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IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO.

1, JANUARY 2005 293

A 0.18-m 3.0-V 64-Mb Nonvolatile Phase-Transition


Random Access Memory (PRAM)
Woo Yeong Cho, Beak-Hyung Cho, Byung-Gil Choi, Hyung-Rok Oh, Sangbeom Kang, Ki-Sung Kim,
Kyung-Hee Kim, Du-Eung Kim, Choong-Keun Kwak, Hyun-Geun Byun, Youngnam Hwang, SuJin Ahn,
Gwan-Hyeob Koh, Gitae Jeong, Hongsik Jeong, and Kinam Kim, Fellow, IEEE

Abstract—A nonvolatile 64-Mb 1T1R phase-transition random


access memory (PRAM) has been developed by fully integrating
chalcogenied storage material (GST: Ge2 Sb2 Te5 ) into 0.18- m
CMOS technology. To optimize SET/RESET distribution, 512-kb
sub-array core architecture was proposed, featuring meshed
ground line and separated SET/RESET control schemes. Random
read access time, random SET and RESET write access times
were measured to be 60 ns, 120 ns, and 50 ns, respectively, at 3.0-V
supply voltage with 30 C.
Index Terms—Phase change, phase-transition random access
memory (PRAM), RESET, SET. Fig. 1. Basic structure of PRAM unit-cell.

I. INTRODUCTION

A PHASE-TRANSITION random access memory (PRAM)


which uses chalcogenide alloy (GST: Ge Sb Te ), is pro-
grammed by resistive heating with current pulses that drive the
cell into high or low resistance state (RESET or SET state)
[1]–[4]. Stored data is read out from its resistance difference [5],
[6]. As shown in Fig. 1, PRAM cell is composed of a standard
access transistor plus a storage element of GST alloy which has
been used for rewritable compact disk (CD) or DVD disk. The
top of GST is connected to the bit-line (B/L) through top-elec-
trode-contact (TEC) and the bottom of GST is connected to
Fig. 2. RESET current as a function of BEC size.
the drain of access transistor through bottom-electrode-contact
(BEC) and bottom-electrode (BE). Using this simple cell struc-
ture, it is easy to integrate GST cells into a conventional CMOS
process. BEC works as a heater tip to make GST transition
between SET and RESET state. The size of BEC is about 45
nm and the entire cell size is 0.504 m , which corresponds
to 16 F . Fig. 2 shows the reduction of RESET current with
BEC size. For a BEC size of 45 nm, RESET current is about
1 mA. To reduce RESET write current, many researches were Fig. 3. Basic operational characteristics of PRAM cell.
tried such as a development of storage material [7] and a modi-
fication of PRAM cell structure [8]. Fig. 3 shows a basic opera- for read operation by forcing read bias current and typical re-
tional characteristic of PRAM cell. SET state means crystalline sistance difference ratio is more than . Write operation is
low-resistance state with logic “L” state and RESET state means performed by heating the GST cell by injecting write current.
amorphous high-resistance state with logic “H” state. The re- RESET state of GST cell is obtained by heating GST cell above
sistance difference between SET and RESET state is sensed melting temperature with fast quenching. SET state of GST
cell is obtained by heating above crystallization temperature
Manuscript received April 15, 2004; revised May 10, 2004. and below melting temperature with gradual quenching process.
W. Y. Cho, B.-H. Cho, B.-G. Choi, H.-R. Oh, S. Kang, K.-S. Kim, K.-H. Kim, With its nonvolatile byte write in either direction, the writing
D.-E. Kim, C.-K. Kwak, and H.-G. Byun are with the SRAM team, Memory
Division, Samsung Electronics Company, Ltd., Hwasung-City, Gyeonggi-Do, speed of PRAM is much faster than that of Flash memory and
Korea 445-701 (e-mail: solarmac.cho@samsung.com). cell size is smaller than SRAM due to its simple structure. Due
Y. Hwang, S. Ahn, G.-H. Koh, G. Jeong, H. Jeong, and K. Kim are with to these promising characteristics of nonvolatile random acces-
the Technology Development Team, Memory Division, Samsung Electronics
Company, Ltd., Yongin-City, Gyeonggi-Do, Korea. sibility with high density, PRAM is one of the candidates for
Digital Object Identifier 10.1109/JSSC.2004.837974 future memory technology. Currently, as shown in Fig. 4, the
0018-9200/$20.00 © 2005 IEEE

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294 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005

Fig. 4. Example of the advantage of random accessibility of PRAM. (a) Flash + RAM solution case. (b) PRAM case.

Flash memory plus RAM buffer solution is widely used for mo- or higher). In the case of write operation, the amount of write
bile applications. With the added complexity of buffering with current which flows from W/D to cell ground line through
SRAM, complex four steps are required to change one-byte data circuit, B/L, GST and access NMOS
in Flash memory for nonvolatile retention. At the first step, the transistor, is very important to guarantee uniform SET/RESET
entire corresponding block is dumped to DRAM. Next within resistance states. Tungsten (W) ground lines within a cell array
DRAM, the new one-byte of data is changed. Next within Flash, causes considerable rise of ground level due to its relatively
the corresponding block is erased, and finally, the changed block high resistivity. Meshed ground strapping lines of Aluminum
is programmed from DRAM to Flash memory. However, by (Al) with resistivity almost 7 times lower than W, attach every
using a PRAM solution, random access byte write is possible 16 cells along the column and 64 cells along the row. This
and needs only one step that reduces write time by times. technique restricts the ground voltage variation in the cell array
The potential performance of PRAM features notably higher to less than 50 mV during SET/RESET write operation.
write speed than Flash, smaller cell size than SRAM, but also
simpler circuitries than Flash and DRAM because PRAM does III. SET WINDOW
not need high-voltage boosting and refresh/restore operations. Fig. 6 shows the change of GST resistance with applied
Thus, PRAM can merge advantageous aspects of conventional voltage for all GST cells under same test condition. The resis-
mobile memory technologies. In this work, we describe a de- tance of SET and RESET state show Gaussian like distribution
veloped 64-Mb PRAM featuring 512-kb sub-array core archi- with target minimum and maximum values. These distributions
tecture with full integration of GST into 0.18- m CMOS tech- are intrinsic and may come from process variations such as
nology. On-chip circuits fully control SET/RESET resistance BEC size variation and local uniformity variation of GST
states stably with minimal stand-by power consumption and composition. The SET window can be defined as ,
nonvolatile random read/write operation. The SRAM interface where as shown in
was employed to confirm the feasibility of PRAM use in low- the R–V curve. This SET window and its distribution are very
power mobile applications. important factors for designing cell array size, S/A and W/D. In
addition to the SET window defined from R–V characteristics,
II. CORE ARCHITECTURE the influence of B/L, needs to be considered to obtain the
real SET window. A typical I–V curve for GST based cell and
64-Mb density PRAM core is constructed with 128 sub-array B/L configuration are shown in Fig. 7. The B/L resistance for
blocks of 512 kb, by collating 16 blocks in the direction of the cell located far from the W/D is larger. The B/L voltage for
row and 8 blocks in the direction of column. As depicted in far cell, which is defined as , is lower than that of the near
Fig. 5, a sub-array core consists of 512-kb cell array organized cell defined as . To transit GST cell to SET state, the voltage
as 1024 word-line drivers (SWD), 512 column select/precharge applied across the GST layer should be controlled between
circuits, 8 I/O sense-amplifiers and and . is the threshold voltage
8 write drivers . For read and write operation, each ( , typically 1.0 V) for phase transition of GST.
top and bottom circuit connects 4 B/L to is the RESET voltage at which GST material starts to melt.
S/A for reading, and W/D for writing. Sharing the SWD, S/A, Thus, to obtain reliable SET operation, the voltage difference
W/D and circuitries with adjacent 512-kb between and , defined as , should be within the
sub-array cores make chip layout more efficient and simpler. . Especially the B/L voltage far from the W/D
Since I/O S/A and W/D are included in every 512-kb sub-array defined as must be larger than to guarantee
core, read and write related operational margins do not degrade entering minimum SET operation. From the statistical distri-
with combining sub-blocks to obtain higher cell density (64 Mb bution analysis of the intrinsic defined from the

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CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 295

Fig. 5. 512-kb sub-array core architecture having common shared SWD, S/A, and W/D.

R–V curve in Fig. 6, the mean and standard deviation of the far cell, , becomes lower than injected into the near
are essential design parameters to construct cell cell. This contributes to further reduction of . In our design
array, since small with wide distribution make it with B/L with Al, 1024 cells per bit-line (CPB) architecture
very challenging to aim the SET-voltage range to appropriate has of 0.5 k with of 250 mV that corresponds to
level. In this work, as depicted in Fig. 8(a), and values are of . The SET fail probability of far cells is
1.53 V and 380 mV, respectively. The minimum SET window statistically only 0.04%. If is about 1.5 k , the voltage
which is far from the value by is 390 mV. This corresponds drop from to is 770 mV. In this case, several percent
to statistical SET fail probability of 0.13% for far cells. Another of far cells cannot be changed from the previous resistance
factor that needs to be considered is that varies with the states during SET operation. As a result, 512-kb sub-array core
distance between W/D and PRAM cells. When the PRAM having 1024 CPB architecture is suitable for stable read and
cells selected for writing are far from the W/D, makes the write operation of PRAM.
voltage difference of . Fig. 8(b) is a simulation result of
as a function of which shows the increasing IV. DEVICE CHARACTERISTICS
with increased . The intrinsic minimum SET window of
390 mV which is defined from the distribution characteristic A. S/A and W/D Schematics
of SET window implies an equivalent of 0.8 k , which Fig. 9 shows a simplified schematic for read and write op-
corresponds to the maximum allowed for acceptable SET eration consisting of current mirror type W/D, S/A,
operation of far cells. Since the W/D is a nonideal current and PRAM cell. When cells are not selected or
source for B/L voltage variations, the performance of the W/D in stand-by mode, all the B/L are precharged to ground level by
is degraded with larger such that SET current injected into enabling PREBL signal so that current consumption in sub-cell

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296 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005

Fig. 6. Typical GST R–V curve having SET voltage window.

Fig. 8. (a) SET voltage window distribution characteristic and (b) BL voltage
versus BL resistance characteristics.

Fig. 7. Typical GST I–V curve and BL configuration.

array is near zero. During read operation, to prevent uninten-


tional write, the selected B/L is clamped below 0.5 V, which Fig. 9. Simplified S/A, W/D, and BL schematics.
is sufficiently lower than the threshold voltage of GST cell.
The S/A is a single ended voltage type with reference voltage
. Also, read bias current is adjustable to allow extracting and actual measurement at 3.0-V supply voltage with 30 C.
the distributions of GST-resistance state after various write op- This access time is fast enough for mobile applications. For
eration. For SET and RESET operations, two separated current reduction of active power consumption, address-transition-de-
W/D sources are used respectively to control the height and du- tectors (ATD) are used to activate a pulsed W/L scheme. In
ration of applied pulses, independently. this scheme, W/L is activated only when external addresses are
changed.
During write operation referring to Fig. 9, SET and RESET
B. Read/Write Operation
current are delivered by W/D which is included within each
Fig. 10 shows the simulation results for read operation, sub-array core block. To verify SET and RESET write character-
showing voltage levels at input and output nodes of S/A, B/L istics, W/L is statically activated during write operation. Using
clamping behaviors, and DQ results with SET resistance of 1 separate SET and RESET control logic for independent pulse
k and RESET resistance of 100 k cases. The S/A read bias height and duration, various write conditions could be tried for
current is supplied form the S/A input node. With W/L and verification. Fig. 11 shows voltage level at BL during SET and
enabled, BL is clamped below of GST. The S/A RESET operations. For stable write operation, the required min-
input node drop to the B/L level for reading SET state and S/A imum write pulse widths of SET and RESET were 80 and
input node maintains its precharged level (nearly Vcc level) 20 ns, respectively, with a pulse height ratio of 0.8. The pulse
for reading the RESET state. Even though the timing margin durations for random access write time are 120 ns for
for S/A enable and other read-related control signals are not SET state and 50 ns for RESET state at 3.0-V supply voltage
tight, the random access time is 60 ns both by simulation with 30 C.

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CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 297

Fig. 10. Simulation waveforms of read operation.

Fig. 11. Simulation waveforms of SET/RESET write operation.

C. On Chip Resistance Distribution

The distribution characteristics of SET and RESET resis-


tances are shown in Fig. 12. The SET and RESET resistances
are extracted by counting pass/fail bits while varying read
bias current as shown in Fig. 9. For the as-fabricated
chip, before any write operation, the initial distribution of GST
resistance ranged from 1 k to 1 M . After optimum SET
and RESET operations, the typical SET and RESET resistance
values were 2 k and 200 k , respectively. Thus, the resistance
difference between SET and RESET is large enough for the
S/A to determine data state using a reference voltage only,
without reference cells.

D. Design Summary

Fig. 13 shows the microphotograph of the fabricated 64-Mb


PRAM chip in which GST storage materials were fully inte-
grated into 0.18- m CMOS technology. External pads include Fig. 12. Resistance distribution of GST cell before/after initial write.
power pins, address pins, and control pins, located at top and
bottom. For two-byte (x16) operation, the left-half 32 Mb is used instead of bipolar transistor (BJT) or diode, because scala-
used for the lower-byte (LB) and the right-half 32 Mb is used for bility of PRAM cell using NMOS transistor as an access device
the upper-byte (UB). 128 sub-core arrays are placed above and is better than a BJT or diode beyond sub-100-nm technology
below the periphery circuits. Design feature and device perfor- to satisfy the high write current requirement. Using dual gate
mance of the test chip are summarized in Table I. In this work, a polysilicon, Co-salicidation, and triple metal process with de-
64-Mb PRAM was successfully developed for the first time with sign rule of 0.18- m, the unit cell size is 0.504 m and the chip
the highest reported density. As an access device, NMOS was size is 70 mm . Read, SET and RESET random access times are

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298 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005

TABLE I
SUMMARY OF CHIP PERFORMANCES AND PROCESS TECHNOLOGY

cell is less than 0.5 k . So the statistical SET fail probability


of far cells was only 0.04%. The typical on-chip SET and
RESET resistances were 2 k and 200 k , respectively. The
device was fully functional at 3.0 V. Random read access
time of 60 ns, random SET write time of 120 ns and random
RESET write times of 50 ns were achieved. Operating current
is 30 mA at 70-ns cycle time and stand-by current is 5 A
at 3.0-V supply voltage with 30 C.

REFERENCES
[1] S. Lai and T. Lowrey, “OUM—A 180 nm nonvolatile memory cell ele-
ment technology for stand alone and embedded applications,” in IEDM
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[2] S. Lai, “Current status of the phase change memory and its future,” in
IEDM Tech. Dig., 2003, pp. 10.1.1–10.1.4.
[3] A. Pirovano, A. L. Lacaita, A. Benvenuti, F. Pellizzer, S. Hugens, and R.
Bez, “Scaling analysis of phase-change memory technology,” in IEDM
Tech Dig., 2003, pp. 29.6.1–29.6.4.
[4] A. Pirovano, A. L. Lacaita, A. Benvenuti, F. Pellizzer, and R. Bez, “Elec-
tronic switching in phase-change memories,” IEEE Trans. Electron De-
vices, vol. 51, no. 3, pp. 452–459, Mar. 2004.
[5] M. Gill, T. Lowrey, and J. Park, “Ovonic unified memory—A high-per-
formance nonvolatile memory technology for stand alone and embedded
applications,” in IEEE Int. Solid-State Circuits Conf. (ISSCC) Dig. Tech.
Papers, 2002, pp. 202–203.
[6] Y. N. Hwang et al., “Full integration and reliability evaluation of phase-
change RAM based on 0.24 m-CMOS technologies,” in Symp. VLSI
Technology Dig. Tech. Papers, Jun. 2003, pp. 173–174.
[7] H. Horii, J. H. Yi, J. H. Park, Y. H. Ha, I. G. Baek, S. O. Park, Y. N.
Hwang, S. H. Lee, Y. T. Kim, K. H. Lee, U.-I. Chung, and J. T. Moon,
“A novel cell technology using n-doped GeSbTe films for phase change
Fig. 13. Microphotograph of fabricated 64-Mb PRAM chip. RAM,” in Symp. VLSI Technology Dig. Tech. Papers, 2003, pp. 177–178.
[8] Y. H. Ha, J. H. Yi, H. Horii, J. H. Park, S. H. Joo, S. O. Park, U.-I. Chung,
and J. T. Moon, “An edge contact type cell for phase change RAM fea-
60 ns, 120 ns, and 50 ns, respectively at 3.0-V supply voltage turing very low power consumption,” in Symp. VLSI Technology Dig.
with 30 C. Tech. Papers, 2003, pp. 175–176.

V. CONCLUSION

A GST alloy with an NMOS transistor PRAM cell configura- Woo Yeong Cho received the B.S., M.S., and Ph.D.
tion is very convenient for integration with conventional CMOS degrees in electrical engineering from Korea Ad-
vanced Science and Technology (KAIST), Taejon,
process. Through built-in S/A and W/D within sub-array core Korea, in 1992, 1994, and 1999, respectively.
architecture and a meshed Al ground plane, read and write In 1999, he joined Samsung Electronics, where he
related margin was secured. The distribution characteristic of has been involved in low-power SRAM, UtRAM and
is working on the circuit design for next-generation
intrinsic SET window that is introduced from process variation memories such as PRAM, MRAM, and STTM (Scal-
has a mean value of 1.53 V with standard deviation of 380 mV. able Two Transistor Memory).
By using 1024 CPB configuration, the BL resistance to a far

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CHO et al.: NONVOLATILE PHASE-TRANSITION RANDOM ACCESS MEMORY (PRAM) 299

Beak-Hyung Cho received the B.S. degree in Kyung-Hee Kim was born in Busan, Korea, in 1974.
electrical engineering from Ajou University, Suwon, She joined Samsung Electronics Company, Ltd.,
Korea, in 1994. Yongin, Kyunggi-Do, Korea in 1993, where she has
In 1995, he joined Samsung Electronics Company, been working on the layout of high-speed SRAM,
Yong-In, Korea, and has been working on design of low-power SRAM, UtRAM, and PRAM.
low-power SRAM. His interests are in analog circuits
and new memory development including MRAM and
PRAM.

Byung-Gil Choi was born in Po-Hang, Korea, Du-Eung Kim was born in Hong-Sung, Korea, in
on May 3, 1971. He received the B.S. degree in 1964. He received the B.S. degree in electrical en-
semiconductor science from Dong-guk University, gineering from In-Ha university, Korea, in 1990.
Korea, in 1999. He joined the Memory Division, Samsung Elec-
He joined the Memory Division, Samsung Elec- tronics Corporation, Kiheung, Korea, in 1990, where
tronics Corporation, Kiheung, Korea, in 1989, where he was involved in the circuit design of SRAM. Cur-
he was involved in the circuit design of SRAM, rently, he is involved in developing the next-genera-
UtRAM, and PRAM. At present, he has been tion memory (PRAM).
working on circuit design of new memory PRAM.

Hyung-Rok Oh received the B.S. and M.S. degrees


Choong-Keun Kwak was born on November 17,
in electrical engineering from Yonsei University,
1959, in Kyungbook, Korea. He received the B.S.
Seoul, Korea, in 1994 and 1999, respectively.
and M.S. degrees in electrical engineering from
In 2000, he joined Samsung Electronics Company,
Dankook University, Seoul, Korea, in 1982 and
Yong-In, Korea, and has been working on design of
1985, respectively.
low-power SRAM. His interests are in analog circuits
He joined the Memory Development Division,
and new memory development including MRAM and
Samsung Electronics, Korea, in 1985, where he was
PRAM.
engaged in the development of low-power SRAM
and high-speed SRAM. Currently, he is involved
in developing new memory (PRAM/MRAM) and
next-generation low-power SRAM for mobile appli-
cation.

Sangbeom Kang received the B.S. degree in elec-


trical engineering from Korea University, Seoul,
Korea, in 1993, and the M.S.E.E. and Ph.D. de- Hyun-Geun Byun was born on October 17, 1957,
grees from the Georgia Institute of Technology, in Kyungbook, Korea. He received the B.S. degree
Atlanta, in 1997 and 2002, respectively. While in electronic engineering from Kyungbook National
in the master’s degree track, he joined a research University, Taegu, Korea, in 1993.
project of designing a voltage comparator operating He joined the Memory Development Division,
at low-power supply voltages. His Ph.D. research Samsung Electronics, Korea, in 1983, where he was
topic was the heteroepitaxy of GaN and AlGaN/GaN engaged in the development of low-power SRAM
structures using MBE (molecular beam epitaxy) for and high-speed SRAM.
high-power HFET applications.
In 2003, he joined Samsung Electronics Company, Ltd., where he has been
involved in the development of 64-Mb PRAM.

Ki-Sung Kim was born in Seoul, Korea, in 1974. Youngnam Hwang received the B.S., M.S., and
He received the B.S. degree in electrical engineering Ph.D. degrees in physics from Yonsei University,
from Dankook University, Seoul, Korea, in 2000. Seoul, Korea, in 1991, 1993, and 1998, respectively.
In 2000, he joined Samsung Electronics Company, In 1998, he studied the carrier dynamics of
Yong-In, Korea and has been working on device quantum dots as a Postdoctorate with Kriss, Taejon,
evaluation programming development and analysis Korea. He joined Samsung Electronics Company,
of low-power SRAM, UtRAM. His interests are in Ltd., Yongin, Korea, in 2000, where he has been
next-generation mobile solution memory verification involved in the development of PRAM.
and including low-power sync-SRAM, MRAM, and
PRAM.

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300 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 1, JANUARY 2005

Sujin Ahn received the M.S. and Ph.D. degrees in Hongsik Jeong was born in Seoul, Korea, on May
electronics and electrical engineering from Pohang 27, 1962. He received the B.S., M.S., and Ph.D. de-
University of Science and Technology, Pohang, grees in department of physics from Yonsei Univer-
Korea, in 1996, and 1999, respectively. sity, Korea, in 1985, 1987, and 1992, respectively.
In 1999, she joined Samsung Electronics Com- In 1992, he studied the carrier dynamics of
pany, Ltd., Yongin, Kyunggi-Do, Korea. Since then, GaAs/AlGaAs quantum structure as a Postdoctorate
she was engaged in the research and development of at the Laser Spectroscopy Lab, Kriss, Taejon, Korea.
CMOS process and device technologies in DRAM In the same year, he joined the Samsung Electronics
process integration. She took part in 4-Gb DRAM Company, Ltd., Kyunggi-Do, Korea, where he is
development and currently involved in the develop- involved in dry etching process for device fabrication
ment of next-generation memory devices. such as 64-Mb and 256-Mb DRAM. Since 1997, he
has been engaged in the development of process integration. He participated in
development of cutting-edge technologies of 1-Gb and 4-Gb DRAM. Recently,
he is in charge of developing new memories such as FRAM, MRAM, and
PRAM as a project leader.

Kinam Kim (S’90–M’97–SM’01–F’03) received


the Ph.D. degree in electrical engineering from the
University of California at Los Angeles in 1994. He
Gwan-Hyeob Koh was born in Korea in 1966. He received the B.Sc. degree in electronic engineering in
received the B.S., M.S., and Ph.D. degrees in physics 1981 from Seoul National University, South Korea.
from Seoul National University, Seoul, Korea, in In 1983, he received the M.S. degree in electrical
1989, 1991, and 1996, respectively. engineering from the Korea Advanced Institute of
In 1997, he joined Samsung Electronics Company, Science and Technology.
Ltd., where he worked on the development of 4-Gb In 1983, he joined Samsung Electronics Company,
DRAM. Since 2002, he has been working on the de- Ltd., where he has been involved in the development
velopment of new memories including MRAM and of DRAMs, ranging from 64-kb to 4-Gb densities.
PRAM. Currently, he is a Senior Vice President responsible for the research and
development of next-generation memory technologies for DRAM, nonvolatile
memory, SRAM, and emerging new memories such as FRAM, PRAM, and
MRAM. He was a program director for 0.13-m DRAM technology generation
from its development at the R&D center to transferring to manufacturing lines
during 1999–2001. He was a Technical Director for 4-Gb DRAM development
for 1998–1999. He has been a Project Leader for the development of the
first 1-Gb DRAM using 0.18-m CMOS technologies during 1994–1996.
His current major activity is focused on the development of technologies for
low-power and high-performance multigigabit density DRAMs and high-den-
sity nonvolatile memories. His research interests are memory device reliability,
yield modeling on memory device, memory cell technology, and multilevel
metallization for high-performance of multigigabit memory devices. He has
Gitae Jeong received the B.S., M.S., and Ph.D. published more than 260 technical papers on the field of memory technology.
degrees in physics from Seoul National University, He holds 70 patents related to memory technology. He plays an active part in
Seoul, Korea, in 1989, 1991, and 1995, respectively. advancing future memory technology through participating panel discussions
He has been with Samsung Electronics Company, of prime conferences such as VLSI technology symposium.
Ltd., since 1995, where he has been involved in the Dr. Kim twice received the grand prize of the Samsung group, for the suc-
development of 512-Mb DRAM and 1-Gb DRAM. cessful developments of 1-Mb DRAM and 1-Gb DRAM in 1986 and 1996, re-
Currently, he is involved in the development of spectively. He is a recipient of ISI’s citation award for highly cited paper. He
next-generation new memories such as PRAM and served as a committee member of the International Electron Device Meeting
MRAM. (IEDM), and he is a member of editorial advisory board of Microelectronics
Reliability. He is a Samsung fellow.

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