Professional Documents
Culture Documents
Effects of SrRuO 3 buffer layer thickness on multiferroic ( Bi 0.90 La 0.10 ) ( Fe 0.95 Mn 0.05 ) O 3 thin films
J. Appl. Phys. 106, 054115 (2009); 10.1063/1.3213335
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18
JOURNAL OF APPLIED PHYSICS 108, 034102 共2010兲
FIG. 1. 共Color online兲 共a兲 XRD patterns of BFO/ZnO and ZnO thin films, where the inset is the expanded XRD patterns of BFO/ZnO and ZnO thin films.
SEM micrographs showing 共b兲 cross section and 共c兲 surface morphologies of BFO/ZnO thin films. 共d兲 Dielectric behavior of BFO/ZnO and BFO thin films.
Pt共111兲 / TiO2 / SiO2 / Si共100兲 substrates. The preparation pro- III. RESULTS AND DISCUSSION
cedure for the Bi1.10FeO3 ceramic target has been described
Figure 1共a兲 shows the XRD patterns of the BFO/ZnO
elsewhere.12,15 The ZnO ceramic target was prepared by sin-
thin film and ZnO buffer layer. The desired BFO and ZnO
tering of ZnO powder. A buffer layer of ⬃80 nm ZnO in
phases were well retained in the BFO/ZnO thin film, as rep-
thickness was grown in situ by off-axis rf magnetron sput-
resented by the strong BFO 共110兲 and ZnO 共002兲 peaks 关inset
tering on the Pt/ TiO2 / SiO2 / Si共100兲 substrate at the substrate of Fig. 1共a兲兴, where no other secondary phases were detected.
temperature of 620 ° C. The BFO thin film was then depos- The BFO thin film deposited on the Pt/ TiO2 / SiO2 / Si共100兲
ited on the ZnO/ Pt/ TiO2 / SiO2 / Si共100兲 substrate at the sub- substrate without a ZnO buffer layer exhibits a polycrystal-
strate temperature of 570 ° C. They were both deposited un- line structure, often with one or more secondary phases.11,15
der a rf power of 120 W, and at a base pressure of 5 The bottom ZnO buffer layer had, therefore, improved the
⫻ 10−6 Torr and a deposition pressure of 10 mTorr with Ar phase purity of BFO and gave rise to a strong 共110兲 texture
and O2 at a ratio of 4:1, giving rise to a growth rate of 3.0 for the BFO thin film deposited above. Figures 1共b兲 and 1共c兲
nm/min and 2.5 nm/min for the BFO and ZnO layers, respec- show the FE-SEM micrographs for the cross section and sur-
tively. The resultant thicknesses of BFO and ZnO layers face morphology of the BFO/ZnO thin film. The BFO/ZnO
were measured to be ⬃300 nm and 80 nm, respectively. thin film appears to be dense and well adhered to Pt coated
Circular Au electrodes of 0.1 mm in diameter were sputtered silicon substrate. Figure 1共d兲 plots the dielectric behavior of
on the film surface by using a shadow mask in order to BFO/Pt and BFO/ZnO thin films in the frequency range of
investigate their electrical behavior. 101 Hz– 106 Hz. The dielectric loss of the BFO/ZnO thin
The phases present in the BFO/ZnO thin film were ana- film is much lower than that of the BFO/Pt thin film, that is,
lyzed by using x-ray diffraction 共XRD兲 共Bruker D8 Ad- the dielectric loss measured for BFO/Pt and BFO/ZnO thin
vanced XRD, Bruker AXS Inc., Madison, WI, Cu K␣兲. Field films was 15.7% and 1.2% at 10 kHz, respectively. The
emission scanning electron microscopy 共FE-SEM兲 共Philips, high dielectric loss measured for the BFO/Pt thin film
XL30兲 was employed to study the cross section and surface without a ZnO buffer layer is consistent with what has
morphologies of thin films. Their ferroelectric and fatigue been observed for the BFO thin film deposited on the
behavior were studied by using the Radiant precise worksta- Pt/ TiO2 / SiO2 / Si共100兲 substrate.11,15 It is dramatically low-
tion 共Radiant Technologies, Medina, NY兲. An impedance ered when a ZnO layer buffer layer is inserted between the
analyzer 共Solartron Grain Phase Analyzer兲 was used to char- substrate and BFO thin film, and the dense microstructure is
acterize the dielectric behavior of thin films. Their leakage expected to contribute positively toward the dielectric behav-
currents were measured by using a Keithley meter 共Keithley ior.
6430, Cleveland, OH兲, where the voltage was swept as Figure 2共a兲 shows the I-V relationship for the
−Vmax → +Vmax → −Vmax 共Vmax = 1, 2, 3, 4, and 5 V兲. BiFeO3 / ZnO thin film, which was measured at 300 K and
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18
034102-3 J. Wu and J. Wang J. Appl. Phys. 108, 034102 共2010兲
clearly observed for the BFO/ZnO thin film and it becomes JFN = CE2e− , 共4兲
E
more and more saturated with the increase in applied volt-
ages. The voltage at which the hysteresis occurs on the posi- where r is the relative dielectric constant, 0 is the permit-
tive voltage side is defined as Von, the value of which de- tivity of free space, is the charge carrier mobility, d is the
creases with the increase in applied voltages, as indicated in film thickness, K is the optical dielectric permittivity, and A,
Fig. 2共d兲. A resistive hysteresis under a dc applied field can B, and C are constants; 쏗, EI, and i are the height of
arise from the polarization reversal in the ferroelectric Schottky barrier, trap ionization energy, and potential barrier
layer.22,24,26,27 Indeed, a similar phenomenon has been ob- height, respectively. In order to identify the actual dominat-
served in ZnO/ BaTiO3.26 Fig. 2共c兲 shows the temperature ing leakage process involved in the BFO/ZnO thin film, the
dependence of I-V curves for the BFO/ZnO thin film mea- measured data can be fitted as a function of electric fields
sured at 60 ° C, 110 ° C, and 150 ° C, respectively. The re- according to Eqs. 共1兲–共4兲, where the 0 → Vmax is defined as
sistive hysteresis located at the positive voltage side in the the positive direction and Vmax → 0 as the negative direction.
I-V loop shows a strong temperature dependence, that is, the The leakage plotted as J versus E2 according to Eq. 共1兲 is
resistive hysteresis becomes more and more saturated with shown in Fig. 3共a兲, where a linear fitting would suggest
the increase in measurement temperature. Moreover, the Von SCLC as the dominant leakage process. Indeed, a more or
value decreases with the increase in measurement tempera- less linear fit in both the positive and negative directions was
ture, as shown in Fig. 2共d兲. observed at the low electric fields, and thus, the SCLC is
Although the diode-like behavior for the “ferroelectric- largely responsible for the leakage behavior of the BFO/ZnO
semiconductor” heterostructure have been explained,22,26,27 thin film at low electric fields. To further determine whether
their physical origins are still a subject of debate. In the past, the Schottky barriers, PF emissions, or interface-limited FN
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18
034102-4 J. Wu and J. Wang J. Appl. Phys. 108, 034102 共2010兲
FIG. 10. 共Color online兲 Inverse of the peak frequency 共relaxations time 兲 as
FIG. 9. 共Color online兲 ac conductivity plotted for 共a兲 BFO/Pt and 共b兲 BFO/
a function of temperature for 共a兲 BFO/Pt and 共b兲 BFO/ZnO thin films; dc
ZnO thin films as a function of frequencies at varying temperatures in the
conductivity vs 1 / T plots at different frequencies for 共c兲 BFO/Pt and 共d兲
range of 20– 200 ° C, where the insets in 共a兲 and 共b兲 are plots for permittiv-
bilayered BFO/ZnO thin films.
ity vs frequency as a function of temperature of BFO and BFO/ZnO thin
films, respectively. Frequency dependence of imaginary part 共Z⬙ / Zmax ⬙ 兲 of
the impedance for 共c兲 BFO and 共d兲 BFO/ZnO thin films.
frequencies.40 Moreover, the permittivities of BFO/Pt and
BFO/ZnO thin films increase with rising temperature, as
improve the fatigue endurance by limiting the defect migra- shown in the insets of Figs. 9共a兲 and 9共b兲. Figures 9共c兲 and
tion and related domain wall pinning effects.36 9共d兲 plot the frequency dependence of imaginary part
To further understand the effect of ZnO buffer layer on ⬙ 兲 of the impedance for BFO/Pt without a ZnO
共Z⬙ / Zmax
the electrical conduction and dielectric relaxation, the com- buffer layer and BFO/ZnO as a function of frequencies at
plex impedance spectroscopy is employed to identify the dif- different temperatures. Only a single Debye-like peak with
ference in the conduction and relaxation behavior between the characteristic frequency maxima 共f max兲 was observed for
the BFO/ZnO and BFO/Pt thin film without a ZnO buffer both BFO/Pt and BFO/ZnO in the range of temperatures and
layer. Figures 9共a兲 and 9共b兲 show the ac conductivity plotted frequencies investigated. The peak position of relaxation fre-
as a function of frequencies at varying temperatures 共in the quencies due to the grain effect is gradually shifted toward
range of 20 to 200 ° C兲 for the BFO/Pt and BFO/ZnO thin higher frequencies with increasing temperature, indicating
films, respectively. The frequency dependence of conductiv- the relaxation rate for this process increases with tempera-
ity can be described by the power-law relationship proposed ture. The grain boundary peaks are not observed in the fre-
by Jonscher39 quency window and temperature range studied for the
BFO/Pt and BFO/ZnO thin films.
共兲 = 共0兲 + As , 共5兲
Figures 10共a兲 and 10共b兲 plot the inverse of the peak fre-
where 共兲 is the total conductivity, 共0兲 is the frequency- quency 共relaxations time 兲 as a function of temperature for
independent dc conductivity, is angular frequency, and co- the BFO/Pt without a ZnO buffer layer and bilayered BFO/
efficient A and exponent s are the temperature and material ZnO thin film, where the linear relationship confirms the
dependent parameters 共0 ⬍ s ⬍ 1兲. The plots for both BFO/Pt Debye-like behavior.41 The relaxation time is observed to
and BFO/ZnO thin films tend to become more flattened in decrease with the increase in temperature. The activation en-
the low frequency region with rising temperature and the ergy for the dielectric relaxation can be calculated according
flattened region becomes wider and is shifted toward higher to the Arrhenius equation
frequencies, indicating that ac then becomes almost = o exp共ER/kBT兲, 共6兲
frequency-independent. The frequency-independent plateau-
like region observed in the low frequency region is attributed where o is the relaxation time at infinite temperature, ER is
to the frequency-independent conductivity 关共0兲兴 in Eq. 共5兲. the activation energy of dielectric relaxation, kB is the Bolt-
With an increase in frequencies, a frequency-dependent con- zmann constant, and T is the absolute temperature. The BFO
ductivity 关共兲 ⬃ As兴 region is observed. It is of interest to thin films have been demonstrated with different activation
note that BFO/ZnO possesses a narrower dc conduction re- energies, depending on temperature. In contrast, the activa-
gion and much lower conduction 共above three orders兲 as tion energy for the BFO/ZnO thin film is almost unchanged
compared to those of the BFO/Pt thin film without a ZnO regardless of the change in temperature, indicating the in-
buffer layer at the same condition, indicating that ZnO buffer volvement of the same relaxation process at different tem-
layer greatly improves the resistance of BFO thin films. Ow- peratures. Moreover, the activation energy value is distinctly
ing to the enhanced mobility of oxygen vacancies and or different between the BFO/Pt without a ZnO buffer layer and
other structural defects, conductivities of both films increase BFO/ZnO thin film, where the activation energy for the di-
with the increase in temperature, and the flattened region electric relaxation is 0.33 eV and 0.56 eV at low and high
shifts upwards and dominates over a larger range of temperatures, respectively, for BFO/Pt without a ZnO buffer
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18
034102-7 J. Wu and J. Wang J. Appl. Phys. 108, 034102 共2010兲
where o and kB are constant and Ea is the electrical activa- FIG. 11. 共Color online兲 Scaling behavior of the imaginary part for 共a兲
BFO/Pt and 共b兲 BFO/ZnO thin films, as a function of temperature. Fre-
tion energy of conduction, which can be calculated over dif- ⬙ and M⬙ / Mmax
quency dependence of the normalized peaks 共Z⬙ / Zmax ⬙ 兲 of 共c兲
ferent frequencies from the linear slopes in Figs. 10共c兲 and BFO/Pt and 共d兲 BFO/ZnO thin films. 共e兲 Comparable scaling behavior of the
10共d兲. Different conduction processes are expected in the imaginary part for BFO/Pt and BFO/ZnO thin films at 160 ° C.
two films at different temperatures. The calculated activation
energy for the BFO/Pt thin film at low and high temperatures ⬙
indicating a long range relaxation.44 In contrast, the Z⬙ / Zmax
was 0.32 eV and 0.42 eV, respectively, indicating that the ⬙ peaks of the BFO/ZnO thin film do not over-
and M⬙ / Mmax
first-ionization of oxygen vacancies is responsible for the lap, suggesting a localized relaxation.44 Figure 11共e兲 shows
conduction. For the BFO/ZnO thin film, it can be fitted with the scaling behavior of imaginary part 共Z⬙兲 for the BFO/Pt
one single linear relationship over the entire temperature re- without a ZnO buffer layer and BFO/ZnO thin films at a
gion investigated. Therefore, the conduction is dominated by fixed temperature of 160 ° C. Apparently, they possess rather
the same process, regardless of the variation in temperatures. different spectra, confirming the different types of dielectric
The activation energy of conduction calculated for the relaxation.
BFO/Pt thin film is 0.78 eV, indicating that its electrical con-
duction is largely governed by the thermal excitation of car-
riers from the second-ionization of oxygen vacancies.42 The
calculated value of ER is close to Ea value for the BFO/Pt IV. CONCLUSIONS
thin film, confirming that the same type of charge carriers is
responsible for both dielectric relaxation and conduction. In The ZnO as a buffer layer promoted the growth of 共110兲
contrast, the BFO/ZnO thin film exhibits notably different ER film texture for the BiFeO3 thin film deposited on the
and Ea values. To further show the scaling behavior of the Pt/ TiO2 / SiO2 / Si共100兲 substrate by off-axis rf magnetron
two films with and without a ZnO buffer layer, the imaginary sputtering. The BiFeO3 / ZnO thin film exhibits a much low-
part of impedance was scaled. Figures 11共a兲 and 11共b兲 plot ered dielectric loss 共tan ␦ ⬃ 0.012兲 than that of the film with-
the scaling behavior of the imaginary part 共Z⬙兲 for the out a ZnO buffer layer. Due to the much reduced leakage
BFO/Pt and BFO/ZnO thin films at different temperatures, current, the bilayered thin film demonstrates a well estab-
where Zmax⬙ and f max are employed as the scaling parameters lished P-E hysteresis loop, characterized by 2Pr
for Z⬙ and f, respectively.43 Although temperature affects the ⬃ 153.6 C / cm2 and 2Ec ⬃ 857.2 kV/ cm. The fatigue en-
activation energy value 共ER兲 of the BFO/Pt thin film, the durance of the BFO/ZnO thin film is strongly dependent on
dielectric relaxation and electrical conduction appear to be measurement frequencies. A diode-like behavior and resis-
the same type of charge carriers, as shown in the scaling of tive hysteresis are observed for the BFO/ZnO thin film,
imaginary part 共Z⬙兲 in Fig. 11共a兲. The very similar spectra in where the rectifying ratio increases with the increase in ap-
Fig. 11共b兲 shows that the relaxation dynamics, which vary plied voltages. The voltage at which the hysteresis occurs on
little with temperature, do not change much for BFO/ZnO. In the positive voltage side decreases with increasing voltage
order to further identify the difference in relaxation between and temperature. The resistive switching behavior of the be-
two thin films, Figs. 11共c兲 and 11共d兲 show the frequency layed BFO/ZnO thin film is shown to closely associate with
dependence of normalized peaks 共Z⬙ / Zmax⬙ and M⬙ / Mmax ⬙ 兲 for the trap-controlled space charge limited current and
the BFO/Pt without a ZnO buffer layer and BFO/ZnO thin interface-limited FN tunneling. ZnO had significantly
films, respectively. The peak positions for Z⬙ / Zmax ⬙ and changed the dielectric relaxation and electrical condition,
⬙ of the BFO/Pt thin film are almost overlapped,
M⬙ / Mmax where the dielectric relaxation and electrical conduction are
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18
034102-8 J. Wu and J. Wang J. Appl. Phys. 108, 034102 共2010兲
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
129.8.242.67 On: Sat, 11 Jul 2015 00:31:18