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Applications of Molybdenum Metal and Its Alloys: WWW - Imoa.info
Applications of Molybdenum Metal and Its Alloys: WWW - Imoa.info
Molybdenum Metal
and its Alloys
www.imoa.info
Applications of Molybdenum Metal and its Alloys Contents
Second, completely revised edition 2013 Introduction 3
IMOA 2013 How molybdenum metal products are made 4
Properties and applications of molybdenum 8
ISBN 978-1-907470-30-1 Lighting 11
Electrical and electronic devices and manufacturing 12
Electrical power devices 12
Published by the International Molybdenum Thin lms and sputtering targets 16
Association (IMOA), London, UK Semiconductor manufacturing 19
www.imoa.info Medical equipment 20
info@imoa.info High-temperature processing 22
Hot working 22
Prepared by John A. Shields, Jr., Ph.D. Processing liquid metals 25
PentaMet Associates LLC, Cleveland, OH, USA Melting glass 25
Designed by circa drei, Munich, Germany Furnaces 27
Thermal spray coating 31
Machining and fabricating molybdenum 34
Machining 34
Forming and metalworking 36
Joining 38
Summary 39
References 40
2
Introduction
The rst molybdenum metal application Resistance to attack by molten metal, Applications in all these areas require
lead wires in incandescent lamps Compatibility with most glass unique combinations of several properties.
appeared in the early days of the 20th compositions, Molybdenum and its alloys, and composite
century. Molybdenum was chosen for Thermal shock resistance, materials that employ molybdenum
this application because of its stability High stiffness, and metal, provide unique combinations of
and strength at elevated temperatures. Strong bonding with glass used in thermal and electrical conductivity,
Since that rst application, scientists and lamps and electronic devices. thermal expansion, high-temperature
engineers have discovered that other strength and creep resistance, vapor
properties of molybdenum make it the Because so many of its properties pressure, environmental stability, and
material of choice for many applications. are attractive to engineers and designers, resistance to abrasion and wear that make
Some of these take advantage of molybdenum metal and its alloys are them ideal. This brochure intends to help
molybdenums strength and stability at used in: the reader understand why this unique
high temperatures, just as the rst material nds use in so many varied
lamp wires did. However, molybdenum Lighting, applications. It also presents information
has many other properties that make it Electrical and electronic devices, on machining and fabrication techniques
attractive for applications outside Medical equipment, for molybdenum and its alloys.
traditional high-temperature components, Materials processing equipment,
including: High temperature furnaces and
associated equipment,
High thermal conductivity, Thermal spray coatings, and
High electrical conductivity, Aerospace & defense components.
Low coefficient of thermal expansion
3
How molybdenum metal products are made
Because pure molybdenum melts at ore is processed in a series of grinding the remaining unseparated mineral
such a high temperature and because it and separation steps to isolate its MoS2 content called gangue, is roasted in air
oxidizes at relatively low temperatures, (molybdenum disulde) from other to produce MoO3 (molybdic oxide) and
traditional smelting processes cannot components. This isolated material, SO2 (sulfur dioxide). The sulfur dioxide
extract the metal from its ore. Instead, containing up to about 90% MoS2 and is converted to sulfuric acid and sold
Mo tech oxide
Chemical treatment
MoO2
Extrude
Mill processing: Flat roll, swage, rotary forge, upset forge, etc.
4
for chemical applications. The roasted and sold as alloying additions for nickel-
product, called technical oxide or tech base superalloys and some stainless
oxide, contains about 57% Mo and less steels. Some powder is spray-dried
than 0.1% S. The roasting process does (see sidebar) to manufacture spherical
not remove gangue, but this is not a powders. The binders used in spray-dried
problem for the vast majority of tech oxide powders can be either organic (in the
used to manufacture molybdenum-alloy case of powders used for high-speed
steel. During melting, the gangue ends pressing operations) or ammonium
up in the slag. However, tech oxide must molybdate (in the case of thermal-spray
be puried chemically to use it in the powders).
manufacture of molybdenum metal.
The majority of powder is used to make
Figure 1 is a ow chart of molybdenum mill products like sheet, plate, foil, rod,
Figure 2. As-reduced molybdenum metal powder.
metal manufacturing, starting with tech H. C. Starck bar and forgings. Most mill products are
oxide. The oxide is rst dissolved in made from pressed and sintered starting
ammonium or sodium hydroxide, and this ingots. In this process, molybdenum
solution is processed by precipitation powder or molybdenum powder blended
and ltration, solvent extraction, or a The two stages are necessary because with appropriate alloy components is
combination of both to remove impurities. attempting to reduce the input material placed in an elastomeric mold. After
High-purity ammonium molybdate, or directly to metal at high temperature lling, the mold is evacuated, sealed, and
ADM, is extracted by crystallization or can result in signicant evaporation of
precipitation and ltration. This high-purity molybdic oxide, which has a high vapor
chemical is the starting material for pressure at temperatures as low as
molybdenum metal powder production. 800C. The as-reduced powder shown in
The molybdate can be calcined (heated Figure 2 is typical. Note the extremely ne
to high temperature in air) to produce and highly irregular particles, each larger
a high-purity molybdic oxide. Whether particle made up of agglomerated ner
ADM or calcined oxide is used as the particles. This morphology promotes high
starting material for metal production, the as-pressed strength in pressed shapes,
subsequent process is the same. The but it produces very poor flowability
ADM or calcined oxide undergoes a two- that makes powder handling difficult. In
stage chemical reduction in hydrogen striking contrast is Figure 3, an image of
gas to create pure molybdenum metal a spherical stainless steel powder like
powder. First-stage reduction occurs in the that used for thermal spray and powder-
temperature range 450 650C, and injection-molding (PIM) applications
Figure 3. Standard gas-atomized 17-4 PH stainless
reduces the input material to MoO2, often where owability is paramount. steel powder. Materials Processing, Inc.
called brown oxide because of its color.
Second-stage reduction is performed in Powder is the starting point for all virgin
the 1000 1100C range, and this molybdenum metal products. Substantial
process results in molybdenum metal quantities of powder are pressed and
powder that is typically > 99.97% Mo. sintered into pellets or other simple shapes
5
245
235
225
215
Vickers hardness
UTS = 558 MPa (81.0 ksi) UTS = 623 MPa (90.3 ksi)
YS = 462 MPa (67.0 ksi) YS = 533 MPa (77.3 ksi)
Elong. = 45% Elong. = 36%
205
195
Figure 4. Microstructure of pressed and sintered
molydenum. H. C. Starck; sample prepared by
185
NSL Analytical Services
6
The second important effect of mechanical
100
deformation is to decrease the materials
ductile-brittle transition temperature 90
(DBTT). Figure 7 2 illustrates the change
in molybdenums tensile ductility that 80
occurs as the test temperature is lowered.
Figure 8. Ductile-brittle transition behavior of sheet in the deformed and stress-relieved condition
compared to the deformed and recrystallized condition, as measured by the angle at which cracking occurs
during a three-point bend test. t = 1.59 mm (1/16); bend radius = 1t; deflection rate = 483 mm/min
(19 in/min). Source: H. C. Starck
7
Properties and applications of molybdenum
An unbreakable link exists between a Even though alloying increases oxygen atoms not contained in the carbide
materials properties and its applications. strength, the main way molybdenum is particles. This combination maintains
In some applications, a particular strengthened in all cases is by mechanical molybdenums strength to temperatures
property (e.g. electrical conductivity) is deformation. This is normally done by higher than possible with either pure
paramount. In others, a combination of standard rolling, swaging, and forging molybdenum or simple substitutional
properties taken together makes a processes. Deformation can increase alloys because the fine particles force
material the optimum choice. Optimum molybdenums strength by a factor of as recovery processes to take place at
is an important word in this context. It much as four, depending on the amount higher temperatures. Processing is a key
means that while other materials may of deformation applied. For heavily element in the success of these alloys.
have an advantage in one property or worked material like wire, this factor can The process must ensure that the
another, the material of choice provides be even higher. Annealing removes reactive metals and carbon rst dissolve
the best combination of solutions to the effects of working, causing recovery in the molybdenum matrix, then precipitate
the various engineering design problems of unworked properties. Substitutional in the required ne dispersion during the
confronting the material in a given alloys may have slightly higher maximum balance of the process.
component. Sometimes the optimum use temperatures than pure molybdenum.
solution is not a single material, but a However, to provide significant Dispersion-strengthened alloys use oxide
combination of materials, or composite, improvement in high-temperature strength second phases, or in the case of Al/K/Si-
that allows a designer to tailor the metallurgists have resorted to other doped materials dispersed elemental
properties of interest to meet a challenge alloying approaches. phases, that do not dissolve in the
presented by a particular application. molybdenum matrix. In this case, the
In all cases, cost-effective solutions Carbide-stabilized alloys contain ne extremely small and stable second-phase
are the ones that ultimately win the particles of reactive metal carbides in the particles must be present in the material
competition. This means that materials molybdenum matrix. They also benet at the very start of deformation processing.
like molybdenum metal, which by from a small amount of substitutional Processing is designed to create a
common engineering material standards alloying conferred by the reactive metals special array of these particles that
are quite expensive, must demonstrate not present as carbides and additional produces extraordinary high-temperature
a signicant advantage over competitors. interestitial hardening from carbon and strength and stability.
8
Table I. Nominal chemical composition ranges of commercial molybdenum-based materials
Pure molybdenum
Mo Min. 99.9599.97 Mo Constitutes the majority of Mo metal products: furnace and glass
(depending on the producer) melting components, power semiconductor heat sinks, sputtering
targets used to manufacture thin lms in at-panel displays and
thin-lm solar cells, powders spray-dried with either organic binders
for high-speed pressing, or ADM for thermal spray applications
Alloys
Substitutional alloys
Mo-W 1050 W Equipment for handling molten Zn, glass stirrers
Mo-Re 3 Re, 5 Re, 4147.5 Re Thermocouples (low Re) and applications
requiring low-temperature ductility (high Re)
Mo-Ta 10.7 Ta Thin lms in touch-screen displays
Mo-Nb 3.09.7 Nb Thin lms in touch-screen displays
Carbide-stabilized alloys
TZM 0.5 Ti-0.08 Zr-0.03 C Isothermal forging dies, injection molding tooling,
metalworking tools, X-ray targets
MHC 1.2 Hf-0.08 C Extrusion dies, metalworking tools
Dispersion-strengthened alloys
Mo-La2O3 0.431.20 La, 0.0750.21 O Furnace heating elements, sintering boats, lamp components
Mo-ZrO2 1.24 Zr, 0.43 O Glass-melting furnace components
Mo-Y2O3-Ce2O3 0.370.43 Y, 00.06 Ce, 0.110.12 0 Halogen lamp components, evaporation boats
K/Si doped 0.010.07 Si, 0.0050.03 K, Lamp components, heating elements
0.010.07 O
Composite materials
Laminates
Cu-Mo-Cu Various Cu/Mo ratios possible; typically Heat sinks for semiconductors and integrated circuits
between 13% and 25% Cu thickness per side
Mo-Ni Typically 5% Ni thickness bonded to one side Power semiconductor heat sinks
Powder composites
MoCu 15 Cu, 30 Cu Heat sinks for power integrated circuits:
hybrid vehicles, mobile telephone cell transmitters
Mo-Ti 50 atomic % Ti Sputtering targets to manufacture thin lms in
at-panel displays and thin-lm photovoltaic devices
Mo-Na 13 Na Sputtering targets to manufacture electrodes in
thin-lm photovoltaic devices
9
Composite materials fall in two classes: is built around only a single property. existing material system is available,
laminates and powder composites. For example, heat sinks for power semi- consideration can be given to developing
Laminates are produced by roll-bonding conductors must have thermal expansion a new material with a set of tailored
Cu or Ni to a molybdenum core. Powder coefficients that minimize thermal stresses properties. This decision must be made
composites are produced by either blend/ during operation, but they must also with an understanding of the landscape of
press/sinter (sometimes augmented conduct heat and electricity efficiently, competitive materials systems and their
by hot isostatic pressing, or HIPing) or since their job also requires them to both cost, availability, and reliability compared
liquid-phase inltration techniques. pass current and remove the heat from to the molybdenum-based option.
the semiconductor. If the power devices
Table II cross-references a selection of are in aircraft or spacecraft, density Molybdenum-based materials systems
properties and applications, noting the becomes a much more important factor are used in all the applications in Table II
properties important for each application. than if they are part of equipment like and many more because as noted earlier,
Neither the property nor the application power controls for large stationary motors. they have unique property suites that
list is exhaustive. Manufacturing properties make them ideal for those applications.
like machinability and formability come Thus, one must think in terms of a suite The remaining sections of this brochure
into play in the economic decision to of properties when matching a material present short descriptions a few of
manufacture a specic component, but to an application. Once the required suite of molybdenums many applications,
the basic material options are dened for a given application is understood, and discuss the properties that enable
by the applications requirements. It is the appropriate alloy or composite may molybdenum to succeed.
apparent from the table that no application be selected for the application. When no
Property Application
Halogen Heat LCD & Semiconductor X-ray Hot-work Liquid-metal and Furnace Surface
lamps sinks photovoltaic manufacturing tubes tooling glass processing components coating
Physical properties
Density X
Electrical
X X X X X X
conductivity
Thermal
X X X X
conductivity
Thermal
X X X X X X X
expansion
Mechanical properties
Elastic
X X X X X X X
modulus
Hot strength X X X X X X
Creep
X X X X X
resistance
Other properties
Wear/Erosion
X X X
resistance
Corrosion
X X X X X
resistance
Bond strength
X X X X X
with substrates
10
Lighting
Incandescent lighting was the first
molybdenum metal application. Its use,
dating back to about 1910 4, was in
the form of wire filament supports in
incandescent lamps (Figure 10). Lighting
applications continue to account for
large quantities of molybdenum metal 5
production today as both lamp components
and wire used as mandrels to coil tungsten
laments. At the time of writing, this is
changing dramatically as the incandescent
lamp is being replaced by compact
uorescent lamps (CFL) and light-emitting
diode (LED) lamps. Lighting technology
is far more advanced today than it was a
century ago, but molybdenum is still used
for support wire and glass feed-throughs
in halogen lamps and as mandrel wire
Figure 11. Halogen lamp showing molybdenum feedthroughs (left) and reflector (arrow right). Plansee SE
around which tungsten laments are
coiled during manufacturing. Halogen and
high-intensity discharge (HID) lamps
operate at much higher temperatures 3.0 x 10-7 K-1 and 8.0 x 10-7 K-1, between thin molybdenum sheet is used for the
than standard incandescent lamps, so room temperature and 1500C. Molyb- feedthrough, allowing plastic deformation
require more sophisticated materials denums CTE averages 5.8 x 10-6 K-1 in the molybdenum sheet to relieve the
solutions. Lower power (<100 W) halogen between 0C and 1000C. Thus, even stresses. For lower-power lamps, or
and HID lamps employ vitreous silica though molybdenum is required as a those having larger dimensions, the
glass envelopes to withstand the higher feed-through material because of the glass envelope can be made from alkali-
temperatures generated by their sources. lamps temperature, signicant thermal free borosilicate glass (average CTE
The coefficient of thermal expansion stresses develop as the lamp heats. To approximately 5 x 10-6 K-1 between room
(CTE) of vitreous silica varies between accommodate them, a carefully proled temperature and 500C) or aluminosilicate
glass (average CTE approximately
4.6 x 10-6 K-1 between room temperature
and 300C). Figure 11 shows two views
of an automotive halogen lamp. The
Tungsten lament Glass bulb lamp envelope on the left shows the
molybdenum foil feed-throughs, while
the assembly on the right shows a
Molybdenum lament
Lead wire supports molybdenum reector (arrow) designed
to minimize blinding of approaching
Dumet wire
drivers. The feed-through employs
molybdenum foil because of its low CTE,
good electrical conductivity, and strong
bonding with silica glass. Molybdenums
excellent high-temperature strength
and mechanical stability, and resistance
Cap Lead wire
to corrosion by the halogen gases inside
the lamp envelope (a critical feature for
the application), make it ideal for the
Soldered contacts
reector. These properties also make it a
material of choice for similar components
Figure 10. Schematic of incandescent lamp. Drawing courtesy GE Lighting, simplified for clarity of high-intensity lamps.
11
Electrical and electronic devices and
manufacturing
Electrical power devices high-temperature strength continued to use in electronic devices shifted from
make molybdenum indispensible. mechanical properties (high-temperature
Electron vacuum tube manufacturers Molybdenums CTE is close to that of strength and stiffness) to physical
capitalized on molybdenums lighting silicon, and molybdenum has excellent properties (thermal expansion, electrical
experience, using it for lament supports thermal and electrical conductivity. These conductivity, and thermal conductivity).
and grids because of its high-temperature properties make it ideal as a substrate In fact, by 2009 the use of molybdenum
strength and mechanical stability. Solid- for fragile silicon devices. Molybdenum by electronic devices equaled that for
state electronics long ago eliminated provides a strong, rigid base that conducts lighting products 6.
vacuum tubes from common use. As electricity to and from the device and
molybdenums use in vacuum tubes removes heat efficiently. Its low CTE Table III lists selected physical properties
declined, solid-state device designers minimizes differential expansion stresses. of several materials used in electronic
discovered that properties other than Thus, the driving force for molybdenums devices, including molybdenum. The
Epoxy/Glass
15.8**; 80 90*** 1.7 17.2 1.9 0.9 9.1
FR4 12/70
Mo30Cu 11
(Inltrated powder 7.1 205 9.7 21.1
composite) 11
W20Cu 11
(Inltrated powder 8.7 235 15.5 15.2
composite) 11
* Specic properties are ratioed to specic gravity ** In-plane *** Through-thickness ****This value is somewhat lower than the more commonly used value of 5.2
12
Al braze Al braze
Mo
Si
Mo Mo
Mo
N
Cu lead wire (phosphorous
doped)
N+ P
(phosphorous (boron
Sealing glass doped)
heavily
doped)
Plastic
Figure 12. Left-hand image shows a schematic of a small power semiconductor diode using pressed and sintered molybednum
heat sinks. Right-hand image shows the semiconductor junction and brazed assembly details, showing the size of a typical device.
Prof. K. S. Hwang
table summarizes coefficient of thermal counteract the effect of the aluminum demand maximum performance, so heat
expansion (), thermal conductivity (k), brazing material, which tends to make the sinks for these devices are manufactured
elastic modulus (E), and density (). silicon a P-type semiconductor. The right from fully dense molybdenum sheet.
The table also includes specic thermal hand side is doped with boron to make Molybdenum heat sinks for high-power
conductivity and elastic modulus, obtained it P type. The heat sinks are pressed devices have been an important part of
by dividing the individual properties by and sintered from molybdenum powder. solid-state electronics technology for many
specic gravity. These specic properties They conduct power through the diode years. Power semiconductors handle
are important in weight-sensitive and remove heat from it. Millions of these large electric currents; they are used in
applications like aerospace components. tiny cylinders are made each day using applications like motor controls for
Table II includes device materials, automated high-speed presses. Standard transit vehicles and industrial equipment,
substrate materials used in integrated molybdenum powder, shown in Figure 2, and electrical power generation.
circuits, packaging and interconnect is incompatible with this equipment
materials, and thermal management because it does not ow readily. It does
materials. Demands for ever increasing not have a good morphology for powder
device performance have pushed used with automatic feeders. To solve this
operating temperatures higher. In problem, the powder is spray dried with
response, thermal management materials a water-based organic binder solution.
have evolved toward highly engineered The spherical aggregates thus produced
composite systems designed to optimize are shown in Figure 13. The spherical
the combination of matched thermal agglomerates have high owability, while
expansion and high thermal conductivity. the binder enhances the green strength
of the as-pressed parts and lubricates
The left side of Figure 12 12 illustrates the particles and die walls, reducing
a thermal management application that pressing loads, extending tool life, and
has used pure molybdenum for many minimizing tool failure.
years, a diode heat sink found in the
rectier circuits of countless consumer Pressed and sintered heat sinks work
products. The right side of Figure 12 is a very well for low-power rectiers, but the
high-magnication SEM image of a brazed parts are not fully dense. Residual
diode assembly. The Si chip is doped on porosity is always present in pressed and
the left hand side with phosphorous to sintered parts, and the pores reduce the
make it an N type semiconductor, then heat sinks thermal conductivity. Sintered
additional P is doped near the surface molybdenum also has lower toughness
Figure 13. Spray-dried molybdenum powder,
making this region an N+ semiconductor. than wrought (deformed) material. showing the highly flowable spherical particles.
The additional doping is needed to High-power semiconductor applications H. C. Starck
13
Cathode electrode
Scroll spring
Gate
terminal Gate ring
electrode
14
skeleton, so they have higher TCE
values for any given composition, an
undesirable effect. Figure 20 illustrates
this point for tungsten with data presented
in the original patents for this class of
materials. 13, 14, 15, 16 Tungsten-copper
(WCu) and MoCu are analogues because
the chemical and physical properties
of molybdenum and tungsten are very
similar to one another, and because WCu
composites use the same manufacturing
Figure 18. Microstructure of CMC sheet. Figure 19. Microstructure of an infiltrated MoCu
H. C. Starck; sample prepared by NSL Analytical heat sink material containing 30 wt.% copper. processes as MoCu composites. For a
Services Plansee SE given thermal expansion coefficient, the
inltrated composite always has a higher
thermal conductivity than the blended
and sintered material. The advantage is
about 10%, a signicant increment in
these applications.
Figure 18 illustrates the microstructure of It is possible to produce MoCu using
this unique material. The anisotropic traditional blend/press/solid-state sinter Infiltrated MoCu is found in heat sinks
properties shown in Figure 16 can be an processes. However, this approach for integrated gate bipolar transistor
advantage when lateral heat spreading produces inferior properties because (IGBT) power devices used in hybrid
is more important than through-thickness residual porosity is always present in vehicles. While tungsten-copper has a
conduction, because devices attach to these materials after sintering. The pores better combination of TCE and thermal
the high-conductivity copper surface. cannot conduct heat, so degrade the conductivity than molybdenum-copper,
composites thermal conductivity. These the need to save weight and minimize
If isotropy of thermal properties is composites also do not have the benecial costs in automotive applications makes
paramount, MoCu composites having constraining effect of the molybdenum MoCu the preferred choice.
several copper/molybdenum ratios are
available. MoCu is typically made by
presintering a molybdenum skeleton to
attain a controlled volume fraction of
interconnected porosity, then lling the 320
pores with liquid copper by inltration.
This process is possible for only a limited 300
W-Cu composite thermal conductivity, W(mK)
180
160
140
4 5 6 7 8 9 10 11 12 13
W-Cu composite CTE, 10 -6 K -1
Figure 20. Thermal conductivity vs. thermal expansion for WCu composites made by solid-state sintering
and liquid infiltration. MoCu composites behave in a similar fashion.
15
various picture elements (pixels). For each
pixel, individual TFTs control the electric
eld surrounding each liquid crystal,
allowing the liquid crystal to admit the
appropriate amount of light to illuminate
the pixel. Molybdenum thin lms are
used in the gate metallization and source/
drain electrodes of the TFT, while the
main electrically conductive layer is
usually aluminum or copper, which both
have higher electrical conductivity than
molybdenum. Molybdenum serves several
purposes:
16
Figure 23. A sputtering target during operation, showing the blue glow
associated with its Ar plasma. Materials Science, Inc.
Figure 23 shows a sputtering target the electric eld. They hit the target screens are produced on a single sheet
during operation. Low-pressure argon gas surface with high kinetic energy, knocking of glass, so as display size increases the
is ionized by applying a voltage to the out some target atoms. The typically target area must keep pace. In a short
target, creating a plasma consisting of neutral target atoms y away from the time from inception of the technology,
positively charged argon ions (Ar+), free target in straight lines and deposit on the target sizes increased to the point where
electrons, and neutral argon atoms. substrate surface. Because of this they began to exceed molybdenum plate
The plasma produces the striking glow line-of-flight deposition, the target and manufacturing capability, multiple-target
seen in Figure 23. The Ar+ ions are substrate must be closely matched in arrays were developed as alternatives to
accelerated towards the negatively size and close to one another to maximize large monolithic targets. Figure 24 shows
charged target (acting as a cathode) by yield. To maximize productivity, multiple a at target and tubular targets.
Figure 24. Sputtering targets are now produced in an array of sizes and forms. Plansee SE
17
Material development continues to High-efficiency CIGS cells incorporate
evolve as new higher-performance alkali metals into the absorber layer.
designs evolve to meet increased display Studies have shown that sodium produces
performance requirements. Composite the greatest increase in efficiency,
Mo-Ti targets manufactured using a followed by potassium and lithium, while
powder metallurgy (PM) approach that cesium has virtually no inuence 21.
employs combinations of blending, Typical sodium concentrations are in the
pressing, sintering, and hot isostatic order of 0.1 atomic %, with sodium,
pressing (HIP)18. Figure 25 shows the being distributed preferentially at grain
microstructure of a typical Mo-Ti target. boundaries in the CIGS layer. This
improvement in efficiency is attributed to
TFT-LCD and touch-screen panel both electronic and structural effects. The
applications employ Mo-Nb and Mo-Ta structural effects include the favorable
Figure 25. Microstructure of a Mo-Ti target.
alloys that exhibit greater corrosion H. C. Starck; sample prepared by NSL Analytical inuence of alkali metals on the growth
resistance in humid ambient atmospheres, Services and the morphology of the CIGS layer.
but retain low electrical resistivity and One electronic effect is an increase in
excellent wet etching characteristics. effective charge carrier density and
therefore conductivity, which increases
All these materials must fulll several CIGS solar cell cross-section. Because in the open-circuit voltage of the cell.
requirements. The molybdenum layer CIGS cells can use polymer or metal
must bond strongly with substrate and substrates as well as the glass substrate Doping of the absorber layer with the
semiconductor materials, forming shown in the image, they allow for low- alkali metal can be accomplished by
low-resistivity contacts to allow efficient weight exible (i.e. bendable) designs. diffusion of sodium from the soda-lime
electrical conduction. It must have a good Solar cells and at panel displays use glass substrate through the molybdenum
thermal expansion match and good molybdenum for the same reasons: back electrode layer. However, the use
thermal conductivity to dissipate heat. reliable adhesion to both the substrates of this method is restricted to rigid glass
It must also be compatible with the and to the display components or active substrates. To enable manufacture of
chemistry used in panel manufacturing solar cell material, good CTE matching to high-efficiency cells on substrates other
processes, capable of being etched minimize thermal stress and related than glass and to better control the doping
precisely while protecting underlying cracking, good electrical conductivity, process, molybdenum-sodium sputtering
layers from potentially damaging and compatibility with processing targets that incorporate sodium directly in
environments. environments. the back contact layer are now available.
18
The molybdenum layer can also be made
up of two coating layers, one coating
doped with sodium and the second layer
consisting of pure molybdenum. Both
coating layers can be produced by means
of DC sputtering 22.
Separation Substrate
magnet (green)
Solar cells rely on molybdenum for the
same reasons that TFT-LCD panels do.
Molybdenums ability to establish strong
ohmic contact with the thin-lm cell
structure is especially important because
molybdenums purpose is to harvest
electrons generated in the cell and
conduct them out to be used for electrical Udecell
power.
Uaccell
A
Semiconductor manufacturing
Semiconductor manufacturing equipment
has long used molybdenum for compo- Ion source Current integrator
nents requiring strength at temperature
and compatibility with aggressive process
environments. Figure 27 is a schematic
Figure 27. Schematic drawing of the ion implantation process.
diagram of the ion implantation process Source: D. Schwen / CC-BY-SA-3.0 (http://creativecommons.org/licenses/by-sa/3.0/)
used to dope silicon wafers with atoms
to create semiconductor devices. Highly
reactive gases containing the dopant
are ionized in the ion source, and
accelerated by high voltage toward a
magnet that bends the ion beams of
different elements in arcs with diameters D
that depend on their mass/charge ratio.
That way, impurities entrained in the
ion beam by reaction and erosion of the
ion source wall, are separated from B
C
the dopant beam directed toward the
silicon substrate. Ion sources employ
molybdenum because it resists reaction
with dopant gases and erosion by the
plasma inside the chamber. Figure 28
shows a typical molybdenum ion-source
component. A
Figure 28. Assembled ion source. The power leads (A) supply power through Al2O3 insulating
feedthroughs (B) to a tungsten filament inside the molybdenum ion chamber (C). The appropriate doping
gas is ionized inside the chamber and ions are accelerated through the beam slit (D) in order to implant
dopant into the silicon wafer. Signet Products, Inc.
19
Molecular beam epitaxy (MBE) machines
are used to grow semiconductor
materials in place, atom by atom. Figure
29 is a schematic of this process. Effusion To buffer
chamber
cells containing the elements used to
make the semiconductor, e.g. gallium
and arsenic, are heated to evaporate the
elements. The evaporated atoms travel
across the high-vacuum chamber,
Ionization gauge
depositing on the substrate material where Beam ux monitor
they create a semiconductor crystal Mechanical
feedthrough
aligned with the substrates crystal
structure. Molybdenum is used in this Cryo panels Substrate (green);
process as shutters, substrate carriers, heating element (red)
and other internal components of RHEED (relatively
high-energy
the vacuum chamber. Molybdenums electron diffraction) RHEED gun used
chemical stability, stiffness and strength screen to measure semicon-
at elevated temperatures all are factors ductor thickness
Heating coils
in its choice.
Medical equipment
Molybdenum components are essential to
the operation of high-power X-ray tubes
used in computerized axial tomography
(CAT, or CT) scanning equipment. The
vacuum tube that generates X-rays is
C
analogous in many ways to the vacuum
tubes used in early electronic equipment,
but it must withstand much more severe A B
thermal and stress environments. Figure
30 is a photograph of a contemporary E
X-ray tube. The tube has elements similar
to those in electronic tubes: a cathode D
(electron source), and an anode, or F
target (electron receptor). Electrons in an
X-ray tube do not carry a signal as in
electronic tubes, but instead deposit their
energy into the target, thereby generating
Figure 30. X-ray target showing rotor (A), stem (B), and molybdenum-alloy target (C) with
X-rays. Large electron currents and high tungsten-rhenium alloy track (D) for X-ray generation. Also shown are the graphite heat sink (E) and
accelerating voltages increase the X-ray cathode cup (F) that contains the tungsten filament. Plansee SE (X-ray tube produced by Dunlee)
20
signals for analysis, but for different
reasons. Figure 32 shows how the X-ray
tube and detector array rotate around
the patient during a scan. The two com-
ponents are coupled with one another
on a large gantry assembly designed to
hold constant their geometric relationship
with one another. This is necessary
because of the precision required by the
mathematics used to analyze the signals.
yield from the process, which is inherently in order to withstand these stresses.
inefficient. Most of the beam energy It contains an integral track made from Tube
creates heat, not X-rays, so the target tungsten-rhenium alloy on the outer
must survive very high temperatures. The surface, which can exceed 70% of its
cathode assembly employs molybdenum melting temperature during operation. The
parts machined from mill products. target and track are made together as a
These parts must withstand the thermal single unit, pressed from powders in
loads imposed by the lament inside. The a steel mold and sintered to densify the Patient
rotor also uses machined molybdenum target and bond the tungsten-rhenium
or Mo-TZM alloy round bar because alloy track to the Mo-TZM substrate. The
it supports the spinning load of the large sintered target is then hot forged to
target, and conducts heat down and slightly densify it and improve its strength,
away from the target. High-temperature machined to nish dimensions, and
strength is paramount in this component brazed to a carbon heat sink whose
as well. The target is probably the most purpose is to store the heat created while
important part of the tube, as it must the tube is operating and release it in Detectors
endure extremely high temperatures, a controlled fashion. Some target designs
associated high thermal stresses, and call for coating the graphite heat sink to
Figure 32. Sketch of CAT scanner X-ray tube and
mechanical stresses from the centrifugal increase its thermal emissivity. Figure 31 detector array.
forces present in the spinning target, shows a nished tube during a post-
which may operate at speeds up to manufacturing test.
10,000 RPM. The target is typically made
from Mo-TZM, or proprietary carbide- Molybdenum sheet is also important in
strengthened alloys similar to TZM the detector array that captures the X-ray
21
High-temperature processing
Hot working Table IV. Commercially available molybdenum alloys and their 1-hour recrystallization times
1000 1000
900 900
800 800
0.2% offset yield strength, MPa
700 700
MHC MHC
600 600
TZM TZM
500 500
Mo
400 400 Mo
300 300
200 200
100 100
0 0
0 200 400 600 800 1000 1200 1400 1600 1800 2000 0 200 400 600 800 1000 1200 1400 1600 1800 2000
Test temperature, C Test temperature, C
Figure 33. 0.2% offset yield strength of stress-relieved molybdenum, TZM, Figure 34. Ultimate tensile strength of stress-relieved molybdenum, TZM,
and MHC 25-mm bar as a function of temperature. Source: Plansee SE and MHC 25-mm bar as a function of temperature. Source: Plansee SE
22
Figure 35. Isothermal forging of superalloy turbine discs using TZM alloy tooling. ATI Ladish
Figure 35 shows the isothermal forging High strength at elevated temperatures be used to describe thermal shock
process used to produce superalloy and high thermal diffusivity make the resistance, depending on the imposed
gas turbine engine discs. This process carbide-strengthened alloys ideal for thermal conditions. One is the robustness
uses TZM tooling to forge nickel-base hot-work tooling because this combination parameter, R, for the case of heat ow
superalloy billets in the 11001200C of properties makes them resistant to through a material 25.
temperature range. To prevent oxidation thermal shock and cracking that arise
of the molybdenum tooling, the forging when the tool surface is heated rapidly R =(1-)kU /E, where
billet and tooling stack are contained in a to high temperatures. The thermal =Poissons ratio,
protective chamber integrated with the expansion of the surface is constrained k =Thermal conductivity, W/mK
forging press. The superplastic forming by the colder metal inside the tool, which U =Ultimate tensile strength, MPa
process enables large deformations places the surface in compression and =Coefficient of thermal expansion,
and produces highly dened forgings. the interior in tension. If these thermal 10 -6 K-1, and
Forgings produced this way have much stresses are high enough, they can E = Youngs modulus, GPa
ner grain size and higher strength than initiate cracks in the tool that propagate
those produced by conventional forging and cause tool failure. If the surface is The expression shows that high strength
processes. They also require less not strong enough, it will deform when hot and thermal conductivity, and low
machining than conventional closed-die to alleviate the stress. The stress pattern elastic modulus and thermal expansion
forgings. The cost saved in machining is then reversed on cooling. Multiple coefficient, increase R.
more than compensates for the higher heating/cooling cycles can lead to thermal
cost of forging. fatigue failure. Several parameters can
23
Table V. Values of the room-temperature robustness parameter Rfor three tooling materials
R Mo
high CTE, its resistance to thermal shock
is only a fraction of molybdenums.
Figure 36 illustrates how the parameters 30
change with temperature. Molybdenums
resistance declines slightly with
increasing temperature due to strength 20
loss and decrease in conductivity,
while the resistance of H13 remains
approximately constant. Even so,
molybdenum retains a 3:1 advantage at 10
elevated temperature. This advantage R H13
24
loses some material due to evaporation
of MoO3. However, the oxidation provides
additional lubrication between the plug
and workpiece, enhancing tube surface
quality and tooling life.
Processing liquid metals Melting glass side of the furnace 31. The electrode is
held by a sheath, and molten glass is
Aluminum die casters use molybdenum Pure molybdenum is compatible with allowed to inltrate the region between
TZM die inserts (such as cores and many molten glass compositions, so it the electrode, sheath, and refractory
pins) to solve thermal checking and is used in glass handling equipment, brick. The inltrating glass cools and forms
cracking problems in areas of high heat tooling, and furnace components. Glass a seal, preventing bath leakage and
ux and large temperature gradients. melting electrodes (GMEs) are the most product loss. The portion of the electrode
Resistance to thermal shock and fatigue common application. Glass is electrically exposed to the atmosphere must be
are paramount in this application also. conductive when molten, so molybdenum protected from oxidation. A number of
Molybdenums resistance to molten metal electrodes that pass current through approaches have been taken over
corrosion by aluminum is an additional the melt can increase the energy input in the years to provide oxidation protection,
factor in its favor. Molybdenum tooling is conventionally red furnaces, increasing including internal or external cooling,
more costly than steel, so inserts are throughput and productivity. Many protective atmospheres, or protective
used in critical areas of the die to provide electrode designs exist, but all immerse coatings based on a variety of coating
thermal cracking resistance and improve the molybdenum electrode in the glass materials 32. As the erosion consumes
casting microstructures. Molybdenums melt, which protects the electrodes from the electrode during furnace operation,
high thermal conductivity allows it to oxidation. Figure 39 illustrates a design new electrode segments are threaded
extract heat rapidly from the casting. This where the electrodes penetrate the into the exposed external end, the glass
reduces aluminum dendrite arm spacing
and improves the castings properties in
these areas. Molybdenum-tungsten alloys
are another example of molybdenums Furnace sidewall
25
seal is melted, and the newly extended
electrode is pushed into the bath. In
addition to the side-entry electrode shown,
both top- and bottom-entry designs are
used. Figure 40 shows an example of a
furnace using bottom-fed electrodes.
Tin oxide
26
Coating technology to increase
Temperature, F
molybdenums oxidation resistance is
392 752 1112 1472 1832 2192 2552 2912
important for glass melting. When a 30
furnace is running at steady state there
is little problem, because the molten 20
glass protects immersed molybdenum Mild steel
0.1
negligible at typical vacuum-furnace
Vacuum operating temperatures. Tantalum and
10 -2 furnace 10 -4
operating tungsten, both of which have lower
range vapor pressures than molybdenum, are
10 -3 10 -5
much more expensive, and tungsten is
much more difficult to fabricate than
10 -4 10 -6 molybdenum, so they nd use only in
TM
furnaces operating above 1500C.
10 -5 10 -7
10 -6 10 -8
27
Figure 43 shows an all-metal hot zone relies heavily on molybdenum internal
employed in a modern vacuum furnace. components for their strength at
Metal hot zones offer the utmost in temperature and dimensional stability.
vacuum cleanliness for materials like Molybdenum and its alloys are widely
titanium, niobium, and tantalum that used as materials of construction for HIP
cannot tolerate carbon or oxygen vessels, and are found in heating
contamination. Therefore, metal hot zones elements, mantles, and support structures.
are often found in furnaces serving in the Figure 44 shows a molybdenum mantle
aerospace, lighting, medical, electronics fabrication for a large HIP unit, being
and powder injection molding (PIM) hoisted for positioning in the hot zone. The
industries. Hot isostatic pressing (HIP), molybdenum internals are illuminated by
used to consolidate powder materials evocative lighting.
and improve the integrity of cast metals,
28
Figure 45. High-temperature hydrogen-atmosphere furnace employing molybdenum heating elments. CM Furnaces
Figure 46. Stress-rupture plots for Mo, TZM, and MHC alloys. (Based on data from Ref. 36)
29
It is important to remember that rupture
1.0E+01
life is not the only determinant of creep
performance. A component that lasts
a long time before failure, but deforms 1.0E+00
signicantly during use, may fail Mo
because it simply cannot keep its shape. 1.0E-01
1.0E-03
1.0E-04
Mo
1.0E-05
Recrystallized Mo-La alloy TZM
1.0E-06
1.0E-07
10 50 100 500 1000
Stress, MPa
Figure 48. Steady-state creep rate of pure Mo, TZM, and Mo-La at 1100C. Source: Plansee SE
30
Thermal spray coating
Thermal spray is a technology that in this area that wire spraying is strongest, Pure molybdenum is limited to tempera-
creates a new, engineered surface on a due to historical precedents and the fact tures of about 300C due to oxidation
substrate by spraying droplets onto it 39. that spray wire is available only as the concerns, so it is often blended with other
Thermal spray equipment feeds the pure metal. Journal and bearing shafts and elements in order to produce molybdenum-
coating material into a high-temperature piston rings are two major users of alloy coatings or with another base
jet of inert or reducing gas, which melts molybdenum coatings, applied using both material such as nickel to enhance the
and atomizes the coating material and wire and powder deposition processes. coating.
impels it onto the surface. There the
droplets solidify in splats, building up
the surface coating. The coating material
source can be wire, rod, or powder.
Metals, ceramics, and cermets are all
processed using thermal spray technology.
The heat source for spraying may
be a ame, an electric arc, or even a
controlled explosion. This variety of heat
sources, carrier gases, materials, and
material forms has led to the development
of many different processes, including
flame spray, wire spray, detonation
gun deposition, high-velocity oxyfuel
(HVOF), and plasma spray. The coatings
themselves can be designed to impart
corrosion resistance, wear resistance,
friction control, and thermal insulation to
the substrate. Thermal spray is also
used in some cases to rebuild regions
of a component that have been worn
or eroded away in service. Figure 49
illustrates a modern thermal spray setup,
with multiple spray guns operated using
sophisitcated digital controls.
Figure 49. Automated ganged rotating-gun technology used to coat automotive cylinders. While this is not
a molybdenum spray application, it illustrates the level of sophistication possible with current technology.
Sulzer Metco
31
Figure 50 illustrates the microstructure priority as green strength for mill
obtained when thermal spraying a products because mold lling is frequently
Specimen mounting material molybdenum-based alloy powder 40. When performed manually, not with mechanized
using powder spray equipment, varying equipment. Thus, powders that are best
the composition of the feed material to the for mill products tend to be agglomerates
Mo-rich coating
jet in a controlled fashion can produce of ne particles that mechanically inter-
composite or graded coatings. lock when pressed. Spray applications,
like the powders used for automated
Powders used in spray applications are pressing applications, place a premium
Substrate
markedly different from those used to on owability. The solution to this problem
produce mill products. Mill products start is similar, but not identical, to that used
as pressed and sintered billets, so to produce powders for high-speed
require powder that will press to high pressing operations. The powder is spray
Figure 50. Molybdenum-containing thermal spray
coating on substrate. Mahle Group density and produce large green billets dried, but instead of using a water-based
with the strength to survive industrial organic binder, an aqueous solution
handling. Flowability is not as high a of ammonium dimolybdate is used.
Mo-base alloys
Spheroidal/
2.5 Air plasma spray (4575 m)
agglomerated & sintered
99.0% Mo
Irregular/
5.9 HVOF (1545 m)
sintered & crushed
Spheroidal/
Mo-3Mo2C 23 Air plasma spray
agglomerated & sintered
Ni-20Cr-10W-9Mo-4Cu (Superalloy)
Water atomized
Co-28.5Mo-8.5Cr-2.6Si (T-400 type) 3.3 HVOF
Ni-14Cr-9.5Co-5Ti-4Mo-4W-3Al
Spheroidal/gas atomized 3.94.4 HVOF
(Ren 80 type)
32
When spray dried, the powder/molybdate thermal spray powder that contains both
solution forms spherical droplets and the spherical molybdenum powders (lacy
water evaporates as the drops fall to surfaces) and alloying element powders
the bottom of the spray dryer chamber. produced by atomization from the melt
Unlike the spherical pressing powder (smooth surfaces).
that uses organic binders, these powders
are held together with the solid ammonium Thermal spray powders are available in
molybdate that remains after the water many compositions for a variety of appli-
is removed. Heating the molybdenum/ cations. Table VII summarizes information
ammonium molybdate composite spheres about molybdenum-containing thermal-
in hydrogen chemically reduces the spray alloys, including composition,
molybdate to molybdenum metal and powder and coating physical properties,
partially sinters the sphere, providing the applications, and user specications.
Figure 51. Spray-dried molybdenum powder alloy
strength necessary to withstand shipping, blend, showing highly flowable spherical particles.
handling, and processing in thermal H. C. Starck
spray equipment. Figure 51 shows a
575
650
GE B50TF155 ClA
Honeywell EMS52432, Cl XVI
Rolls Royce EMS56712, Volvo PM819-62
GE B50TF190 ClA
Honeywell EMS 52432, Cl XV
Rolls Royce EMS56713, Volvo PM819-15
33
Machining and fabricating molybdenum
Machining Some heavy machining (e.g. ingot lubricant manufacturers to determine the
scalping and rough turning) can be done best lubricant system for a particular job.
Molybdenum metal and its alloys are without lubrication, but for most tasks,
machinable by all common machining especially nishing work, emulsion Table VIII 41 summarizes some suggested
processes. Shops around the world lubricants are needed to ush dust away basic machining parameters for
manufacture a wide variety of parts in a from the tool/workpiece interface and cool molybdenum promulgated by one major
range of sizes from molybdenum and the workpiece and tool. Consult with manufacturer. Table IX 42 presents the
its alloys every day. Excellent surface
nishes and exacting tolerances can be
attained with appropriate attention to
detail. Table VIII. Basic machining recommendations for molybdenum 41
34
Table IX. Basic machining recommendations for molybdenum TZM alloy 42
Operation Tool material Tool geometry Tool Depth of cut Width of cut Feed Speed
in. in. ft/min.
Face milling T-15 HSS AR: 0, ECEA: 10, 0.010 in./tooth 100
4 in. dia
RR: 20, CA: 45, 0.060 2
single tooth
Face milling C-2 carbide clearance: 10 0.005 in./tooth 350
End mill slotting T-15 HSS Helix: 30, 0.750 dia drill,
RR: 10, CA: 45, 0.125 0.750 0.004 in./tooth 190
End mill HSS end mill
M-3 HSS clearance: 10
peripheral cut
results of an extensive research program Both silicon carbide and aluminum oxide recommendations choosing wheel
funded by the U.S. Air Force into the wheels are used to grind molybdenum. compositions and grinding practices.
appropriate techniques for machining Manufacturers of grinding wheels and Cooling is important in grinding
molybdenum and its alloys in the early abrasives offer a variety of compositions operations to prevent overheating.
1960s. The parameters in these tables are designed for a range of applications. Grinding coolants similar to those used
a good starting point for machining They should be consulted for specic for machining give good results.
these materials. Experimentation on any
specic job will allow a shop to optimize
their procedures and minimize their
manufacturing cost.
35
Forming and metalworking 100
36
Note that Figure 54 only presents two
140
different nishing processes as ways to
evaluate the effect of surface condition on
120 bendability, both chemical cleaning
and surface removal techniques. While
electropolishing is clearly superior, molten
100
caustic cleaning is far more economical
Electropolished
Bend angle, degrees
37
the alloys reactive metals titanium and
zirconium react with oxygen to form
ne oxides during welding. Molybdenum
is often welded inside high-purity inert
gas chambers to minimize oxygen
contamination 46.
Figure 57. Transition between HAZ (right) and Figure 58. Transition between HAZ (right) and base
base metal (left) in TIG-welded ODS Mo-La alloy. metal (left) in TIG-welded pure Mo component.
Rhenium Alloys Rhenium Alloys.
38
Figure 59 Illustrates a common use of
welding for molybdenum components,
to seal crevices in formed and riveted
sintering boats.
Figure 59. Molybdenum boats, illustrating both basic forming and fabrication techniques and GTA welding
to seal crevices at joints. Elmet Technologies
Summary
Molybdenum and its alloys are used attractive strength at high temperature, to employ that knowledge. Because of
in a broad spectrum of markets, for high stiffness, excellent thermal these factors, we expect that applications
applications in traditional smokestack conductivity, low coefficient of thermal in existing and emerging markets will
industry technologies, cutting-edge expansion, and chemical compatibility continue to arise. The technological
electronic devices and their manufacture, with a variety of environments will infrastructure exists to support new
and emerging green technologies such continue to be important in future applications with new materials and
as LED lighting and high-efficiency demanding applications. A considerable processes, so the use of molybdenum
thin-lm solar cells. The properties that manufacturing knowledge base exists, metal should contiue to grow in the
originally made molybdenum metal so along with numerous organizations able future.
39
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3 Ibid. p. 35
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40
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41
37 Molybdenum, op. cit., p. 16.
38 Ibid. p.16.
39 Robert C. Tucker, Jr., Thermal Spray Coatings, ASM Handbook Volume 5: Surface Engineering, Catherine M. Cotell,
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42 Noran Zlatin, Michael Field, William P. Kostor, and John V. Gould, Machining of Refractory Metals, Chapter V-Machining
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44 Molybdenum, op.cit., p. 23
45 J. A. Shields, Jr. and B. Mravic, Factors Affecting the Delamination of P/M Molybdenum Sheet During Stamping, Advances
in Powder Metallurgy and Particulate Materials - 1991, Vol. 9, American Powder Metallurgy Institute, Princeton, NJ (1991).
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Research Council, New York, NY (1986).
47 R. I. Jaffee, C. T. Sims, and J. J. Harwood, The Effect of Rhenium on the Fabricability and Ductility of Molybdenum and
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48 Leonhardt and J. E. Gould, A Study of Welding Behavior for Molybdenum With and Without Lanthanum Oxide Additions,
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42
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