AnalyticalResolution

Analytical Resolutionversus
versusDetection
Detection Limit
Limit

AFM

Imaging
TEM FE-SEM SEM Only
100 %
Bulk 1E22
Only
10 %
FE-AES EDS Raman FTIR 1E21
1%
µESCA XRF RBS 1E20
.1%
AES XPS/ESCA 1E19
100 ppm
Detection Range

Ph
ys GC/MS 1E18

Atoms/cc
Ph i
10 ppm ys cal
Ph i c al Limi TOF-SIMS 1E17
ys tf
1 ppm ica Limi or TXRF
tf
lL
im or 3 Å 1E16
100 ppb it 30 Sa
for Å m
30 Sa plin 1E15
0 mp g
10 ppb Å D
Sa ling epth 1E14
mp De Dynamic SIMS
1 ppb Chemical bonding/ lin pt GDMS
molecular information g h
Elemental information De 1E13
pt
100 ppt Imaging information h
1E12
© 2002 CHARLES EVANS & ASSOCIATES
10 ppt
1Å 10 Å 100 Å 1000 Å 1 µm 10 µm 100 µm 1 mm 1 cm
Analytical Spot Size

CHARLES EVANS & ASSOCIATES • EVANS PHI • EVANS EAST • EVANS NORTHEAST • EVANS TEXAS • EVANS TAIWAN
WWW.EAGLABS.COM
 Typical Analysis Depths for Techniques

FTIR, EDS,
XRF, Raman,
Physical
AFM TOF-SIMS AES, XPS TXRF SurfaceSIMS RBS Conventional
Monolayer
SIMS
30 Å Top Surface/Native Oxide
100 Å Near Surface
100 - 1,000 Å
Thin Film

1,000 - 10,000 Å
Coating

Bulk

CHARLES EVANS & ASSOCIATES • EVANS PHI • EVANS EAST • EVANS NORTHEAST • EVANS TEXAS • EVANS TAIWAN
WWW.EAGLABS.COM