RECOMMENDED PARTS LIST FOR SVG

Below is a generic recommended parts list for SVG 88 systems. We can customize part lists for SVG
86 and 88 systems to suite your configurations. Contact the regional parts office near you for
assistance with all your SVG / Rite Track 86, 88 and 90-S/SE parts needs.

Area Part No. DESCRIPTION QTY

INDEXE
QUANTITY ARE FOR 4 ASSEMBLIES
R

112-077 INDEXER MOTOR 2

100-032 CAP, WAFER SENSOR (IF APPLICABLE) 2

99-
OPTICAL WAFER SENSOR (IF APPLICABLE) 2
18266-02

99-
HI TORQUE INDEXER HARNESS 2
16310-02

99-
HI TORQUE INDEXER PCB (REPLACES 99-80039-07) 2
73092-01

HOT
PLATE QUANTITIES ARE PER ASSEMBLY
OVEN

109-014 VACUUM SWITCH 1

215-200 FLEXIBLE COUPLER 1

70013-01 115VAC 700 WATT HEATER ELEMENT (IF APPLICABLE) 1

206-247 TEFLON FERRULE 2

215-200 COUPLING MOTOR 1

THERMOCOUPLE ASSY. (FOR USE WITH BARBER

99-04089 1
COLEMAN TEMP. CONTROLLERS ONLY)

99- RTD. ASSY. (FOR USE WITH WATLOW TEMP. 1

Area Part No. DESCRIPTION QTY

43896-01 CONTROLLERS ONLY)

99-
SINGLE SENSOR PCB 1
80158-01

COATE
R (SUB
QUANTITIES ARE PER ASSEMBLY
MICRO
N)

114-020 SOLENOID VALVE 1

99-
SOLENOID VALVE 1
70265-01

99-
SOLENOID VALVE 2
70265-02

109-014 VACUUM SWITCH 1

109-125 CCR SWITCH ACTUATOR 1

109-126 CCR SWITCH 1

109-148 MAGNETIC REED SWITCH 1

202-303 KALREZ O-RING 3

202-283 TEFLON O-RING 1

06041-01 CATCH CUP BOTTOM SECTION 1

11959-01 CATCH CUP INSERT 1

17215-01 CATCH CUP LID (FOR VAPOR TIP BATH SYSTEMS) 1

17215-02 CATCH CUP LID (FOR NON-VAPOR TIP BATH SYSTEMS) 1

Area Part No. DESCRIPTION QTY

114-006 VACUUM SOLENOID 1

203-062 SPINDLE DRIVE LIFT CYLINDER 1

203-071 DISPENSE ARM AIR CYLINDER 1

99-
SINGLE SENSOR PCB 3
80158-01

99- FLAT FINDER SENSOR PCB (IF APPLICABLE 150mm AND

2
80089-06 125mm WAFERS ONLY)

99-
FLAT FINDER RIBBON CABLE ASSEMBLY 1
18427-01

99-
SMC SPINDLE TUBE ASSEMBLY 1
19960-01

150mm HIGH ACCEL WAFER CHUCK (COUNTER

30048-01 1
BALANCED)

125mm HIGH ACCEL WAFER CHUCK (COUNTER

30048-02 1
BALANCED)

125mm HIGH ACCEL WAFER CHUCK (NON COUNTER

30048-03 1
BALANCED)

100mm HIGH ACCEL WAFER CHUCK (NON COUNTER

30048-04 1
BALANCED)

COATE
R
QUANTITIES ARE PER ASSEMBLY
(STAND
ARD)

114-020 SOLENOID VALVE 2

114-022 SOLENOID VALVE 2

203-062 AIR CYLINDER, SPINDLE GUIDE PLATE 1

Area Part No. DESCRIPTION QTY

202-283 TEFLON O-RING 1

202-410 O-RING 1

17276-01 KNOB EBR 1

17530-02 BEBR NOZZLE, CHISEL POINT 1

201-007 SEAL BALL BUSHING 3/8 1

201-219 BEARING LINEAR 3/8 2

202-418 MOVING DISPENSE DRIVE BELT 1

203-072 DISPENSE ARM AIR CYLINDER 1

99-
MOVING DISPENSE, HIGH TORQUE STEPPER MTR HARN 1
16559-03

99-
PIVOTING DISPENSE, AIR CYLINDER HARNESS 1
17216-01

99-
SINGLE SENSOR PCB 3
80158-01

112-005 / HIGH SPEED SPINDLE DRIVE MOTOR 1

112-
005EXL

112-
HIGH SPEED SPINDLE DRIVE MOTOR 1
005EXL

17-
86/88 SPINDLE TUBE REBUILD KIT 1
06603-01

203-7002 CENTERING DEVICE AIR CYLINDER 1

201-064 BALL BUSHING 2

Area Part No. DESCRIPTION QTY

201-085 LINEAR BERING SEAL 2

99-
CATCH CUP ASSY W/ PVTG DISP TUB/CCR 1
16538-05

203-052 AIR CYLINDER, 9/16 X 4 STROKE 1

202-303 SEAL, O-RING, CHEMRAZ 3

222-005 CABLE, 34.25 LG, EYES BOTH ENDS 1

109-115 SUBMINITURE SWITCH 1

109-192 ACTUATOR, MAG SENSOR, FOR 109-193 1

109-192 MAGNETIC SENSOR 1

213-139 VALVE 3 WAY PNEUMATIC TEFLON 1

206-666 ELBOW 10-32 X 1/8 TUBE BARB NYLON 1

99-
ASSY, SOLENOID 114-007 1
38846-01

99-
ASSY, SOLENOID 114-021 1
38847-1

DEVEL
OPER
QUANTITIES ARE PER ASSEMBLY
(FIXED
HEAD)

109-014 VACUUM SWITCH 1

114-003 NOZZLE CLEANOUT SOLENOID 2

114-020 SOLENOID VALVE 1

Area Part No. DESCRIPTION QTY

99-
SOLENOID VALVE 2
70265-01

99-
SOLENOID VALVE 2
70265-02

114-006 VACUUM SOLENOID 1

109-025 MAGNETIC REED SWITCH 1

112-005 / HIGH SPEED MOTOR 1

112-
005EXL

203-064 SPLASH SHIELD LIFT CYLINDER 1

203-067 SPINDLE LIFT CYLINDER 1

206-097 SPRAY RINSE FITTING 1

207-011 SPRAY NOZZLE 2

207-014 NYLON GASKET 2

215-021 TORQUE COUPLER 1

06734-05 3" WAFER CHUCK (IF APPLICABLE) 1

06734-06 4" WAFER CHUCK (IF APPLICABLE) 1

06734-07 5" WAFER CHUCK (IF APPLICABLE) 1

06734-08 6" WAFER CHUCK (IF APPLICABLE) 1

99-
DEVELOPER SPINDLE TUBE 1
16113-02

99- SINGLE SENSOR PCB 4

Area Part No. DESCRIPTION QTY

80158-01

DEVEL
OPER
QUANTITIES ARE PER ASSEMBLY
(MOVIN
G ARM)

46 HOLLOW SCREW 2

109-014 VACUUM SWITCH 1

99-
SOLENOID VALVE 4
70265-01

112-066 LOW SPEED MOTOR 1

112-067 /
112- HIGH SPEED MOTOR 1
067EXL

201-064 DISPENSE ARM BEARING 4

201-085 BERING SEAL 4

203-074 SPINDLE LIFT CYLINDER 1

206-584 FITTING 2

206-925 FITTING 2

207-024 FLAT PATTERN SPRAY NOZZLE 2

207-026 FLAT PATTERN SPRAY NOZZLE 2

215-021 TORQUE COUPLER 1

216-080 NYLON HOSE CLAMP 4

Area Part No. DESCRIPTION QTY

216-081 NYLON HOSE CLAMP 4

215-082 DISPENSE ARM SHAFTS 2

06734-05 3" WAFER CHUCK (IF APPLICABLE) 1

06734-06 4" WAFER CHUCK (IF APPLICABLE) 1

06734-07 5" WAFER CHUCK (IF APPLICABLE) 1

06734-08 6" WAFER CHUCK (IF APPLICABLE) 1

06820-01 CATCH CUP GASKET 1

99-
SINGLE SENSOR PCB 4
80158-01

99-
ELECTRO-MECHANICAL CLUTCH ASSEMBLY 1
14416-01

99-
SPINDLE TUBE ASSEMBLY 1
16113-03

CHILL
QUANTITIES ARE PER ASSEMBLY
PLATE

109-014 VACUUM SWITCH 1

114-006 VACUUM SOLENOID 1

114-002 2 WAY SOLENOID VALVE 1

114-003 4 WAY SOLENOID VALVE 1

16188-01 HILL PLATE WAFER PIN 2

ATS QUANTITIES ARE PER ASSEMBLY

ARM
Area Part No. DESCRIPTION QTY

DRIVE

112-106 SILVER GRAPHITE DRIVE MOTOR 1

202-256 DRIVE BELT 1

99-
ATS DRIVE PCB 1
71265-01

99-
SINGLE SENSOR PCB 2
80158-01

CTD
QUANTITIES ARE PER ASSEMBLY
CART

NOTE: NEW SMC VERSION AVAILABLE

109-064 BATH WATER LEVEL SWITCH 1

109-102 LIQUID LEVEL SWITCH 1

114-045 2 WAY TEFLON VALVE (IF APPLICABLE) 2

114-041 3 WAY SOLENOID VALVE (MD CARTS ONLY) 2

114-007 2 WAY SOLENOID VALVE (IF APPLICABLE) 2

121-212 115 VAC FLOW THRU COOLER (IF APPLICABLE) 1

209-035 PRESSURE GAUGE (MD CARTS ONLY) 1

209-056 SPRAY FLOWMETER (MD CARTS ONLY) 1

209-061 STREAM FLOWMETER (MD CARTS ONLY) 2

209-091 PRESSURE GAUGE (IF APPLICABLE) 1

Area Part No. DESCRIPTION QTY

213-131 COMBO ON/OFF SUCKBACK VALVE (MD CARTS ONLY) 1

213-151 METERING VALVE (IF APPLICABLE) 2

HIGH PRESSURE 2 WAY TEFLON VALVE (MD CARTS

213-085 2
ONLY)

217-060 .2 MICRON DEVELOPER FILTER 2

219-092 115 VAC MAGNETIC DRIVE DEV. PUMP (IF APPLICABLE) 1

219-093 230 VAC MAGNETIC DRIVE DEV. PUMP (IF APPLICABLE) 1

219-094 115 VAC MAGNETIC DRIVE BATH PUMP (IF APPLICABLE) 1

219-095 230 VAC MAGNETIC DRIVE BATH PUMP (IF APPLICABLE) 1

99- 115 VAC LAUDA IMMERSION CIRCULATOR (IF

1
08370-01 APPLICABLE) - NEW SMC VERSION AVAILABLE

99- 230 VAC LAUDA IMMERSION CIRCULATOR (IF

1
08370-02 APPLICABLE) - NEW SMC VERSION AVAILABLE

99-
DUAL DEVELOPER INTERFACE PCB (IF APPLICABLE) 2
80163-01

SYSTE
M
SPARES
:

102-5388 LED 4

103-6051 LOW SPEED DRIVE TRANSISTOR 2

103-6384 HIGH SPEED BRAKE TRANSISTOR 2

103-
BRUSH DRIVE TRANSISTOR 2
11011
Area Part No. DESCRIPTION QTY

107-004 POWER SUPPLY RELAY 2

109-051 SNAP SWITCH 25

109-052 SNAP SWITCH 10

109-088 CARD CAGE POWER SWITCH 2

110-005 28 VOLT LAMP 5

111-003 5 AMP FUSE 10

111-008 3 AMP FUSE 10

111-010 10 AMP FUSE 10

111-012 .5  AMP FUSE 10

114-003 2 WAY SOLENOID VALVE WITH E.P. SEALS 2

114-007 2 WAY SOLENOID VALVE WITH KALREZ SEALS 2

121-204 WATLOW TEMP. CONTROLLER 1

124-005 5 BDC REGULATOR 2

200-003 TEFLON TAPE 2

200-014 LOCTITE 242 1

200-056 LOCTITE 222 1

200-310 LUBRICANT 2

18810-14 OVERLAY 8826SMC/36 (IF APPLICABLE) 1

Area Part No. DESCRIPTION QTY

18810-11 OVERLAY 8838 (IF APPLICABLE) 1

18810-04 OVERLAY 8832 CTD/36 (IF APPLICABLE) 1

18810-10 OVERLAY 8832 CTD MD/36 (IF APPLICABLE) 1

99-
CPU PCB (REPLACES SVG 99-80103) 1
71103-01

99- TRACK I/O PCB (FOR HPO/VP STAND ALONE CARD

1
71122-01 CAGES)

99- TRACK I/O PCB (FOR COATER AND DEVELOPER CARD

1
71122-03 CAGES)

99-
TRACK I/O PCB (MD DEVELOPERS ONLY) 1
71122-03

99-
PCB INTERCONNECT HARNESS 1
16105-01

99-
ATS ARM COMMUNICATION CABLE 1
16091-01

99-
VAC DELAY PCB 1
80146-01