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  • Dr. Gargi Raina VIT 2011

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    Govarthanan
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    The document discusses different types of lithography techniques used in semiconductor manufacturing including contact printing, proximity printing, and projection printing. Projection printing is further broken down into catadioptric and refractive methods. The document also mentions the short lifetime of masks as an issue with lithography techniques. It is attributed to Dr. Gargi Raina VIT 2011.

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    Lithography

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    The document discusses different types of lithography techniques used in semiconductor manufacturing including contact printing, proximity printing, and projection printing. Projection printing is further broken down into catadioptric and refractive methods. The document also mentions the short lifetime of masks as an issue with lithography techniques. It is attributed to Dr. Gargi Raina VIT 2011.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    9 views21 pages

    Dr. Gargi Raina VIT 2011

    Uploaded by

    Govarthanan
    The document discusses different types of lithography techniques used in semiconductor manufacturing including contact printing, proximity printing, and projection printing. Projection printing is further broken down into catadioptric and refractive methods. The document also mentions the short lifetime of masks as an issue with lithography techniques. It is attributed to Dr. Gargi Raina VIT 2011.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 21

    Dr.

    Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    (i) Contact Printing

    (i) Proximity Printing

    (i) Projection Printing


    • Reflection & Catadioptric
    (Combination of reflective & refractive
    components)
    • Refractive

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    (iii) Short life-time of mask

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    E

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011
    Dr. Gargi Raina VIT 2011

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