criteria of the surface conditions are stated in the
calibration certificate of the F rench National Metrology Bureau
Centre d'Etalonnage Agr BNM
of the
Etablissement Technique Central de l'Armement

The nominal values for Ra are as follows:

1,6

3,2

6,3

12,5 ^m.

Consequently, these roughness standards complement the PTB's standards

very well in the range of higher measurement values.

1.4 Measuring instruments

The 15 laboratories used contact stylus instruments manufactured by the
3 participating instrument makers. The most different types of instruments
were applied, some of them of the latest design, others of very old design.
The majority of the instruments had been supplemented by external
computers of different design.
In some cases the complete measuring equipment - consisting of contact
stylus instrument, analogue-to-digital converter, computer and software had been delivered by one instrument maker; in other cases, the equipment
had been combined in the respective laboratory with the laboratory's own
software. Consequently, the measurements were carried out with an
extraordinarily great variety of measuring facilities.

Each participant was to give a detailed description of his measuring

equipment, including the extent of the vertical and horizontal digital steps.

1.5 Measurands
Groove depth of the 4 greatest grooves of the calibration standard.
Arithmetical mean deviation Ra, average peak-to-valley height R z and
maximum peak-to-valley height R m a x according to DIN 4768 sh. 1 / 8 / on
the 3 roughness standards and the 4 talons the rugosit LCA.
The arithmetical mean deviation is defined by the equation
x*=_ lm
L

m
Ra = Lm
-
/y/ dx

where
y =

=
lm =
=

* -

"
4_

/yi

profile ordinate
abscissa in traversing direction
total sampling length
number of digital steps in x-direction

In order to determine the average peak-to-valley height, the total sampling

length is subdivided into 5 single equally long sampling lengths. The single
peak-to-valley height i is determined in each single sampling length as
the distance between the highest and the lowest profile ordinate. R is the
arithmetical mean of 5 single peak-to-valley heights Z . The greatest single
peak-to-valley height is Rmax
These definitions are in conformity with ISO 4287/1

/9/.

Preference is given to the roughness p arameters Ra, Rz and R m a x as they

have not only been clearly defined but exactly standardized conditions of

measurement have also been specified for them /10/. In addition to these
there are a great number of other roughness parameters for which
measurement conditions must, however, be agreed upon between the trado
partners in each particular case.

1.6 Conditions of measurement

Well-defined and completely uniform conditions of measurement are a very
important prerequisite for such comparison measurements. Before proceeding
to the measurements, the participants therefore agreed to determine the
parameters Ra, Rz and Rmax i n t n e same way as has been precisely fixed in
the definitions and conditions of measurement of DIN 4768 sh. l; i.e. the
parameters are determined on the filtered roughness profile.
2 RC filters are used as filters. The designation of the filters follows from
the wavelength limit c (cut off) which defines the 75% point of the filter
characteristic. This is in conformity with ISO 3274 / l l / .
The wavelength limit Xc and the total sampling length l m are selected
according to the tables given in DIN 4768 sh.l; i.e. the aperiodical profiles
of the PTB roughness standards with 0,1 m Ra 2 m a nd 0 , 5 m Rz
measured with Xc = 0,8 mm and l m = 4
mm.
10m are
As far as the talons de rugosit LCA with periodic profiles are concerned,
A and are also measured with c = 0,8 mm and l m = 4 mm, as the groove
spacing is 0,1 mm S m 0,32 mm. C and D are measured with c = 2,5 mm
and l m = 12,5 mm, as the groove spacing is 0,32 mm S m 1 mm.
These specifications in DIN 4768 sh. 1 are based on extensive investigations
which industry carried out on surfaces as found in practice /12/. This is in
conformity with ISO 4288 /13/.

Furthermore, it was agreed

to use

reference

surface

contact

systems

in

order to eliminate the potential influence of skids (cf. / 1 4 / ) .

12 measurements which are to be distributed over the whole measurement
surface are carried out on each roughness standard. In this way, for each
roughness parameter a definite mean value can be determined from the 12
individual measured values.
In order to ensure t h a t the Rz and R m a x values do not always depend on
the same peaks and valleys in t h e profile, the initial points of the 12 total
sampling lengths must be arbitrarily distributed. Another way to a t t a i n a
good mean value consists in carrying out precisely defined

displacements

with a mechanical stage. When t h i s method is applied and t o t a l sampling

lengths are fitted to one another in t h e direction of measurement, care must
be taken t h a t the displacement to t h e initial point of the following total
sampling length is not exactly an integer multiple of the length of a single
sampling length

(0,8 mm). In the case of several t o t a l sampling

lengths

arranged in parallel, the initial points do not lie in one row normal to the
direction of measurement, but are somewhat staggered in the direction of
measurement. The 12 measurements can, for example, be distributed over the
whole measurement surface according to t h e t e s t point plan (Fig. 4), as it
is done at t h e PTB.

1.7 Testing of t h e measuring Instruments

It

had

been

agreed

that

each

participant

should

thoroughly

test

his

measuring instrument prior to carrying out the measurements:

1. Testing of stylus tip with stylus wear gauge / 1 5 / which was circulated
with the specimens. The stylus wear gauge is provided

with 4 slots,

between 2,5 and 20 in width. Depending on tip radius and cone

angle,

the

stylus

moves

more

or

less

deep

into

these

slots

during

scanning. From this, the tip radius can be roughly estimated. This stylus
wear gauge is above all suited to indicate changes of the stylus tip in
the case of prolonged application.
The best - but at the same time most sophisticated - method of
determining the tip radius consists in taking micrographs of the stylus
tip, or of casts taken from it, in the scanning electron microscope /16/.
But even the evaluation of such micrographs is not easy.
2. Determination of the static measuring force in zero position.
3. Determination of Ra and Rz on a glass flat for testing electrical noise
and mechanical vibrations.
4. Testing of the uniformity of the feed rate with a precisely graduated
rule.
5. Testini of the vertical
calibration standard.

stylus

deflection

with

known grooves

of a

6. Testing of the total measuring instrument with 3 roughness standards / 6 /

with known measurement values.
7. Testing of amplifier, filter and computer with electrical sine signals.
Here not only the filter characteristic but also particularly the slope of
the transfer characteristic in the range of very small wavelengths was of
interest.
This test has proved to be most valuable. It has not, however, been
carried out by all laboratories as it is very difficult to perform.

'.
Flach

Measurement results
participant,

measurement

provided

results

is

25

measurement

available.

These

results,
are

i.e.

shown

a
in

total

of

375

Table

2,

the

laboratories being designated by Nos. 1 to 15. Under the No. 0, the mean
values of all participants are listed. The diagrams of Fig. 5 to Fig. 8 are
graphical representations. Here, the distribution curves of the measurement
results are plotted in relation to the reference values (reference value =
100%). A representation

of

all

individual

results

can

be

found

in

the

diagrams of Figs. 9 to 16. Each sheet contains all the values determined on
one standard. Over the number of the respective participant, the deviation
from the reference

value is marked

as a horizontal

line. The

pertaining

reference values for the groove depth, R a , R7j and R m a x are given in each
diagram. The hatched area gives the indicated u n c e r t a i n t y of measurement.
For the

groove

depths,

the

values

measured

by t h e

PTB were used

as

reference values as they were determined by interferometry. The reference

values for the roughness values measured

are the mean values from

15

values obtained by each participant.

The standards were measured by the PTB early in 1982 and a t the end of
the comparison measurements in

1986. The results s t a t e d

here are

mean

values from both measurements. In the case of the roughness s t a n d a r d s , the

difference

between

the

values

obtained

before

and

after

the

intercomparisons amounts to * 1% at most, in the case of the groove depth

to * 6 nm.
At the
V = 0,1

PTB, the
mm/s,

roughness
the

fine

standards

are

PTB roughness

scanned
standard

with

a feed

rate

of

with

rate

of

feed

v r =0,05 mm/s. This allows the required digitalization of the profile to be

realized

in

feed

direction

roughness standard

in steps

of = 0.67 \, for

the fine

in steps of = 0,33 un. The reasons for

these digital steps are explained in / 5 / and / 1 7 / .

PTB

selecting

10

Two participants provided results obtained with several measuring

instruments. As hero, too, the differences were only slight, mean values
wore determined and used in the representation of the results.
The greatest deviations of about 30% occurred in laboratory No. 8 on the
LCA talons C and D, cf. F igs. 15 and 16. Here, the software was affected
by errors which were later eliminated. New evaluations of the stored profile
data still available showed that the measurement values of all roughness
standards (PTB and LCA) deviated from the reference values by only -6,3%
at most !
Taking this subsequent correction into account, all measurement results can
be summarized as follows:
Calibration standard
The deviations of all measurement values from the reference values of the
PTB lie within *6,5%. 90% of the deviations lie within 2%.
PTB roughness standards with aperiodic profile
The deviations of all measurement values from the mean values (taken as
reference values) lie within 10%. 90% of the deviations lie within *6%.
LCA talons with periodic profile
The deviations of all measurement values from the mean values (taken as
reference values) lie within *15%. 90% of the deviations lie within *10%.
With respect to the brief summary above, it is, however, to be pointed out
that everything has been included, from a measurement value of Ra =
0,17 to a measurement value of Rmax = 46 . 1% of Ra = 0,17 is
only 0,0017 , whereas 1% of R m a x = 46 is 0,46 . Moreover, the
parameters Ra, Rz and Rmax have a very different character.

11

This

is

the

measurements
variety

of

first
which

extensive
has

measuring

international

furnished
equipment

intercomparison

such

good

results,

has

been

used

of

roughness

although
in

great

the

individual

with

laboratories.

3.

Measurement r e s u l t s with p h a s e - c o r r e c t e d filter

Several

participants

desired

to repeat

the

measurements

digital,

p h a s e - c o r r e c t e d filter. The filter characteristic always agrees more or less

with t h a t of the standardized 2 RC filter. It is not, however, in each case
identical with it. 7 of the participants took p a r t in this t e s t .
The measurement results are compiled in the diagrams of Figs. 17 to 23.
Again the deviation from the reference value and t h e indicated

uncertainty

of measurement are plotted.

Reference values are the mean values from 7 measurement values of the
participants in this comparison.

4.

Discussion of the measurement results

4.1 Calibration standard, Fig. 9

The measurement r e s u l t s in the range investigated are satisfactory.
4.2 PTB roughness s t a n d a r d s , Figs. 10 to 12
Apart from a few exceptions, the measurement results are satisfactory. The
deviations lie in the order of the u n c e r t a i n t i e s of measurement s t a t e d . The
R a values are in r a t h e r good agreement. The R m ax values show a somewhat
stronger

dispersion

which

surface of the s t a n d a r d s .

is

due

to

the

unavoidable

dispersion

on

the

12

In the case of the Rz values of the fine roughness standard (Fig. 10) it.
turns out that the PTB's deviation of +6,1% is the highest (participant 1),
while the other participants' deviations amount to up to -6,8%. This
corresponds in fact to absolute values which do not exceed 0,08 pm and
which are in the order of the uncertainty of measurement; however, there
are quite obviously differences in the measuring instruments used which
should be identified. The potential causes are discussed in the next section.
The Rz values of the other roughness standards show smaller
deviations.

relative

4.3 LCA talons. Fig. 13 to 16

The Ra values are in rather good agreement. The dispersion of the Rz and
R m a x values is slightly greater; the deviations of some participants Increase
with increasing roughness, while the relative deviations of the majority of
the participants decrease with increasing roughness.
Greater deviations found with some of the participants are obviously not
systematic for a particular type of instrument. The participants concerned
will surely clarify the respective cause individually (see also supplement in
section 2).

4.4 Phase-corrected filter

Some participants carried out additional measurements with phase-corrected
filters. Part of the relative deviations are a little greater, but they also
decrease with increasing roughness. The smallest deviations are found for
the Ra values.

13

After elimination of the discrepancies described in sections 4.2 and 4.3, the
deviations will surely become smaller even when phase-corrected filters are
used. The influence
exerted
by using somewhat different
filter
characteristics should not be very serious.
In the last few years, contacts have been established between the three
leading European instrument makers in order to standardize uniform
characteristics for phase-corrected filters within the framework of DIN and
ISO. As a result, the draft standard DIN 4777 /18/ has been drawn up. The
same filter characteristic is also discussed within ISO.

4.5 Relative uncertainty of measurement

Figs. 9 to 23 show the uncertainty of measurement as a hatched area. In
general, reasonable values have been stated for the uncertainty of
measurement. Where the uncertainties of measurement stated appear too
great or even too small, the comparison carried out here will result in this
problem being reconsidered. The measurement results are of great value to
all participants as they will allow them to assess the uncertainty of
measurement in future with greater certainty.

5.

Potential causes of the differences between the measurement results

In the following, reference is made to some details of the measuring devices

used which may have been of importance for the deviations of the Rz
values of the fine PTB roughness standard referred to In section 4.2.
As had been recommended, some participants tested their measuring
instrument with an electrical sine wave generator. In addition to the
characteristic line of the wave filter (cut off), the slope of the transmission
coefficient descending to the left at very short wavelengths /19/ was

14

was

particularly important, as Is shown in F ig. 24. The wavelength * U 95

defined at the 95% point in order to be able to compare t h e p a r t i c i p a n t s '

t e s t results with one another.
This

descending

slope

of

the

transmission

wavelengths is caused by filters

avoid electrical

noise

coefficient

at

very

short

installed in the measuring equipment

and mechanical vibrations. This may possibly

to
also

affect part of the roughness to be measured.

The wavelength X u gs is shown in F ig. 25. It assumes values between 0,8 \
and 20 .
Fig. 26 shows t h e horizontal digital step Ax with values between 0,3 and
5 .
Fig. 27 shows the Rz value measured on an optical flat and referred to as
Rz with values between 5 nm and 70 nm. Hero, the size of the measuring
circle

used

and

the

stability

of

the

mechanical

measuring

set-up

are

evidently of Importance.
Fig. 28 shows the tip radius r with values between about 1,3 m and 4 .
Fig. 29 shows the s t a t i c measuring force F g with values between 0,6 mN
and 2 mN.
Fig. 30 shows the feed r a t e with values between 0,1 mm/s and 1,3 mm/s.
In order

to

approximate

the

true

standard

as closely as possible, it

measuring device with small x U 95

for

the

differences

between

the

Rz

value

is without

and

Rz

of t h e

fine

PTB

roughness

doubt advisable

to use a

values and low R Z Q. The reasons

values

discussed before are probably to be found here.

measured

which

have

been

15

On

the

other

hand,

small

tip

radius

is

also

of

advantage

when

measuring force FQ and feed rate v j are not too high, so t h a t damage to
the surface of the roughness standard is avoided.

6.

Appearance of wear on the standards

At

the

beginning

of

the

comparison

measurements,

after

use

by

each

participant and at the end of the comparison, the standards were examined
for

the

appearance

of

wear.

The

original

condition

and

the

individual

phases of the increasing appearance of wear were photographically recorded

in

photomicrographs.

In

the

course

of

time,

the

taking

technique

was

gradually improved. In Figs. 31 to 39, photos of each standard are compared

showing the respective surfaces

a t the beginning (1982) and at the end

(1987) of the comparison measurements.

The stylus wear gauge, Fig. 3 1 , mainly shows wear at the widest slit.
The calibration standard, Fig. 32, shows almost no new traces of wear. This
is obviously due to the fact t h a t this standard was made of quartz glass.
On the conventional glass standards, wear usually appears very soon when
the standards are used.
Numerous new traces of wear have appeared on all roughness standards of
the PTB and on the LCA talons. Some participants have left only a few,
others numerous traces of wear. These participants have a tendency to use
smaller tip radii and higher feed rates. Another cause of the traces of wear
found may be t h a t a broken stylus tip was used or t h a t strong deviations
from

the

feed

direction

adjustment of the surface.

existed

at

the

beginning

of

the

mechanical

16

In any case, half the participants have confirmed the experience t h a t

s t a n d a r d s can be traced

under the

usual p i c k - u p

the

(r, FQ , V )

conditions

without traces of wear being left.

The roughness measurements carried out at the PTB at the beginning and
end of the comparison measurements differ only so little t h a t the following
can

be

said:

Despite

numerous

visible

traces

of

wear,

the

roughness

s t a n d a r d s can still be used. In fact, it is very unlikely t h a t in any future

measurements the stylus will get into exactly one of these traces of wear.
7.

Conclusions

This Is the

first

extensive

international

intercomparison

in the

field

of

roughness measurements which has furnished excellent r e s u l t s . In the case

of all 15 p a r t i c i p a n t s from 9 countries all deviations of the
values

from

the

reference

values

(mean

values

of

all

measurement

participants)

lie

within a range of *15%. For the PTB roughness s t a n d a r d s , even a range of

only

*10% resulted.

This

was attained

although

an

extraordinarily

great

number of different measuring s e t - u p s were used. All p a r t i c i p a n t s were able

to

gain

valuable

experience

on

the

basis

of

these

measurements.

The

following conclusions can be drawn:

1.

All participants now have at their disposal PTB roughness s t a n d a r d s

with roughness parameters according to DIN 4768 sh. 1 / 8 / . A c o n s t a n t
control of t h e measuring device is t h u s possible.

2.

One participant,

some of

whose

measurement

results

showed

greater

deviations in the beginning, recalculated the r e s u l t s l a t e r on the basis

of the stored

profile

d a t a after

having corrected his evaluation;

the

resulting deviations were s u b s t a n t i a l l y smaller.

3.

In future, a b e t t e r estimate of the u n c e r t a i n t y of measurement will be

possible.

17

4.

A detailed

analysis of the technical details of the instruments

used

indicated systematic differences in the measurement of small Rz values.

A discussion group comprising r e p r e s e n t a t i v e s of the three participating
instrument makers tries to reach harmonization. A defined limitation of
the bandwidth of t h e instruments is being considered. In addition to the
limitation of long wavelengths (cut off) already applied, a limitation of
short

wavelengths

is

required,

taking

the

stylus

dimensions

account. At the same time, t h e determination of a preferred

into

horizontal

quantisation step is under discussion. In addition to this, unequivocal

definitions of ISO roughness parameters are aimed at.
5.

In addition to the 2 RC filters which are still standardized for t h e time

being,

measurements

were

digital phase-corrected
identical

filter

carried

out

by

way

of

experiment

filters which had similar^ although not

characteristics.

The

discussion

group

has

using
totally

defined

uniform filter characteristic for future roughness measurements, which

has already been published in a draft standard DIN 4777 / 1 8 / . The same
filter characteristic is also being discussed within ISO.
In view
measuring

of the

increasing

technique

considerable

also

exchange
in

the

of goods within

field

of

roughness

economic importance to industry. That

recommendations
measurements.

are
These

given

to

industry

recommendations

to

EC, a

already

uniform

measurement

is why t h e

guarantee

have

the

uniform
been

is

of

following
roughness

successfully

applied for years by the German Calibration Service and by large sectors of
German industry:
1.

Well-defined

roughness

parameters

with

precise

conditions

of

measurement, such as R a , Rz and R m ax according to DIN 4768 sh. 1. The

contents of this standard is in conformity with ISO 4287/1, ISO 3274
and ISO 4288.

"7 1

18

2.

Contact stylus instruments which evaluate the surface profiles according

to these standards, cf. DIN 4772.

3.

Testing of the contact stylus instruments with the calibration standards

and roughness standards developed at the PTB /6/.

4.

Official certificates of calibration must be issued for the standards.

It is known that a surface can in no way be perfectly described with
the roughness parameters used here; practical application in industry
shows, however, that this is sufficient in very many cases. Should the
roughness parameters according to DIN 4768 sh. 1 not suffice, further
well-defined parameters for the description of the Abbott curve can be
found in the draft DIN 4776 /20/, cf. also / 2 1 / and /22/. In addition,
other generally defined roughness parameters according to ISO 4287/1
can be used. The trade partners must, however, agree quite unequivocal
conditions for the measurement of such parameters.

The testing of the contact stylus instruments with the above-mentioned

standards can be regarded as sufficient. More detailed investigations are
only required to find the causes in case greater deviations are found. Of
course, the testing of the measuring instruments can only be carried out in
the range covered by the standards available. A future extension to the
range of smaller roughness measurement values (Rz 1 ) is desirable.
Everyone interested in acquainting himself more thoroughly with roughness
measuring technique may do so on the basis of the standards and
publications referred to in this report.
An introduction into roughness measuring technique has been published by
Dagnall / 2 3 / (in English) and by Bodschwinna and Hillmann /24/
(in German). The annex of / 2 3 / comprises a selection of standards from
many countries. /24/ contains a list of all DIN standards, VDI directives and
ISO standards. In case of need, this list can be obtained in advance from

19

ISO s t a n d a r d s . In case of need, this list can be obtained in advance from

the authors. K ranz / 2 5 / has published a. most intensive investigation
the mechanical

scanning process. Investigations into the influence

into

of the

geometrical dimensions stylus tips on roughness measurements have been

published in / 5 , 17, 26 and 27/. These investigations are based on a new
precision

measuring

electron

microscope.

method
The

developed

books

by

/ 2 3 / and

Eckolt
/24/

/28/
give

using
a

great

scanning

number

of

additional references to l i t e r a t u r e in the English and German languages.

The author wishes to thank all participants for t h e great success jointly
achieved with these intercomparison measurements within the EC.
Special thanks are due to the BCR for the financial support given and the
patience

shown

measurements.

during

the

time

required

for

the

complicated

roughness

20

Literature

1/ Weingraber, H. v.; Kulik, V.:

Ein Vergleich der Messwertanzeigen verschiedener
elektronischer Tastschnittgerte.
Z. Ind. Fertigungstech., 60 (1970), S. 614617.
2/

Weingraber, H. v.:
Die Genauigkeit und Zuverlssigkeit der Rauheits
messung.
Ann. CIRP, 18 (1970), S.. 6376.

3/

Hillmann, W.; Eckolt, K.:

PTBNormale zum Kalibrieren von Oberflchenmegerten.
PTBBericht PTBMe5, 1974, S. 7883.

4/

Hillmann, W.:
Westeuropische Vergleichsmessungen an PTBRauhnor
malen.
PhysikalischTechnische Bundesanstalt,. Braunschweig,
Jahresbericht 1981, S. 87.

5/

Hillmann, W.; Kranz, O.; Eckolt, K.:

Reliability of roughness measurements using contact
stylus instruments with particular reference to results
of recent research at the PhysikalischTechnische Bun
desanstalt.
Wear, 97 (1984), p. 2743.

6/

Normale zum Kalibrieren und Prfen von elektrischen

Tastschnittgerten entsprechend PTBNormalen.
Prospekt der Firma Halle, Feinwerktechnik, Bunzlaustr.2
3300 Braunschweig.

7/

Etalons de Rugosit, L.C..

Etablissement Technique Central De L'Armement, 16 bis,
Avenue Prieur de la Coted'Or, 94114 Arcueil, Cedex,
France.

21

/ 8/ DIN 4768 Bl. 1 (1974):

Ermittlung der Rauheitsmegren R , R , R

mit

elektrischen Tastschnittgerten, Grundlagen.

English issue available by BeuthVerlag GmbH,
D1000 Berlin 30.
/ 9/ ISO 4287/1 (1984):
Surface roughness Terminology
Part 1: Surface and its parameters.
/10/

Grode, H.P.; Hillmann, W.; Noppen, G.:

Vorzugsmegren zum Beschreiben der Rauheit von tech
nischen Oberflchen.
DINMitteilungen 59 (1980), S. 730732.

/11/

ISO 3274 (1975):

Instruments for the measurement of surface roughness
by the profile method Contact (stylus) instruments
of consecutive profile transformation Contact profile
meters, system M.

/12/

Henzold, G.:
Rauheitsmessung mit elektrischen Tastschnittgerten.
Normenheft 12, BeuthVerlag 1971.

/13/

ISO 4288 (1985):

Rule and procedures for the measurement of surface
roughness using stylus instruments.

/14/

VDI/VDE 2602 /1983):

Rauheitsmessung mit elektrischen Tastschnittgerten.
BeuthVerlag GmbH, D1000 Berlin 30.

/15/

Instructions for using Stylus Wear Gage,

Rank Taylor Hobson Ltd., New Star Road,
Leicester LE 4 7JQ, England.

22

/16/

Kranz, 0.; Hillmann, W.:

Untersuchungen der Diamantspitzen der Tastnadeln von
Rauheitsmegerten mit dem Raster-Elektronenmikroskop.
Beitr. elektronenmikroskop, Direktabb. Oberfl. 6 (1973)
S. 319-327.

/17/

Hillmann, W.:
Forschung und Entwicklung auf. dem Gebiet der Rauheitsmessung.
Technisches Messen tm 47 (1980), S. 169-174, S. 209218, S. 273-283; tm 48 (1981), S. 36-37.

/18/

DIN 4777, Teil 1 (Entwurf 1988):

Profilfilter zur Anwendung in elektrischen. Tastschnittgerten, Phasenkorrekte Filter.

/19/

DIN 4772 (1979):

Elektrische Tastschnittgerte zur Messung der Oberflchenrauheit nach dem Tastschnittverfahren.
English issue available by Beuth-Verlag GmbH,
D-1000 Berlin 30.

/20/

DIN 4776 (Entwurf 1985, Beiblatt I.Entwurf 1985)

Kenngren Rk, Rpk, Rvk, Mr1, Mr2 zur Beschreibung des
Materialanteils im Rauheitsprofil.

/21/

Schmidt, U.; Bodschwinna, H.; Schneider, U.:

Funktionsgerechte Rauheitskennwerte durch Auswerten
der Abbott-Kurve.
Antriebstechnik 26 (1987), Nr. 9,. S. 65-69 und Nr. 10,
S. 55-59.

/22/

Schmidt, ./ Bodschwinna, H.; Schneider, U.:

Einflu der Oberflchenrauheit auf die Schmierfilmausbildung in realen EHD-Wlzkontakten.
Antriebstechnik 26 (1987), Nr. 11, S. 55-60 und Nr. 12,
S. 55-60.

23
/23/

Degnali, H.:
Exploring Surface Texture.
Rank Taylor Hobson, Leicester, England.

/24/

Bodschwinna, H.; Hillmann, W.:

Oberflchenmetechnik in der industriellen Praxis.
Beuth-Kommentar, Beuth-Verlag, Berlin, voraussichtlich
1989.

/25/

Kranz, 0.:
Untersuchungen des Abtastvorganges bei Rauheitsmessungen
PTB-Bericht PTB-Me-29, 1980.

/26/

Eckolt, K.; Hillmann, W.:

Untersuchung des Abtastvorganges bei der Rauheitsmessung.
Beitr. elektronenmikroskop. Direktabb. Oberfl. 17 (1984),
S. 149-154.

'27/

Hillmann, W. ; Eckolt, K.:

Ergebnisse von Rauheitsmessungen mit dem Raster-Elektronenmikroskop in Beziehung zu Meergebnissen des Tastschnittverfahrens .
Feingertetechnik 37 (1988), S. 6-9.

'28/

Eckolt, K.:
Messung von Oberflchenprofilen mit dem Raster-Elektronenmikroskop - Herstellen und Auswerten von Stereobildpaaren.
PTB-Bericht PTB-Me-44, 1983.

'29/

Stuht, P.:
Mikroskop mit Beleuchtungseinrichtung fr Auflichtuntersuchungen.
Deutsches Patentamt, Offenlegungsschrift DE 3417075 A1,
9.85.

24

Table 1

List of Participants

Consiglio Nazionale delle Ricerche

Via Frejus, 127
1-10043 Orbassano TO
Italy
Danmarks teskniske Hjskole
Instituttet for Produktudvikling
Bygning 424
DK-2800 Lyngby
Denmark
Ets. Technique Central de l'Armement
Div. de Mesures Tridimentionelles
16 bis, Ave Prieur de la Cote d'Or
F-94114 Arcueil Cedex
France
Feinprf GmbH
Postfach 119
D-3400 Gttingen
BR Deutschland
Hommelwerke GmbH
POB 3268
D-7730 VS-Schwenningen
BR Deutschland
Institute for Industrial
Research and Standards
Ballymun Road
IRL-Dublin 9
Ireland

25

Katholieke Universiteit Leuven

Institute of Mechanics
Celestijnenplaan 300
-3030 Leuven
Belgium
National Engineering Laboratory
East Kilbride
Glasgow G 75 OQU
Scotland

Physikalisch-Technische Bundesanstalt
Postfach 3345
D-3300 Braunschweig
BR Deutschland
Politecnico di Torino
Dipartimento di Tecnologie
e Sistemi di Produzione
Corso Duca degli Abruzzi, 24
1-10129 Torino
Italy
Rank Taylor Hobson Ltd.
New Star Road
Leicester LE4 7JQ
England
Twente University of Technology
Department WB
P.O.Box 217
NL-7500 AE Enschede
Niederlande

26

Universitt Hannover
Institut fr Metechnik im Masch
Nienburger Strae 17
D3000 Hannover
BR Deutschland
Universit de Liege
Institut de Mcanique
Rue de ValBenoit 75
4000 Liege
Belgium

University di Pisa
Istituto di Tecnologia Meccanica
Pisa
Italy

27
Table 2, Part 1

Measurement Results
Participant No.
Standard
No.

1 un =
3un=
1 E 5
2 I Z O O M 6un=
1 Oun=
3
1
5 RH G H
6

l
Rz
Rnax

o+)

1 .36G
2 .908
5.990
9.055

1 .352
2.091
5.996
9.051

2
1 .350
2.870
5 .950
9.0G0

1 .376
2.098
5.993
9.033

1 .102
2.906
5.967
9 .002

1 .316
2.916
6.016
9 .1 8 7

1 .350
2 .880
5.920
9 .010

7
1
2
6
9

.300
.920
.UHI
A)/,.'.

1 . 6 7 0 1 . 6 6 3 1 . 7 1 0 1 . 6 5 3 1 . 7 0 9 1 . 7 7 0 1 . 6 5 0 t .f2Ct
9.198
9.127
9 .510 9 .090 9 . 5 6 1
9.380
.9;>u
8.950
1 0 . G 0 1 1 0 . 1 0 1 11 . 2 3 0 1 0 . 3 7 7 11 . 5 7 9 11 . 3 2 0 1 0 . 1 0 0 1 0 . 2 2 S

R
7
0 RH l6 2 6 R z
Rnax
9

.196
3.270
4.311

.501
3.311
1 .359

.520
3.310
1.330

.191
3.29G
1 .303

.185
3.329
1.162

.505
3.200
1.560

.191
3.130
1 .200

.101)
Z.2.M
4 .250

Ra
Kl
11 RH IG38 R z
Rnax
12

.173
1 .151
1 .376

.177
1 .221
1 .105

.175
1 .160
1 .180

.170
1 .208
1 .110

.159
1 .097
1 .384

.175
1 .105
1 .370

.171
1 .076
1 .270

.1 G 9
1 .100
1 .375

Ra
Rz
Rnax

1 .530
5.611
5.816

1 .520
5.550
5.710

1 .527
6.073

1 .506
5.577

1 .510
5.000

6.363

5.725

1 .511
5.919
6.313

1 .510
5.100
5.630

1 .160
5 .160
5 .690

13
11
15

Len

6.160

Ra
Rz
Rnax

3.011
3.129
3.09G
3.100
3.002
3.120
3.070
3.015
1 1 , 7 1 2 11 . 6 9 0 1 2 . 5 7 6 1 1 . 3 8 7 1 2 . 5 0 5 1 2 . 1 2 0 1 1 . 3 7 0 1 1 . 3 5 0
1 1 . 9 5 3 I l . 0 0 0 1 2 . 7 3 1 1 1 . 1 9 6 1 2 . 9 5 6 1 3 . 2 0 0 11 . 4 6 0 11 . 1 5 0

LCR C

Ra
Rz
Rnax

6.330
6.257
6.323
6.219
6.352
6.350
6.300
6 .231)
2 3 . 3 9 1 2 3 . 6 1 0 2 6 . 7 5 3 2 3 . 1 1 3 2 5 . 0 8 7 2 5 . 6 5 0 2 3 . 2 9 0 2 3 .5011
2 3 . 7 1 1 2 3 . 9 5 0 2 7 . 2 1 8 2 3 . 9 3 0 2 6 . 7 8 2 2 6 . 1 8 0 2 3 . 1 0 0 2 3 .721)

22
2 3 LCR 0
21

Ra
Rz
Rnax

12.115 12.510 12.111 12.371 12.563 12.690 12.110 12.350,

1 5 . 1 0 5 1 5 . 5 3 0 5 1 . 6 1 8 1 5 . 1 6 0 5 0 . 1 5 2 5 0 . 2 8 0 1 5 . 2 8 0 1 5 .1 UO
1 5 . 9 0 3 1 5 . 7 1 0 5 2 . 3 3 0 1 5 . 1 9 3 5 2 . 2 3 7 51 . 5 5 0 4 5 . 5 0 0 1 5 . 1 0 0

IG

17 Len
18
19
20
21

) mean value of all participants

28

Table 2, Part 2

Measurement Results
Participant No.
Standard
No.

1
2
3

EH
128011

1
5 RH 6 1 1
6

1 un:
3un =
6un=
10un=
Ra

Rz
Rnax

8
1 .363
2.915
6.119
9.13V

9
1 .333
2.850
5.930
9.020

10
1 .360
2.090
5.990
9.010

1 .660 1 .609 1 .660

9.010
9.160
9.190
10 .200 10 .530 1 0 . 5 0 0

11

12

1 .137
3.027
5.913
8.900

1 .360
2.920
6.010
9.130

13
1 .351
2.090
5.991
9.059

14
1 .300
2.915
6.015
9.005

15
1 .3tj(J

2 .mm
5.990
9.130

1 . 6 0 1 1 . 6 6 8 1 . 6 6 9 1 . 6 6 5 1 .660
8.638
8.900
9.006
.900
9.122
9 . 9 5 7 1 0 . 0 0 1 0 . 3 7 1 11 . 1 1 0 1 0 . 5 0 0

7
Ra
0 RH 6 2 6 Rz
9
Rnax

.195
3.230
1.250

.162
3.161
1 .336

.195
3.280
1.210

.503
3.177
1.288

.197
3.180
1.260

.501
3.300
1.289

.508
3.198
1 .750

.506
3 .270
1 .320

10
Ra
11 RH 6 3 0 R z
12
Rnax

.179
1 .100
1 .310

.171
1 .185
1 .399

.173
1 .200
1 .370

.179
1 .128
1 .389

.171
1 .081
1 .300

.177
1 .197
1 .398

.180
1 .135
1 .101

.171
1 .150
1 .350

13
1 1 LCFI
IS

Ra
Rz
Rnax

1 .500
5.390
5.100

1 .551
5.830
5 .973

1 .510
5.500
5.600

1 .506
5.136
5.620

1 .570
5.710
5.930

1 .535
5.566
5.702

1 .577
5.156
5.650

1 .550
5 .770
6 .050

16
IV
10

ucn

Ra
Rz
Knax

3.060
3.110
3.116
3.070
3.208
3 .070
3.070
3.115
1 1 . 3 V 0 11 . 8 V 0 1 1 . 5 0 0 1 1 . 9 9 1 11 . 8 0 0 11 . 5 3 6 1 0 . 8 0 0 11 .500
1 1 . 5 1 0 1 2 . 1 3 0 1 1 . 7 0 0 1 2 . 1 1 1 1 2 . 1 0 0 11 . 6 7 5 1 0 . 9 0 0 11 . 7 0 0

19
2U
21

Lcn c

Ra
Rz
Rnax

6.200
6.350
6.128
6.308
5.911
6.290
6.258
6 .200
1 6 . 0 1 0 2 3 . 5 1 0 2 3 . 1 0 0 2 1 . 1 0 0 2 3 . 1 7 0 2 3 . 7 5 0 2 3 . 0 8 0 23 . 3 0 0
1 6 . 9 1 0 2 3 . 8 1 0 2 3 . 7 0 0 21 . 7 0 0
0 . 0 0 0 2 1 .1 2 0 2 3 . 1 6 0 23 .100

22
23
21

Ra

Lcn

1 2 . 1 2 0 1 2 . 1 8 0 1 2 . 5 0 0 11 . 5 6 7 1 2 . 5 6 0 1 2 . 5 1 0 1 2 . 5 5 0 1 2 . 6 0 0
3 3 . 0 8 0 1 1 . V 7 0 1 5 . 5 0 0 1 1 . 6 9 0 1 5 . 5 6 0 1 5 . 8 6 0 1 5 . 8 7 0 I G .500
3 3 . 2 0 0 1 5 . 2 1 0 1 5 . 9 0 0 1 2 . 0 2 2 0 . 0 0 0 1 6 . 1 3 0 1 6 . 2 1 0 16 . 0 0 0

Rz
Rnax

29

Fig. 1:

Calibration Standard / 6 /

30

Fig. 2: Roughness Standard /6/

31

Face Avant

Face

ETALONS
RUGOSITE

UJ

Arrire

VALEURS NOMINALE S
MICROMETRES

,250,
U

E N

50

A
A

Ra = 1,6 |

cc
IL

UJ

u
c
o

II

IS
IU

<

UREAU N A T I O N * ,L
DE ME T ROLOGIE

CE N'1
F i g . 3:

VaUurt I f t c t l v ! d e r l t r
d profil rfrer tu C.C
( Cartine, d Ulonrmg I
1 pre 4 0 In

Etalons de Rugosit /7/

The back (on the right) represents the form of the
profile for each specimen and indicates the nominal
values of the parameters of the pattern:
Radius (R)
Pitch or chord (P)
Height or deflection (H)
Arithmetic average deviation (R )

32

3.

3.8

7.6

1 1.4 mm
E

Fig. 4:

0.1

3.9

7.7

1 1.5 mm

0L3

4.1

7.9

1 1.7 mm

Plan of measurement points with position of the

initial points of the 12 total sampling lengths
and direction of measurement.

OJ

20

10
Fig.

5:

30

40

50

60

70

80

90

100

D i s t r i b u t i o n c u r v e o f Ra v a l u e s
relative
t o mean v a l u e s o f a l l r e s u l t s
( 100/ )

110

120

quant i t y
30

r-

25

20

15

10

) mistake removed a f t e r w a r d s

0
0

J_

JL

-L

10

20

30

40

Fig.

G:

X)

am

HL
50

60

70

D i s t r i b u t i o n c u r v e o f Rz v a l u e s
t o mean v a l u e s o f a l l
results
(

90

tLQ
100

relative
100/C )

110

-*

120

quant i ty
3 0 I-

25

20

15

10

" )

mistake removed afterwards

A.

-L

X)

J.

80
90
100
10
20
30
40
50
60
70
Fig. 7: Dis tribution curve of Rmax values relative
to mean values of all res ults
( 100^ )

mei .%
110

120

quant i t y

55
50
45
-

40
-

35
30

25

20

15

10

-.

^ 1

mistake

0
3

10
Fig.

removed a f t e r w a r d s
1

20
8:

30

40

x)
.

50

D i s t r i b u t i o n curve of
t o mean v a l u e s o f a l l

in .

70
Ra, Rz,
results

80

Il

90

100

Rmax v a l u e s
( 100* )

110

I*/

120

relative

37

Dev.

15

Groove 3 tl,352pm

10-.
5H
O

vxxxxxx^^yvxxxv*

ESEES

A W W V iWVVVV

E^SS

-io]
-15 -i
5

Dev. .
1 5

10

11

12

13

14

15

10

11

12

13

14

15

Groove 4 :2.631 pm

~\

10 \

s\
o\

Is

JSSSS

www

-5\
-10 \

-;5-

5
6
7
Groove 5 t 6,

ES5SS

gjgSS.

??FcnF!oS^ii>>>^!^

\ \ \ \

RWJKSNSXSK

m
2

10

11

12

13

14

15

Groove 6 . 9.05pm

Dev. X
15 \
105-.

KK*m

o sum

^^ \ \ \ \ \ '

KSSSa

5j
-IO1.
15 H

Fig. 9: Calibration
Deviations
relativo

10

11

12

13

14

15

Standard N o. 128014/2068 PTB 81

rQlativQ to PTB values and
uncertainties.

38

Rn ~ a 173

-15-.:

7
8
9
Rz ' 1,154 /

7
Rmax

10

11

12

13

14

15

8
9 10
1.376

11

12

13

14

15

11

12

13

14

15

10

Fig. 10: Roughness Standard No. 638/2082 PTB 82

Deviations relative
to m ean values and
relative
uncertainties.
2-RC-filter

39

Fig. 11: Roughness Standord No. 626/2081 PTB 82

Deviations relative
to mean values and
relative
uncertainties.
2-RC-filter

40

Ra = 1.670

1
Dav. X
20}.

Rz

8
9
9,13

8
R^-10.60

10

11

12

13

14

15

10

11

12

13

14

15

10

11

12

13

14

Fig. 12: Roughness Standard No. 641/2080 PTB 82

Deviations relative
to mean values and
relative
uncertainties.
2-RC-filter

41

Ra

1530 JM

Rz~

8
9
5.64 *

10

11

12

13

14

15

10

11

12

13

14

15

Fig. 13: Etalon de Rugosit LCA N o. 81178 /

Deviations relative
to mean values and
relative uncertainties.
2RCfilter

42

Fig. 14: Etalon de Rug osit ICA No. 81178 /

Deviations relative
to mean values and
relative
uncertainties.
2-RC-filter

43

Dov.
20-
;5

Ra

6.26

1i

10+

w^h

5-
O

sssteasss
ses

5+
-10+

-30+
L * ;
DQV. X
20-

8
9
23.39

10

11

12

13

14

15

10

11

12

13

14

15

10

11

12

13

14

15

ff may - 23. 74

sST

m
)

* ;

Fig. 15: Etalon de Rugosit LCA No. 81178 / C

Deviations relative
to mean values and
relative
uncertainties.
2-RC-filter
x) mistake removed afterwards

44

/? IZ 41

Dev.

'Hi

10+
5

Balten
KSSS

10+

-**H
-30+
*
DQV.

20k
15+

10

11

12

13

14 15

0
a
fiaax"*ZOf**

;z?

;;

73

;*

10

11

12

13

14 15

Rz * 45.5 *
K

/-li
fe

" 5 1
10+
-75-ji

-Hi.

30+.
*

20.
is\
5j

o\ M
-O-r.

^ S 5 3

SS3

m
3

5^
^

i5

S55

'^^^"<

-Sss****
^

-/5-jj
-20^
-2S.
30+
* 1

Essa
53
8

Fig. 16: Etalon de Rugosit ICA N o. 81178 / D

Deviations relative
to mean values and
relative
un
c ertainties.
2-RC-filter
) mistake removed afterwards

45

Ra * 0.177

8
Rz ' 1.230

* 1

10

11

12

13

14

15 1

8
9 10
Rnax " 1* 441 "

11

12

13

14

15

11

12

13

14

15

10

Fig. 17: Roughness Standard No. 638/2082 P TB 82

Deviations relative
to mean values and
relative uncertainties. P hase correct
filter

46

Ra - a 433

5
Dev.
40.

10

11

12

13

14

15

Rz 3,53

35\
3\
2S\
2\
15

io\

S55

5H

35

-5
.JOi^
15
20
*

S S

2 ^ ^

DQV.

Rrnox '

404

10

11

12

13

14

15

10

11

12

13

14

15

4.52

30-W
25

Hi
20\
15H!
SS

5-W

ss:

-5-iS
1015-20-*

m
8

Fig. IBs Roughness Standard No. 626/2081 PTB 82

Deviations relative
to m ean values and
relative
uncertainties.
Phase correct

filter

47

Ra - 1, 738

Dov.
40
35
30
25
20-

15
10
5

04

5
lo
is
20
*

1
5

Dov.
40
35
3\
'J:
25
20
15
10
5

^
^

7
Rz"

8
9
3.70

10

11

12

^
;

14

15

13

14

15

14

15

04
51
10
15
20
*

13

LVVVVfi3^^>^>Jh ^

8
9 10
*max " U U V

11

12

kVsNN

10

11

12

13

Fig. 19: Roughness Standard No. 641/2080 PTB 82

Deviations relative
to mean values and
relative
un
c ertainties.
Phase c orrec t

filter

48

Ra - 1,535 yrn

9
Rz - 5,73

Dav.
20-:.

SSSSSiS

iM

10

11

12

13

14

15

10

11

12

13

14

15

10

JU

12

13

14

15

15- :
10-:.
J-i:
0 ~
-J-:
-10-}.
-15-}
x

1
DQV. X
20\

7
*max "

5.96

15-}
10-}
5-}
O
-5-\
10-}

-15-.:
x
l

2 3

Fig. 20: Etalon de Rugosit

8 9

ICA No. 81178 /

Deviations relative
to mean values and
relative
uncertainties.
Phase correct

filter

49

3.13

DQV.

an

15-}.
io-}
5-.\
t^roiSSSS

0-}
-5-}
-10-}
-15-:
x

DQV.

1
X

10

11

12

13

14

15

Rz - 11.96 ym

20\
15-.':
10-}.
5-}
JSS

o-}

-5-.\
-10-}
-15-}
x

1
X

DQV.

7
8
9
Rmt 12.13

10

11

12

13

14

15

10

11

12

13

14

15

20-}
15-}
10-}
5-}

o-}
-5-\
10-}
15-.:
x

Fig. 21: Etal on de Rugosit LOA No. 81178 /

Deviations l
re ative
to mean val ues and
relative
uncertainties.
Phase correct lfi ter

50

RQ

6,37

"*\3

Dav.
2\
15

10

11

1
12

13

14

15

14

15

14

15

Rz - 24.43

v\

IO1:.
5-i:
t\v\\\i

5!
1

O.:
~5.\
IO.':
15.:
1

- ;

OQV.

20

9
fimax '24.75

10

11

12

13

15.':
10.':
5.:

W$

m
ms

Or.
5.:
10.':
15.:
* 1

10

11

12

13

Fig. 22: Etalon de Rugosit ICA No. 81178 / C

Deviations relative
to mean values and
relative
un
c ertainties.
Phase c orrec t

filter

51

Dov.

RQ'

12.58

io},
5}.

mm

O
5
liti:
15.:

8
9
Rz 47.1 m

Dov.
20}.

10

11

12

13

14

15

14

15

14

15

15.':
10
5'

O:

Pffi
SS

Is

S.':

-llr\
15.:
x

Dov. X
20}.

8
9 10
Rmax " 47.4 ym

11

12

13

15}.
Wr.

s-}

Epa

Oir
-5-:
10-}
15.:
x
1

10

11

12

13

Fig. 23: Etalon de Rugosit ICA No. 81178 / D

Deviations relative
to mean values and
relative
uncertainties.
Phase correct

filter

52

=0,25
III'

F i g . 24:

Ac=0.8
! ! ' I

l l l l f

10"
10"
Sine wavelength in mm

95

=2,5
i..,

| ilt

/ c =8,0
'

Transmission coefficients for input sine wave

signal as far as measuredvalue indication (e. g,
R
a' R ) for various cutoff wavelengths
(DIN 4772). See point X u 9 5 at 95% used in
Fig. 25.

20H
en

/itt/a.

Fig. 25:

ym.
3

Wavelength

6
g5

ressa
9
10 11

W7Z^
12

13

14

15

according to Fig. 24.

101

jjm0

^!\
1

Fig. 26:

rrrrrrr ^

_ESSSS

Horizontal digital step .

10

^w//^Nste^
11

12

13

14

15

53

4
5
6
7
8 9
10 11 12
R _ measured on an o p t i c a l f l a t .

F i g . 27:

F i g . 28:

10

12

13 14

13

14 15

Tip r a d i u s r .

1
2
3 4
5
6
7
8
9
10
Fig. 29: S tatic measuring force FQ.

mm/s -

FS$?ZL

i*mM
11

12

13

14 15

11

12

13

14 15

Ws
^$^^m^>^i^\

1
2
3 4
5
6
7
8
9
Fig. 30: Traversing speed -,.

10

54

Fig. 31 : Surface of stylus wear gage

No, 044,
on top 1982, at the bottom 1987.

55

Fig. 32:

Surface of the calibration standard

No. 128014/2068 PTB 81,
on the left 1982, on the right 1988,

56

IL

Fig. 33:

Surface of the PTB roughness standard

No. 638/2082 PTB 82,
on the top 1982, at the bottom 1987.

57

#mmMm--m

Fig. 34:

t,iM : '

Surface of the PTB roughness standard

No. 626/2081 PTB 82,
on the top 1982, at the bottom 19 87.

58

il
s
.

I!

' iil

I
il'

1
j

Fig. 35:

Surface of the PTB roughness standard

No. 641/2080 PTB 82,
on the top 1982, at the bottom 1987.

59

Fig. 36: Surface of the etalon de rugosit LCA No. 81178/A,

on the left 1982, on the right 1987.

60

Fig. 37: Surface of the etalon de rugosit LCA No. 81178/B,

on the left 1982, on the right 1987.

61

S*

Veie*-^

~mm*t<tP&'

SiFig. 38:

Surface of the etalon de rugosit LCA

No. 81178/C,
on the left 1982, on the right 1987.

62

Fig. 39: Surface of the etalon de rugosit LCA No. 81178/D,

on the left 1982, on the right 1987.
,,. . . , . , . , . . . > ! i m if III u i III 111 f i

lif / ill Ili II 1/1 iii i/l 1/ l i l i i I ((1/ il i