2010i|202

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Adwanlags Hinialisugalin

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McRoELECcTeONIC3 MicesSTEM
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Nultdinliany
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MINIATU RiKAiON
uylo Ipl de Cn
* euyenancy dinLianuly man
unud y saling laua

uvetlecktenues untugralens
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adualers luith e-hai.

1.MoNOAITHIC TNisGRAtTioN - Sing wWatn hrel

Ca: acclartemetin
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PARALLEL EABRiCATLON
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3. YHoTDAIHORnPY
4.NVERTE D PAPmMD CAVITY
5. WAfER HoLE
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buna utancs Kgnda

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PCVD PECVD AHics

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PHoToLIL0GRAPHY
Muglh vueibn yalliwn
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T T mar
Pe PMMA
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Se mae

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SHO Si0 +2H (400-20)e

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Physical Vapeut dipeulin
udlasutThuslw loA en dullrat
mulal vapetutCauuun ghs-ArkoN.

kTHING
hhyaical-duy-high insy4 qulashna
chimicalwet -_M A ahimical ssetaeMt

McRoMACHINI NC 1ecHNIQUES
ilhasyrapk
Lyasanapnng

RPMMA dusken
7unbahen XLAY
lej PiÁA
Elshd- Khsisldrs

3. BvLK_MiceonNACHININ
y muchani.calL eAtandinq sualure
alnid_r, Glas,yaAs itt