Professional Documents
Culture Documents
Gabriel Paciotti
• Introduction
• Key Challenges
• SCM design
• Lessons learned
• Conclusions
• Slit Positioning
– accuracies (~±10 µm / 5 arcmin)
Metallic bellows
• Contamination control
25
20 7.5
15 4.3 5
10 4.9 6.1 15.1
5 5 5
0
Radial Runout at Radial Runout at angular Runout
Zmin [µm] Zmax [µm] [arcsec]
roller screw max runout pulsating component non-rotating components
Lower Blade
Compliant rod connection
Compliant Rod • Minimize perturbations
Metallic Bellows
146 mm
∅ 90 mm
Blade design
• Ti Gr.5
• 47 X 20 mm
• 0.1 mm thick
Blade manufacturing
Photo-etching
Lesson learned:
• masking process critical
• microscope inspection required
Challenging Requirements
• 6 Degrees of Freedom
• High accuracy (±5µm / 25arcsec)
• 4 slit positions
Challenging Environment
• 3 different temperatures
• Maintain high cleanliness
• N2 purging for bearings
Challenging Measurements
• Special features on Carrier
• 3x 2D lasers
• 6 DoFs measured
Solution
• No snubbers
• Double blades
Design
• Compliant link
• Clamped design
• Large margin of safety
However
• Unexpected high crosstalk in
X and Y while excitation in Z
• Connection Rod slippage
• Connection Rod replaced
and glued
“The greatest measure of a man is not the way he handles times of comfort
but in the way he rises through controversy and challenges” Martin Luther King
Q&A
Gabriel Paciotti