Professional Documents
Culture Documents
I. INTRODUCTION
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
294 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005
Fig. 4. Example of the advantage of random accessibility of PRAM. (a) Flash + RAM solution case. (b) PRAM case.
Flash memory plus RAM buffer solution is widely used for mo- or higher). In the case of write operation, the amount of write
bile applications. With the added complexity of buffering with current which flows from W/D to cell ground line through
SRAM, complex four steps are required to change one-byte data circuit, B/L, GST and access NMOS
in Flash memory for nonvolatile retention. At the first step, the transistor, is very important to guarantee uniform SET/RESET
entire corresponding block is dumped to DRAM. Next within resistance states. Tungsten (W) ground lines within a cell array
DRAM, the new one-byte of data is changed. Next within Flash, causes considerable rise of ground level due to its relatively
the corresponding block is erased, and finally, the changed block high resistivity. Meshed ground strapping lines of Aluminum
is programmed from DRAM to Flash memory. However, by (Al) with resistivity almost 7 times lower than W, attach every
using a PRAM solution, random access byte write is possible 16 cells along the column and 64 cells along the row. This
and needs only one step that reduces write time by times. technique restricts the ground voltage variation in the cell array
The potential performance of PRAM features notably higher to less than 50 mV during SET/RESET write operation.
write speed than Flash, smaller cell size than SRAM, but also
simpler circuitries than Flash and DRAM because PRAM does III. SET WINDOW
not need high-voltage boosting and refresh/restore operations. Fig. 6 shows the change of GST resistance with applied
Thus, PRAM can merge advantageous aspects of conventional voltage for all GST cells under same test condition. The resis-
mobile memory technologies. In this work, we describe a de- tance of SET and RESET state show Gaussian like distribution
veloped 64-Mb PRAM featuring 512-kb sub-array core archi- with target minimum and maximum values. These distributions
tecture with full integration of GST into 0.18- m CMOS tech- are intrinsic and may come from process variations such as
nology. On-chip circuits fully control SET/RESET resistance BEC size variation and local uniformity variation of GST
states stably with minimal stand-by power consumption and composition. The SET window can be defined as ,
nonvolatile random read/write operation. The SRAM interface where as shown in
was employed to confirm the feasibility of PRAM use in low- the R–V curve. This SET window and its distribution are very
power mobile applications. important factors for designing cell array size, S/A and W/D. In
addition to the SET window defined from R–V characteristics,
II. CORE ARCHITECTURE the influence of B/L, needs to be considered to obtain the
real SET window. A typical I–V curve for GST based cell and
64-Mb density PRAM core is constructed with 128 sub-array B/L configuration are shown in Fig. 7. The B/L resistance for
blocks of 512 kb, by collating 16 blocks in the direction of the cell located far from the W/D is larger. The B/L voltage for
row and 8 blocks in the direction of column. As depicted in far cell, which is defined as , is lower than that of the near
Fig. 5, a sub-array core consists of 512-kb cell array organized cell defined as . To transit GST cell to SET state, the voltage
as 1024 word-line drivers (SWD), 512 column select/precharge applied across the GST layer should be controlled between
circuits, 8 I/O sense-amplifiers and and . is the threshold voltage
8 write drivers . For read and write operation, each ( , typically 1.0 V) for phase transition of GST.
top and bottom circuit connects 4 B/L to is the RESET voltage at which GST material starts to melt.
S/A for reading, and W/D for writing. Sharing the SWD, S/A, Thus, to obtain reliable SET operation, the voltage difference
W/D and circuitries with adjacent 512-kb between and , defined as , should be within the
sub-array cores make chip layout more efficient and simpler. . Especially the B/L voltage far from the W/D
Since I/O S/A and W/D are included in every 512-kb sub-array defined as must be larger than to guarantee
core, read and write related operational margins do not degrade entering minimum SET operation. From the statistical distri-
with combining sub-blocks to obtain higher cell density (64 Mb bution analysis of the intrinsic defined from the
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 295
Fig. 5. 512-kb sub-array core architecture having common shared SWD, S/A, and W/D.
R–V curve in Fig. 6, the mean and standard deviation of the far cell, , becomes lower than injected into the near
are essential design parameters to construct cell cell. This contributes to further reduction of . In our design
array, since small with wide distribution make it with B/L with Al, 1024 cells per bit-line (CPB) architecture
very challenging to aim the SET-voltage range to appropriate has of 0.5 k with of 250 mV that corresponds to
level. In this work, as depicted in Fig. 8(a), and values are of . The SET fail probability of far cells is
1.53 V and 380 mV, respectively. The minimum SET window statistically only 0.04%. If is about 1.5 k , the voltage
which is far from the value by is 390 mV. This corresponds drop from to is 770 mV. In this case, several percent
to statistical SET fail probability of 0.13% for far cells. Another of far cells cannot be changed from the previous resistance
factor that needs to be considered is that varies with the states during SET operation. As a result, 512-kb sub-array core
distance between W/D and PRAM cells. When the PRAM having 1024 CPB architecture is suitable for stable read and
cells selected for writing are far from the W/D, makes the write operation of PRAM.
voltage difference of . Fig. 8(b) is a simulation result of
as a function of which shows the increasing IV. DEVICE CHARACTERISTICS
with increased . The intrinsic minimum SET window of
390 mV which is defined from the distribution characteristic A. S/A and W/D Schematics
of SET window implies an equivalent of 0.8 k , which Fig. 9 shows a simplified schematic for read and write op-
corresponds to the maximum allowed for acceptable SET eration consisting of current mirror type W/D, S/A,
operation of far cells. Since the W/D is a nonideal current and PRAM cell. When cells are not selected or
source for B/L voltage variations, the performance of the W/D in stand-by mode, all the B/L are precharged to ground level by
is degraded with larger such that SET current injected into enabling PREBL signal so that current consumption in sub-cell
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
296 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005
Fig. 8. (a) SET voltage window distribution characteristic and (b) BL voltage
versus BL resistance characteristics.
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 297
D. Design Summary
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
298 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005
TABLE I
SUMMARY OF CHIP PERFORMANCES AND PROCESS TECHNOLOGY
REFERENCES
[1] S. Lai and T. Lowrey, “OUM—A 180 nm nonvolatile memory cell ele-
ment technology for stand alone and embedded applications,” in IEDM
Tech. Dig., 2001, pp. 36.5.1–36.5.4.
[2] S. Lai, “Current status of the phase change memory and its future,” in
IEDM Tech. Dig., 2003, pp. 10.1.1–10.1.4.
[3] A. Pirovano, A. L. Lacaita, A. Benvenuti, F. Pellizzer, S. Hugens, and R.
Bez, “Scaling analysis of phase-change memory technology,” in IEDM
Tech Dig., 2003, pp. 29.6.1–29.6.4.
[4] A. Pirovano, A. L. Lacaita, A. Benvenuti, F. Pellizzer, and R. Bez, “Elec-
tronic switching in phase-change memories,” IEEE Trans. Electron De-
vices, vol. 51, no. 3, pp. 452–459, Mar. 2004.
[5] M. Gill, T. Lowrey, and J. Park, “Ovonic unified memory—A high-per-
formance nonvolatile memory technology for stand alone and embedded
applications,” in IEEE Int. Solid-State Circuits Conf. (ISSCC) Dig. Tech.
Papers, 2002, pp. 202–203.
[6] Y. N. Hwang et al., “Full integration and reliability evaluation of phase-
change RAM based on 0.24 m-CMOS technologies,” in Symp. VLSI
Technology Dig. Tech. Papers, Jun. 2003, pp. 173–174.
[7] H. Horii, J. H. Yi, J. H. Park, Y. H. Ha, I. G. Baek, S. O. Park, Y. N.
Hwang, S. H. Lee, Y. T. Kim, K. H. Lee, U.-I. Chung, and J. T. Moon,
“A novel cell technology using n-doped GeSbTe films for phase change
Fig. 13. Microphotograph of fabricated 64-Mb PRAM chip. RAM,” in Symp. VLSI Technology Dig. Tech. Papers, 2003, pp. 177–178.
[8] Y. H. Ha, J. H. Yi, H. Horii, J. H. Park, S. H. Joo, S. O. Park, U.-I. Chung,
and J. T. Moon, “An edge contact type cell for phase change RAM fea-
60 ns, 120 ns, and 50 ns, respectively at 3.0-V supply voltage turing very low power consumption,” in Symp. VLSI Technology Dig.
with 30 C. Tech. Papers, 2003, pp. 175–176.
V. CONCLUSION
A GST alloy with an NMOS transistor PRAM cell configura- Woo Yeong Cho received the B.S., M.S., and Ph.D.
tion is very convenient for integration with conventional CMOS degrees in electrical engineering from Korea Ad-
vanced Science and Technology (KAIST), Taejon,
process. Through built-in S/A and W/D within sub-array core Korea, in 1992, 1994, and 1999, respectively.
architecture and a meshed Al ground plane, read and write In 1999, he joined Samsung Electronics, where he
related margin was secured. The distribution characteristic of has been involved in low-power SRAM, UtRAM and
is working on the circuit design for next-generation
intrinsic SET window that is introduced from process variation memories such as PRAM, MRAM, and STTM (Scal-
has a mean value of 1.53 V with standard deviation of 380 mV. able Two Transistor Memory).
By using 1024 CPB configuration, the BL resistance to a far
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 299
Beak-Hyung Cho received the B.S. degree in Kyung-Hee Kim was born in Busan, Korea, in 1974.
electrical engineering from Ajou University, Suwon, She joined Samsung Electronics Company, Ltd.,
Korea, in 1994. Yongin, Kyunggi-Do, Korea in 1993, where she has
In 1995, he joined Samsung Electronics Company, been working on the layout of high-speed SRAM,
Yong-In, Korea, and has been working on design of low-power SRAM, UtRAM, and PRAM.
low-power SRAM. His interests are in analog circuits
and new memory development including MRAM and
PRAM.
Byung-Gil Choi was born in Po-Hang, Korea, Du-Eung Kim was born in Hong-Sung, Korea, in
on May 3, 1971. He received the B.S. degree in 1964. He received the B.S. degree in electrical en-
semiconductor science from Dong-guk University, gineering from In-Ha university, Korea, in 1990.
Korea, in 1999. He joined the Memory Division, Samsung Elec-
He joined the Memory Division, Samsung Elec- tronics Corporation, Kiheung, Korea, in 1990, where
tronics Corporation, Kiheung, Korea, in 1989, where he was involved in the circuit design of SRAM. Cur-
he was involved in the circuit design of SRAM, rently, he is involved in developing the next-genera-
UtRAM, and PRAM. At present, he has been tion memory (PRAM).
working on circuit design of new memory PRAM.
Ki-Sung Kim was born in Seoul, Korea, in 1974. Youngnam Hwang received the B.S., M.S., and
He received the B.S. degree in electrical engineering Ph.D. degrees in physics from Yonsei University,
from Dankook University, Seoul, Korea, in 2000. Seoul, Korea, in 1991, 1993, and 1998, respectively.
In 2000, he joined Samsung Electronics Company, In 1998, he studied the carrier dynamics of
Yong-In, Korea and has been working on device quantum dots as a Postdoctorate with Kriss, Taejon,
evaluation programming development and analysis Korea. He joined Samsung Electronics Company,
of low-power SRAM, UtRAM. His interests are in Ltd., Yongin, Korea, in 2000, where he has been
next-generation mobile solution memory verification involved in the development of PRAM.
and including low-power sync-SRAM, MRAM, and
PRAM.
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.
300 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005
Sujin Ahn received the M.S. and Ph.D. degrees in Hongsik Jeong was born in Seoul, Korea, on May
electronics and electrical engineering from Pohang 27, 1962. He received the B.S., M.S., and Ph.D. de-
University of Science and Technology, Pohang, grees in department of physics from Yonsei Univer-
Korea, in 1996, and 1999, respectively. sity, Korea, in 1985, 1987, and 1992, respectively.
In 1999, she joined Samsung Electronics Com- In 1992, he studied the carrier dynamics of
pany, Ltd., Yongin, Kyunggi-Do, Korea. Since then, GaAs/AlGaAs quantum structure as a Postdoctorate
she was engaged in the research and development of at the Laser Spectroscopy Lab, Kriss, Taejon, Korea.
CMOS process and device technologies in DRAM In the same year, he joined the Samsung Electronics
process integration. She took part in 4-Gb DRAM Company, Ltd., Kyunggi-Do, Korea, where he is
development and currently involved in the develop- involved in dry etching process for device fabrication
ment of next-generation memory devices. such as 64-Mb and 256-Mb DRAM. Since 1997, he
has been engaged in the development of process integration. He participated in
development of cutting-edge technologies of 1-Gb and 4-Gb DRAM. Recently,
he is in charge of developing new memories such as FRAM, MRAM, and
PRAM as a project leader.
Authorized licensed use limited to: Univ Of Incheon. Downloaded on March 01,2020 at 05:57:58 UTC from IEEE Xplore. Restrictions apply.