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Lambda(λ)- based Rules

 Feature size f = distance between source and drain
 Set by minimum width of polysilicon
 Feature size improves 30% every 3 years or so
 Normalize for feature size when describing design rules
 Express rules in terms of λ = f/2
 E.g. λ = 0.3 µm in 0.6 µm process
 The rules describe
 Minimum width to avoid breaks in a line,
 Minimum spacing to avoid shorts between lines,
 Minimum overlap to ensure that two layers completely overlap.

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Anil Kumar Bhat 1
 10/18/2021

Lambda(λ)- based Rules

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Lambda(λ)- based Rules

 Metal and diffusion have minimum width and spacing of 4λ
 Contacts are 2λ × 2λ and must be surrounded by 1λ on the layers
above and below.
 Polysilicon uses a width of 2λ.
 Polysilicon overlaps diffusion by 2λ where a transistor is desired and
has a spacing of 1λ away where no transistor is desired.
 Polysilicon and contacts have a spacing of 3λ from other polysilicon
or contacts.
 N-well surrounds pMOS transistors by 6λ and avoids nMOS
transistors by 6λ

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Anil Kumar Bhat 2
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Layout Design

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Layout Design

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Anil Kumar Bhat 3