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  • SPM Based Nanolithography: Examples: Scratching Lithography Local Anodic Oxidation (LAO) Dip Pen Nanolithography (DPN)

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    This document discusses various scanning probe microscopy (SPM) based nanolithography techniques including scratching lithography, local anodic oxidation (LAO), and dip-pen nanolithography (DPN). It provides examples of each technique and how they work. Specifically, it explains that DPN uses an AFM tip to deliver "ink" molecules to a surface via capillary forces to pattern features less than 100 nm. The document also shows examples of DPN used to pattern self-assembled monolayers and attach gold nanoparticles or proteins. It investigates how the depth and width of DPN patterns depends on parameters like setpoint force and tip velocity. Finally, it demonstrates nanomanipulation using SPM to move

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    This document discusses various scanning probe microscopy (SPM) based nanolithography techniques including scratching lithography, local anodic oxidation (LAO), and dip-pen nanolithography (DPN). It provides examples of each technique and how they work. Specifically, it explains that DPN uses an AFM tip to deliver "ink" molecules to a surface via capillary forces to pattern features less than 100 nm. The document also shows examples of DPN used to pattern self-assembled monolayers and attach gold nanoparticles or proteins. It investigates how the depth and width of DPN patterns depends on parameters like setpoint force and tip velocity. Finally, it demonstrates nanomanipulation using SPM to move

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    © All Rights Reserved
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    15 views19 pages

    SPM Based Nanolithography: Examples: Scratching Lithography Local Anodic Oxidation (LAO) Dip Pen Nanolithography (DPN)

    Uploaded by

    Govarthanan
    This document discusses various scanning probe microscopy (SPM) based nanolithography techniques including scratching lithography, local anodic oxidation (LAO), and dip-pen nanolithography (DPN). It provides examples of each technique and how they work. Specifically, it explains that DPN uses an AFM tip to deliver "ink" molecules to a surface via capillary forces to pattern features less than 100 nm. The document also shows examples of DPN used to pattern self-assembled monolayers and attach gold nanoparticles or proteins. It investigates how the depth and width of DPN patterns depends on parameters like setpoint force and tip velocity. Finally, it demonstrates nanomanipulation using SPM to move

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 19

    SPM based Nanolithography

    Examples:
    Scratching Lithography
    Local anodic oxidation (LAO)
    Dip Pen Nanolithography (DPN)

    Dr. Gargi Raina VIT 2011


    Diff. Mechanisms to modify
    surfaces with SPM

    Dr. Gargi Raina VIT 2011


    Sample-probe boundary layers

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    SCRATCHING LITHOGRAPHY

    Dr. Gargi Raina VIT 2011


    SCRATCHING LITHOGRAPHY

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    Local Anodic Oxidation (LAO)
    AFM Tip----- Acts as cathode
    Water Meniscus---Acts as electrolyte
    Voltage pulses applied--- Typically 10-30 V

    Dr. Gargi Raina VIT 2011


    Examples of LAO

    Interdigitated SiO2 lines


    Periodic Array of 10nm
    SiO2 nanodots

    Dr. Gargi Raina VIT 2011


    Dip-Pen Nanolithography (DPN)
    • Dip Pen Nanolithography (DPN) was first demonstrated by Chad
    Mirkin’s group at Northwestern University in 1999.

    • Dip-Pen Nanolithography (DPN) is a scanning probe nanopatterning


    technique in which an AFM tip is used to deliver molecules to a
    surface via a solvent meniscus, which naturally forms in the
    ambient atmosphere.

    • This technique allows surface patterning on scales of under 100


    nanometers.

    • Working: Ink molecules that can anchor themselves to the substrate


    via chemisorption or electrostatic interactions.

    Dr. Gargi Raina VIT 2011


    DIP PEN NANOLITHOGRAPHY

    Dr. Gargi Raina VIT 2011


    Applications:
    • Direct-write technique with no photomasks

    • Can use wide variety of inks for patterning for e.g.


    Alkylthiols, Silazanes, Proteins, DNA, Metal salts

    • Can patterns variety of length scales (nm-µm)

    A) Ultra-high resolution pattern of mercaptohexadecanoic acid on atomically-flat gold


    surface. B) DPN generated multi-component nanostructure with two aligned alkanethiol
    patterns. C) Richard Feynmann's historic speech written using the DPN nanoplotter.
    Dr. Gargi Raina VIT 2011
    DPN
    Study of variation of Setpoint Force (Fixed Tip velocity)

    Substrate: Mica; Ink: Milk Temperature: 25.80C


    Humidity : 41%

    Depth of pattern increases as setpoint is increased.

    Dr. Gargi Raina VIT 2011


    Study of variation of Tip Velocity (Fixed Setpoint force)

    Width of pattern increases as tip velocity increases.

    Dr. Gargi Raina VIT 2011


    Individual Au nanoparticles adsorbed on NH2-SAM-
    modified nanopatterns of lines (A) and dots (B)

    Chad A Mirkin et al, Nanotechnology 14 (2003) 1113–1117

    Dr. Gargi Raina VIT 2011


    Biofunctionalized nanoarrays of inorganic structures prepared by DPN

    Dr. Gargi Raina VIT 2011


    Dr. Gargi Raina VIT 2011
    Nanomanipulation using SPM

    Au Nanoparticles deposited on Mica surface

    Before Manipulation After Manipulation

    J. Chem. Phys. 133, 094704 2010


    Dr. Gargi Raina VIT 2011
    MWCNT deposited on APTMS-coated Mica
    Before After

    1.96 nm

    George Jacob and Gargi Raina, M. Tech Project Thesis, 2007

    Dr. Gargi Raina VIT 2011

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