CHAPTER III

Design and simulation of Piezoelectric MEMS Sensor

Objectives
Changing various aspects of the accelerometer can further enhance the device
performance. The device structure, dimensions and the choice of material of the structure as well
as dielectric are additional performance boosters for proposed MEMS accelerometer. Also
designed the trampoline, annular diaphragm structured piezoelectric accelerometers for
providing low transverse sensitivity along one axis and good temperature stability.
This Chapter describes the design and simulation of the trampoline, annular diaphragm
structured piezoelectric accelerometers using PZT-5H with COMSOL tool for providing low
transverse sensitivity along one axis and good temperature stability. These accelerometers are
utilized as a part of the applications remote interchanges as a particular joining circuit (ASIC)
and RF telemetry frameworks.

3.1 Designing of Piezoelectric Accelerometer

3.1.1 Computation Tool

Nowadays Computer reproduction is a standout amongst the most crucial parameter in the
exploration field of science and designing. For the advancement of new items or enhancing plans
the computerized investigation of parts are critical. In Today's reality an expansive range of
alternatives are accessible for reproduction; analysts use everything from essential programming
dialects to different abnormal state bundles for actualizing the new propelled systems. A PC
recreation is truly a decent domain and it is basically an interpretation of genuine physical laws
into their virtual structures. The definite precision of the subsequent model relies on the
rearrangements happens in the interpretation process. A reenactment domain would be perfect
just that incorporated the likelihood to add any physical impact to your model. That is the thing
that COMSOL is about. COMSOL is Finite Element Method apparatus and it is extremely
adaptable stage for clients to outline all applicable physical parts of the models [66].

To create redid arrangements, clients ought to go more profound and utilize their insight and
appropriate to their special circumstances. COMSOL gives you the certainty to construct the
model that you need with true accuracy with this sort of exhaustive displaying environment.

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3.1.2 Designing

The designing includes the annular diaphragm shape as well as trampoline model. The annular
diaphragm model includes the circular surfaces with 3 layers in which two electrodes are inserted
to collect the voltage generated. The trampoline model includes a rectangular diaphragm where
the proof mass is located at the bottom its centre.

The designing is done by going through the two different stages i.e. first we have to construct the
required shape on work plane in 2D and then it has been extruded for 3D geometry with the
required thickness. Once the model has been designed and desired thickness has been obtained
the next stage of designing process will be application of required materials to constructed model
Fig 3.1 and Fig 3.2 represents two stages of designing annular diaphragm model and Fig 3.3 and
Fig 3.4 represents the designing of trampoline model.

Fig 3.1. Construction of annular diaphragm on work plane Fig 3.2. After extruding from the work plane

Fig 3.3: Construction of trampoline model in work plane Fig 3.4: Extruding to 3D surface

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The below figures shows the materials applied for different parts are as specified for annular
diaphragm:

 Piezoelectric layer-lead ZirconateTitanate

 Ring shaped electrodes

Fig 3.5: After application of materials Yellow-gold Fig 3.6: Materials applied for trampoline model

Red - platinum
Mounting frame-cast iron
Proof mass-SiO2
Membrane-SiO2
The following are the materials applied for trampoline model:

Blue -- Piezoelectric Lead ZirconateTitanate.

Gray -- SiO2

Fig 3.7: Materials applied for trampoline model

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3.1.3 Meshing

Meshing is done for the device in order to have good study of results, i.e. when the meshing is
done by the force or the stress applied on the device will be equally distributed so that the results
will be exact. The meshing can be done in different ways fine, extra fine wider etc. according to
the device type. Here the normal meshing has been used. The following pictures show the mesh
formed for annular diaphragm as well as trampoline models.

Fig 3.8.After the application of meshes Fig 3.9: Meshed trampoline model

3.1.4 Working

The common principle of accelerometer is to find acceleration, by using different principles. The
different principles may be capacitive; Piezoresistive, resistive etc. but for the today’s generation
the device must be low power consuming as well as highly resistant. So, as discussed earlier the
self-power producing piezoelectric accelerometer works on the principle piezoelectric i.e. when
the stress or force is applied on the piezoelectric material it produces voltage due to the colliding
of atoms at the time of application of force. So, to measure acceleration when we place this
amount forced corresponding to the amount of acceleration is applied on it and the respective
voltage is generated by the piezoelectric material [68].

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3.1.5 Computational results

Now the constructed models are computed with Eigen frequencies and the following results are
obtained. The annular diaphreamic model is done with the eigen frequencies 8.826164e9. From
the obtained results we can say that the construction with the 3 piezoelectric layers and with the
Lead ZirconateTitanate is undergoing the displacement of 0.0467 um and potential is of
4.1003V. We can consider this as good result as the deformation of the material is very low and
potential is better high. The trampoline model is computed with the eigen frequencies
4.5118051e10 and the results are as follows:

Fig 3.10.Displacement obtained in the piezoelectric layer Fig 3.11 .Displacement from the down view

Here the piezoelectric crystal is undergoing a displacement of 0.2652 um and also obtaining
good potential value of 6.9616 V. Therefore both the models are giving good results.
Piezoelectric material gives the displacement is uniform and potential output is high but the
annular diaphragm model is considered as better one.

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Fig 3.12.Obtained potential of 4.1003 Fig 3.13: Displacement obtained in the
piezoelectric layer

Fig 3.14: Potential obtained is 6.9616 V

3.2 Simulation

Any device on the earth is not perfect but a device is said to be better than the other by only due
to comparison. So at any place simulation or comparison plays a major role in judging the
performance of the device. All the simulated results will be as given in table 1.So the simulation
has been done here for annular diaphragm model in the following 3 ways:

1. Simulation with materials

2. Simulation with geometry

3. Simulation with Eigen frequencies

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3.3 Results and discussions

The simulations for the constructed model are done with the materials quartz, ZnO, Lead
Zirconate Titanate-5H. In the above results we had seen for Lead Zirconate titanate-5H

Fig 3.15.Displacement undergone Fig 3.16.Potential generated

Fig 3.17.Displacement in ZnO Fig 3.18 Potential obtained for ZnO

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 Fig 3.19: displacement undergone Fig 3.20: potential released

Simulation with varying geometry

The simulations done for the trampoline model are as follows:

 Simulation with materials

 Simulation with Eigen frequencies

Fig 3.21.Displacement for the varied geometry Fig 3.22.Potential obtained for the varied geometry

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 Fig 3.23: Displacement for eigen Fig 3.24: Potential obtained for Eigen
frequency 9.391821e9 frequency 9.391821e9

Fig 3.25: displacement undergone Fig 3.26: Potential obtained

Fig 3.27: Displacement undergone Fig 3.28: Potential obtained

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 Fig 3.29: Displacement undergone Fig 3.30: Potential obtained

Simulation with Eigen frequencies

The study of obtained results says that the annular diaphragm model is more sensitive than the
trampoline mode. Table.5.1 summarizes the amount of potential with the corresponding
displacement in each case.

Fig 3.31: Displacement undergone Fig 3.32: Potential obtained

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 Table 3.1 Amount of potential with the corresponding displacement in each case.

Type of Simulation Geometry Eigen

Model Output Material 4-Layer frequencies

0.7643u 0.2099u
Annular
Displacement 0.0617um 0.0207um 0.00981um
m m
0.206um
Diaphragm

4.100 2.033 15.47 5.085

Annular Potential 0.677 15.571
Diaphragm (V) 3 2 2 5

2.829*1 8.074*10- Not

Trampoline Displacement 0.2652um 0-9m 9m
0.0123um
Applicable
0.0202um

6.961 8.993 7.631 6.633 Not

Trampoline Potential 10.924
(V) 6 3 7 8 Applicable

The MEMS accelerometers especially created a revolution in the electronic devices, so to keep
the standards of accelerometers and to cop up with the developing technology, today the MEMS
accelerometers should be developed with various principles and different models for better
results. The piezoelectric MEMS accelerometers, outlines the consolidating both geometries i.e a
novel annular stomach, trampoline and high electromechanical coupling thick PZT movies,
which shows high sensitivities and expansive usable recurrence ranges. Our outcome
demonstrates that, the configuration accelerometer gives high affectability and great temperature
dependability.

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