ECE/ME/IE 485

Fall 2010

HW #2

1. a) Make an equivalent circuit for the mechanical system shown in the figure
below and show the current flows in the model:

k1 k2
k2 F F2
m1 m212

b1 b2
x1 xx122

b) Redraw the model when a force F1 is applied to mass M1 in the same direction
as F2, but F2=0.

c) How does the model change if the mass M2 becomes infinitely massive?
2. Suspended Membrane Lumped Element Model

a) A SiO2 suspended membrane with diameter of 50μm is fabricated on a Silicon

substrate. Uniform pressure is applied across the membrane and displaces it
upwards. Draw a lumped element mechanical model for the membrane,
showing all forces, springs, dampers, and displacements. Assume
displacement is constant over entire membrane.

b) State what physical dimensions or characteristics of the surrounding

environment could be used to
i) decrease the mass m by half
ii) increase the spring constant k
iii) decrease the damping b

c) Draw an equivalent electrical circuit showing all current flows and forces.
Also, draw the same circuit in the Laplace domain.

d) Derive the transfer function of the system by getting an expression for the
X ( s)
force vs. displacement: H ( s ) 
F ( s)
3. Go through the following steps to determine the snap-down voltage for the device
structure below. Ignore the effects of fringe fields.

Top View

Side View

Let k1 = 0.1 N/m and k2 = 0.05 N/m

The anchors and proof mass are all electrically conducting
and connected in common

a) Write an expression for the net force, F, on the proof mass as a function of
applied voltage and the gap between the proof mass and lower electrode.

b) Write an expression for the stability criteria in terms of the spring constant
k.

c) Calculate Vsnap

d) Consider the use of this structure as an acceleration sensor for detecting

inertial forces out of the plane of the proof mass. Describe how you
would optimize sensitivity through manipulation of the widths and
thicknesses of different parts of the structure.

e) If the proof mass is comprised of single crystal silicon, what acceleration

would bring the proof mass and lower electrode into physical contact?
Can the applied voltage bias help to prevent this? Why or Why not?