ME 4313

Introduction to Vacuum Technology

6. High Vacuum Pump

By Ming-Chyuan Lu

Department of Mechanical Engineering

National Chung Hsing University
Vacuum Pump Operating
Ranges
High Vacuum Pump

Momentum Turbo Molecular Pump

Transfer Pump
Diffusion Pump

Capture Pump Cryogenic Pump

Ion Pump
 Turbo Molecular Pump
Introduced by Becker in 1958
Molecular pump by Gaede in 1913

At that time, high cost and low speed compared to

diffusion, but no hydrocarbons backstream and no
trap is need
Characteristics of Turbo
Pump
Modern Turbo Pump
• High pumping speed

• Compression ratio

• High exhaust pressure

• No hydrocarbon backstream

• Back by oil free pump

Gas Flow and Gas/Blade
Collision
Mechanism
Compress gas by momentum transfer from high speed
rotating blades to gas molecules

Rotor Speed 24,000 ~80,000 rpm (by Motor Set)

Multi-Stages for higher compression ratio

Momentum transfer is more efficiently in the molecular flow

Pump exhaust pressure must remain in the molecular or

transition regime ( No exhaust to atmosphere)
Section View of Turbo
Molecular Pump
 Exhaust Pressure and
Power

Foreline pressure increase to viscous flow

regime Torque Increase

Due to Power =Rotor Speed X Torque

Limited power
Rotor speed suddenly decrease and loss in gas
pumping speed
Constant Speed
Power consumption increase
Maximum Compression
Ratio and Maximum Flow

Q
S=
∆P
Maximum △P S=0

Maximum S △P=0
Speed-Compression
Relations

Single Stage Development

Blade impart a directed momentum to a gas
molecule on collision

Angled blade make the

probability of a gas molecule
being transmitted from the inlet
to the outlet much greater than
in the reverse direction
 Speed-Compression
Relations
Single Stage Development
Γ1 , Γ2 The number of molecules incident on the
disk per unit time at the inlet and outlet
Γ1 𝑤𝑤 = Γ1 𝑎𝑎12 − Γ2 𝑎𝑎21
Γ2 a12 W
= −
a12, Fraction of Γ1 transmitted Γ1 a21 a21

from the inlet to outlet

a21, Fraction of Γ2 transmitted from

the outlet to inlet

W, Ratio of net flux to incident flux

 Maximum Compression Ratio
If the gas temperature and the velocity distributions are
the same everywhere
𝑃𝑃2 𝑎𝑎12 𝑊𝑊
= 𝐾𝐾 = −
𝑃𝑃1 𝑎𝑎21 𝑎𝑎21
K: ratio of outlet to inlet pressure
𝑎𝑎12
At Zero Flow 𝑊𝑊 = 0 ⇒ 𝐾𝐾𝑀𝑀𝑀𝑀𝑀𝑀 =
𝑎𝑎21
Ratio of forward to reverse
transmission probabilities
Performance of Turbo Pump

Pumping Speed

Compression Ratio

Ultimate Pressure
 Design of Turbo Pump
By Kruger and Shapiro with Monte Carlo Method
Zero flow case

Blade angle

Blade spacing –to-

cord ratio

Blade Speed Ratio

 Mass and Blade Velocity
Effect

Blade Velocity
Gas Mass
𝑉𝑉𝑏𝑏 𝑀𝑀 (Hydrogen < Argon)
𝐾𝐾max ∝
2𝑘𝑘𝑁𝑁0 𝑇𝑇
Temperature

Low Mass < Large Mass

Low blade velocity < High blade velocity

Compression Ration for Different
Locations in Turbo Pump

Locations close to rotor

Smaller speed ratio (V=rw)
Smaller blade spacing-to-chord ratio

Smaller compression ratio

(only 30% of radius designed for H2)
 Compression Ratio for
Different Gas
Zero Flow Case
 Maximum Speed
Maximum Speed is achieved when the compression ratio
across a blade in unit
Maximum Speed Factor (Chang and Jou)
𝑎𝑎12 − 𝑎𝑎21
𝑊𝑊max =
1 − 𝑎𝑎21 Transmission probability

a12 is maximum
Maximum W
a21 is minimum

𝑊𝑊max = 𝑎𝑎12 − 𝑎𝑎21 by Kruger and Shapiro equation)

Maximum Speed
(Chang and Jou)
Net Pumping Speed
Molecular arrival rate is proportional
to thermal velocity 𝑘𝑘𝑘𝑘⁄𝑚𝑚

𝑆𝑆 ∝ 𝑉𝑉𝑏𝑏

Pumping speed of the blade is

approximately independently of the
mass of the impinging molecules
 Practical Operation Range

Max compression < Practical operation < Max Speed

Maximum Speed Factor

Transmission Factor and
Compression Ratio
Measured Pumping Speed
Ultimate Pressure
Ultimate pressure is determined by
• Compression ratio of light gases
• Amount of outgassing
Unbaked turbomolecular pump
• Release of water vapor from the blades
closest to the inlet
• Compression ratio for water release from
the first few blades is much less than Kmax
Ultimate Pressure
Unbaked turbomolecular pump

2X10-7 – 5X10-7 Pa (Varied by Oil Type)

baked turbomolecular pump

2X10-8 – 5X10-9 Pa
 Turbo Pump Design
Multi-bladed structure design for adequate
compression and speed

For high compression ratio (low For high pumping speed (low
pumping speed) nearest the compression ratio) nearest the
foreline) inlet
 Turbo Pump Design
Main Design Parameters
s/b ratio
ψ

Small s/b ratio, ψ Large compression

Large s/b ratio, ψ Large pumping speed

Gas Flow and Gas/Blade
Collision
 Turbo Pump Design Issue

•Bearing Tolerance

•Coefficients of expansion

•Material Stress Limits

Operation note
Inlet flange should be carefully design
Improper loading cause premature bearing failure
Bearing Design
Oil lubricant design

Grease lubricant design

Ceramic bearing

Magnetic bearing
Oil Lubricant Bearing
Grease Lubricant Bearing
 Ceramic Ball Bearings
Design

From Adixen ATP series catalog C11.05

Magnetic Bearing Design
Molecular Drag Pump
Gaede Molecular Drag Pump Holweck Molecular Drag PumP
 Turbo-molecular Drag Pumps
Goal
Increase required foreline pressure from
1~10 mTorr to 30 ~150 mTorr

Dry pump can be used as

backing pump

Clean with hydrocarbon

contamination
Improvement of Molecular
Drag Pump
Commercial Product
Adixen ATH-M series
Magnetic Bearing
System Design
Performance
Flow Rate and Operation
Pressure
Spec. for Turbo Pump
 Operation Principle for
Vacuum System Operation

First On, last off

In General Last On, first off
Turn On
A B C D

Turn Off

D C B A
Diffusion Pump
Diffusion Pump

http://www.varianinc.com/cgi-bin/nav?products/vacuum/pumps/diffusion/nhs35/index&cid=975JINROOOLMKGMJLMMRQGN
Characteristics of
Diffusion Pump
Since 1913
Large pumping speed for almost all
gases in high vacuum range
Highest pumping speed per price in all
types of pumps
Low failure rate
Easy operation

Disadvantage: Oil Back Streaming

 Diffusion Pump From BOC
Edward
Air cooled Water Cooled

http://www.bocedwards.com/index.cfm?markapps/cmpd_
semi/web/index.html~content
 Diffusion Pump from
Varian

http://www.varianinc.com/cgi-bin/nav?products/vacuum/pumps/diffusion/nhs35/index&cid=975JINROOOLMKGMJLMMRQGN
Mechanism
Transfer gas by momentum transfer on collision
with the vapor stream
Fluid heated to vapor
Vapors flow up chimney and out through a series of
nozzles
Supersonic stream downward
Gas is injected into high pressure region by vapor
stream
Vapor condenses at cooled outer wall and returns
to the boiler
 Characteristics of
Diffusion Pump
Pump cannot sustain a pressure drop any
larger than this boiler pressure between its
inlet and outlet

Ranges from 25-75Pa (0.2 – 0.6 Torr)

Depends on pump design and boiler

pressure
Characteristics of Diffusion
Pump

Diffusion pump cannot eject gas to atmospheric

pressure

Must backed by another pump to keep foreline below

the critical forepressure

Forepressure exceeds cirtical pressure

pumping action ceases at high pressures
because the directed supersonic vapor stream
no longer extend from the jet to the wall
Multi-Stage Pump
Practical Pump

Several stages of compression

Inlet pressure and pumping speed will be

unaffected by the forepressure as long as it is
below the critical value
<3X10-7 Torr without trapping
< 3X10-11 Torr when trapped with liquid nitrogen
 Multi-Stage Pump
Gas flow Q is the same through each stage

The top jet has the largest speed and the lowest
pressure drop

The last jet has the greatest pressure drop with

smaller pumping speed

Many pumps use a vapor ejector as the last stage

Speed – Throughput
Characteristics
Four operating Regions

•Constant Speed

•Constant Throughput

•Mechanical Pump
Dominant

•Compression ratio
Four Operation Regions
Constant Speed
•Normal operation range
•0.5 pumping efficiency for the pump alone
•10-1 ~10-9 Pa
•Q rises linearly with pressure below the critical inlet
pressure

Constant Throughput
•Maximum useable Q is at the critical inlet pressure
 Four Operation Region
Mechanical Pump Dominant region
•Throughput increases in accordance with
the speed of the backing pump
Compression ratio
Low pumping speed due to finite compression
ratio
For well designed pump:
•Exceeding critical forepressure – by equipment malfunction

•Exceeding critical inlet pressure – by incorrect pressure

 Pumping Speed for Gases
Low compression ratio (High Pumping Speed) for
light gases, 103~106 .(108~1010 for heavy gases)

Why ??

Feasible
reverse flow
for light gases
Pumping Speed with Baffle
 Ultimate Pressure
Decided by
• Compression limit
• Wall outgassing
If ideal pump without wall outgassing
Partial Pressures in
Pf 1 Pf 2 Pf 3 the foreline
Pu = + + +
K1 K2 K3
Compression ratios
 Ultimate Pressure
If operation in constant speed range
Independent flow
Q1 Q2 Q3 for each gas
Pu = + + +
S1 S 2 S 3
Pumping speed for
each gas
Affected by • Fluid released by the trap
• Gases dissolved in the fluid • Compression limit
Boiler Heater Input Effect
 Backstreaming
Fractions of pumping fluid from pump to chamber
Five Sources of steady state backstreaming
Evaporation of fluid condensed on the upper walls of
the pump
Premature boiling of the condensate before it enters
the boiler
Overdivergence of the oil vapor in the top jet
Leaks in the jet cap
Evaporation of fluid from the heated lip of the top jet
 Gas Type in Backstreaming

DC-705 fluid
 Reduction of
Beckstreaming

Low vapor pressure fluids (1)

Pump Design (2) and (4)

Cooled Cap (3) and (5)

Baffle or trap Further reduction of

backstreaming
 Baffle
Device that condenses pump fluid vapors
and return the liquid to the pump boiler
Cold Trap
Baffle and Cold Trap
Effect of Trap on Backstreaming
Diffusion Pump Backstreaming
Backstreaming Rate with
Heating
Pumping Fluid
Cost of Fluid
Operation Range for
Diffusion Pump (Again)
Commercial Product
Varian VHS Series
Spec. for VHS Series (1)
Spec. for VHS Series (2)
 Pumping Speed

Varian : VHS-6 Speed and Throughput Curves

 Start Up Operation
(Varian VHS Series)
1. Visually inspect proper amount of diffusion pump
fluid.

2. Evacuate the diffusion pump (rough pump) with a

mechanical backing pump with pressure reduced
to less than 0.5 Torr (.66 mbars).

3. Cooling water to the pump body (No cooling water

to the Quick Cool Coil at this time).

4. Turn on the power to the diffusion pump heater.

5. Monitor inlet and foreline pressures.

 Notes for Diffusion Pump

The gas load at the inlet should not exceed the

maximum throughput capability of the pump.

The forepressure should not exceed the

specified tolerable forepressure.

During initial operation, a fresh pump oil may go

through a degassing process and can result in inlet
and foreline pressure fluctuations.
 Shut Down Operation (Varian
VHS Series)

1.Turn off the power to the diffusion pump and continue to back
the diffusion pump with the appropriate mechanical pump.

2. Allow cooling water to flow through the diffusion pump until

the pump body temperature, located just above the boiler plate,
has cooled to a temperature of approximately 130 °F.

3. After isolating the backing pump, the diffusion pump can be

vented to atmosphere. If faster cooling is desired, the pump can
be cooled using the Quick Cool Coil at the bottom of the diffusion
pump.
EDWARDS TVA Series
Cryogenic Pump
Cryogenic Pumps

Capture of molecules on a
cooled surface by weak van
der Waals or dispersion
forces
Mechanism
Surface to be cooled to a temperature at which
the vapor pressure is so low and the residence time
is so long
Mechanism

Cryocondensation

Cryosorption

Cryotrapping
 Crycondensation

Atom will condense on collision with a

cold surface

Example: Vapor pressure of water at 77K

(Liquid Nitrogen) is 10-19Pa
Vapor Pressure for Some Gases
 Cryosorption
Weak attractive force for at least the first few
monolayers of gas or vapor on solid

Why so important to cryopuming?

Allow a substance to be pumped to a pressure far
below its saturated vapor pressure

The only mechanism for helium, hydrogen, and

neon pumping
 Effect of adsorbed layer on
Cryosorption
Limiting sorption capacity is reached after a
few monolayers have been deposited

Porous silver
adsorbent at 77 K
with area > 1cm2
Effect of Temperature on
Adsorption
Gas adsorption at a given pressure is
increased if temperature is reduced
 Ultimate Pressure and
Surface Coverage
Ultimate pressure is a function of the
surface coverage

How to minimized the surface coverage?

Pumping a small quantity of gas

Generate a large surface area with porous

sorbents such as charcoal or a zeolite
 Cryotrapping
A noncondensable gas are adsorbed on the surface or
incorporated within the condensed gas microcrystallites if
they arrives simultaneously

Take place only between certain pairs of

gases
Hydrogen in argon
Helium in argon
Hydrogen in carbon monoxide
Cryotrapping Hydrogen in Argon

Critical argon flow for the beginning of hydrogen trapping

Hydrogen trapping ratio

(H2/Ar) is higher at 5K than 15 K

Lower temperature get more

porous argon

No trapping occurs at T>

23K
Ar/H2
Thermal cycling to higher temp. evolved the previously
trapped hydrogen
Speed, Pressure, and Saturation

Difference in discussion of gas flow between

Cryogenic pump and normal pump
Temperature vary during operation

Particle flow over throughput to formulate

the behavior of a cryogenic pump
Simple Model for Pumping Speed, Pressure
and Satuation

1⁄2
Γ𝑛𝑛𝑛𝑛𝑛𝑛 𝑃𝑃𝑆𝑆 𝑇𝑇𝐶𝐶
Γ𝑛𝑛𝑛𝑛𝑛𝑛 = Γ𝑖𝑖𝑖𝑖 − Γ𝑜𝑜𝑜𝑜𝑜𝑜 = 1−
Γmax 𝑃𝑃𝐶𝐶 𝑇𝑇𝑆𝑆

1⁄2
𝑇𝑇𝐶𝐶
If Γ𝑢𝑢𝑢𝑢𝑢𝑢 = 𝑃𝑃𝑆𝑆
𝑇𝑇𝑆𝑆
Γ𝑛𝑛𝑛𝑛𝑛𝑛 𝑃𝑃𝑢𝑢𝑢𝑢𝑢𝑢
= 𝐶𝐶 1 −
Γ𝑀𝑀𝑀𝑀𝑀𝑀 𝑃𝑃𝐶𝐶

C: Condensation
coefficient
Definition of Pressure in
Cryopump

PS: Saturated vapor pressure for

condensation pump

PS: Pressure obtained from the adsorption

isotherm for sorption pump
 Ultimate Pressure
For cryocondensation: saturated vapor
pressure multiplied by thermal transpiration
ratio 𝑇𝑇𝐶𝐶� 1⁄2
𝑇𝑇𝑆𝑆
For cryosorption: Increase with time because
the saturation pressure over the sorbent is a
function of the quantity of previously pumped
gas
Example: Pult=4.47 PS for TC=300K, TS=15K
 Pumping Speed
For cryocondensation pump
Pumping speed is constant and maximum
when Pult << Pc

For cryosorption pump

Pumping speed affected by prior use

Pumping speed go to zero for

IF Pult = Pc both cases
 Practical Applications
Gas density and temperature are neither
uniform nor in equilibrium

Thermal loading on the pumping surfaces

need to be considered
Simple model only valid for chamber/pump
connected by small aperture

Simple model is sufficient to understand conceptually

the speed-pressure relationships for single gases
Mixed Gases Pumping
Cryotrapping contribute in some cases

Cause desorption of a previously pumped gas

Water vapor inhibit the pumping of nitrogen

CO has shown to replace N2, Kr on Pyrex glass

 Practical Pump

Three effects not accounted in idea cases

Effects of thermal gradients between pumping
surfaces and refrigerator

Gas and radiant-heat loading

Geometrical isolation of condensation and

sorption stages
 Rough Sorption Pump
Since 1900s
•Pumping to 10-1 Pa

•Less pumping capacity for

the least active gas
•Presorption of water vapor
reduce the capacity for all
gases( 2 wt% is detrimental)
 Adsorption isotherms for
Gases
•Adsorptive capacity 1.35Kg of molecular sieve

for nitrogen is quite

high from 10-3 ~105
Pa

•No good for H2, Ne,

He
 Arrangement of Multi-Stage
Crysorption Pump

Close 1 before opening 2

1 2 3

Huntington sorption pump

Biltoft, Benapfl, and Swain Fall 2002

 Multi-Stage Sorption Pump

Improved pumping characteristic

is a result of adsorbate saturation
and neon removel
Ultimate pressure of the second
pump is less than the first stage
Because~
•pumping a smaller quantity of gas
•most of the neon was trapped the first pump by nitrogen
stream (High pumping speed for nitrogen)
Notes for Sorption Pump
Closed valves quickly for preventing back diffusion
of neon

The ultimate pressure is a function of pumping

and baking history

Baking is required to release water vapor and

obtain the full capacity of the sieve (250℃ for 5h)

Safety pressure release valve for the pump is

warmed to ATM or baked
 Structure of Gas
Refrigerator Vacuum Pump
Gas Refrigerator Pump
Compressor + Refrigerator + Pump
Housing
Condensing Array+ Charcoal

Compressor

Refrigerator
 Structure of Gas
Refrigerator Vacuum Pump

Two Stage helium gas Outer surface is attached

refrigerator to the first stage

Inner surface is attached

to the second stage
Pumping Characteristic for Two
Stages

First stage Pumping

Baffle
•Water vapor
•CO2 (If its concentration is
large enough or the surface
temperature is adequately low

Second stage Pumping Refrigerator

•Crysorption for helium, hydrogen, and neon head
•Crycondensation for others
Single Stage Refrigerator
Two Stage Refrigerator
Gas Refrigerator Pump
 Gas Refrigerator Vacuum
Pump

Biltoft, Benapfl, and Swain Fall 2002

Notes for Gas Refrigerator Pump
Temperature of two pumping surfaces is
determined by the total heat flux to the surface

Radiant heat load is reduced by reducing the

emissivities of the inside surface of vacuum wall and
the outside surface of the first stage

Pump is regenerated if it becomes saturated and is

shut down
Regenerated gas released through safety valve, or
pump will become a bomb
Commercial Product
Sorption Pump
 MDC Cryogenic Sorption
Pump

Features

• 1x10-3 Torr vacuum level

• Economical roughing source
• No moving parts
• Vibration free operation
• Heat regeneration
• Positive pressure safety vent
• Multiple pump capability
• Clean and noncontaminating operation
http://www.mdcvacuum.com/searchs/doc/VacuumPumps-Intro.htm
 Accessories
Dewar

Sorbent

Trap

Bakeout heater
http://www.mdcvacuum.com/searchs/doc/VacuumPumps-Intro.htm
Gas Refrigerator Vacuum
Pump
Genesis Cryogenic Pump
Genesis Cryogenic Pump
ICP 200 General Specifications Model ICP 200
Nitrogen 1500
Pumping Speed Hydrogen 2200
(Liter/sec) Argon 1200
Water 4000
Reachable Pressure Torr 10 -9
Maximum Flow Rate for Argon Torr L / sec 10.0
Pumping Capacity Argon 1100
(Std. Liters) Hydrogen 30
Crossover Torr L 300
Standard Cool down Time min. 85

Full Regeneration (min.)

115
Standard Regeneration Time
Quick Regeneration (min.)
45
Weight Kg 22
 Genesis Cryogenic
Compressor

Refrigerant
Gas Helium
Power 99.995 % Min., -
Purity
Phase 3-phase 80°F Dew Point
Frequency 50 / 60 Hz Charge 210 ± 5 psi @ 20
Pressure °C
200 / 200 - 230
Voltage Cooling Water
± 10% VAC
Operating Flow rate 2 gal / min.
19 / 21 A
current Temperature Inlet 4°C to 29°C
Starting Cooling water
131- 151 A 6.0 kW
current heat radiation
CTI Cryo-Torr Cryopump

Cryo-Torr 8F
Cryo-Torr 4F Cryo-Torr 10
CTI Cryo-Torr Cryopump
Ion Pump
Characteristics of Ion
Pump
Reach ultra-high vacuum region without
concern for heavy organic contamination

Pumping speed closely related to the gas

types
Pressure range
extends from 10-2~10-8
Pa for sputter ion
pump
 Mechanism
Common first step

Electric field makes gas

ionized

Titanium on cathode is
sputtered and deposited on
the anode
 Pumping Mechanism
Gas pumping mechanism will be based on one or
more of the following mechanism
Adsorption following molecular dissociation
Gettering by freshly sputtered cathode material
Surface burial under sputtered cathode material
Ion burial following ionization in the discharge
Fast neutral atom burial
 Pumping Speed and
Pumping Mechanism
Organic gases, active gases, hydrogen, and inert gases
are pumped in distinctly different ways
In steady state, reemission rates equal pumping rates

Organic gases
Easily pumped by adsorption and precipitation

Active gases
•reaction with titanium on anode
Easily Pumped by
•Ion burial in the cathode
 Pumping Speed and
Pumping Mechanism

Hydrogen
• Initially Pumped Ion burial and neutral adsorption
• Then diffusion into bulk titanium and forms a
hydride
• Pumping speed does not rate limit unless
indiffusion prevention made on cathode surface
 Pumping Speed and
Pumping Mechanism

Inert Gases
Not pumped efficiently as active gases

Pumped by
•Ion burial in the cathodes
•Reflected neutral burial
in the anodes and
cathodes
•Argon only 1~2 % of the active gas speed
Types of Ion Pump
Diode Triode
Pumping Speed
Pump Designs for Inert Gas
Pumping
 Notes for Ion Pumps
Lifetime of a diode pump is a function of the time
necessary to sputter through the cathodes (Typical
Values: 5000 h at 10-3)

Triode pump slightly better than diode at high

pressure get lifetime less than half the diode

Suffer from the reemission of previously pumped gases,

particularly hydrogen, methane, and the noble gases
 Titanium Sublimation Pump

Titanium is sublimed and deposited on

adjacent wall
Active gases captured on
fresh titanium surface

Hydrogen diffused into

underlying film

Noble gas are not pumped

at all
Pumping speed is determined by the sticking coefficient
Room Temperature Sorption
Characteristics for Pure Gases
Sticking Coefficient for
Gases on Titanium
Commercial Product
Sublimation Panel (Varian)
ULVAC Getter Pump

Model PGT-3F PGT-6F

Evacuation speed (*1) 24m3/(Sm2) <20ºC>/64m3/(Sm2) <-196ºC>

Operating pressure range Ultra-high vacuum of between 10-1 to 10-9Pa

Gases that can be evacuated H2, N2, O2, H2O, CO, CO2

Gases that can't be evacuated He, Ne, Ar, CH4, C2H6 and other organic gases

Leak volume 1.3 x 10-11Pam3/s max.

 Ion Pump (Varian)

VacIon Plus 75
Titanium Sublimation Combination
Pumps (Varian)
Argon and Hydrogen Pumping
Speed
Questions?
&
Comment!
Thanks !!!