CBSM - Procurement Specification For Disco Fully Automatic Dicing Saw 12-Inch - Rev O - Aida

Document Number: Revision:
ON Semiconductor
12MRR80044A O
PROCUREMENT SPECIFICATION FOR DISCO
FULLY AUTOMATIC DICING SAW Page 1 of 16
DOCUMENT TYPE
Title: Document Number: Revision:
PROCUREMENT SPECIFICATION FOR DISCO -

FULLY AUTOMATIC DICING SAW O
Page 1 of 16
APPLICABLE TO LOCATION(s): OWNER (GROUP OR DEPARTMENT):
Seremban CBSM Alberto Obnial (CBSM)

The information contained and disclosed in this document is the property of ONS SBN Malaysia Sdn. Bhd. (ONS SBN) and ONS SBN retains all
rights therein. Except at specifically authorized in writing by ONS SBN, the user of this document shall 1) treat the information as confidential; 2)
keep all information contained herein from unauthorized disclosure and dissemination; 3) ensure that the latest approved revision is being used; 4) only
use the information for the sole benefit of ONS SBN; and 5) promptly return or destroy this information upon the request of ONS SBN.
Table of Contents:
1.0 PURPOSE
2.0 SCOPE
3.0 RESPONSIBILITY
4.0 RELATED DOCUMENT/SPECIFICATION
5.0 GENERAL REQUIREMENTS
5.1 Supplier Instructions
5.2 Equipment Acceptance
5.3 Installation and Set-up
5.4 Training
5.5 Equipment Documentation
5.6 Safety Requirement
5.7 ESD Requirement
5.8 Warranty
5.9 Service and Spare Part Support
6.0 SPECIFIC REQUIREMENTS
6.1 Equipment Description
6.2 Equipment Specification
6.3 Equipment Configuration/Capabilities
6.4 Productivity and Performance Requirements
6.5 Product Quality Requirements
7.0 REVISION HISTORY
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12MRR80044A O
1 PURPOSE
This document specifies ONS SBN's procurement specification for the purchase of Fully Automatic
Dicing Saw machine consisting of:
1.1 General Requirement - describes the requirements pertaining to the purchase, equipment buy off
and pre- and post-purchase protocols and requirement.
1.2 Specific Requirement – covers the equipment specification, design requirement, product/process
performance and quality requirements.
1.3 Particular emphasis is given to the design and features of the equipment that must be followed
in order to meet the Cleanroom Class 10 requirements where the equipment will be installed.
2 SCOPE
2.1 This specification covers the (functional and process) requirements and acceptance criteria of
ONS SBN Malaysia Sbn. Bhd. (hereinafter called ONS SBN) for the purchase of Fully
Automatic Dicing Saw from DISCO (hereinafter called "Supplier").
2.2 The machine to be supplied by the DISCO must be in accordance with the description provided
in the supplied Machine Specification with all the standard features and options including all
optional items specified by ON SBN.
2.3 The Machine Specification must be attached with the Purchase Order (PO) as reference in any
need for clarification.
2.4 All optional items must be specified and the individual price indicated in the PO.
2.5 In the event of any conflict between this specification and the PO, the PO shall not take
precedence over this specification. If there is any revision to the specification after the release of
PO, all agreed specifications in this document must be fulfilled when the equipment is
delivered.
2.6 The revision to this specification that applies shall be stated in the Purchase Order. Any
subsequent revision to this document shall be valid only when the supplier is in possession of
the revised specification with a higher revision level and a revised Purchase Order stating that
higher revision level.
3 RESPONSIBILITY
3.1 It is the responsibility of the equipment supplier to ensure that the equipment is installed and in
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12MRR80044A O
proper working condition.

3.2 It is the responsibility of Equipment/Process Engineering groups to ensure the buy-off is done
as per the buy-off requirements.
4 RELATED DOCUMENT/SPECIFICATION
4.1 Reference Document:
Document Number Document Title

( ) (Process Spec)
12MON00403D EHS Equipment Sign Off and Approval
94MRR00063A Procedures for the Equipment Safety Sign-Off
- DISCO Fully Automatic Dicing Saw 6000 Series (DFD6362)
Machine Specification
DFD6362_Spec_SHNL
17R003_C
4.2 Definition and Acronyms: None
4.3 Records: None
5 GENERAL REQUIREMENTS
5.1 SUPPLIER INSTRUCTIONS
5.1.1 Supplier to confirm, in writing, the receipt, knowledge and understanding of this
process/equipment specification with Supplier's written quotation to ONS SBN for
equipment described herein. If Supplier is unable to meet (or disagrees with) any
specific condition (s) of this specification, notification must be provided in writing with
Supplier's quotation to ONS SBN for appropriate resolution prior to issuance of
Purchase Order.
5.1.2 Acceptance of purchase order by Supplier for equipment described herein implies
complete compliance with the conditions of this specification unless prior written
agreement for exceptions has been reached with ONS SBN as specified in section
5.1.1.
5.1.3 Within ten (10) days of issuance of Purchase Order, Supplier is to supply to ONS SBN a
manufacturing plan showing delivery of equipment in quoted time frame.
5.1.4 All product specific tooling designs and custom equipment designs must be informed and
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updated (Only critical parts) on semi-monthly basis from Supplier milestone report to
ONS SBN as stated in item 5.1.
5.1.5 Only Supplier quotations including the following information will be considered :
5.1.5.1 Confirmation in writing of the receipt, knowledge and understanding of this
specification.
5.1.5.2 List of exceptions, if any, to specification.
5.1.5.3 Price and delivery date of equipment.
5.1.5.4 List of recommended and/or specified spare parts and components for six (6)
months of normal operation, including price and delivery.
5.2 EQUIPMENT ACCEPTANCE

5.2.1 PRE-SHIPMENT INSPECTION/BUY-OFF
5.2.1.1 When equipment is ready for acceptance, the Supplier is to inform that the
equipment could meet all requirements and report to ONS SBN Project
Engineers. The inspection must indicate that the equipment has achieved Cpk >
1.67 for critical variables/special characteristics of the process.
5.2.1.2 Prior shipment performance test and equipment functionality test will be done
in Supplier site by ONS SBN engineer and local supplier representative.
5.2.1.2.1 This is mandatory for equipment with overall cost of over US$100K
for which the cost of all incidentals to be incurred in sending ONS
SBN engineers (Process and Equipment engineers) must be borne by
the supplier.
5.2.1.2.2 For equipment that costs below US$100K, it will be at ONS SBN’s
account and discretion to conduct the pre-shipment inspection/buy-off
at Supplier’s site.
5.2.1.3 Supplier should have sufficient tool and equipment to support the buyoff.
5.2.1.4 Supplier will be responsible for the modification of equipment to meet the
agreed criteria at no extra cost charge to ONS SBN.
5.2.1.5 Initial parameter optimization and pattern programming to be done by Supplier.
5.2.1.6 Equipment is ready to acceptance includes:
5.2.1.6.1 Equipment functionality.
5.2.1.6.2 The interfaces between equipment.
5.2.1.6.3 The cycle time of the process.
5.2.1.6.4 Data log and error display capability during simulation. Machine must
continue running upon completion of assists.
5.2.1.6.5 Physical review of equipment.
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5.2.1.6.6 Conformance to specification.

5.2.2 1st STAGE ACCEPTANCE AT ONS SBN.
5.2.2.1 Preliminary acceptance will consist of four (4) hours of continuous equipment
operation to verify that the equipment meets all the requirements of this
specification.
5.2.2.2 Random samples will be 100% inspected for all product dimensional and
quality features generated by the equipment.
5.2.2.3 Critical variables of the random samples will be checked to verify the Cpk
value and the productivity and performance criteria will also be checked during
acceptance.
5.2.2.4 In the event of preliminary acceptance failure, ONS SBN will supply Supplier
with a list of specification requirements which failed.
5.2.2.5 Second preliminary acceptance will be re-run after Supplier makes necessary
corrections to the equipment. All the expenses for second preliminary
acceptance at Supplier site will be borne by supplier.
5.2.2.6 All assembly drawings, sub-assembly drawings, installation drawings, and
operation manuals must be available for the preliminary acceptance. (Only for
critical or specific items)
5.2.3 2ND STAGE (FINAL) ACCEPTANCE.
5.2.3.1 Final site acceptance will consist of 40 hours of running with equipment
meeting all requirements of this specification. (Supplier personnel must be in
ONS SBN during the final site acceptance)
5.2.3.2 Same as from section 5.2.7.2 to 5.2.7.6.
5.2.4 ACCEPTANCE PLAN.
5.2.4.1 The acceptance of the equipment will depend on the results of the final site
acceptance.
5.2.4.2 Supplier shall be responsible for any equipment malfunction under normal
operating conditions for a period of six months after set-up or a maximum of
one year after shipment from Supplier. Any part that fails, other than
expendable items, shall be replaced at Supplier's expense.
5.3 INSTALLATION AND SET-UP

5.3.1 Supplier is responsible for equipment installation and start-up at the ONS SBN
manufacturing site.
5.3.2 Supplier installation must begin within one week after receiving notification from ONS
SBN.
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12MRR80044A O
5.4 TRAINING
5.4.1 Training at Supplier’s Site
5.4.1.1 Training is to be provided by Supplier at Supplier’s site with no additional cost
to the original quotation before the equipment is shipped to ONS SBN. This
will cover the cost of all incidentals to be incurred in sending two (2) ONS
SBN engineers (Process and Equipment engineers).
5.4.1.2 This training can be done together with equipment pre-shipment buy-off or
separately.
5.4.2 Training to include :
5.4.2.1 General equipment (theory of) operation.
5.4.2.2 Equipment assembly, set-up, functionality, calibration and alignment.
5.4.2.3 Preventive maintenance (Hardware/Software)
5.4.2.4 Trouble shooting.
5.4.2.5 Optimization of the system parameters.
5.4.3 Additional training may be requested after the installation of equipment at ONS SBN
manufacturing site.
5.4.4 Supplier must support for the application till startup of production phase and future
application.
5.5 EQUIPMENT DOCUMENTATION

5.5.1 Complete set of Operating Manual (in English), one hard copy of document with clean
room class papers and one soft copy in CD-ROM. Addition update document can
provide by soft copy or electronically.
5.5.2 Complete set of Installation, Maintenance, Repair, Spare part list Manual (in English),
hard copy of document with cleanroom class papers and one soft copy in CD-ROM.
Addition update document can provide by soft copy or electronically
5.5.3 Three copies of all drawings (in English) necessary for installation, repair, operation,
spare parts list and maintenance to be provided by supplier for the 1st machine.
5.5.4 Manual shall contain:
5.5.4.1 Detail set up instructions and operating procedure with illustrations.
5.5.4.2 Preventive maintenance methods and recommended frequencies.
5.5.4.3 Troubleshooting guides procedure.
5.5.4.4 Electrical / electronic schematic, program and system blue prints.
5.5.4.5 Parts list with description, manufacturer and part number.
5.5.4.6 Traceability of all major components and board revision levels of all electronic
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parts used in the machine.

5.5.4.7 All major and minor spare part listing.
5.6 SAFETY REQUIREMENT

5.6.1 The equipment must comply with the Safety requirements stipulated in
94MRR00063A - Procedures for the Equipment Safety Sign-Off.
5.6.1.1 Written certifications pertaining to the requirements on Noise Level (Item 7)
and Prohibited Substance (Item 23) must be provided as required in the
checklist.
5.6.2 The EHS Requirements Equipment Prebuy- off Checklist must be filled up and
reviewed with ONS SBN Equipment Engineer prior shipment of the equipment.
5.7 ESD REQUIREMENT

5.7.1 Operation of equipment shall not in any way cause physical or electrical (ESD)
damage to the units.
5.7.2 The machine should have specified terminal to which the grounding wire will be
connected to location earth ground.
5.7.3 An ESD connector or Ionizer point to be supplied on the equipment.
5.7.4 If the cover is made of material except metal plate, the material should use static
dissipative material.
5.8 WARRANTY
5.8.1 Period of warranty for all items to be at least one (1) year from date of buy off
acceptance at ONS SBN manufacturing site.
5.8.2 Warranty to cover under normal operating conditions:
5.8.2.1 All equipment components found defective, regardless of origin, due to
deficient Supplier design, bad materials or poor workmanship.
5.9 SERVICE AND SPARE PARTS SUPPORT

5.9.1 Supplier must have at least 1 year free of charge service support and on call within 24
hours, including weekend and holiday.
5.9.2 Supplier must have within 24 hours support for delivery of critical spare part once
Service Engineer investigated the case.
5.9.3 Supplier must be able to supply all spare parts for the equipment life time or must
provide notice and information on the qualified equivalent parts from other sources 6
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12MRR80044A O
months before part discontinuation.
6 SPECIFIC REQUIREMENTS
6.1 EQUIPMENT DESCRIPTION
Machine Model/Description: DFD6362 Fully Automatic Dicing Saw
Application/s: Dicing of 12-inch Silicon Wafers for SO8/µ8 Packages
6.2 EQUIPMENT SPECIFICATION

6.2.1 See attached Standard Specification for DISCO Fully Automatic Dicing Saw 6000 Series –
DFD6362
6.2.2 Installation Requirement
6.2.2.1 Air Piping : Clean Air will not be used
6.2.2.2 Water Piping : Each of 2 deionized water paths is connected to cutting and
spinner cleaning water
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12MRR80044A O
6.2.2.3 Duct and Drain Piping and Electrical Wiring
6.2.2.3.1 Electrical Wiring Details

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12MRR80044A O
Nominal cross-sectional
Terminal Terminal
Length area Number of
Specification for power for PE
(m) mm2 terminals
AWG wire wire
equivalent
Standard
(200 to 240 VAC) 5 12 4 4 M5 M5
20A
6.2.2.4 ONS SBN Specifications from Optional Accessory

6.2.2.4.1 Z1/Z2 Spindles: Standard (1.2 kW)
6.2.2.4.2 Wheel Cover : Standard Wheel Cover
(OPTIONS: BBA, Force Exhaust, Atomizing Nozzle for Wheel
Cover
6.2.3 Elective Accessories
Item Specification Selection Specifications (Size) Qty

1 Flange selection A Hub a. Wheel mount set for hub 1
specifications
2 Porous chuck table A For 300 mm Fine mesh porous chuck 1
selection
3 Spinner table A For 2-12 For 300 mm 1
selection
4 Cassette stage A For standard For 300-mm 13-slot 1
selection cassette standard cassette and DTC2-
8
5 Label selection B English  Rotating blade 1 set
 Moving parts
 Rotating spinner
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 Hazardous voltage
 Line voltage always present
 Direction of blade removal
6 Attached manual B English Set  Safety Manual 1 set
selection Manuals  Installation Manual
 Operation Manual
 Data Maintenance Manual
 Maintenance Manual
 Technical Reference
6.2.4 Optional Accessories

No
Optional Accessories Required Remarks
.
1 Stainless Cover NO
2 Selecting the Wheel Cover and Specification for YES For 1.2kW spindle;
Preventing Particles from Adhering (for 1.2 Standard Wheel
kW, 1.8 kW, or high-speed rotation spindle) Cover; Atomizing
nozzle for wheel
cover, Forced exhaust,
C/T water curtain,
Spindle water curtain
3 1.8 kW Spindle NO
4 High-speed Rotation Spindle NO
Spare 2-inch Hub Mount (for 1.2 kW, 1.8 kW, YES For 1.2kW spindle
5
or high-speed rotation spindle)
Spare R-type Flange (for 1.2 kW, 1.8 kW YES For 1.2kW spindle
6
spindle)
7 Starter Kit For 2-inch Hub Mount YES
8 Starter Kit For R-type Flange YES
9 2.2 kW Spindle NO
10 Spare 3-inch Hub Mount (for 2.2 kW spindle) NO
11 Spare S-type Flange (for 2.2 kW spindle) NO
12 Starter Kit for 3-inch Hub Mount NO
13 Starter Kit for S-type Flange NO
14 Tape Frame NO
15 Cassette NO
16 Conversion Plate NO
17 Robotic Flange NO
18 Elevator Cover YES With interlock.
For 300 mm standard
19 UV Irradiation Unit YES
cassette
20 Parts for UV Irradiation Unit 200 mm YES (For 300 mm)
21 Parts for UV Irradiation Unit Square Table YES
22 Spare UV Consumable Part YES
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23 Square Table NO
24 Spare Porous Chuck Table YES For 200 mm
25 Spare Spinner Table YES For 200 mm
26 Specification for Precut Board YES Fixed Sub-Chuck
Table
27 Rinse Cleaning NO
28 Spinner Cleaning High Pressure Pump and High NO
Pressure Pump Limit
29 Spinner Atomizing Nozzle YES Type S (Standard
type)
30 Non-contact Setup YES
31 Abrasive Material for Non-contact Setup Sensor YES
32 Ionizer YES With English
instruction manual
33 Duct Fan Unit YES With forced exhaust
external type.
34 Maintenance Parts YES For 1.2kW spindle
35 General Tool YES
All tool items (Oil
stone, Precision screw
36 Advanced Tool YES driver, Adjustable
wrench, Dial gauge,
Grease Injector Unit)
37 Lifting Jig Set YES
38 Export Packing Hardware YES
39 Spare Axis Metal Fixture YES
40 Machine Anchoring Bracket NO
For 200 to 240 VAC,
41 Power Cables YES
20A
42 Transformer Unit for Use Outside Japan NO
(internal type)
43 Uninterruptible Power Supply (internal type) YES For 1.2kW spindle;
With English
instruction manual
44 Booster Pump Unit (internal type) NO
Instruction Manual for Booster Pump Unit
45 NO
(internal type)
46 CO2 Injector (internal type) NO
47 Stayclean Injector NO
48 Water Temperature Control Unit DTU1531 NO
Power Cable for Water Temperature Control
49 NO
Unit DTU1531
Transformer for Water Temperature Control
50 NO
Unit DTU1531
51 Piping Assy for Water Temperature Control NO
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Unit DTU1531
Instruction Manual for Water Temperature
52 NO
Control Unit DTU1531
53 Microscope (Micro) Specification NO
54 Microscope Light Source YES Direct light source:
High-brightness LED
Oblique light source:
Standard LED
55 Kerf Center Alignment YES
56 Handy Barcode Reader YES
57 Built-in Barcode Reader NO
58 EMO Guard Ring YES
59 Spare USB Flash Drive YES
60 High Pressure Air Blower YES
61 Duct Capacity Measuring Instrument NO
62 Regulator for Cutting Water YES
63 Stylus Pen YES Magnet fixing type
64 Height-adjustable Signal Tower YES
65 Melody Alarm YES
66 Auto Blade Changer NO
67 Drain Pan NO
68 Water Leakage Detection Unit NO
69 Spare Manuals YES All, English
70 SECS Communication Software YES
71 Piping Joint YES
72 Braided Hose YES
73 Polyurethane Tube YES
74 Hose Band YES
75 Filter Unit NO
76 CE-marking Specification YES
6.3 PRODUCTIVITY AND PERFORMANCE REQUIREMENTS.

6.3.1 Productivity requirements
6.3.1.1 Average throughput goal of the system shall be a minimum of 30 wafers per
hour.
6.3.2 Performance requirements.
6.3.2.1 MTBA (Mean Time Between Assist) greater than 4 hours, but not applicable
to material change occurrence.
6.3.2.2 MTBF (Mean Time Between Failure) greater than 168 hours.
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6.3.2.3 Product change over time less than 2 minutes

6.3.2.4 New product setup time less than 10 minutes
6.3.2.5 MTBR (Mean Time Between Repair) less than 1 hour.
6.3.2.6 Up Time (after installation) is more than 98%.
6.4 PRODUCT QUALITY REQUIREMENTS

6.4.1 Wafer handling system and process shall not make any scratch, breakage or any other
damage to the semiconductor wafers/glass.
6.4.2 The maximum kerf width measurement (include chipping ) must be less than 1.5
micron of the blade thickness:
6.4.2.1 For blade thickness of 0.030 mm, the USL is 0.045mm
6.4.2.2 The required Cpk is 1.67 and above.
6.4.3 The detailed quality requirements.
Description Requirement
Dice Fly-off Zero occurrence

Die Crack Zero occurrence
Top Side Quality
 Contamination Zero occurrence
 Dark Spots Zero occurrence
 Pitting Zero occurrence
 Other Visual Anomaly Zero occurrence
Misaligned Cut Zero occurrence
Visual Quality
Die Remnant From Neighboring Die Zero occurrence
Multiple Die After Dicing (Shallow Cut) Zero occurrence
Check left and right die for
offset
Side Wall Chipping <35% of the die thickness
Lateral Cracks Zero occurrence
Backside Chipping <35% of the die thickness
Back Metal Peeling Zero occurrence
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6.4.4 Min Scribe Line Remain is: min SL remain= min (wc1,wc2). See illustration below:
wc1: [ SL remain +
scribe line (SL) or chipping]
saw street width
kerf width kerf width + chipping
wc2: [SL remain +

chipping]
6.4.5 UV Cure is integrated with the fully automatic dicing saw

ON Semiconductor
12MRR80044A O
7.0 REVISION HISTORY
Change Training Change

Revision Description of Revision and Reason Effective Date
Originator Required Analyst
O Alberto Initial release. Yes 10-Jan-2019

Obnial

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PROCUREMENT SPECIFICATION FOR DISCO -

Seremban CBSM Alberto Obnial (CBSM)

proper working condition.

4.1 Reference Document:

Document Number Document Title

4.2 Definition and Acronyms: None

4.3 Records: None

5.2 EQUIPMENT ACCEPTANCE

5.2.1.6.6 Conformance to specification.

5.3 INSTALLATION AND SET-UP

5.5 EQUIPMENT DOCUMENTATION

parts used in the machine.

5.6 SAFETY REQUIREMENT

5.7 ESD REQUIREMENT

5.9 SERVICE AND SPARE PARTS SUPPORT

months before part discontinuation.

6.2 EQUIPMENT SPECIFICATION

6.2.2.3 Duct and Drain Piping and Electrical Wiring

6.2.2.3.1 Electrical Wiring Details

6.2.2.4 ONS SBN Specifications from Optional Accessory

6.2.3 Elective Accessories

Item Specification Selection Specifications (Size) Qty

6.2.4 Optional Accessories

6.3 PRODUCTIVITY AND PERFORMANCE REQUIREMENTS.

6.3.2.3 Product change over time less than 2 minutes

6.4 PRODUCT QUALITY REQUIREMENTS

Dice Fly-off Zero occurrence

kerf width kerf width + chipping

wc2: [SL remain +

6.4.5 UV Cure is integrated with the fully automatic dicing saw

7.0 REVISION HISTORY

Change Training Change

O Alberto Initial release. Yes 10-Jan-2019

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