Facultatea de Inginerie Mecanica si Mecatronica

Company Address Line 2]

Simulation of
Accelerometru MEMS
Date: 13 mai 2015
Designer: Ing. Constantin MARIN
Study name: Frequency 1
Analysis type: Frequency

Table of Contents
Description ............................................ 2
Assumptions .......................................... 3
Model Information ................................... 3
Study Properties ..................................... 5
Units ................................................... 5
Material Properties .................................. 6
Loads and Fixtures................................... 7
Connector Definitions ............................... 7
Contact Information ................................. 7
Mesh Information .................................... 8
Sensor Details ........................................ 9
Study Results ....................................... 10
Conclusion .......................................... 15

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 1

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Description
No Data

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 2

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Assumptions

Model Information

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 3

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Model
Analyzed with SolidWorks name: Accelerometru MEMS
Simulation Simulation of Accelerometru MEMS 4
Current Configuration: Default
Solid Bodies
Document Name and Document Path/Date
Treated As Volumetric Properties
Reference Modified
 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Study Properties
Study name Frequency 1
Analysis type Frequency
Mesh type Solid Mesh
Number of frequencies 5
Solver type FFEPlus
Soft Spring: Off
Incompatible bonding options Automatic
Thermal option Include temperature loads
Zero strain temperature 298 Kelvin
Include fluid pressure effects from SolidWorks Off
Flow Simulation
Result folder SolidWorks document
(C:\Users\Costi\Desktop\Sesiunea de comunicari
stiintifice Anul II master - semestrul II (15.05.2015))

Units
Unit system: SI (MKS)
Length/Displacement mm
Temperature Kelvin
Angular velocity Rad/sec
Pressure/Stress N/m^2

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 5

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Material Properties
Model Reference Properties Components
Name: Silicon SolidBody 1(Boss-
Model type: Linear Elastic Isotropic Extrude3)(Accelerometru
Default failure Unknown MEMS)
criterion:
Yield strength: 1.2e+008 N/m^2
Mass density: 2330 kg/m^3
Elastic modulus: 1.124e+011 N/m^2
Poisson's ratio: 0.28

Curve Data:N/A

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 6

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Loads and Fixtures

Fixture name Fixture Image Fixture Details
Entities: 5 face(s)
Type: Fixed Geometry

Fixed-1

Connector Definitions
No Data

Contact Information
No Data

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 7

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Mesh Information
Mesh type Solid Mesh
Mesher Used: Curvature based mesh
Jacobian points 4 Points
Maximum element size 0.0783121 mm
Minimum element size 0.0783121 mm
Mesh Quality High

Mesh Information - Details

Total Nodes 114403
Total Elements 75068
Maximum Aspect Ratio 43.328
% of elements with Aspect Ratio < 3 97
% of elements with Aspect Ratio > 10 2.15
% of distorted elements(Jacobian) 0
Time to complete mesh(hh;mm;ss): 00:00:05
Computer name: COSTI-PC

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 8

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Sensor Details
No Data

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 9

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Study Results

Name Type Min Max

Amplitude1 AMPRES: Resultant Amplitude Plot 0 516.941
for Mode Shape: 1(Value = 5633.31 Node: 55 Node: 42
Hz)

Accelerometru MEMS-Frequency 1-Amplitude-Amplitude1

Name Type Min Max

Amplitude2 AMPRES: Resultant Amplitude Plot 0 1144.75
for Mode Shape: 2(Value = 9803.92 Node: 55 Node: 2
Hz)

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 10

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Accelerometru MEMS-Frequency 1-Amplitude-Amplitude2

Name Type Min Max

Amplitude3 AMPRES: Resultant Amplitude Plot 0 1135.33
for Mode Shape: 3(Value = 9959.12 Node: 55 Node: 36
Hz)

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 11

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Accelerometru MEMS-Frequency 1-Amplitude-Amplitude3

Name Type Min Max

Amplitude4 AMPRES: Resultant Amplitude Plot 0 688.247
for Mode Shape: 5(Value = 97870.9 Node: 55 Node: 42
Hz)

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 12

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Accelerometru MEMS-Frequency 1-Amplitude-Amplitude4

Name Type Min Max

Amplitude5 AMPRES: Resultant Amplitude Plot 0 1144.75
for Mode Shape: 2(Value = 9803.92 Node: 55 Node: 2
Hz)

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 13

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

Accelerometru MEMS-Frequency 1-Amplitude-Amplitude5

Mode List
Frequency Number Rad/sec Hertz Seconds
1 35395 5633.3 0.00017752

2 61600 9803.9 0.000102

3 62575 9959.1 0.00010041

4 6.148e+005 97848 1.022e-005

5 6.1494e+005 97871 1.0218e-005

Mass Participation (Normalized)

Mode Number Frequency(Hertz) X direction Y direction Z direction
1 5633.3 8.3461e-006 0.45652 1.9862e-005

2 9803.9 0.022186 0.00017281 0.053085

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 14

 Facultatea de Inginerie Mecanica si
Mecatronica Ing. Constantin MARIN
13.05.2015

3 9959.1 0.05313 2.5554e-009 0.022215

4 97848 0.035562 1.4385e-010 0.34635

5 97871 0.34637 1.355e-009 0.035585

Sum X = 0.45726 Sum Y = 0.45669 Sum Z = 0.45725

Conclusion

Analyzed with SolidWorks Simulation Simulation of Accelerometru MEMS 15