Journal of the Korean Physical Society, Vol. 63, No. 1, July 2013, pp.

28∼35

Sensitivity Analysis of a Wide-field Telescope

Juhee Lim
School of Space Research, Kyung Hee University, Yongin 446-701, Korea and
Korea Research Institute of Standards and Science, Daejeon 305-340, Korea

Sangon Lee
Korea Research Institute of Standards and Science, Daejeon 305-340, Korea and
Department of Applied Optics and Electromagnetics, Hannam University, Daejeon 306-791, Korea

Il Kweon Moon and Ho-Soon Yang

Korea Research Institute of Standards and Science, Daejeon 305-340, Korea

Jong Ung Lee

Department of Laser and Optical Information Engineering, Cheongju University, Daejeon 306-791, Korea

Young-Jun Choi and Jang-Hyun Park

Korea Astronomy and Space Science Institute, Daejeon 305-348, Korea

Ho Jin∗
School of Space Research, Kyung Hee University, Yongin 446-701, Korea

(Received 12 September 2012, 13 March 2013)

We are developing three ground-based wide-field telescopes. A wide-field Cassegrain telescope

consists of two hyperbolic mirrors, aberration correctors and a field flattener for a 2-degree field of
view. The diameters of the primary mirror and the secondary mirror are 500 mm and 200 mm,
respectively. Corrective optics combined with four lenses, a filter and a window are also considered.
For the imaging detection device, we use a charge coupled device (CCD) which has a 4096 × 4096
array with a 9-µm2 pixel size. One of the requirements is that the image motion limit of the
opto-mechanical structure be less than 1 pixel size of the CCD on the image plane. To meet this
requirement, we carried out an optical design evaluation and a misalignment analysis. Line-of-
sight sensitivity equations are obtained from the rigid-body rotation in three directions and the
rigid-body translation in three directions. These equations express the image motions at the image
plane in terms of the independent motions of the optical components. We conducted a response
simulation to evaluate the finite element method models under static load conditions, and the result
is represented by the static response function. We show that the wide-field telescope system is stiff
and stable enough to be supported and operated during its operating time.

PACS numbers: 42.79.-e, 42.15.Eq, 93.55.+z

Keywords: Wide-field optics, Optical design/analysis, Finite element method, Sensitivity equation
DOI: 10.3938/jkps.63.28

I. INTRODUCTION
The Korea Astronomy and Space Science Institute
(KASI) is developing three ground-based wide-field tele-
scopes. These telescopes will be operated by remote
control for robotic observations. In the telescope de-
sign stage, we have to consider the environment condi-
∗ E-mail: benho@khu.ac.kr, Fax: +82-31-202-1809
-28-
tions and the static and dynamic loads to meet require-
ments. These may also generate a collateral optical per-
formance degradation because the transformation of the
opto-mechanical structure may cause a displacement rel-
ative to the optical elements. Therefore, from the begin-
ning of the optical design, we have considered the envi-
ronmental conditions at these sites and the consequential
degradations.
The main requirement of the wide-field telescope sys-
tem is to optimize the RMS (root mean square) spot
Sensitivity Analysis of a Wide-field Telescope – Juhee Lim et al.
size to be less than 9 µm In order to verify whether our
design satisfies this requirement or not, we calculated
the static response for the image motion based on line-
of-sight (LOS) sensitivity equations. An image motion
analysis is a useful method to estimate the optical and
the opto-mechanical performances of a telescope system.
The LOS sensitivity equations are derived from the re-
sults of an analysis done using a finite element method
(FEM) with NX NASTRAN.
We investigate the opto-mechanical deformations and
displacements of the wide-field telescope through a FEM
analysis for three cases: a gravitational force, an overall
temperature change and a temperature gradient In the
static analysis, the stiffness properties are defined by the
element and the material properties. We assume that
the optical elements of the telescope can be character-
ized as rigid bodies. The rigid-body motions of the mir-
rors or lens are expressed for various thicknesses along
the optical axis, decenters, and tilts of the elements and
have geometrical properties, such as centers of mass, that
characterize the motion in six degrees of freedom, that
is, in three directions each for translation and rotation
[1]. We entered the concentrated mass elements, and
the mass matrix was automatically computed when the
mass density was specified for any of the standard FEMs
in NX NASTRAN [2].
In this paper, Section II describes the optical design
based on the requirements and specifications for the
wide-field telescope system. The opto-mechanical design
as well as the sensitivity and the image motion analyses
is described in Section III. The conclusion and the future
work are presented in Section IV.
II. OPTICAL SYSTEM AND ANALYSIS
1. Optical Design and Performance
We designed a wide-field Cassegrain telescope by using
the optical design program Code V. This system consists
of two hyperbolic mirrors, two lenses (L1, L2), a filter,
a focus compensator (L3), and a window mounted on a
charge coupled device (CCD) camera system. The sys-
tem requirement is that the 2 × 2 degree field of view
be optimized in a CCD imaging area with the given tele-
scope optics. The optical layout and the optical specifi-
cations of the wide-field telescope are shown in Fig. 1 and
Table 1, respectively. The length between the secondary
mirror (M2) and the CCD window is 616.4 mm. The
CCD camera window and filters are made of silica with
thicknesses of 3 mm and 5 mm, respectively. For this
design, we use a KAF-16801 (KODAK) CCD image sen-
sor, which is a high-performance monochrome full-frame
CCD image sensor with a 4096 × 4096 pixel array and a
9µm2 pixel size. This optical design is also designed for
image sensitivity over a wide range of wavelengths from
-29-
Fig. 1. (Color online) Optical layout of the wide-field tele-
scope. The red type in parentheses indicates the material of
each mirror and lens.
Table 1. Optical specifications for the wide-field telescope
system.
Parameter Wide-field telescope
Dtel (aperture diameter) M1 0.5 m
M2 0.2 m
EFLtel (effective focal length) 28.425 m
Wavelength 365 ∼ 900 nm
CCD pixel size 9 µm × 9 µm
CCD format 4096 × 4096 pixels
f/number 2.99
Field of view 2 × 2 degree
400 to 1000 nm. The quantum efficiencies (QEs) are 40
(450 nm), 52 (550 nm), and 65% (650 nm) [3].
The optical performances are confirmed to meet the
requirement by using the RMS spot size and ray trace
curves for each field These figures are summarized in Fig.
2(a). Because the wide-field telescope operates with a
pixilated CCD sensor, the RMS spot diameter must sat-
isfy the pixelsize requirement. The RMS spot diameter of
the outer field position is 8.66 µm which is smaller than
a pixel size. Figure 2(a) also shows the ray trace curves
at five different field positions. Wavelengths of 365, 440,
550, 700, and 900 nm are plotted as brown, pink, blue,
green, and red colors respectively. These indicate how
much spherical aberration, coma, field curvature, astig-
matism, axial- and lateral colors, and field curvature are
in our design. These results show that our wide-field
telescope has spherical aberration and some coma with
astigmatism. Figure 2(b) shows a variation in the modu-
lation transfer function (MTF) for y-object fields of 0.0,
0.2, 0.5, 0.7, and 1.0 degree. As shown in Fig. 2(b),
the MTF is more than 0.5 around all fields at a Nyquist
frequency of 60 cycles/mm.
-30- Journal of the Korean Physical Society, Vol. 63, No. 1, July 2013

Fig. 2. (Color online) Optical layout of the wide-field telescope. (a) spot diagram (the unit of field is the degree) and ray
trace curve and (b) MTF.

2. Misalignment Analysis Table 2. Alignment tolerances for the wide-field telescope.

Max. RMS spot

In a wide-field telescope design, making a perfect im- Component Parameter Tolerance
diameter (µm)
age is more difficult because of the geometrical aberra-
Decenter X 9.1932
tions, diffraction, errors in manufacturing and assembly, 0.01 mm
Y 10.1170
and other factors. Especially, a misalignment of the op-
tical components also contributes to the degradation of M2 Tilt α 48.0150
1 mrad
the image quality of the overall system. For this reason, β 43.6810
we performed a misalignment analysis for three optical Despace + Z 9.8031
0.01 mm
components: M2, L1 and L2, and L3. Because the L1 -Z 8.3388
and the L2 are fixed in one structure, we assumed them Decenter X 8.6647
to be a single component. In the analysis process, we as- 0.01 mm
Y 8.6792
sumed that all optical components were independent of
L1 and L2 Tilt α 9.5130
each other and that possible alignment errors were lim- 1 mrad
β 9.0586
ited to a tilt, a decenter, and a despace. We calculated
the maximum RMS spot size at the outermost field angle Despace + Z 8.6424
0.01 mm
first, which was a 1-degree object angle. The given me- −Z 8.6867
chanical assemble tolerances were 0.01 mm for a decenter Decenter X 8.6645
0.01 mm
and a despace and 1 mrad for a tilt, and we determined Y 8.7395
the tolerance sensitivity from the variations in the spot Tilt α 10.2950
L3 1 mrad
size with assembly tolerance. We examined the tilt and β 8.8122
the decenter for all fields in the positive coordinate direc- Despace + Z 8.6719
tion because these are symmetric on the axis. In Table 2, 0.01 mm
-Z 8.6577
we summarize the maximum RMS spot size which means
the misalignment error under the given tolerance The as-
sembly of the components and the alignment tolerances
are also summarized. misalignment analysis shows that the image degradation
Table 2 shows that the M2 is a very sensitive com- caused by the probable alignment error is mostly less
ponent compared to other optical components, with an than the performance criteria for the wide-field telescope,
increase in the spherical aberration and a decrease in the 9 µm RMS, described previously.
maximum useful field. For the wide-field telescope, the
M2 should be in its optimum position [4]. The tilt, es-
pecially in the α-direction, is the dominant factor in the 3. Line-of-sight Sensitivity Equation
misalignment. The tilt results in an image degradation
that is mostly characterized as a distinctly third-order
coma. The image quality is insensitive to decenter and The sensitivity analysis belongs to the category of a
despace. Because despace results only in a focal shift to tolerance analysis. The opto-mechanical sensitivity is
defocus the image and an axial shift of the ideal point the amount of image quality degradation in response to
image, it does not affect the image quality much. This a certain deviation of any primary parameter of the tele-
Sensitivity Analysis of a Wide-field Telescope – Juhee Lim et al. -31-

Table 3. LOS sensitivity for the wide-field telescope.

Image motion at image plane (mm)

M1 M2
Displacement
Tix Tiy Tix Tiy
Tx = 1 mm 3.12000 0.0000 −2.30000 0.0000
Ty = 1 mm 0.0000 3.12000 0.0000 -2.30000
Rx = 1 mrad 0.0000 −3.00187 0.0000 1.06743
Ry = 1 mrad 3.00171 0.0000 −1.06751 0.0000
Correction lenses L3 lens, filter, and CCD window
Displacement
Tix Tiy Tix Tiy
Tx = 1 mm 0.33067 0.00890 −0.07783 −0.08030
Ty = 1 mm 0.00890 0.33067 −0.08030 −0.07783
Rx = 1 mrad 0.00111 0.02734 0.00272 0.00773
Ry = 1 mrad -0.02738 −0.00114 −0.00740 −0.00273

R: Rotation of the mirror and the lens, and T: Translation of the mirror and the lens.

scope system The sensitivity analysis is carried out by 9 µm for the operation environment. The image motion
using the examination method in the optical program equation is typically defined as follows:
Code V To calculate the sensitivity coefficients, we as-
sumed that each optical component and mechanical part ⎡ ⎤
had been specified and checked independently; i.e. it did TM 1i
not depend on the other parameters [5]. The sensitivi- ⎢ TM 2i ⎥
ties are derived by summing the effects of the LOS errors
⎢
⎢
⎥
⎥
i
Timage = C1 C2 · · · Cn ⎢ TG 1i ⎥
for each element in the LOS equation. The LOS error ⎢ ⎥
⎢ .. ⎥
is predicted by their individual perturbations in the tilt ⎣ . ⎦
i
and the decenter of the degree of freedom (DOF) The TG(n−2)
LOS equation for the entire system is written as a multi- ⎡ ⎤
point constraint (MPC) and is solved with a scalar point R M 1θ
⎢ R 2θ ⎥
⎢ ⎥
displacement. The LOS sensitivity equation is appropri- M

⎢ ⎥
ate once a baseline design is selected and minimal design θ
+ C1 C2 
· · · Cn ⎢⎢ R G1 ⎥ (1)
changes are expected for the detailed FE model; i.e., no ⎥
⎢ .. ⎥
design changes that cause grid number changes to the ⎣ . ⎦
θ
optical elements and the rigid body element (RBE) are RG(n−2)
expected [6]. The sensitivity levels of the wide-field tele-
scope at the image plane are summarized in Table 3. In Eq. (1), each superscript can be an x or a y coordi-
Note that subscripts T and R represent the corre- nate and θ can be α or β. The resulting values C1 though
sponding optical components, and the superscripts x and Cn , drawn from the sensitivity analysis for each optical
y express their coordinates, respectively [7]. component were normalized and entered into the image
The LOS equation combined with the image motion is motion equation, and the image motion of the wide-field
practical for forecasting the optical capacity of the tele- telescope was estimated. The solutions are
scope We examined the image motion analysis that had
x
been calculated for a static response based on the LOS Timage = 3.00171RM 1y + 3.12TM 1x − 1.06751RG 1y
sensitivity equations which had been integrated using a −2.3TG 1x + 0.00111RG 2x − 0.02738RG 2y
FEM program. In the case of the FEM analysis, the M1
and the M2 are considered as a lumped-mass element +0.33067TG 2x + 0.0089TG 2y + 0.00272RG 3x
with an element, RBE2, rigidly connected to each sup- −0.0074RG 3y − 0.07783TG 3x − 0.0803TG 3y ,
y
porter system The yoke interface part and other struc- Timage = −3.00187RM 1x + 3.12TM 1y + 1.06743RG 1x
tures are modeled as solid elements. The image motion −2.3TG 1y + 0.02734RG 2x − 0.00114RG 2y
analysis is an essential part in estimating the optical and
the structural performances of the wide-field telescope +0.0089TG 2x − 0.33067TG 2y + 0.00773RG 3x
system when static loads are applied. In the analysis −0.00273RG 3y + 0.0803TG 3x − 0.07783TG 3y .
process, the telescope’s structure should be optimized to (2)
ensure that the minimal image motion range is less than
-32-
Table 4. Opto-mechanical properties of the materials.
Material Density (kg/m3 ) Young’s Module (GPa)
Invar 8050 141.0
Zerodur 2530 90.6
Fused Silica 2190 73.0
Aluminum 7820 69.0
Fig. 3. (Color online) Simplified FEM mechanical model
of the wide-field telescope. It has a hole on each wall which
is located at the telescope’s center of gravity along the z-axis
to combine the yoke. The axial and the lateral directions
correspond to the z-axis and the x-/y-axis, respectively.
III. STATIC LOAD ANALYSIS
The opto-mechanical design efforts are focused on easy
manufacturing, alignment, assembly, testing, and an im-
proved robustness in operating environments [8]. Our
wide-field telescope system should be stable under se-
vere environments such as gravity and temperature vari-
ations. The deformation of the opto-mechanical struc-
ture causes a displacement relative to the optical element
and generates a collateral optical-performance degrada-
tion. Therefore, we investigated the opto-mechanical de-
formations and displacements of the wide-field telescope
through a FEM analysis with static loads with a gravi-
tational force and with temperature variations
The material of the telescope structure was cho-
sen based on the design considerations of stiffness,
lightweight, thermal stability and low cost [9]. We sum-
marized the properties of the materials used in the wide-
field telescope in Table 4. In this telescope structure,
the most important dimension is the distance between
the M1 and the M2. To avoid a displacement due to
thermal variations, we use invar rods on the inner side
of the main structure. Zerodur and fused silica are used
as the optical components, and aluminum is used in the
main body’s structure.
For the FEM mechanical analysis, we adopted the
Journal of the Korean Physical Society, Vol. 63, No. 1, July 2013
Poisson’s Ratio Thermal Expansion Coefficient (10−6 /m/m/◦ C)
0.30 1.00
0.24 0.02
0.17 0.58
0.29 11.70
MPCs in NX NASTRAN. The analysis model is shown in
Fig. 3. This structure is separated into the M1 with the
yoke interface part, the M2 part (G1), the lens part (G2),
and the CCD part (G3). The yoke interface part con-
sists of the outer wall divided into 6 pieces with two side
walls on the x-axis. It also has an altitudebearing unit
and an azimuthbearing unit, and these are rigidly con-
nected to the yoke interface. For the FEM analysis, the
M1, G1, G2, and G3 parts are assumed to be lumped-
mass elements at their centroidal point. We assumed
all parts to be rigidly connected to the main structure.
The G1 is fixed by using a four-point supporter on the
intersection of the M2 supporting part. The six-point
supporters are connected to the M1 mirror, and the G2
is connected to the inside of the CCD cover box at four
points. Similarly, the G3 is connected to the outside of
the CCD cover box at four points To reflect the trans-
lational and the rotational kinetic energies of all parts
on the telescope system, we included these DOFs and
mass properties [10]. In our study, three translational
and three rotational DOFs are adopted for each node in
the analysis model.
For the static response analysis, the stiffness proper-
ties are defined by the element and the material proper-
ties. The MPCs are composed of rigid image translations
along the x-, y-, and z-axis and rigid image rotations of
alpha, beta, and gamma. The gravity force is considered
for all axes, and two thermal loads are used: an over-
all temperature change of 1 degree and a temperature
gradient across the three axes from 0 to 1 ◦ First, we in-
vestigated the telescope’s structure deformation due to
gravity. This force is calculated by multiplying the mass
of the structure by the gravitational acceleration. The
structure mass with the material properties of each part
is applied as shown in Fig 3 and the axial and the lateral
directions are the z-axis and the x-/y-axis, respectively.
As a real number or an expression, we determined the
magnitude of gravity. The mass is printed for every coor-
dinate direction, and the location of the center of grav-
ity is given for each of the three translational masses
because the structure masses are different for the three
translational directions The structural deformations of
the telescope due to a 1g static load are shown in Fig. 4.
Second, temperature loads, the sum of a constant tem-
perature load and a time-dependent temperature load,
are used in both the static and the transient analyses.
In the static response analysis, two thermal loads are as-
sumed. One is an overall temperature change with a 1
Sensitivity Analysis of a Wide-field Telescope – Juhee Lim et al.
Fig. 4. (Color online) Simulation results with gravity along
each coordinate (a) Result with gravity along the x-axis with
a maximum deformation of 4.817 µm, (b) result with gravity
along the y-axis with a maximum deformation of 3.082 µm,
and (c) result with gravity along the z-axis with a maximum
deformation of 21.200 µm.
◦ formation of 8.76 µm, (c) result for a temperature gradient
C unit temperature difference and the other is a tem-
perature gradient along the x, y, and z directions This
system is exposed to maximum gradient of 1 ◦ from the
top to the bottom of the telescope. The model for the
temperature gradient is plotted in Fig. 5. T (x), T (y),
and T (z) are distributed from 0 to 1 ◦ , and the red solid
line represents the temperature increase along the x-, y-,
and z-axis.
NX NASTRAN uses the temperature data and the
thermal expansion coefficient of each material to calcu-
late equivalent thermal loads and moments acting at the
grid points. In FEM models, the solid elements obtain
their temperatures from the connected grid points. The
deformation caused by the temperature gradient is due
to the temperatures of the interpolated grid points over
the telescope’s surface. The simulation results shown in
Fig. 6 show the structural deformations in the cases of
temperature and temperature-gradient loads.
The optical performances under gravity, a temperature
change, and a temperature gradient must fall within the
-33-
Fig. 5. (Color online) Temperature gradient model.
Fig. 6. (Color online) Simulation results with an overall
temperature change and with a temperature gradient along
each coordinate: (a) Result for an overall temperature change
with a maximum deformation of 13.00 µm, (b) result for a
temperature gradient along the x-axis with a maximum de-
along the y-axis with a maximum deformation of 10.82 µm,
and (d) result for a temperature gradient along the z-axis
with a maximum deformation of 11.79 µm.
allowable range of the design specification. From the
results of the calculation, the image motion due to a
temperature gradient seems to be more severe than the
other cases in general. The results under static loads are
summarized in Table 5 through Table 8. In Tables 5, 6,
and 7, each character in the rotation column α, β, and γ
means the rotation angle of the x-axis, y-axis, and z-axis,
respectively. A summary of the total results of the image
motion is shown in Table 8. The results indicate that the
largest magnitude of the image motion is 7.28 µm at the
image plane (i.e., 7.28 µm along the x-axis and 0.05 µm
along the y-axis) when gravity is along the y axis. From
the FEM analysis, we conclude that this design is stiff
and stable enough to be supported and operated during
-34- Journal of the Korean Physical Society, Vol. 63, No. 1, July 2013

Table 5. Image motions under gravity.

Gravity Translation (µm) Rotation (µrad)

Direction X Y Z α β γ
X 0.0026 1.0100 −0.0156 −9.90E−04 −1.33E−06 1.48E−05
M1 Y 2.4700 0.0018 −0.0015 4.14E−06 2.83E−04 −1.42E−03
Z 0.0031 0.0054 −2.6900 −6.40E−04 2.53E−05 6.70E−06
X 0.0036 1.0100 0.0017 −2.58E−04 −2.35E−06 −4.80E−06
G1 Y 2.2200 0.0000 0.0000 8.08E−06 −8.82E−04 −4.92E−05
Z −0.0043 0.0210 −2.2000 1.99E−05 −1.16E−05 −7.69E−07
X 0.0010 3.0800 −0.0714 −4.58E−02 −1.08E−04 4.99E−05
G2 Y 4.8200 0.0015 0.0163 3.92E−05 4.61E−02 −1.28E−04
Z −0.0298 0.0775 −2.1000 −1.94E−05 −6.58E−05 −1.90E−04
X 0.0013 1.4600 0.0047 2.25E−05 −5.06E−06 −4.60E−05
G3 Y 3.0700 0.0020 0.0050 3.26E−03 1.70E−03 −7.42E−05
Z −0.0016 −0.0055 −1.7500 3.69E−05 −1.63E−04 −2.17E−06
X 0.0371 3.2900
Image Y 7.2800 0.0508
Z 0.0089 −0.0096

Table 6. Image motions under overall temperature change.

Translation (µm) Rotation (µrad)

X Y Z α β γ
M1 0.013 −1.080 0.238 1.46E−03 2.78E−05 4.23E−05
G1 0.004 −0.376 8.490 9.87E−04 1.79E−04 2.03E−05
G2 0.040 −0.039 −8.790 −1.78E−04 1.86E−04 3.22E−04
G3 −0.035 −0.466 −5.380 −2.28E−04 −1.10E−04 3.36E−05
Image 0.010 −2.580

its operation time. This wide-field telescope structure
satisfies our performance requirement that the range of
the image motion be less than 9 µm. As a related study,
Lee performed an image motion analysis under dynamic
loads [7]. That analysis included all phenomena that
produced fluctuating excitations and acted on a telescope
and its inner constituent components.
IV. CONCLUSIONS
We are designing a wide-field Cassegrain telescope
which consists of two hyperbolic mirrors, aberration cor-
rectors and a field flattener with a 2degree field of view.
For a novel optical design, three kinds of opto-mechanical
analyses are discussed. We evaluated the spot diagram,
the MTF, and the ray trace curve of each field, and
the optical performances satisfy the requirement for the
wide-field telescope. We also analyzed the misalignment
errors for the tilt, decenter, and despace under the given
assembly tolerances. This analysis showed the M2 to be
a very sensitive component compared with other optical
components, and the tilt to be the most dominant factor
of the misalignment. On the contrary, the decenter and
the despace were insensitive to the assembly tolerance.
For the opto-mechanical analysis, the image motion is
a useful method to estimate the optical and the opto-
mechanical performances of a telescope system. We cal-
culated the LOS sensitivity equations from the FEA
analysis results by using NX NASTRAN, and we car-
ried out the image motion analysis under gravity and
two thermal loads as static loads. The MPCs are com-
posed of image translations of the x-, y-, and z-axis and
rotations of alpha, beta, and gamma to calculate the im-
age motion. Gravity is considered along the x-, y-, and
z-axis. The two thermal loads are an overall temperature
change of 1 degree and a temperature gradient across the
three axes from 0 to 1 ◦ C. The largest value of the image
motion is 7.28 µm when gravity is along the x-axis, and
the other load cases have less of an effect on the image
motion. In other words, the image motion results are
less than 9 µm under the given static loads. From the
FEM analysis, we conclude that the wide-field telescope
system is stiff and stable enough to be supported and
operated during the operating time.
As the relative image motion analysis, we calculated
Sensitivity Analysis of a Wide-field Telescope – Juhee Lim et al. -35-

Table 7. Image motions under temperature gradient.

Translation (µm) Rotation (µrad)

Coordinate
X Y Z α β γ
X 0.005 −0.482 0.826 7.49E−02 1.17E−05 1.92E−05
M1 Y −1.860 −0.540 0.121 7.22E−04 −6.83E−04 −4.09E−04
Z 0.009 0.810 0.095 1.88E−03 2.61E−05 3.50E−05
X 0.007 −0.162 6.280 3.96E−04 1.65E−04 2.43E−05
G1 Y −4.260 −0.188 4.240 4.85E−04 −1.21E−02 −1.99E−04
Z −0.001 −0.661 4.280 1.31E−02 1.22E−04 −4.04E−07
X 0.003 −0.010 0.506 −2.11E−05 4.58E−06 3.07E−05
G2 Y −1.680 −0.021 −4.400 −5.83E−05 5.35E−03 −3.16E−05
Z 0.018 1.430 −4.280 −5.36E−03 1.09E−04 1.37E−04
X 0.000 −0.010 −0.013 −5.31E−05 2.55E−06 4.39E−07
G3 Y −2.570 −0.022 −2.660 −1.10E−04 6.73E−03 −1.95E−04
Z −0.020 0.623 −2.660 −6.82E−03 −6.67E−05 9.20E−06
X 0.001 −1.150
Image Y 0.893 −1.300
Z 0.030 5.150

Table 8. Summary of the static image motions. search was partially supported by the World Class Uni-
versity (WCU) program through the National Research
Image motion (µm) Foundation of Korea funded by the Ministry of Educa-
Loads
X Y tion, Science and Technology (R31-10016).
x 0.037 3.290
Gravity y 7.280 0.051
−z 0.009 −0.010
Temperature ∆T = 1◦ C 0.010 −2.580 REFERENCES
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ACKNOWLEDGMENTS
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