aR IE kh Se ne eee ae Modular design. Powerful software. Low detection limit. VACUUMVersatility New generation of software Open programming interface ‘The combination of high sensitivity, maximum stability and inteligent operation make the PrismaPro the perfect solution for mass spectrometry, Its modular design offers you a variety of application ‘options in industrial and analytical environments, in research & development, in semiconductor production and in coating technology. ‘The PrismaPro is the ideal solution for applications ranging from quality assurance, leak detection and residual gas analysis right through to complex, quantitative tasks. ‘The newly developed PV MassSpec software is a further plus. In addition to being especially easy to operate, it also serves as an easy-to-read platform for transferring all measured data Alternatively to the PV MassSpec, the JSON programming interface of the PrismaPro can also be accessed directly. ‘ogether with a wide selection of interfaces, such as digital and analog inputs and outputs or Ethernet, integration into your system is easily achieved. Alternatively, we can offer you a ready-made application to connect the mass spectrometer to your PLC (see page 11). ‘Our product and service professionals around the world stand ready to provide you with application assistance on the implementation of the PrismaPro. Many decades of customer and application-specific experiences make Pfeiffer Vacuum, your ideal partner, Coating Industrial applications, e.g. freeze dryingCustomer values srr cu Optimum adaptability due to modular design High performance in spite of compact size ‘Avariety of interfaces make for simple systems integration Networkable through Ethernet High measurement speed, stability and high resolution Flexible operation thanks to interchangeable analyzers and electronics ‘Two filaments mean maximum up-time Lowest detectable partial pressure 3-10" hPa (mbar) Easy total pressure measurement due to directly connectable gauges Saving of time through intuitive operation Of the PV MassSpec software World-class support and worldwide ‘on-site service Easy integration thanks to disclosed JSON programming interfacePrismaPro® CM CO ee MLC RM eco The PV MassSpec software has been specifically developed for the PrismaPro and offers an easy-to-read, user-friendly platform for capturing and visualizing measured data and parameter records. Complete measurement procedures can be programmed. screen PV MassSpec measurement routine User-friendly, intuitive operation ‘Automated measurement routines via included sequencer Leak detection and vacuum diagnosis with just one click Automatic calibration and tuning ‘Simple definition of measurement recipes Mass spectrometer data can be linked with external signals.aRUE Lak hea Oued iased ionization chamber Id-axis technology Biasing the ionization chamber results in an extremely low background signal, The electron-emitting filament is positively biased relative to ground, This design prevents desorption of {gas particles from the chamber walls, and thus the generation of an undesired background signals by electron stimulated desorption, Filament lonization + 7svoc + 150V0c One of the most important factors in the performance of ‘a mass spectrometer is the transmission of the ions from the ion source into the mass filter, With the aid of field-axis. technology, the ions are able to cross the peripheral fields of the separating system without any noteworthy interaction. his enables a high level of sensitvity {A/hPa) to be achieved without the need for pre and post filters. Mase fer lons TU lonization pe 1s0ev eneray | _{ + 150V +140PrismaPro® Du ary ‘Mc 250 F 0° (Faraday) . 261.4 re ‘open ion source 1a _ ‘008 ven) vacuum ‘Mc 250 F 90° 2609 (Faraday) ‘open ion source 142 J 300 Make sure that the flange or tube has an inner diameter of = 37 mm, better = 38 mm,‘amc 250 M 0° {C-SEM/Faraday) fr 405 open lon souree = os te L ereineen) vacuum msegmmo a ‘Mme 250 M 90° aa ns. (C-SEM/Faraday) 1699 open on source = Preise) vacuum a 8 er aStandard, Extended Number Specification Resolution Application examples. 2 reurren) vacuunt e 8 o-10V 10-410 16 bit iebit + Measured values, Collecting external data 8g. ion currents values, e.g. pressure, + Ratios temperature, gas flow (concentrations) + Date transfer to higher-level systems 10 Vou = 24 + Free assignment of switehpoints + Valve actuation Standard 1/0 connection (D-Sub 15:pin connector): 1 Analog input 2 Digital inputs 1 Relay Ethernet Power supply: External power supply SP 260 100-240 V AC; 50/60 Hz Extended 1/0 connection (D-Sub 62-pin connector): 8 Analog outputs 8 Analog inputs 10 Digital outputs 5 Digital inputs Connections total pressure transmitter ActiveLine or DigiLine with Analog Relay option (AR} e.g. to protect the mass spectrometer against an accidental increase of pressure 5 fn = 24 Starting oF stopping tasks by external sighalTechnical data fprsmaProOMG.250F1 [QMG 2502 [OMG 2503 [aMG 2501 [aMG 250 Mz [AMG 250 ME Detector Faraday (F) (C-SEMIFaraday (Mi) Mass range 1-100 u 1-200 1-300 1-100 4 1-200 1-200 4 Rod systom, diameterflongth 6 mm / 125 mm Min, detection limit, Faraday"? 410 mPa 5:10" hPa 7-10 hPa Min, detection limit, C-SEM* 5 5 5 310% hPa 4-10" hPa 5-10" hPa ‘Ar sensitivity, Faraday” S104 AInPs 4:10 ANP 3-10*AHPa 5:10“ AIRPa 4-104 A/MPa 3:10 AIPa Max. operating pressure, Faraday operation 5-10 hPa Max. operating pressure, C-SEM operation ~ - - 5-10*hPa 510% hPa 5:10 hPa Contribution to adjacent mass (40/41) << 10 ppm <20ppm_——< BO ppm_ —< 10 ppm —< 20ppm_ ——-< BD ppm. Operating temperature, analyzer 200 °C (max. 150 °C when operating with SEM) Operating temperature, electronics 5-50°C Bakeout temperature, analyzer 300 °C (electronics removes) Connection flange DN 40 cRF Resolution at 10 % peak height 05-254 Divell ime Tims = 16 su Reproducibility of peak ratio 205% Interface Etnernet Supply voltage 100-240 V AC, 60/60 Hz Weight 25k9 a2k9 ? ony for open fn source and 0° connection P ata dol ume ot 4s © Considerably higher zensiity by operation with C-SEM(Order matrix PrismaPro* Faraday" only for leak detection and high-vacuum residual gas analysis C-SEMFaraday; C-SEM = Continuous Secondary Electron Multiplier for fast, sensitive UHV residual gas analysi,analytical apnlications and leak detection 1-100 w 1-204 12000 Open ion source ‘or high-vacuum residual gas analysis; high sensitivity and good linearity Crossheam ion source fer direct gas bear inlet, without interaction with the walls of the ion source, electron energy adjustable from 15 to 102 eV Grid ion source” {or UHV residual gas analysis; minimum outgassing and desorption rate “Tungsten; {or UHV applica Yetvated iridium: low filament temperatures, high resistance to air inrushes 20 (right-angied) Standard Extended {or control and signal interchange via analog and digital inputs/outputs and connection toa total prossure gauge fon sources with tungsten filament only Order number PTM1Accessories for external total pressure Seecrarrente ‘Actveline, PKR 360, 1-107 - 1,000 hPa aaa ‘etveline, PKR 361, 1-10 1,000 hPa PT To3 350010 ‘ActveLine, PBR 260, 5:10" — 1,000 hPs PT R27 000 ‘ActveLine, TPR 280, 5-10 — 1,000 hPa PT R26 950 Connection cable, ActiveLine gauge-OMG 250, 0.6 m Pr aaa 249-7 Digibine, PPT 200 AR, 1-10 ~ 1,000 hPa PTR3S 131 Digibine, HPT 200 AR, 5:10"? - 1,000 hPa PT R39 351 : Digibine, MPT 200 AR, 5:10 - 1,000 hPa PT RAO 251 ‘Can be used ony n coniunction Connection gable, DigiLine gauge-OMG 220, 3 m PT 348 250-17 with extended 0 connection Aceessris for connecting and testing the V/Os Testbox for Standard UO-Interface (15-pin Sub-D) PT 160 203 Connection cable, 1-pin Sub-D, femele/male, length: 2 m PM o71711-X Gender changer, 16-pin Sub-D (male) PT 160 309 Interface module, 15-pin PT 160310, Testbaox for Extended /0-Interface (62-pin Sub-D) PT 160 308 Connection cable, 62-pin Sub-D, male/male, length: 1.52 m PT 160 205 ‘Gonder changer, 62-pin Sub-D HD (female) PT 160 306 Interface module, 62-pin PT 160 307 Banana plugs for testbox, 4 mm, 2.5 mm® PT 160 308 Simulator for ActiveLine gauges, adjustable PT'583 066-7 Interface module, 15-pin Testbox for Standard Interface module, 62-pin Testbox for Extended WO-Interface (18-pin Sub-D) VO-Interface (62-pin Sub-D) os ‘Chamber for PriemaPro with 90° angle, DN 40 CF K-PV.D0001. ‘Alkmetal gas dosing valve, manual, DN 40 CF. gas inlet VCR 1/4 “420VEDO40-VER MPP-License only PT 160 302 Box-PC IPCI27E + MPP-Licence PT 160.301 Box-PC IPC227E + MPP-License PT 160 300 further accessories on request Avia <«<— —@ MPP: Application for communication between mass spectrometer PrismaPro and PC/PLCPfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site se VACUUM