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SAND2019-12493C
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f.... TAdheinEleidc,ttrclhtehm
enmiclail,S?tcihety
•
••••••••••••••--•••
InAs * GaSb
•6 10'
• Indirect Gap(Hudgins)
Direct Gap (Hudgins) I --- Original(Sze & Gibbons)
- Original(Sze & Gibbons) id
103 * InSb
le 10' le
10-t 10' 1011 101
Bandgap Energy(eV) Eandgeg Energy(eV)
103
WWI
1 Critical Electric Field and Device Performance
The critical field is defined as the IEI
Gauss' Law: Voltage:
maximum electric field that leads EEcrit = NDWD VBD = WDEcrit/2
to avalanche breakdown in a 1D
analytical model Voltage:
,s2
crit
r _iectric Dielei_ _ VBD = 2qATD
ioating guard-ri
edge terminati
6Floating guard-rir,,_
dge termination
(1
Electric Field
n- GaN Drift region
epitaxial layer
3-7I
= EPnEcrEt
I UFOM: 17"
4
Ron,sp
2D Electron Gas
Unipolar Figure of Merit(UFOM)
---------- -
Electric Field
channel • Ecrit is obtained from VBD
• —on,sp
R is extracted from forward-
current slope
• Carrier mobility is often taken from
literature 0ENEEdir AMS41
6 Procedure for Renormalization of Ecrit values
1 • UFOM assumes a given doping and field profile
• Valid comparison of critical electric field between devices requires two
major kinds of corrections:
• Doping:
➢ Critical electric field is doping-dependent
➢ Devices of different doping levels must be compared to an equivalent doping level
• Structure
➢ Electric fields in non-punch-through (NPT) and punch-through (PT) style devices are not directly comparable
➢ To equate, PT devices are transformed into an "equivalent" NPT device (integrated E-field curve is
constant)
Critical Electric Field for Breakdown (V/cm)
107
Non-punch-through Punch-through
n- n+ n-
1E1 Ecrit,NPT
1E1 Ecrit,PT
Ecrit,NPT - corrected
10'
q ND
slope= —
E
Si
10' X
10" 10,4 10,4 1016 10" WNPT L"PT
Doping Concentration (cm 3) WNPT- extra polated
• B.J. Baliga, Fundamentals of Power Semiconductor Devices, 2nd Ed. (2018) OMER& Amsa
7
1 Correction for Doping
1
1
° 1 °
a(E)dE cr(E)dE
ND1f
Ecriti ND2 Ecrit2
Ecrit1 (ND1
Ecrit2 ND2
• B.J. Baliga, Fundamentals of Power Semiconductor Devices, 2nd Ed. (2018) 0ENERGY WWI
1 Correction for NPT & PT Device Structure
Pu nch-th rough
I
•
p+ n- n+
IEI Ecrit,PT
Ecrit,NPT - corrected
•
•
•
•
•
•
Mk_
14n7 x
I("PT
WATT- extrapolated
(.I
- ND 2
VBD,PT = Ecrit,PTWPT
2E WPT
qND
E(x) = Ecrit,PT E xix WPT
Equating the impact ionization integrals for different electric field profiles:
fXNPT oXPT q ND
f Ecrit PT E vv PT
cr(x)dx = a(E)dE = a(E)dE
o ECrtit,NPT
[1 (1
Ecrit,NPT — (IND,PT WPT
Ecrit,PT E Ecrit,PT
NffS41
9
I Combined Corrections
• Using this equation gives us the ability to equate Ecrit for devices with
different doping and field profileF
Reference: DRIFT- ND WPT VBD Ecrit,PT- Ecrit,NPT WNPT - -
Ecrit,NPT
LAYER (CM-3) (-11-n) (V) measured corrected extrapolated normalized to
MATERIAL (MV/cm) (MV/cm) (Pm) ND=loi6 cm-3
(MV/cm)
Armstrong et al. GaN 3x1015 30 3930 2.09 2.09 40.10 2.43
Alterman et al. A10.3Ga0.7N 5x1016 4.3 1627 5.76 5.76 6.26 4.71
Ohta et al. GaN 9x1015 22 4700 3.86 3.86 24.64 3.91
Hu et al. GaN 2.5x1015 8 1406 1.93 1.88 25.46 2.23
Nishikawa et al. GaN 2x1016 0.225 52.375 2.37 1.98 5.68 1.81
Nishikawa et al. fidild5a0.71 N 2x1016 0.225 83.75 3.76 3.00 8.16 2.75
Nishikawa et al. Ad0LI 5a0.66N 2x1016 0.225 91.125 4.14 3.23 8.72 3.00
Nishikawa et al. A10.46Ga0.54N 2x1016 0.225 112.5 5.04 3.90 10.26 3.58
Nishikawa et al. A10.52Ga0A8N 2x1016 0.225 138.75 6.21 4.69 12.20 4.30
Nishikawa et al. Alo.57G ao_43N 2x1016 0.225 181.5 8.11 5.94 15.30 5.45
[
Ge 0.661 Indirect 2.5x105 1x105 1x105 2.0X105
GaSb 0.726 Direct 5x104 5x104 b
4.7 d
Widebandgap f3-Ga203 Direct 15x106
C (diamond) 5.5 Indirect 5.7x106 21.5x106 10.1x106
• Impact ionization coefficients and E„it vs. doping is known for many of the well-
established semiconductors
• Compiled in Semiconductor Parameters Volumes 1 a, 2 edited by Levinshtein,
Rumyantsev Et Shur
Ge Si InP10-
10'
103 GaA
4
> 10 106
al
Li:-
o 1• 03 105 o.)
o
c
104
c
.8 10 3: 2
10
O -o
O
cias
O
ap_ a
101
1014 1015 1016 1011 lol° 1013 1014 10
15
10
16
1017 1018
Impurity concentration N ( cm-3) Concentration N (cm-3)
1x1 04
2x
co
a)
E4=
4-
a) 5x103
o 5x
co
N 3x10
o
4C3 2x 105
CU 2x103
E
Decreasing a
with temperature 1x
avalanche breakdown • ping a
1x103 I ' I
2.8 3.2 3.6 4.0
1021
mik..._ —NIL
NM\\ si.
1.0E-04
1.0E-05
1.0E-06
T=175°C
1.0E-07
1.0E-08
c.)
1.0E-09
1.0E-10
T=25°C
1.0E 11
-800 -700 -600 -500 -400 -300 -200 -100
1000 2000 3000 4000 5000
Reverse Voltage(V)
Voltage(V)
•
a) -10
-8 n-Al„Ga1.xN
(1) -0.01
57%
52% I• 29°4 0%
:1
n-AlyGa,.),N buffer
-12 a)
n-SiC substrate 1
-14 -0.02
111111111111111111111111111111111111111111111111111I 1
0 -16 Ti/Au a)
1
-2000 -1500 -1000 -500 0
() -0.03
11
Voltage (V) (Drift layei ; I 11
225 nm -200 -150 -100 -50 0
Ecrit = 2.8 MI7lcm Reverse voltage (V)
• J. Yang et al., ECS Jour. of Sol. State Sci. and Tech. 8, 7(2019)
• A. Nishikawa et al., Jap. Jour. of App. Phys. 46, 4B (2007) OINERdif NffSli
15 I UWBG Semiconductor: C (diamond)
1 1
- c1.0.13.6 µin
107
4E'
Au Schottky
---- o8 lb (100) HPHT
----- Ti/Au Ohmic
7 d,ub=500 pm
104
s•/
zQ 1015 4o. •
gr
H detection limit 0,..g
10'9
do (a)
vi N detection limit •
1014 1.1. 18
10
0 2 4 6 8 10 12 14
Depth (pm)
1o6-
LL
lJ
lJ
U 105—
"s7
u
02 L0
Bandgap (eV)
60
104
02 10
Bandgap (eV)
60 1
Semiconductor
Ge
1110.53Ga0AAS
Si
InP
Type
Indirect
Direct
Indirect
Direct
Bandgap (eV) Our research
0.661
0.74
1.12
1.344
2.0x105
2.84x105
3.7x105
5.0x105
Criticial Field Values
All
Direct Bandgap
Slope
1.86
1.76
R2
0.980
0.947
1
G aAs Direct 1.424 5.4x105
Indirect Bandgap 1.89 0.992
6H-SiC Indirect 3.0 2.9x106
4H-SiC Indirect 3.23 3.2x106
GaN Direct 3.45 3.9x106
C (diamond) Indirect 5.5 1.01x107 0ENERGY NffSogi
17 I Comparison of Updated Empirical Fit with
Historical Fits
• normalized data
0.75 Power Fit
R2 = 0.631
1.86 Power Fit
R2 = 0.980
2.0 Power Fit
R2 = 0.974
2.5 Power Fit
R2 = 0.864
3.0 Power Fit
R2 = 0.612
0.75 1 2 3 4 5 6
Bandgap (eV)
• For normalized data, the proposed 1.86 fit is much better than most
historical fits to date
• This fit should more accurately predict material performance
capabilities Nadir Nowt
18
I Simulation: Ridley's Lucky-electron
• To provide fundamental basis for E„it, developed a phenomenological model
for breakdown
• Ionization integral transformed from integral over space 4 integral over E-field
• Ionization rate as a function of field is inserted into integral
1
crA.= —l-x
x
e +
x=
eEA.
(e-2rx2
1 — 2rx
) T
Eth
[-x(1-0
+ po e
(e,-2rx2(1-0 — e-x(1-)11
+
= 2rx2
PT
1 — 2rx
0
PT = 1 — e
-2rx(x-3)1
x>3
1
Lucky-drift can be described by three variables:
o Eth, thresholdenergy required to initiate avalanche
. r, ratio of energy between electron-phonon interaction and electron-electron momentum transfer
. X, mean free path of electron
• W. Maes, K. de Meyer, R. van Overstraeten, Sol.-State. Elec. 33, 705 (1990) OMER& Amsa
1 Determining Eg dependence of Mean-free-path
for Ridley's Lucky Electron Model
/1 a
1
m*2
,\12Eth
m*
so:
with
'ac
vfl(E)
1
1
Eth 2
2E
M.*
and
1
y OC
EEZ
1
m*2
1
1
rn,* 2 m* 2 m*2 m*2
A linear relationship between m* and Eg can also be derived via Bloch Theory for a periodic potential
1
1 Eg 2 1
oc OC
3 1 3
E92 E92 E
Use Si values for r, X to calculate proportionality constants:
Asi = 7.1 nm to 11.94 nm
rsi = 0.049 to 0.063
OMER& AMS4
21 I Parameters for Ridley's Lucky Electron Model
• B.K. Ridley., Jour. of Phys. C - Sol. State. Phys. 16, 3373 (1983)
• W. Maes, K. de Meyer, R. van Overstraeten, Sol.-State. Elec. 33, 705 (1990)
• W. Maes, K. de Meyer, R. van Overstraeten, Sol.-State. Elec. 33, 705 (1990)
• T. H. Ning, C. M. Osburn, and H. N. Yu, Jour. of App. Phys. 48, 286 (1977)
• T. Simon, K. Ping-Keung, and H. Chenming, IEEE Trans. on Elec. Dev. 31, 1116 (1984)
• J. W. Slotboom et al., 1987 Inter. Elec. Dev. Meeting (1987)
• Y. Z. Chen and T. W. Tang, Jour. of App. Phys. 65, 4279 (1989)
• F. M. Abou El-Ela and I. M. Hamada, Fizika A 13, 89 (2004) Oblaidir AMS4 I
22 I Flow Diagram for Simulation of Ridley's Lucky
Electron Model
Materials constants Calculate
Dielectric constant: E Threshold energy: Eth
Applied Voltage: V
Bandgap: Eg Mean free path: Ä.
[Energy loss ratio: r
l Device Parameters
Doping: ND 1
Calculate Maximum Electric Field: Šmax
1 2E,E0V
sqND
1
Calculate "Lucky Drift" Ionization rates: a, Et CCP
1
Calculate Electron Et hole multiplication coefficients Mn Et Mp:
0 r E
Mn =
Er E0
q ND
f
c
L
0
max
ap(E)•
exp[r
-TO
q ND
r 0
(an(E') — ap(E'))dEldE —4 1
Emax
ErE0
M~ = an(E) • ±q
exp[- ;:fE (ap(E — an(E'))dEldE 1
(IND tmax
• I ndirect Bandgap
Semiconductor Bandgap Our Simulated
■ Direct Bandgap (eV) research
1.86 Power Fit InSb 0.17 3.41x104
-Simulated Fit InAs 0.354 8.70x104
Ge 0.661 2.0x105 1.88x105
GaSb 0.726 2.20x105
I n0.53Ga0.47As 0.74 2.84x105 2.35x105
Si 1.12 3.7x 105 4.83x105
InP 1.344 5.0x 105 6.65x105
G aAs 1.424 5.4x 105 7.36x105
GaP 2.26 1.73x106
3C-SiC 2.36 1.89x106
6H-SiC 3.0 2.9x106 2.94x106
4H-SiC 3.23 3.2x106 3.36x106
GaN 3.45 3.9x106 3.80x106
104 f3-Ga203 4.7 6.71x106
0.5 0.75 1 2 3 4 5 6
Bandgap (eV) C (diamond) 5.5 1.01x107 9.27x106
0ENERGY NffSogi
24 I Conclusions & Precations
• Updated critical electric field vs semiconductor bandgap values
• Performed re-normalization to properly compare devices with different
dopings and structures
• Power-law slope of: 1.86 is best fit
• No difference between direct against indirect bandgap semiconductors
0ENERGY AMS4