Regulators Series Page

For ultra high purity (UHP)

Single Stage Compact Regulator AP500 P.2
Single Stage Regulator: Low to intermediate flow AP1000 P.4
Single Stage Regulator: Low flow (Tied-diaphragm) AP1500 P.6
Single Stage Regulator: Low to intermediate flow AP1600

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

P.8
Single Stage Regulator: Low to intermediate flow (Tied-diaphragm) AP1900 P.10
Single Stage Regulator: Intermediate flow (Tied-diaphragm) AP1400T P.12
Single Stage Regulator: High flow (Tied-diaphragm) AP1200 P.14
Single Stage Regulator: Delivery of sub-atmospheric pressure AP1100 P.16
Two Stage Regulator: Low flow (Tied-diaphragm) AP1700 P.18
Two Stage Regulator: Intermediate flow (Tied-diaphragm) AP2700 P.20
Single Stage Regulator: Bulk gas delivery AP9000 & 9100 P.22
Single Stage Compact Regulator SL5200 P.24
Single Stage Regulator: Low flow SL5500 P.26
Single Stage Regulator: Intermediate flow SL5400 P.28
Single Stage Regulator: Intermediate flow SL5800 P.30
Single Stage Regulator: Low to intermediate flow AZ1000 P.32
Single Stage Regulator: Low flow (Tied-diaphragm) AZ1500 P.34
Single Stage Regulator: Intermediate flow (Tied-diaphragm) AZ1400T P.36
Single Stage Regulator: High flow AZ1300 P.38
Single Stage Regulator: High flow (Tied-diaphragm) AZ1200 P.40
Single Stage Regulator: High flow (Tied-diaphragm) AZ9200 P.42
Single Stage Regulator: Delivery of sub-atmospheric pressure AZ1100 P.44
For general applications
Single Stage Regulator: Low to intermediate flow AK1000 P.46
Single Stage Regulator: Low flow (Tied-diaphragm) AK1500 P.48
Single Stage Regulator: Intermediate flow (Tied-diaphragm) AK1400T P.50
Single Stage Regulator: High flow AK1300 P.52
Single Stage Regulator: High flow (Tied-diaphragm) AK1200 P.54

Check Valves
Single Stage Regulator: High flow (Tied-diaphragm) AK9200 P.56
Two Stage Regulator: Low flow (Tied-diaphragm) AK1700 P.58
Back Pressure Regulator BP1000 P.66
For ultra high purity (UHP)
Back Pressure Regulator BP1000 P.68

Vacuum Generators
For high pressure applications
Single Stage Regulator: Low flow KT10 P.60
Single Stage Regulator: Low flow (Welded connection) KT10 P.62
Single Stage Regulator: High flow KT12 P.64
For air operated applications
Flow Switches

Pneumatic Actuation Pressure Regulator: Low flow AP10PA P.70

Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) AP15PA P.72
Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) AP14PAT P.74
Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm) AP12PA P.76
Pneumatic Actuation Pressure Regulator: Low flow AZ10PA P.78
Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) AZ15PA P.80
Glossary of Terms
Technical Data/

Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) AZ14PAT P.82

Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm) AZ12PA P.84
Pneumatic Actuation Pressure Regulator: Low flow AK10PA P.86
Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) AK15PA P.88
Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) AK14PAT P.90
Precautions

Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm) AK12PA P.92

Pressure Gauges P.94
Regulators and Back Pressure Regulator/Specific Product Precautions P.96
1
 Low to intermediate
Single Stage Regulator for General Applications flow

Series AK1000
¡High inlet pressure type: Max. 3500 psig (24.1 MPa)
¡Flow capacity Standard: to 30 slpm
HF (option): to 120 slpm
¡Body material: Stainless steel and Brass available
¡Hastelloy internals available for corrosion resistance

How to Order
Port Number
q w e r t

AK10 01 S 4PL 4 4 0 0
Delivery pressure
Code Delivery pressure Code Delivery pressure Connections Bonnet option
01 0.5 to 10 psig (0.0034 to 0.07 MPa) 15 5 to 150 psig (0.034 to 1.0 MPa) (Inletq, Outletw) Code Bonnet
02 1 to 30 psig (0.007 to 0.2 MPa) 20 5 to 200 psig (0.034 to 1.4 MPa) Code Connections No code Standard
06 2 to 60 psig (0.014 to 0.4 MPa) 30 5 to 300 psig (0.034 to 2.1 MPa) 4 NPT 1/4 inch P Panel installation ∗6)
10 2 to 100 psig (0.014 to 0.7 MPa) 50 10 to 500 psig (0.07 to 3.4 MPa) 4T 1/4 inch compression ∗6) Panel mounting hole:
Material 6T 3/8 inch compression dia. 1.42 inch (36.1 mm).
Code Body Poppet Diaphragm
B Brass Option
316 SS 316 SS Gauge port
S Code Specification
316 SS (Extra bottom outlete, Inletr, Outlett) No code Standard (Cv: 0.09)
SH Hastelloy ® C-22 Hastelloy ® C-22 Pressure gauge ∗1)
Code HF High flow (Cv: 0.15)
Ports psig/bar unit MPa unitunit
Material No code No gauge port Seat material
Code Ports
B S, SH No pressure gauge Code Material
0
2P  (Connections: 1/4 inch NPT) No code PCTFE (Standard)
3P  V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa VS Vespel® ∗3)
Refer to the following
4P  1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa PK PEEK
porting configurations.
4PL   2 0 to 200 psig 0 to 1.5 MPa TF PTFE ∗4) ∗5)
5PC   10 0 to 1000 psig 0 to 7 MPa ∗3) Not available with SH material.
40 0 to 4000 psig 0 to 28 MPa ∗4) Source pressure rating is limited
Porting Configuration ∗1) Other range available. Refer to gauge to 300 psig (2.1 MPa) or less.
t t r guide (P.94,95). ∗5) PTFE seats reduce seat
abrasion for flow cycle
w q w q w q Sample Order Number application. Gas permeation is
Port qwer t greater with PTFE than PCTFE.
2P 3P 4P AK1002S 2P 4 4
3P 4 4 V3 MPA Pressure gauge unit ∗2)
t t r 4P 4 4 1 V3 MPA Code Unit
4PL 4 4 0 V3 MPA
5PC 4 4 0 1 V3 MPA No code psig/bar
w q w q
MPA MPa
∗2) Pressure gauge unit MPa or
psig/bar selectable. However
e 4PL e 5PC under Japanese regulation, only
qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) MPa is available in Japan.

Specifications
Operating Parameters AK1001 AK1002 AK1006 AK1010 AK1015 AK1020 AK1030 AK1050
0.5 to 10 psig 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig 5 to 200 psig 5 to 300 psig 10 to 500 psig
Delivery pressure
(0.0034 to 0.07 MPa) (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) (0.034 to 1.4 MPa) (0.034 to 2.1 MPa) (0.07 to 3.4 MPa)
Gas Select compatible materials of construction for the gas
Vacuum to 300 psig
Source pressure Vacuum to 3500 psig (24.1 MPa) ∗1)
(2.1 MPa)
Proof pressure (Inlet) 4500 psig (30.7 MPa)
Burst pressure 10000 psig (69 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing) ∗2)
Cv 0.09
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 0.49 in3 (8 cm3)
Mass 1.09 kg ∗3)
∗1) Max 300 psig (2.1 MPa) for PTFE seat.
∗2) -10 to 90 °C for Vespel® and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC.
∗3) Mass, including individual boxed weight, may vary depending on connections or options.
46
 Single Stage Regulator for General Applications
Low to intermediate flow Series AK1000

Option

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

High flow
Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are:
Option Other Parameters AK1001 AK1002 AK1006 AK1010 AK1015 AK1020 AK1030 AK1050
Cv 0.15
HF
Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Wetted Parts Material Flow Characteristics

Inlet pressure: 3000 psig (20.7 MPa)
Wetted Parts B S SH AK1000 200 psig (1.4 MPa)
Body Brass 316 SS
Hastelloy ® C-22 100 0.69
Poppet 316 SS
Diaphragm 316 SS Hastelloy ® C-22 90 0.62
PCTFE PCTFE
Seat 80 0.55

Delivery pressure (MPa)

(Option: Vespel®, PEEK, PTFE) (Option: PEEK, PTFE)

Delivery pressure (psig)

70 0.48
60 0.41
Dimensions inch (mm) 50 0.34

AK1000 40 0.28
30 0.21
ø2.12 (ø53.8)
20 0.14
AK1050 and the panel mounting option)

10 0.07
0 0.00
Max. 5.6 (142.2) (When selecting

0 100 200 300 400

Flow rate (slpm, N2)
Max. 5.0 (127.0)

Inlet pressure: 100 psig (0.69 MPa) 80 psig (0.55 MPa)

ø1.50 (ø38.1)
AK1000 40 psig (0.28 MPa) 20 psig (0.14 MPa)
50 0.34
ø2.25 (ø57.2)

Check Valves
40 0.28

Delivery pressure (MPa)

Delivery pressure (psig)

30 0.21
(17.5)
0.69

ø2.00 20 0.14

Vacuum Generators
(ø50.8)

0.88 (22.4) 10 0.07

2 x 10-32 UNF depth 0.25 (6.3)

(Mounting hole) 0 0.00
0 20 40 60 80
Flow rate (slpm, N2)

Inlet pressure: 100 psig (0.69 MPa) 50 psig (0.34 MPa)

Flow Switches

AK1000HF 30 psig (0.21 MPa)

60 0.41

50 0.34
Delivery pressure (psig)

Dlivery pressure (MPa)

40 0.28
Glossary of Terms
Technical Data/

30 0.21

20 0.14

10 0.07
Precautions

0 0.00
0 20 40 60 80 100 120 140 160 180 200
Flow rate (slpm, N2)
Hastelloy ® is a registered trademark of Haynes International.
Vespel® is a registered trademark of DuPont.
47
 Low flow
Single Stage Regulator for General Applications (Tied-diaphragm)

Series AK1500
¡High inlet pressure type: Max. 3500 psig (24.1 MPa)
¡Flow capacity: to 30 slpm
¡Body material: Stainless steel and Brass available
¡Hastelloy internals available for corrosion resistance
¡Tied-diaphragm design

How to Order
Port Number
q w e r t

AK15 02 S 4PL 4 4 0 0
Delivery pressure Bonnet option
Code Delivery pressure Code Bonnet
02 1 to 30 psig (0.007 to 0.2 MPa) No code Standard
06 2 to 60 psig (0.014 to 0.4 MPa) P Panel installation ∗4)
10 2 to 100 psig (0.014 to 0.7 MPa) Connections
∗4) Panel mounting hole:
15 5 to 150 psig (0.034 to 1.0 MPa) (Inletq, Outletw) dia. 1.42 inch (36.1 mm).
Code Connections
Material
4 NPT 1/4 inch
Code Body Poppet Diaphragm Seat material
4T 1/4 inch compression
B Brass Code Material
316 SS 316 SS 6T 3/8 inch compression
S No code PCTFE (Standard)
316 SS
SH Hastelloy ® C-22 Hastelloy ® C-22 VS Vespel® ∗3)
Ports PK PEEK
Material ∗3) Not available with SH material.
Code Ports Gauge port
B S, SH (Extra bottom outlete, Inletr, Outlett)
2P  Pressure gauge unit ∗2)
Pressure gauge ∗1)
3P Refer to the following  Code
psig/bar unit MPa unit Code Unit
4PL porting configurations.   No code
No code No gauge port psig/bar
5PC   MPA MPa
No pressure gauge
0
(Connections: 1/4 inch NPT) ∗2) Pressure gauge unit MPa or psig/bar
Porting Configuration
V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa selectable. However
t 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa under Japanese regulation, only MPa
2 0 to 200 psig 0 to 1.5 MPa is available in Japan.
w q w q 10 0 to 1000 psig 0 to 7 MPa
40 0 to 4000 psig 0 to 28 MPa
∗1) Other range available. Refer to
2P 3P gauge guide (P.94,95).
t t r
Sample Order Number
Port q w e r t
w q w q AK1510S 2P 4 4
3P 4 4 1 MPA
4PL 4 4 0 1 MPA
e 4PL e 5PC 5PC 4 4 0 40 1 MPA

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications

Operating Parameters AK1502 AK1506 AK1510 AK1515

1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig
Delivery pressure
(0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa)
Gas Select compatible materials of construction for the gas
Source pressure Vacuum to 3500 psig (24.1 MPa)
Proof pressure (inlet) 4500 psig (30.7 MPa)
Burst pressure 10000 psig (69 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing) ∗1)
Cv 0.09
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 0.49 in3 (8 cm3)
Mass 1.18 kg ∗2)
∗1) -10 to 90 °C for Vespel® and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC.
∗2) Mass, including individual boxed weight, may vary depending on connections or options.
48
 Single Stage Regulator for General Applications
Low flow (Tied-diaphragm) Series AK1500

Wetted Parts Material

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

Wetted Parts B S SH
Body Brass 316 SS
Poppet 316 SS Hastelloy® C-22
Diaphragm 316 SS Hastelloy® C-22
PCTFE PCTFE
Seat
(Option: Vespel®, PEEK) (Option: PEEK)

Dimensions inch (mm)

AK1500 ø2.12 (ø53.8)

AK1050 and the panel mounting option)

Max. 5.6 (142.2) (When selecting
Max. 5.0 (127.0)
ø1.50 (ø38.1)

ø2.25 (ø57.2)

(17.5)
0.69

ø2.00
(ø50.8)

0.88 (22.4)
2 x 10-32 UNF depth 0.25 (6.3)

Check Valves
(Mounting hole)

Vacuum Generators
Flow Characteristics
Inlet pressure: 3000 psig (20.7 MPa) Inlet pressure: 100 psig (0.69 MPa) 80 psig (0.55 MPa)
AK1500 200 psig (1.4 MPa) AK1500 40 psig (0.28 MPa) 20 psig (0.14 MPa)
100 0.69 50 0.34
90 0.62
80 0.55 40 0.28
Flow Switches
Delivery pressure (MPa)

Delivery pressure (MPa)

Delivery pressure (psig)

Delivery pressure (psig)

70 0.48
60 0.41 30 0.21
50 0.34
40 0.28 20 0.14
30 0.21
Glossary of Terms
Technical Data/

20 0.14 10 0.07
10 0.07
0 0.00 0 0.00
0 100 200 300 400 0 20 40 60 80
Flow rate (slpm, N2) Flow rate (slpm, N2)
Precautions

Hastelloy ® is a registered trademark of Haynes International.

Vespel® is a registered trademark of DuPont.
49
 Intermediate flow
Single Stage Regulator for General Applications (Tied-diaphragm)

Series AK1400T
¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) ¡Sub-atmospheric
HR (option): Max. 3000 psig (20.7MPa) pressure delivery option
¡Flow capacity to 400 slpm ¡Tied-diaphragm design
¡Body material: Stainless steel and Brass available
¡Hastelloy internals standard

How to Order
Port Number
q w e r t

AK14 02 T S 4PL 6 6 0 0
Delivery pressure
Code Delivery pressure Connections(Inletq, Outletw) Bonnet option
1 to 30 psig (0.007 to 0.2 MPa) Code Bonnet
Code Connections
02 Sub-atmospheric (A): 100 mm Hg No code Standard
4 NPT 1/4 inch
absolute to 30 psig (-88kPa to 0.2 MPa) P Panel installation∗6)
6 NPT 3/8 inch
06 1 to 60 psig (0.007 to 0.4 MPa) BP Bonnet port (NPT 1/8 inch)
8 NPT 1/2 inch
10 2 to 100 psig (0.014 to 0.7 MPa) 4T 1/4 inch compression ∗6) Panel mounting hole: dia.
15 5 to 150 psig (0.034 to 1.0 MPa) 6T 3/8 inch compression 1.56 inch (39.6 mm).
Material 8T 1/2 inch compression Option
Code Body Poppet Diaphragm Nozzle Ports Code Specification
B Brass Material No code Standard
Hastelloy Hastelloy
® ® 316 SS Code Ports High inlet pressure
S B S, SH
316 SS C-22 C-22 HR (Max. inlet pressure 3000 psig
SH Hastelloy ® C-22 2P 
3P Refer to the following  (20.7 MPa)) ∗5)
Porting Configuration 4PL porting configurations.   ∗5) Not available with AK1402T and AK1406T.
5PC   Seat material
t Code Material
Range options ∗1) No code PCTFE (Standard)
w q w q Code Specification VS Vespel® ∗4)
No code Standard ∗1) Only available with ∗4) Not available with SH material.
A Sub-atmospheric AK1402T. Pressure gauge unit ∗3)
2P 3P
Code Unit
t t r Gauge port No code psig/bar
(Extra bottom outlete, Inletr, Outlett) MPA MPa
w q w q Pressure gauge ∗2) ∗3) Pressure gauge unit MPa or psig/bar
Code
psig/bar unit MPa unit selectable. However under Japanese
No code No gauge port regulation, only MPa is available in Japan.
e 4PL e 5PC 0 No pressure gauge (Connections: 1/4 inch NPT)
Sample Order Number
V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Port q w e r t
qIN wOUT eExtra bottom port (Outlet) 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa AK1410TS 2P 6 6
rGauge port (Inlet) tGauge port (Outlet) 2 0 to 200 psig 0 to 1.5 MPa 3P 6 6 1 MPA
10 0 to 1000 psig 0 to 7 MPa 4PL 6 6 0 1 MPA
40 0 to 4000 psig 0 to 28 MPa 5PC 6 6 0 40 1 MPA
∗2) Other range available. Refer to gauge guide (P.94,95).
Specifications
Operating Parameters AK1402TA AK1402T AK1406T AK1410T AK1415T
100 mm Hg absolute to 30 psig 1 to 30 psig 1 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa)
Delivery pressure
(-88 kPa to 0.2 MPa) (0.007 to 0.2 MPa) (0.007 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) ∗1)
Gas Select compatible materials of construction for the gas
Vacuum to 300 psig
Source pressure Vacuum to 2300 psig (15.9 MPa)
(2.1 MPa)
Proof pressure (Inlet) 4000 psig (27.6 MPa)
Burst pressure 8000 psig (55.2 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing) ∗2)
Cv 0.45
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 0.65 in3 (10.6 cm3)
Mass 2.04 kg ∗3)
∗1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure
effect. When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa).
∗2) -10 to 90 °C for Vespel® seat.
∗3) Mass, including individual boxed weight, may vary depending on connections or options.
50
 Single Stage Regulator for General Applications
Intermediate flow (Tied-diaphragm) Series AK1400T

Option

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

High inlet pressure
Changes from the standard type are:
Option Other Parameters AK1410T AK1415T
Source pressure Vacuum to 3000 psig (20.7 MPa)
HR Proof pressure (Inlet) 4500 psig (31 MPa)
Burst pressure 9000 psig (62 MPa)

Wetted Parts Material Flow Characteristics

Inlet pressure: 2000 psig (13.8 MPa) 600 psig (4.1 MPa)
Wetted Parts B S SH 200 psig (1.4 MPa)
Body Brass 316 SS AK1400T 1/2 inch Connection ∗)
Poppet Hastelloy ® C-22 80 0.55
Diaphragm Hastelloy ® C-22
Nozzle 316 SS Hastelloy ® C-22 70 0.48
Seat PCTFE (Option: Vespel®) PCTFE

Delivery pressure (MPa)

Delivery pressure (psig)
60 0.41

Dimensions inch (mm) 50 0.34

AK1400T 40 0.28

30 0.21
ø2.12 (ø53.8) 20 0.14

10 0.07
Max. 6.0 (152.4) (When selecting option code P or BP)

0 0.00
0 100 200 300 400 500 600 700 800
Flow rate (slpm, N2)

Inlet pressure: 80 psig (0.55 MPa) 60 psig (0.41 MPa)

Max. 5.6 (142.2)

AK1400T 1/2 inch Connection ∗)

ø1.50 (ø38.1)
50 0.34

Check Valves
ø2.62 (ø66.5) 40 0.28

Delivery pressure (MPa)

Delivery pressure (psig)

30 0.21
(17.5)
0.69

20 0.14

Vacuum Generators
ø2.50 (ø63.5)
10 0.07

0.88 (22.4) 0 0.00

0 40 80 120 160 200
2 x 10-32 UNF depth 0.25 (6.3) Flow Rate (slpm, N2)
(Mounting hole)
AK1400TA
Flow Switches

Inlet pressure: 0 psig (14 kPa)

760 0
700 -8
Delivery pressure (mm Hg abs)

600 -21
Delivery pressure (kPa)

500 -35
Glossary of Terms
Technical Data/

400 -48

300 -61

200 -75

100 -88
Precautions

0 -101
0 1 2 3 4 5 6 7 8 9 10
Flow rate (slpm, N2)
Hastelloy® is a registered trademark of Haynes International.
Vespel® is a registered trademark of DuPont. ∗) If connection size differs, flow characteristics also differ.
51
 Single Stage Regulator for General Applications High flow

Series AK1300
¡Flow capacity to 1000 slpm
¡Body material: Stainless steel and Brass available
¡Inlet pressure: Max. 300 psig (2.1 MPa)

How to Order
Port Number
q w e r

AK13 02 S 4PL 8 8 0 0
Delivery pressure Bonnet option
Code Delivery pressure Code Bonnet
Connections
02 1 to 30 psig (0.007 to 0.2 MPa) No code Standard
06 2 to 60 psig (0.014 to 0.4 MPa) (Inletq, Outletw)
Code Connections P Panel installation∗4)
10 2 to 100 psig (0.014 to 0.7 MPa) Bonnet port
15 5 to 150 psig (0.034 to 1.0 MPa) 4 NPT 1/4 inch BP
(NPT 1/8 inch)
6 NPT 3/8 inch
Material 8 NPT 1/2 inch ∗4) Panel mounting hole: dia.
Code Body Poppet Diaphragm 4T 1/4 inch compression 1.56 inch (39.6 mm).
B Brass 6T 3/8 inch compression
316 SS Hastelloy ® C-22 8T 1/2 inch compression Seat material
S 316 SS
Code Material
Ports No code PCTFE (Standard)
Material Gauge port (Outlete, r) TF PTFE ∗3)
Code Ports Pressure gauge ∗1) ∗3) PTFE seats reduce seat abrasion
B S, SH Code
2P  psig/bar unit MPa unit for flow cycle application. Gas
Refer to the following No code No gauge port permeation is greater with PTFE
3P 
porting configurations. No pressure gauge than PCTFE.
4PL   0
(Connections: 1/4 inch NPT)
V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Pressure gauge unit ∗2)
Porting Configuration Code Unit
1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa
r r 2 0 to 200 psig 0 to 1.5 MPa No code psig/bar
MPA MPa
∗1) Other range available. Refer to
w q w q w q gauge guide (P.94,95). ∗2) Pressure gauge unit MPa or psig/bar
selectable. However under Japanese
Sample Order Number regulation, only MPa is available in
2P 3P e 4PL Port q w e r Japan.
AK1302S 2P 6 6
3P 6 6 V3 MPA
qIN wOUT erGauge port (Outlet) 4PL 6 6 0 V3 MPA
Specifications

Operating Parameters AK1302 AK1306 AK1310 AK1315

1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig
Delivery pressure
(0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa)
Gas Select compatible materials of construction for the gas
Source pressure Vacuum to 300 psig (2.1 MPa)
Proof pressure (Inlet) 450 psig (3.1 MPa)
Burst pressure 1200 psig (8.3 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing)
Cv 1.1
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 4.6 psig (0.031 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 0.65 in3 (10.6 cm3)
Mass 2.0 kg ∗
∗ Mass, including individual boxed weight, may vary depending on connections or options.

Wetted Parts Material

Wetted Parts B S
Body Brass 316 SS
Poppet 316 SS
Diaphragm Hastelloy ® C-22
Seat PCTFE (Option: PTFE)
52
 Single Stage Regulator for General Applications
High flow Series AK1300

Dimensions inch (mm)

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

AK1300
ø2.12 (ø53.8)

Max. 6.0 (152.4) (When selecting option code P or BP)

Max. 5.6 (142.2)
ø1.5 (ø38.1)

ø2.62 (ø66.5)

(17.5)
0.69
ø2.50 (ø63.5)

0.88 (22.4)

2 x 10-32 UNF depth 0.25 (6.3)

(Mounting hole)

Check Valves
Flow Characteristics
Inlet pressure: 150 psig (1.0 MPa) 100 psig (0.69 MPa) Inlet pressure: 75 psig (0.52 MPa) 50 psig (0.34 MPa)
AK1300 AK1300

Vacuum Generators
75 psig (0.52 MPa) 25 psig (0.17 MPa)
140 0.97 40 0.28

120 0.83 35 0.24

Delivery pressure (MPa)

Delivery pressure (MPa)

Delivery pressure (psig)

Delivery pressure (psig)

30 0.21
100 0.69
25 0.17
80 0.55
Flow Switches

20 0.14
60 0.41
15 0.10
40 0.28
10 0.07
20 0.14 5 0.03
0 0.00 0 0.00
Glossary of Terms
Technical Data/

0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700
Flow rate (slpm, N2) Flow rate (slpm, N2)
Precautions

Hastelloy ® is a registered trademark of Haynes International.

53
 High flow
Single Stage Regulator for General Applications (Tied-diaphragm)

Series AK1200
¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) ¡Hastelloy internals
HR (option): Max. 3000 psig (20.7 MPa) available for corrosion
¡Flow capacity Standard: to 800 slpm resistance
HF (option): to 1000 slpm ¡Tied-diaphragm design
FC (Option): to 1500 slpm
¡Body material: Stainless steel and Brass available

How to Order
Port Number
q w e r t

AK12 02 S 4PL 8 8 0 0
Delivery pressure
Code Delivery pressure Bonnet option
02 1 to 30 psig (0.007 to 0.2 MPa) Connections Code Bonnet
06 2 to 60 psig (0.014 to 0.4 MPa) (Inletq, Outletw) No code Standard
10 2 to 100 psig (0.014 to 0.7 MPa) Code Connections P Panel installation ∗6)
15 5 to 150 psig (0.034 to 1.0 MPa) 4 NPT 1/4 inch BP Bonnet port (NPT 1/8 inch)
25 Preset to 250 psig (1.7 MPa) 6 NPT 3/8 inch
Material ∗6) Panel mounting hole: dia.
8 NPT 1/2 inch 1.56 inch (39.6 mm).
Code Body Poppet Diaphragm 4T 1/4 inch compression
B Brass Option
316 SS 6T 3/8 inch compression Code Specification
S Hastelloy ® C-22 8T 1/2 inch compression
316 SS No code Standard (Cv: 0.65)
SH Hastelloy ® C-22
Ports Gauge port HF High flow (Cv: 1.1)
FC Force compensation(Cv: 0.65) ∗4) ∗5)
Code Ports
Material (Extra bottom outlete, Inletr, Outlett)
High inlet pressure
B S, SH Pressure gauge ∗1)
Code HR (Max. inlet pressure
2P  psig/bar unit MPa unit 3000 psig (20.7 MPa)) ∗4)
3P Refer to the following  No code No gauge port
4PL porting configurations.   No pressure gauge ∗4) FC option is not available with
5PC   0 AK1202, AK1206 and AK1225.
(Connections: 1/4 inch NPT)
∗5) FC option is available with 1/2 inch
Porting Configuration V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa
NPT or 1/2 inch compression.
1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa
t t 2 0 to 200 psig 0 to 1.5 MPa Seat material
Code Material
10 0 to 1000 psig 0 to 7 MPa
w q w q w q No code PCTFE (Standard)
40 0 to 4000 psig 0 to 28 MPa
VS Vespel® ∗3)
∗1) Other range available. Refer to
∗3 ) Not available with SH material.
gauge guide (P.94,95).
2P 3P e 4PL Pressure gauge unit ∗2)
t r Sample Order Number Code Unit
qIN
Port q w e r r No code psig/bar
w q wOUT AK1202S 2P 8 8 MPA MPa
eExtra bottom port (Outlet) 3P 8 8 V3 MPA
4PL 8 8 0 V3 MPA ∗2) Pressure gauge unit MPa or
rGauge port (Inlet) psig/bar selectable. However
e 5PC tGauge port (Outlet) 5PC 8 8 0 40 V3 MPA
under Japanese regulation, only
MPa is available in Japan.
Specifications
Operating Parameters AK1202 AK1206 AK1210 AK1215 AK1225
1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig
Delivery pressure
(0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) ∗1) (1.7 MPa) ∗2)
Gas Select compatible materials of construction for the gas
Source pressure Vacuum to 1700 psig (11.7 MPa)
Proof pressure (Inlet) 2550 psig (17.6 MPa)
Burst pressure 9000 psig (62 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing) ∗3)
Cv 0.65
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 0.65 in3 (10.6 cm3)
Mass 2.0 kg ∗4)
∗1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When
the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)).
∗2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC.
∗3) -10 to 90 °C for Vespel® seat. Optional ambient and operating temperature range available. Please contact SMC.
∗4) Mass, including individual boxed weight, may vary depending on connections or options.

Hastelloy® is a registered trademark of Haynes International. Vespel® is a registered trademark of DuPont.

54
 Single Stage Regulator for General Applications
High flow (Tied-diaphragm) Series AK1200

Options Dimensions inch (mm)

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

1.High flow Higher flow capacity with internal changes only, no change in external AK1200
dimensions. Changes from the standard type are: ø2.12 (ø53.8)
Option Other Parameters AK1202 AK1206 AK1210 AK1215 AK1225
Cv 1.1

Max. 6.0 (152.4) (When selecting option code P or HR)

HF

Max. 6.5 (165.1) (When selecting option code FC)

Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
2. Force compensation Force compensation feature added to HF option and has
higher flow capacity than HF option. Changes from the

Max. 5.6 (142.2)

standard type are:
Option Other Parameters AK1210 AK1215 ø1.50 (ø38.1)
Source pressure Vacuum to 300 psig (2.1 MPa)
Cv 0.65
FC
Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop ø2.62
Connections NPT 1/2 inch, 1/2 inch compression (ø66.5)
3. High inlet pressure Changes from the standard type are:
Option Other Parameters AK1210 AK1215

(17.5)
0.69
Source pressure Vacuum to 3000 psig (20.7 MPa)
HR Proof pressure (Inlet) 4500 psig (31 MPa)
Burst pressure 9000 psig (62 MPa) ø2.50 (ø63.5)

0.88 (22.4)
Wetted Parts Material
2 x 10-32 UNF depth 0.25 (6.3)
Wetted Parts B S SH (Mounting hole)
Body Brass 316 SS
Poppet 316 SS Hastelloy® C-22
Diaphragm Hastelloy® C-22
Seat PCTFE (Option: Vespel®) PCTFE

Flow Characteristics
Inlet pressure: 1700 psig (11.7 MPa) 500 to 1000 psig (3.4 to 6.9 MPa) Inlet pressure: 80 psig (0.55 MPa) 60 psig (0.41 MPa)
AK1200 1/2 inch connections ∗) AK1200 1/2 inch connections ∗)
90 0.62 50 0.34
45 0.31

Check Valves
80 0.55
40 0.28
Delivery pressure (MPa)

Delivery pressure (MPa)

Delivery pressure (psig)

Delivery pressure (psig)

35 0.24
70 0.48
30 0.21
60 0.41 25 0.17
20 0.14

Vacuum Generators
50 0.34
15 0.10
10 0.07
40 0.28
5 0.03
30 0.21 0 0.00
0 100 200 300 400 500 600 700 800 900 1000 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700
Flow rate (slpm, N2) Flow rate (slpm, N2)
Inlet pressure: 150 psig (1.0 MPa) 100 psig (0.69 MPa) Inlet pressure: 150 psig (1.0 MPa)
Flow Switches

AK1200HF 50 psig (0.34 MPa) AK1200FC 3/4 inch connections ∗)

100 0.69 75 0.52
90 0.62
80 0.55 60 0.41
Delivery pressure (MPa)

Delivery pressure (MPa)

Delivery pressure (psig)

Delivery pressure (psig)

70 0.48
Glossary of Terms
Technical Data/

60 0.41 45 0.31
50 0.34
40 0.28 30 0.21
30 0.21
20 0.14 15 0.10
Precautions

10 0.07
0 0.00 0 0.00
0 200 400 600 800 1000 0 400 800 1200 1600 2000
Flow rate (slpm, N2) Flow rate (slpm, N2)
∗) If connection size differs, flow characteristics also differ.
55
 High flow
Single Stage Regulator for General Applications (Tied-diaphragm)

Series AK9200
¡3/4 inch port size
¡Inlet pressure : Max. 300 psig (2.1 MPa)
¡Flow capacity: to 2000 slpm
¡Body material: 316 SS

How to Order
Port Number
q w e r

AK92 02 S 4PL1212 0 0
Delivery pressure
Code Delivery pressure Bonnet option
02 1 to 30 psig (0.007 to 0.2 MPa) Code Bonnet
06 2 to 60 psig (0.014 to 0.4 MPa) No code Standard
10 2 to 100 psig (0.014 to 0.7 MPa) P Panel installation ∗3)
15 5 to 150 psig (0.034 to 1.0 MPa) BP Bonnet port (NPT 1/8 inch)
∗3) Panel mounting hole: dia.39.6 mm.
Material
Code Body Poppet Diaphragm Pressure gauge unit ∗2)
S 316 SS 316 SS Hastelloy ® C-22 Code Unit
No code psig/bar
MPA MPa
Ports
Code Ports ∗2) Pressure gauge unit MPa or psig/bar
4PL 4 ports selectable. However under Japanese
regulation, only MPa is available in
Japan.
Connections (Inletq, Outletw)
Code Connections Gauge port (Outlete, r)
Porting Configuration 12 NPT 3/4 inch Pressure gauge ∗1)
r Code
psig/bar unit MPa unit
No pressure gauge
w q 0
(Connections: 1/4 inch NPT)
V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa
1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa
e 4PL 2 0 to 200 psig 0 to 1.5 MPa
TOP VIEW ∗1) Other range available. Refer to gauge guide
qIN wOUT erGauge port (Outlet) (P.94, 95).

Specifications

Operating Parameters AK9202 AK9206 AK9210 Ak9215

1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig
Delivery pressure
(0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa)
Gas Select compatible materials of construction for the gas
Source pressure Vacuum to 300 psig (2.1 MPa)
Proof pressure (Inlet) 450 psig (3.1 MPa)
Burst pressure 1500 psig (10.3 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing)
Cv 1.6
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT 3/4 inch
Supply pressure effect 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Bottom mount (Option: panel mount)
Internal volume 2.2 in3 (36 cm3)

Wetted Parts Material

Wetted Parts S
Body 316 SS
Nozzle 316 SS
Poppet 316 SS
Diaphragm Hastelloy® C-22
Seat PFA

56
 Single Stage Regulator for General Applications
High flow (Tied-diaphragm) Series AK9200

Dimensions inch (mm)

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

AK9200

Max. 6.9 (175.3) (P & BP Option)

Max. 6.4 (162.6)
ø1.5 (ø38.1)

ø2.62 (ø66.5)

(28.6)
1.125
ø2.99 (75.9)

Flow Characteristics

Check Valves
AK9200 Inlet pressure: 150 psig (1.0 MPa) 100 psig (0.69 MPa)
120

100 0.69
Delivery pressure (MPa)
Delivery pressure (psig)

Vacuum Generators
80 0.55

60 0.41

40 0.28

20 0.14
Flow Switches

0 0.00
0 500 1000 1500 2000 2500
Flow rate (slpm, N2)
Glossary of Terms
Technical Data/
Precautions

Hastelloy® is a registered trademark of Haynes International.

57
 Low flow
Two Stage Regulator for General Applications (Tied-diaphragm)

Series AK1700
¡High inlet pressure type: Max. 3500 psig (24.1 MPa)
¡Flow capacity Standard: to 30 slpm
¡Body material: Stainless steel and Brass available
¡Hastelloy internals available for corrosion resistance
¡Minimizes supply pressure effect by two stage regulation
¡Tied-diaphragm design

How to Order
Port Number
q w e r t

AK17 02 S 5PC 4 4 0 0 0
Delivery pressure
Code Delivery pressure Bonnet option
02 1 to 30 psig (0.007 to 0.2 MPa) Code Bonnet
06 2 to 60 psig (0.014 to 0.4 MPa) Connections No code Standard
10 2 to 100 psig (0.014 to 0.7 MPa) (Inletq, Outletw) P Panel installation ∗4)
20 5 to 200 psig (0.034 to 1.4 MPa) Code Connections ∗4) Panel mounting hole:
4 NPT 1/4 inch dia. 1.42 inch (36.1 mm).
Material 4T 1/4 inch compression
Code Body Poppet Diaphragm Poppet feature option
B Brass Code Feature
316 SS 316 SS Standard
S No code
316 SS (First and second stage tied diaphragm)
SH Hastelloy ® C-22 Hastelloy ® C-22 Gauge port
(Extra bottom outlete, Inletr, Outlett) First stage tied,
NT
Porting configuration Pressure gauge ∗1)
second stage free poppet
Code
psig/bar unit MPa unit
t r No code No gauge port
Seat material
Code Material
q No pressure gauge
w 0 No code PCTFE (Standard)
qIN wOUT (Connections: 1/4 inch NPT)
VS Vespel® ∗3)
eExtra bottom port (Outlet) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa
PK PEEK
1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa
rGauge port (Inlet) e 5PC 2 0 to 200 psig 0 to 1.5 MPa ∗3) Not available with SH material.
tGauge port (Outlet) 10 0 to 1000 psig 0 to 7 MPa
40 0 to 4000 psig 0 to 28 MPa Pressure gauge unit ∗2)
Code Unit
∗1) Other range available. Refer
No code psig/bar
to gauge guide (P.94,95).
MPA MPa
∗2) Pressure gauge unit MPa or psig/bar selectable.
However under Japanese regulation, only MPa is
available in Japan.

Specifications

Operating Parameters AK1702 AK1706 AK1710 AK1720

1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 200 psig
Delivery pressure
(0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.4 MPa)
Gas Select compatible materials of construction for the gas
Source pressure Vacuum to 3500 psig (24.1 MPa)
First stage pressure 175 psig (1.2 MPa)
Proof pressure (Inlet) 4500 psig (30.7 MPa)
Burst pressure 8000 psig (55.2 MPa)
Ambient and operating temperature -40 to 71 °C (No freezing) ∗1)
Cv 0.05
Leak rate 1 x 10-10 Pa·m3/sec
Connections NPT female, Compression
Supply pressure effect 0.05 psig (0.00035 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop
Installation Option: panel mount
Internal volume 0.9 in3 (15 cm3)
Mass 1.95 kg ∗2)
∗1) -10 to 90 °C for Vespel and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC.
®

∗2) Mass, including individual boxed weight, may vary depending on connections or options.

58
 Two Stage Regulator for General Applications
Low flow (Tied-diaphragm) Series AK1700

Wetted Parts Material

Diaphragm Valves BP KT AK AZ SL AP Regulators Recommendations

Wetted Parts B S SH
Body Brass 316 SS
Poppet 316 SS Hastelloy ® C-22
Diaphragm 316 SS Hastelloy ® C-22
Seat PCTFE (Option: Vespel®, PEEK) PCTFE (Option: PEEK)

Dimensions inch (mm)

AK1700
ø2.12 (ø53.8)

Max. 7.5 (190.5) (When selecting option code P)

ø1.5 (ø38.1)

Max. 6.9 (175.3)

ø2.25 (ø57.2)
2.40 (61.0)

Check Valves
Vacuum Generators
Flow Characteristics
AK1700 Inlet pressure: 200 to 3000 psig (1.4 to 20.7 MPa)
100 0.69
90 0.62
Flow Switches

80 0.55
Delivery pressure (MPa)
Delivery pressure (psig)

70 0.48
60 0.41
50 0.34
40 0.28
Glossary of Terms
Technical Data/

30 0.21
20 0.14
10 0.07
0 0.00
0 50 100 150 200
Flow rate (slpm, N2)
Precautions

Hastelloy ® is a registered trademark of Haynes International.

Vespel® is a registered trademark of DuPont.
59