What is a Mass Flow Controller?

A mass flow controller automatically controls the flow rate of a gas according to a set flow rate sent as an
electric signal, without being affected by use conditions or changes in gas pressure.  Flow rates can be roughly
classified into two types: volumetric flow and mass flow.  A volumetric flow measurement is affected by
ambient temperature and pressure.  To see the true flow, the pressure and temperature conditions need to be
pressure conditions, therfore providing much more accurate and stable flow measurement and control.  Our
mass flow controllers are used in a wide range of industrial fields as indispensable equipment when accurate
control of flow rates is required or an automated production line is built.

Structure and operating principles

These mass flow controllers have a flow rate measurement section that includes a sensor, bypass, flow rate
control valve, and special circuitry. A CPU is part of the circuitry, which makes it both multi-functional and
highly efficient.
The gas is input from an Inlet joint, and is divided so that it flows over both the flow rate sensor and a bypass.
The sensor measures the mass flow rate of the gas, and the flow rate control valve modifies the flow rate so
that the difference between the measured flow rate and the flow rate received from the external flow rate
setting signal is 0 (zero).
The units feature a loop circuit, so even if there is a secondary pressure change or ambient temperature
change that could affect the supply pressure of the introduced gas, the flow rate is instantaneously corrected,
which ensures stable flow rate control.

Operating Principle
1. The gas, which enters from the inlet, first splits to flow past the sensor or through the bypass.
2. At the sensor, the mass flow rate is detected as a proportional change in temperature and converted
by the bridge circuits to an electrical signal.
3. This signal passes through the amplification and correction circuits, and is output as a linear voltage
between 0 to 5V.  At the same time, it is also sent to the comparison control circuits.
4. The comparison control circuit compares the flow rate setting signal and the acutual flow setting
signal from the sensor and sends a difference signal to the valve driving circuit.
5. The flow rate control valve movers as appropriate to make the difference between the reguired flow
set point and flow output signals approach zero.  In other words, the unit controls the flow so that it is
always at the set flow rate.

Liquid Mass Flow Control

Measurement principles
Cooling measurement method
The flow rate sensor in the LF-F/LV-F series of fine mass flow controllers for liquids consists of an electronic
cooling element (Peltier element) that is in contact with a capillary tube, as well as several temperature
detection elements. When the liquid is flowing, the sensor detects the temperature rise (⊗T) corresponding to
the flow rate and displays it as a flow rate. Unlike methods where heat is added, this cooling method enables
flow rate measurement of liquids with low boiling points. It also prevents problems with interference due to the
influence of secondary discharge (vaporization) and makes accurate flow rate measurements possible.

Structure/Operating principle
The LV-F series of mass flow controllers are similar to the LF-F series of mass flow meters, but also have a
piezo actuator valve and an internal comparison control circuit. They compare the flow rate setting signal and
the flow rate output signal and automatically control the valve aperture so that the two signals will match. Since
they use a feedback control system, there are no flow rate variations as a result of external factors, and,
therefore, stable, accurate control is possible. The use of a piezo actuator valve, which is both stable and does
not generate heat, as the control valve makes these units ideal for flow control of liquids with low boiling points.