Plasma & Reactive Gas

Model Types 8 and 12

are available in Quartz or
PFA, Flaretek® or Pillar
fittings are available

Static Mixer
A CONTACTOR FOR DISSOLVING OZONE GAS IN FLUIDS
Solutions

The Static Mixer is designed to dissolve gases efficiently in fluids. Both gas and fluid are
injected into the Static Mixer under pressure. A series of baffles converts the kinetic energy
into turbulence, which results in improved mixing and solution.The fluids can be ultra pure
W W W . M K S I N S T . C O M

water, sulphuric acid or, in the PFA version, water containing HF. Common applications
include the solution of ozone gas in fluids for photoresist strip or for cleaning steps in
semiconductor wet wafer processing.

Features & Benefits

Excellent Process Performance
• No moving parts, no contamination
• High efficiency mass transfer for
maximum dissolved ozone
• Quartz and PFA/PTFE versions
available to accommodate multiple
chemistries
• Flaretek or Pillar compatible fittings
available (Pillar only for PFA/PTFE
version)
Low CoO
• Small size
• Reliable design
• No consumable parts
Performance
35

dissolved ozone concentration in mg

The following diagrams show two application examples.
30
Through a single pass, 30mg/l can be reached. Steady
state concentrations are achieved quickly in recirculation 25

mode. 20

15
• Mixing of ozone in UPW (single pass) Single Pass of Water
gas flow rate 4.3 slm Static Mixer Type 12
10
• Mixing of ozone in hot sulfuric acid (recirculation) gas flow rate 7.2 slm temperature 16 ˚C
ozone gas concentration: 150 g/m³
5 gas flow rate 10slm

Example of Setup 4 5 6 7 8 9 10
waterflowrate in l/min
11 12 13 14 15

The mass transfer of ozone gas in the fluid correlates with

the product of the fluid flow rate and the pressure loss Figure 1 —
over the Static Mixer. Application of ozone in cold water, single pass

Not all ozone can be dissolved within the fluid. If gas

bubbles are undesirable in the bath, a de-bubbler (a vessel
20
with a low flow velocity) should be installed behind the dissolved ozone concentration in mg/l
18

Static Mixer. The gas outlet of the de-bubbler contains 16

ozone, which has to be destroyed properly before 14

exhausting into the environment. 12

10 Recirculation of Sulfuric Acid

Static Mixer Type 12
For practical reasons, the gas inlet of the Static Mixer 8
temperature: 81˚C
should be pointing upwards to avoid fluid residues in the 6 liquid flow rate 26 slm acid volume: 15 Liter
ozone gas flow: 5 slm
4 liquid flow rate 21.6 slm
gas line. 2
liquid flow rate 14.7 slm ozone gas concentration: 120 g/m³

The Static Mixer can be installed within the recirculation 0

0 1 2 3 4 5 6 7 8 9 10
loop. It must then be installed downstream of the pump (to time in min
minimize possible cavitation problems).

Figure 2 —
Application of ozone gas in hot sulfuric acid, recirculation

Figure 3 —
Two typical installation examples with a SEMOZON® ozone generator supplying a bath in a semiconductor wet bench
Specifications

Static Mixer Type 8 Static Mixer Type 12

Fluid Flow Range 5 – 12 l/min recommended 10 – 25 l/min recommended
Gas Flow Range Between 30% and 100% of the fluid Between 30% and 100% of the fluid
flow (slm per l/min), 50% recommended flow (slm per l/min), 50% recommended
Max. Operation Pressure 3.2 bargauge (46 psigauge) at 24°C (75°F) 3.2 bargauge (46 psigauge) at 24°C (75°F)
1.5 bargauge (22 psigauge) at 130°C (266°F), PFA 1.5 bargauge (22 psigauge) at 130°C (266°F), PFA
1.0 bargauge (15 psigauge) at 130°C (266°F), Quartz 1.0 bargauge (15 psigauge) at 130°C (266°F), Quartz
Fittings for the fluid phase Flaretek compatible 1/2” Flaretek compatible 3/4“
Pillar 3/4” for PFA version available
Fittings for the gas phase Flaretek compatible 3/8” Flaretek compatible 3/8”
Pillar 3/8” for PFA version available
Dimensions (see Dimensional Drawing and Ordering Information)
Outer Diameter ∅ 20 mm ∅ 27 mm
Weight 185 g (Quartz version) 385 g (Quartz version)
325 g (PFA version)
Ordering Information

Static Mixer Type Material Fittings Type Dimensions

L A B
8 Quartz Quartz Flaretek compatible 339mm 67mm 50mm
12 Quartz Quartz Flaretek compatible 470mm 67mm 50mm
12 PFA Flaretek PFA/PTFE Flaretek 470mm 45mm 50mm
12 PFA Pillar PFA/PTFE Pillar 460mm 43mm 62mm

Dimensional Drawing —
Unless otherwise specified, dimensions are
nominal values in inches.

MKS Instruments, Inc. MKS Instruments, Inc. MKS Instruments Deutschland GmbH
Global Headquarters Plasma & Reactive Gas Plasma & Reactive Gas
2 Tech Drive, Suite 201 Solutions Solutions
Andover, MA 01810 90 Industrial Way Wattstr. 11-13
Tel: 978.645.5500 Wilmington, MA 01887 13355 Berlin, Germany
Tel: 800.227.8766 (in USA) Tel: 978.284.4000 Tel: +49.30.464.0030
Web: www.mksinst.com
Static Mixer - 11/15 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
© 2004 MKS Instruments, Inc. Specifications are subject to change without notice.
All rights reserved. mksinst™ is a trademark and SEMOZON® is a registered trademark of MKS Instruments, Inc., Andover, MA.
Flaretek® is a registered trademark of Fluoroware Inc.