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Instructor: Hồ Trung Mỹ
Chapter 3
Refs:
1. Solid State Electronic Devices, Ben G. Streetman and
Sanjay Banerjee, Sixth Edition
1
Objectives
1. Understand conduction and valence energy bands, and
how bandgaps are formed
2. Appreciate the idea of doping in semiconductors
3. Use the density of states and Fermi Dirac statistics to
calculate carrier concentrations
4. Calculate drift currents in an electric field in terms of
carrier mobility, and how mobility is^affected by
scattering
5. Discuss the idea of "effective" masses
2
Introduction
• In this chapter we begin to discuss the specific mechanisms
by which current flows in a solid.
• In examining these mechanisms we shall learn why some
materials are good conductors of electric current, whereas
others are poor conductors.
• We shall see how the conductivity of a semiconductor can
be varied by changing the temperature or the number of
impurities.
• These fundamental concepts of charge transport form the
basis for later discussions of solid state device behavior.
3
3.1 Bonding Forces and Energy Bands in Solids
• In Chapter 2 we found that electrons are restricted to sets of
discrete energy levels within atoms. Large gaps exist in the energy
scale in which no energy states are available.
• Electrons in solids are restricted to certain energies and are not
allowed at other energies.
• The basic difference between the case of an electron in a solid and
that of an electron in an isolated atom is that in the solid the
electron has a range, or band, of available energies.
• The discrete energy levels of the isolated atom spread into bands
of energies in the solid because in the solid the wave functions of
electrons in neighboring atoms overlap, and an electron is not
necessarily localized at a particular atom.
– For example, an electron in the outer orbit of one atom feels the
influence of neighboring atoms, and its overall wave function is
altered.
4
3.1.1 Bonding Forces in Solids
Bond: The interaction of electrons in neighboring atoms is
called bond.
The bonding mechanisms between atoms are closely
related to the structure of the atoms themselves.
• Secondary Bonding
Three types of dipole-dipole bonds
5
Molecules and General Bonding Principles
6
Types of Bonding
The electronic structure of atoms defines the character of
their interaction among each other. Filled outer shells
result in a stable configuration as in noble inert gases.
Atoms with incomplete outer shells strive to reach this
noble gas configuration by sharing or transferring
electrons among each other for maximal stability. Strong
“primary” bonding results from the electron sharing or
transfer.
7
Types of Bonding
8
Types of Bonding
9
Ionic Bonding
10
Ionic Bonding
13
Secondary Bonding
14
Secondary Bonding
C (Z=6) 1s2 2s2 2p2 For N atoms, there will be 2N, 2N, and 6N
states of type 1s, 2s, and 2p, respectively.
2 states for 1s level
2 states for 2s level
6 states for 2p level 16
17
Band Theory of Solids
We concluded that, due to the periodic potential
associated with the crystalline lattice, there are
allowed and disallowed energy bands. Let us look
at how carrier transport is affected if a band is
filled with electrons or not.
If N identical atoms are brought together, each energy level of an isolated atom, E1,
E2, E3 will split into N levels forming quasi-continous bands.
© Nezih Pala npala@fiu.edu
19
EEE5425 Introduction to Nanotechnology
Band Theory of Solids
Linear combinations of atomic orbitals (LCAO): The LCAO when 2 atoms are brought together
leads to 2 distinct “normal modes – a higher energy antibonding orbital and a lower energy bonding
orbital . Note that the electron probability density is high in the region between the ion cores
(covalent “bond”), leading to lowering of the bonding energy level and the cohesion of the crystal. If
instead of 2 atoms, one brings together N atoms, there will be N distinct LCAO, and N closely
spaced energy levels in a band.
© Nezih Pala npala@fiu.edu EEE5425 Introduction to 22
Nanotechnology
LCAO
Note: Each energy state for an isolated atom gives rise to bands 23
sp3 Hybridization in Si
When individual atoms are very close together, the s and p-orbitals in
adjacent atoms overlap so much that they can form hybridized orbitals. For
example: 1s and 3p orbitals can mix to give sp3 hybridized orbitals
24
Band Theory of Solids (9)
1s2 ⇨ 2N states
2s2 ⇨ 2N states
2p6 ⇨ 6N states
3p6 ⇨ 6N states
3s2 ⇨ 2N states
As distance reduces the bands first mix among themselves, then hybridize (mix),
and then for even lower distance splits into conduction and valence bands 25
Band Theory of Solids (10)
27
Classification of Solids by Resistivity
28
3.1.4 Direct and Indirect Semiconductors
29
Direct and Indirect Semiconductors (2)
30
Direct and Indirect Semiconductors (3)
31
3.1.5 Variation of Energy Bands with
Alloy Composition
32
3.2 Charge Carriers in Semiconductors
• The mechanism of current conduction is relatively easy to visualize in
the case of a metal:
– the metal atoms are imbedded in a "sea" of relatively free electrons, and
– these electrons can move as a group under the influence of an electric
field.
• The free electron view is oversimplified, but many important
conduction properties of metals can be derived from just such a
model.
• Since the semiconductor has a filled valence band and an empty
conduction band at 0 K, we must consider the increase in conduction
band electrons by thermal excitations across the band gap as the
temperature is raised.
– After electrons are excited to the conduction band, the empty states left
in the valence band can contribute to the conduction process.
– There is considerable flexibility in controlling the electrical properties of
semiconductors 33
3.2.1 Electrons and Holes
34
Electrons in Valence Band
35
Mathematical description
36
Motion of Electrons in an Electric Field
37
3.2.2 Effective Mass
38
Effective Mass
39
Effective Mass
Ge Si GaAs
*
m 0.55 m0 1.1m0 0.067 m0
n
*
m p
0.37 m0 0.56 m0 0.48 m0
40
† m0 is the free electron rest mass.
3.2.3 Intrinsic Material
• A perfect semiconductor crystal with no impurities or lattice
defects is called an Intrinsic semiconductor.
• In such material there are no charge carriers at 0ºK, since the
valence band is filled with electrons and the conduction band is
empty.
• At high temperature electron-hole pairs are generated as valence
band electrons are excited thermally across the band gap to the
conduction band.
• These EHPs are the only charge carriers in intrinsic material.
• Since the electrons and holes are created in pairs, the conduction
band electron concentration n (electron/cm3) is equal to the
concentration of holes in the valence band p (holes/cm3).
• Each of these intrinsic carrier concentrations is commonly
referred to as ni. Thus for intrinsic material: n = p = ni (3-6)
• At a temperature there is a carrier concentration of EHPs ni.
41
Electrical Properties of Semicondutors
Explained by a Band Model and Bond Model
n=p=ni
n=p
Intrinsic Material
43
3.2.4 Extrinsic Material
• When a crystal is doped such that the equilibrium carrier concentrations n0 and p0
are different from carrier concentration
ni, the material is said to be extrinsic material.
• In addition to the intrinsic carriers generated, it is possible to create carriers in
semiconductors by purposely introducing impurities into the crystal.
This process, called doping, is the most common technique for varying
conductivity of semiconductor.
• There are two types of doped semiconductors
n‐type : more electrons (majority) than holes (minority).
p‐type : more holes (majority) than electrons (minority).
• Impurities introduced into the lattice actually create additional energy levels,
usually within the forbidden band.
Group V impurities, such as P, As, and Sb, introduce energy levels (donor levels)
near the bottom of the conduction band in Ge and Si. Each donor impurity provides
one extra electron to the lattice.
Group III impurity, such as B, introduces energy levels (acceptor levels) near the
top of the valence band in Ge and Si. Each acceptor impurity provides one extra hole
to the lattice. 44
Electrical Properties of Semicondutors Explained by a Band Model and Bond Model
n-type Silicon doped with As
n=NAs
Very small
ionization
energies ED and
EA
moves
Electrons and Holes in Quantum Wells
• One of most useful applications of MBE or OMVPE growth of
multilayer compound semiconductors is the fact that a
continuous single crystal can be grown in which adjacent
layer have different band gaps.
• A consequence of confining electrons and holes in a very
thin layer is that hese particles behave according to “the
particle in a potential well problem”.
Al0.3Ga0.7As GaAs Al0.3Ga0.7As
50Å
E1
0.28eV
1.85eV 1.43e
1.43eV
Eh 0.14eV
46
Electrons and Holes in Quantum Wells (2/2)
• Instead of having the continuum of states as described by
n 2 2 h 2
En
2mL2
modified for effective mass and finite barrier height.
• Similarly, the states in the valence band available for holes are
restricted to discrete levels in the quantum well.
48
Properties of the Fermi Dirac Distribution Function
49
Determination of the Fermi Level Ef
50
EF deviation
51
EF deviation (2)
52
EF deviation (3)
53
• Example: The Fermi level in a Si sample at equilibrium is located
at 0.2 eV below the conduction band. At T=320K, determine the
probability of occupancy of the acceptor states if the acceptor
states relocated at 0.03 eV above the valence band.
• Solution:
From above figure, Ea – EF ={0.03-(1.1-0.2)} eV= -0.87 eV
kT= 8.62×10-5 eV/K×320=2758.4 eV
we know that,
54
Formulation for a “Continuum” of Allowed /
Available States
55
Thermal equilibrium
• A semicondutor material is in thermal equilibrium, if the
temperature at each position of the crystal is the same,
the overall current through the material is 0, and the
solid state is not illuminated. Furthermore, we assume
that no chemical reaction is taking part.
• As a consequence the Fermi energy throughout the
material is constant
EF = EF(x,y, z) = const. Thermal equilibrium
56
Electron and Hole Concentrations at Equilibrium
• The concentration of electron and hole in the conduction band
and valance are
58
59
Fig. 3.16 (c) Concentration of electrons and holes in p-type material
• The electron concentration (in terms of effective density of states Nc
which is located at the conduction band edge Ec) in thermal equilibrium
can also be written as follows:
• It is assumed that the Fermi level EF lies at least several kT below the
conduction band. Then exp(EC-EF)/kT)>> 1 and the Fermi function f(Ec)
can be simplified as
60
• By similar argument, the hole concentration (in terms of
effective density of states Nv which is located at the valance
band edge Ev) in thermal equilibrium can also be written as
follows:
61
• The electron and hole concentrations predicted by Eqs.
(3-15) and (3-18) are valid whether the material is
intrinsic or doped, provided thermal equilibrium is
maintained.
• Thus for intrinsic material, EF lies at some intrinsic level
Ei near the middle of the band gap, and the intrinsic
electron and hole concentrations are
62
• From Eq. (21), we obtain
• The constant product of electron and hole concentrations in Eq. (3.24) can
be written conveniently from (3.22) and (3.23) as
• It seen from the equation (3.27) that the electron concentrations n0 increases
exponentially as the Fermi level moves away from Ei toward the conduction band.
• Similarly, the hole concentrations p0 varies from ni to larger values as EF moves from
Ei toward the valence band.
64
• Example 3-5 A Si sample is doped with 1017 As atoms/cm3. What is the
equilibrium hole concentration p0 at 300K? Where is EF relative to Ei ?
• Solution: Nd=1017 atoms/cm3; kT=0.0259eV; ni (for Si)=1.5×1010 cm-3;
Since Nd>>ni, we can approximate n0=Nd
We know that
65
For intrinsic semiconductor : EF Location
66
Temperature Dependence of Carrier Concentrations
• The variation of carrier concentration with temperature is
indicated by Eq. (3.21)
67
Temperature Dependence of Carrier Concentrations (2)
In this example, Si is doped
n-type with donor
concentration Nd of 1015 cm-3.
At very low temperature
(large 1/T) negligible intrinsic
EHPs exist, and the donor
electrons are bound to the
donor atoms.
As the temperature is raised,
these electrons are donated to
the conduction band, and at
about 100K (1000/T=10) all
the donor atoms are ionized.
This temperature range is
called ionization region.
Once the donor atoms are ionized, the conduction band electron
concentration is n0≈Nd=1015 cm-3, since one electron is
obtained for each donor atom. 68
Temperature Dependence of Carrier Concentrations (3)
69
Compensation and Space Charge Neutrality
• If a semiconductor contains both donors and acceptors. For example,
Fig. 3.19 illustrates a semiconductor for which both donor and
acceptors are present, but Nd >Na.
• The predominance of donors makes the material n-type, and the Fermi
level is therefore in the upper part of the band gap. Since EF is well
above acceptor level Ea, this level is essentially filled with electrons.
• However, with EF above Ei, it cannot
be expected that a hole concentration
in valence band commensurate with
the acceptor concentration.
• In fact, the filling of the Ea states
occurs at the expense of the
donated conduction band electrons.
70
Compensation and Space Charge Neutrality (2)
This mechanism can be visualized as follows:
• Assume an acceptor state is filled with a valence band electrons
with a hole resulting in the valence band.
• This hole is then filled by recombination with one of the
conduction band electrons.
• Extending this logic to all the acceptor atoms, it is expected that
the resultant concentration of electrons in the conduction band to
be Nd -Na instead of the total Nd.
• This process is called compensation.
• By this process it is possible to begin with an n-type
semiconductor and add acceptors until Na=Nd and no donated
electrons remain in the conduction band.
• In such compensated material n0=ni=po, and intrinsic conduction
is obtained.
• With further acceptor doping the semiconductor becomes p-type
with a hole concentration of essentially Na-Nd.
71
Compensation and Space Charge Neutrality (3)
• The exact relationship among the electron, hole, donor and acceptor
concentrations can be obtained by considering the requirements for
space charge neutrality.
• If the material is to remain electrostatically neutral, the sum of the
positive charges (holes and ionized donor atoms) must balance the sum
of the negative charges (electrons and ionized acceptor atoms):
• Thus in Fig 3.19 the net electron concentration in the conduction band is
(3.28)
72
Compensated Semiconductor
73
• Example: A Si is doped with 9×1015 cm-3 donors and 3×1015
acceptors. Find the position of the Fermi level at 40°C.
• Solution: Nd=9×1015 cm-3; Na=3×1015 cm-3; ni=1.5×1010 cm-3;
Since Nd>Na, the Fermi level near to the donor states.
We obtain, Nrd = Nd -Na=6×1015 cm-3 donor atoms; Thus the Fermi
level depends on the donor atoms Nrd.
Now we consider n0=Nrd because Nrd>>ni. T=(273+40)K=313K
So we obtain,
74
3.4 Drift of Carriers in Electric and
Magnetic Fields
• Electrons in the conduction band and holes in the valence band are able
to move upon thermal activation, a gradient or an applied electric field.
• During current collision and scattering of the carrier depend on the
process temperature, the thermal motion of atoms and the lattice which
affects the velocity of the carrier
• There are two main currents in semiconductor devices:
– Drift
Applying an electric field according to the movement of electrons and
holes generated
– Diffusion (diffusion)
Carrier concentration due to non-uniform
Graded doping, or the like appropriate carrier injection from the source
position can be changed according to the concentration of
• Lattice and impurity scattering of carriers (scattering)
– The calculation of the flow of current n, p considered with
– Also in the solid content (mobility, the ease with which the carrier is
present) affected
– Depends on the temperature and the thermal motion of atoms and
the lattice effect on carrier velocity 75
3.4.1 Conductivity and Mobility
Thermal movement of carriers
Electrons in the conduction or holes in the valence band can essentially be
treated as free carriers or free particles. Even in the absence of an electric
field the carriers follow a thermally activated random motion. In thermal
equilibrium the average thermal energy of a particle (electron or hole) can
be obtained from the theorem for equipartition of
Average thermal energy of an electron / hole
The thermal energy of the particle is equal to the kinetic energy of the
electron, so that the velocity of the particle can be calculated. The mass of
the electron is equal to the effective mass of the electron.
Furthermore, the velocity of the electron corresponds to the thermal velocity
of the electron, so that the thermal velocity can be determined by:
Note: meff m* 76
Thermal movement of carriers (2/2)
• At room temperature the average thermal velocity of an electron
is about 105m/s in silicon and GaAs.
77
Carrier Drift
• When a small electric field is applied to the semiconductor
material each free carrier will experience an electrostatic force
Force = −qE
• So that the carrier is accelerated along the field (in opposite
direction of the field).
E=0 E
Note: mn m*
79
Carrier Drift (3)
• The electric field is multiplied with a prefactor. The prefactor
depends on the mean free time, the effective mass of the free
carrier, and the charge of the carrier. The prefactor is called the
hole or electron mobility μn,p in units of cm2/Vs.
x=L
• Drift and resistance:
L 1 L
R
wt wt
Electron motion
85
Drift and Resistance (4/4)
• Experimentally, for
Si at room T:
• This is absolutely
essential to show
our control over
resistivity via doping!
90
3.4.4 High-Field Effects
Figure 3—25
The Hall effect.1
VH • VH = Hall voltage
• cross-sectional area
A = t.w
92
The Hall Voltage
B
Ix
w
VH
t
n-type sample
For current in the positive x direction, electrons flow in the negative x direction.
With B directed out of the plane, electrons are deflected to the bottom of the
sample, so the Hall voltage is negative. The sample width is w and the thickness
is t.
93
Hall Effect Calculations
In steady state, the total force on the charge carrier is 0:
F qv B E 0
The orientation of the velocity and magnetic field are as follows.
v v x a x and B B z a z
The current density is defined as:
J x nqvx
Jx
Bz E y
nq
Ey
We define the Hall Coefficient as follows. RH
J x Bz
For the sample geometry given above, Ey = VH/w, and Jx = Ix/w.t,
so…
1 VH t
RH 10 8
nq I x B z
The factor of 108 allows us to use Gauss (instead of Wb/cm2) for B. 94
Hall Mobility
The Hall coefficient gives the carrier density; the sign gives the carrier
type (negative for electrons and positive for holes).
1 VH t
RH 10 8
nq I x B z
We can also find the Hall Mobility if we know the resistivity (or
equivalently the conductivity s).
m RH
95
Example
96
Hall Effect Sensor
B
(B is emerging from the paper.)
w=
0.10 cm t=
0.025 cm
L = 0.20 cm
+ -
VH Ix
97
Data Analysis
Least-squares fit
x However, if we make a plot of VH vs.
x x Ix and then calculate RH from the
x slope, we can account for
x x experimental error and get a more
x x accurate value.
You will need to look at the
Ix
equations describing RH to see how
it relates to the slope of this curve.
This graph assumes that VH increases
with increasing Ix. Your data may be
different.
98
5. Invariance of the Fermi Level at Equilibrium
• Let us consider two materials in intimate contact such that
electrons can move between the two
• Qualitatively
– At thermal equilibrium there can be no discontinuity or
gradient in the Fermi level.
– Assume two dissimilar semiconductors
• There can be no net charge transport at thermal
equilibrium, therefor no net charge transfer
• The charges must balance each other. This leads to:
dEF
0
dx
99
Invariance of the Fermi Level at Equilibrium (2/2)