1 March 1995

OPTICS
COMMUNICATIONS

HSEVIER Optics Communications 115(1995) 40-44

Simple equations for the calculation of a multilevel phase grating

for Talbot array illumination
Changhe Zhou, Liren Liu
Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, P.O. Box 800-216, Shanghai 201800, China

Received 30 June 1994; revised version received 3 October 1994

Abstract

Compared with Szwaykowski’s equation [Appl. Optics 32 ( 1993 ) 11091, simple equations for the calculation of a multilevel
phase grating for array illumination based on the fractional Talbot effect are given. The characteristics of the multilevel phase
gratings can also be easily analyzed with these simple equations.

Since Lohmann put forward [ 1 ] and demon-
strated [2] the array illuminator based on the frac-
tional Talbot effect, many researchers published their
works on this subject recently. Da [ 31 and later Ar-
riz6n [ 41 discussed in how many cases binary phase
gratings can be used for array illuminations based on
the fractional Talbot effect. Their conclusions are that
only six cases are possible for a single binary phase
grating to be used for Talbot array illuminations. Al-
though Arriz6n [ 5 ] also gave an architecture in which
binary phase gratings are cascaded in the specific se-
rial distances to realize a required (not arbitrary) high
compression array illumination, the cost of making
such binary phase gratings is still high and light effi-
ciency will be reduced due to a longer distance be-
tween the first binary phase plane and the required
array illumination plane.
Generally, a multilevel phase grating is required to
realize a arbitrary high compression array illumina-
tion at the fractional Talbot distance. Leger et al. [ 61
have given a simple equation to calculate the multil-
evel phase grating for some even-number compres-
sion array illumination and they also gave a experi-
mental example to support his equation. Szwaykowski
et al. [ 7 ] gave their equation to design the multilevel
phase grating for arbitrary-number compression ar-
ray illumination, but Szwaykowski’s equation [ 7 ] is
very complex. In this paper, simple equations for the
calculation of a multilevel phase grating for Talbot
array illumination are given.
For the cases of N multiples of 4, Leger et al. [ 61
have given the following equation to calculate the
multilevel phase
(1)
where k= 1, .... N/2; N is a coefficient corresponding
to the fractional Talbot distance ( 1/N)Z,; 2, is the
Talbot distance
Z, =2d2/A, (2)
where d is the periodic distance of the one-dimen-
sional grating and ;i is the illuminated light
wavelength.
For arbitrary-number compression ratio array il-
lumination, Szwaykowski et al. [ 71 gave the follow-
ing equation:

0030-4018/95/%09.50 0 1995 Elsevier Science B.V. All rights reserved

.SSDI0030-4018(94)00650-4
 C. Zhou, L. Liu /Optics Communications 115 (I 995) 40-44 41

N-l whereP=N/2, k= 1,2, .... (N/2).

IfNiseven but (N/2) isodd, i.e., N=4q+2, q= 1,
2, .... the phase factor will be
=Aexp[$(k. N)] , (3)
Rk= f exp[-i(n(2k-1)m//I+nm2/p)], (12)
where A is a amplitude factor we don’t concern and m=l
@(k, N) is its relative phase. The step to calculate the
where p= N/2, k= 1, 2, .... N/2.
multilevel phase $(k, N) is rather complex as fol-
To calculate the multilevel phases from Eqs. ( 1O)-
lows. If one defines
(12), the procedure in Eqs. (4)-(7) should also be
d(kP) = (27rIN)P(k-P) 1 (4) used. So the computation complexity in Liu’s method
is a little larger than that in Szwaykowski’s method,
and
but both the methods are in the same complexity
N-l
degree.
S(kW= ,& sin[&kp)l, (5) In this paper, simplified equations for the calcula-
N-l
tion of the multilevel phases, compared with the
C(kW= pmmol 2 (6) above two methods, are given. Based on Guigay’s de-
duction result [ 9 1, one knows
then @(k, N) can be calculated as
E2 x,~Z~ =A 2 E,(x+md/N)
@(k,N)=arctan[S(k,N)/C(k,N)]+6(k,N), (7) ( > m=l

where 6(k, N) is the adjusting phase (0, 7cor 27r), Xexp(ilrm2/2N)[1+iN(-I)“], (13)
according to the signs of S( k, N) and C( k, N), mak-
where A is a factor we don’t concern.
ing $( k, N) be in the area (0,27r).
In the case N=4q, q= 1, 2, .... the terms with odd-
In fact, the fractional Talbot effect is the very well
number FYIin Eq. ( 13) is zero, so the phase factor in
known phenomenon which has been studied by many
the above equation ( 13 ) is
researchers, Liu [ 8 ] has also given the following
2
equations to describe this phenomenon. nk?
@(k, N)= g = (N,2) , (14)
It is assumed that the object grating E, (x) is

where m= 2k, k= 1,2, .... (N/2). This equation is that

E,(x)= f Rect(x-kd) . (8)
k=-co which Leger et al. [ 6 ] have given [ Eq. ( 1) 1. This
expression is simple to be calculated. In other cases
In the fractional Talbot distance (1 /N)Zr, the re-
of N, similar simple equations can also be obtained
sponse E2 (x) should be
from Eq. ( 13). In the case N=4q+ 2, the terms with
even-number nz in Eq. ( 13 ) is zero, so the phase fac-
E*(x) =A ,=E Rk Rect(x-kd/P) , (9)
m torintheEq. (13)is

where A is a amplitude factor we don’t concern. If N @(k,N)= n(2;;1)‘, (15)

is odd, the phase factor will be
where k= 1, 2, .... (N/2).
, (10) In the case N= 4q+ 1, the phase factor in Eq. ( 13)
is
where/?=N, k= 1, 2, .... N.
$(k,N)=n[k2/2N++(-1)k], (16)
If N is even and (N/2) is also even, i.e., N=4q,
q= 1,2, .... the phase factor will be where k= 1, 2, .... N.
In case N= 4q+ 3, the phase factor becomes
&= ~~,exp[-i(2Rkml~+nm’iP)l, (11)
c$(k,N)=n [k2/2N-$(-l)k], (17)
42 C. Zhou. L. Liu /Optics Communications 1 IS (I 995) 40-44

where k= 1,2, .... N.
To verify these equations ( 14)-( 17), computer
simulations have been used. Computer simulations
show that the simplified equations given in Eqs.
(14)-( 17) accord well with Szwaykowski’s equation
and Liu’s equations. One advantage of the equations
given in Eqs. (14)-( 17) is that they are easy to be
calculated. Some values of multilevel phases for Tal-
bot array illumination are given in Table 1.
In addition, another advantage of the equations
given in Eqs. ( 14)- ( 17 ) is that the characteristics of
the designed multilevel phase grating can be easily
analyzed. In the case N=4q, it is easy to prove that
Eq. ( 14) has the following characteristic
one period is symmetric about the para-center phase
with k= q except the last one phase (k= 2q), which is
shown in Fig. 1.
In the case N=4q+2, it is easy to prove that Eq.
( 15 ) has the following characteristic:
exp(i, (2til)2)=exp(irc ]N-(~~-1)12), (19)
where k= 1, 2, .... 2q+ 1.
From this equation ( 19), we know that the struc-
ture of the multilevel phases in one period in this case
is also symmetric about the center phase with
k=q+ 1.
In the case N= 4q+ 1, from Eq. ( 16), we can prove

exp(irr&) =exp(in (N~~k)2), exp[$(N-k, N)]=exp[i@(k, N)] , (20)

(18)
where k= 1, 2, .... 2q.
where k= 1, 2, .... (q- 1). From this equation, we In the case N= 4qS 3, from Eq. ( 17 ), we can prove
know that the structure of the multilevel phases in
exp[i~(N-k,N)l=exp[i~(k,N)l, (21)
Table I
Some values of the multilevel phases in one period at ( 1/N) Zr where k= 1,2, .... 2q+ 1.
distance which can be used for the fractional Talbot array illu- The symmetrical characteristics in all the above
mination. L is the number of the different multilevel phases cases are shown in Fig. 1. From Fig. 1, we know that
corresponding to N=4q, 4q+ 1, 4q+2, 4q+ 3, the
N Multilevel phases L
- - maximum numbers of the different multilevel phases
3 o,o, 4n/3 2 are q+l, 2q+ 1, q+ 1, 2q+2, respectively.
4 R/2,0 2 Szwaykowski’s conclusion [ 7 ] is “the number of dif-
5 0,4n/5,4n/5,0,2n/5 3 ferent phase level is at most (N+ 1) /2 for the phase
6 0, 2R/3, 0 2
7 0, 12R/7,4n/7,4n/l, 12R/l,O, Ton/7 4
structure associated with odd N and N/2 for N is
8 R/4, R, R/4,0 3
symmetric symmetric
9 0,2n/3,4R/9,4a/3,4a/3,4R/9,2R/3,0,4R/9 4
10 0,2n/5,6R/5, 2n/5,0, 3
11 0, 18R/11,4R/11,2R/l1, 12R/ll, 12R/ll, 6
2R/11,4R/11,18n/11,0, 16rr/ll
12 n/6,2R/3,3~/2,2R/3, n/6,0 4
13 0,8R/13,4n/13, 14x/13, 12R/l3,24R/l3, 7 k=l.Z, ... q, ... 2q k= 1, 2, qtl, Zqtl

24n/l3,12R/l3, 14~/13,4R/13,8n/13,0,6n/13
14 0,2n/7,6n/7, 12n/7,6n/l, 2n/l, 0 a

15 0,8R/5,4n/15,0.4n/5,2R/3,8n/5,8n/5, symmetric
2R/3,4n/5,0,4n/15,8RJ5,0,22n/l5
16 x/8, R/2,9R/8,0,9R/8, n/2, R/8,0
17 0,10R/17,4n/17, 16R/tl, 12R/17,26R/l7,
24n/17,6R/17,6x/17,24R/17,26n/17, 12R/ll, I&
16~/17,4n/17,10n/17,0,8R/17 k=l.Z. ‘.’ 4qtl k=l. 2. .‘. 4qt3
18 0.2R/9,2n/3,4R/3,2R/9,4R/3,2~/3,2R/9,0 4
19 0,30R/19,4n/19,36R/l9,12R19,8R/19, 10 ICI 14
24n/19,22R/l9,2R/19,2n/l9,22n/l9,24n/l9,
8~119, 12n/l9,36R/l9,4n/l9,30R/19,0,28n/19 Fig. 1. The structure of the multilevel phase gratings in one pe-
20 n/l0,2x/5,9n/lO, 8x/5, n/2,8R/5,9n/10, 6 riod formed by a binary amplitude grating with a appropriate
2R/5, R/IO, 0 opening ratio in the different fractional Talbot distances ( 1/N)&,
(a) N=49, (b) N=4q+2, (c) N=49+ I, (d) N=49+3.
 C. Zhou, L. Liu /Optics Communications 115 (1995) 40-44 43

even”, corresponding to N= 4q, 4q+ 1,4q+ 2,4q+ 3, array illumination, i.e., N= 5,8, 10, corresponding to
the numbers of different phase levels are 2q, 2q+ 1, at (1/5)Z=, (4/5)Z,, (l/8)&, (7/8)Z,, (l/10)2,,
2q+ 1, 2q+2, respectively. So the phase structure (9/1O)Z, distances with the corresponding phase
shown in Fig. 1 is more accurate than Szwaykowski’s distributions.
conclusion. One more interesting characteristic of the multil-
The numbers of the different multilevel phases in evel phase distribution given in Table 1, which can
all the above cases as indicated by the symmetric be proved by the simple equation (14)-( 17), is
structures in Fig. 1, however, are not the practical
numbers of the different multilevel phases; e.g., to t(m)= f cos[@(k+m, N)-@(k, N)]
k=l
consider the case of N= 9 = 4 x 2 + 1, the predicated
number of the different phase levels is 2 X 2 + 1 = 5, =/3? m=O,p,
the practical number as given in Table 1 is 4, this is
10, m=l,2, .... p-1 . (22)
because of one unexpected redundancy in one of the
phases. To consider in general this possible redun- where
dancy, corresponding to N= 4q, 4q+ 1,4q+ 2,4q+ 3,
j?= N/2, if N is even ,
the numbers of the different multilevel phases are at
most q+ 1,2q+ 1, q+ 1,2q+2, respectively. =N, if N is odd , (23)
There are two distances 2,/N and ( 1 - 1/N)Z, at
and @(P+m, N) =@(m, N), m=O, 1, 2, .... j3.
which a binary amplitude grating (with the opening
The above equation (22) has a clear physical
ratio 2/N when N is even, 1IN when N is odd) will
meaning: only one unit in one period of the output
form a uniform irradiance distribution. It can be
discrete function is required to have light illumina-
proved by using Liu’s equations [ 81 and Guigay’s
tion, all the other units are expected to be zero in or-
equations [ 91, that the magnitudes of the phase dis-
der to realize the 100% light efficiency for array illu-
tribution in one period at ( 1 - 1/N)Z, distance are
mination. To illustrate clearly what this phenomenon
equal to that at ( 1/N)Z, distance, but with a nega-
means, one example for N= 5 in Table 1 is given, @(k,
tive sign, for example, N= 5, the multilevel phase dis-
N) in this case are 0, 47r/5, 4x15, 0, 2x15.
tribution in one period at ( l/5 ) Z,, as given in Table
1, is 0,4n/5,4rr/5,0,2n/5, and that at (1- l/N)Z, t(O)=cos(0-0)+cos(47r/5-47r/5)
is calculated as 0, -47~15, -4~~15, 0, -2n/5, or
+cos(47r/5-47l/5)+cos(o-o)
equivalently into the (0, 2~) area as, 0, 6x15, 6x15,
0, 8x15, so it can be proved that if a coherent plane +cos(2n/5-2x/5),
wave is retarded by a phase distribution given in Ta-
=5,
ble 1 and Eqs. (14)-( 17), at (l/N)Z, distance, a
binary amplitude grating will be generated; if a co- t( 1)=cos(47r/5-0)+cos(47r/5-47c/5)
herent plane wave is advanced by a phase distribu-
+cos(O-4rr/5)+cos(2n/5-0)
tiongiveninTablelandEqs.(14)-(17),at(l-l/
N)Z, distance, a binary amplitude grating will be +cos(O-2x/5),
generated.
=o,
Arrizon et al. [ 41 have discussed in how many cases
the binary phase grating can be used for the fractional itisalsoeasilyprovedthatt(2)=0,t(3)=0,t(4)=0,
Talbot array illumination; their conclusions are that t ( 5 ) = t (0) = 5. It can also be proved that all the other
there are only six cases for the binary phase gratings cases given in Table 1 have the same characteristic.
to realize the Talbot array illumination. In fact, these Using the simple equations given in Eqs. ( 14)- ( 17))
six cases are corresponding to N= 3,4,6 cases in Ta- this characteristic can be analytically proved. For
ble 1, i.e., there are at (l/3)2,, (2/3)Z,, (l/4)2,, conciseness, the wordy proof is not given here. This
(3/4)Z,, ( l/6)2, and (5/6)Z, distances, respec- characteristic has a clear physical meaning as we have
tively. From Table 1, we also know that there will be noted, so it can be used to check whether the phase
six cases for three phase gratings to realize the Talbot distribution obtained by any one of the above meth-
44 C. Zhou, L. Liu /Optics Communications 115 (1995) 40-44
ods is right or not (to check the calculation error),
and what is of more importance is that it will help us
to know more about the phase distribution for the
fractional Talbot array illumination, thus may help
us to study it further.
In summary, simple equations to calculate the
multilevel phase grating for fractional Talbot array
illumination are given. Computer simulations show
that these equations accord well with the previous
equations given by Szwaykowski and Liu, but the
computation complexity of the equations given in this
paper is small, which may ease the design work for
Talbot array illumination. The characteristics of the
multilevel grating can also be easily analyzed with
these simple equations, which may be helpful for de-
sign and further study of these gratings. With the de-
signed multilevel phase grating, arbitrary-compres-
sion array illumination can be realized theoretically,
although fabrication of such multilevel phase grating
may be difftcult. The disadvantages of this Talbot il-
luminator are also obvious, which have been ana-
lyzed by many researchers [ 61, e.g., for the finite
number of array illumination, light energy will be lost
at the edge of array illumination plane, etc..
The authors acknowledge the support of Natural
Science Foundation of China.
References
[ 1] A.W. Lohmann, Optik 79 (1988) 41.
[2] A.W. Lohmann and J.A. Thomas, Appl. Optics 29 ( 1990)
4337.
[3] X.-Y. Da, Appl. Optics 31 (1992) 2983.
[ 41 V. Arriz6n and J. Ojeda-Castaneda, Optics Lett. 18 ( 1993)
[ 51 V. Arrizbn, Optics Lett. 18 ( 1993) 1205.
[6] J.R. Leger and G.J. Swanson, Optics Lett. 15 (1990) 288.
[ 71 P. Szwaykowski and V. Arrizbn, Appl. Optics 32 (1993) 1109.
[8] L. Liu, Optics Lett. 14 (1989) 1312.
[9] J.P. Guigay,OpticaActa 18 (1971) 677.