Professional Documents
Culture Documents
(38!8!3) NPTEL - Vacuum Technology
(38!8!3) NPTEL - Vacuum Technology
1
Earlier Lecture
• In the earlier lecture, conductance equations for
some commonly used pipes were given.
Q Q
• Pump Speed : S p = System Speed : S s =
pi p
1 1 1
= +
S s S p Co
• Sp depends on vacuum pump and therefore, in
order to maximize Ss, Co should be maximum.
V p1 − pu
• For a constant Ss, we have t p = ln
S s p2 − pu
2
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Outline of the Lecture
Topic : Vacuum Technology
• Conclusion
3
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Introduction
• In the earlier lectures, we have seen the importance
of vacuum in Cryogenics.
5
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Rotary Vane Pump
• Rotary vane pump is a widely used
Vacuum Pumps
pump in vacuum technology.
Gas Transfer
• It is mostly used as a primary
Positive Displacement pump for backing or roughing
stages.
Rotary
6
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Rotary Vane Pump
• The schematic of a Rotary vane
Gas ballast
valve Exhaust
pump is as shown in the figure.
valve
Outlet
Inlet
• It consists of a stationary part,
Stator and a moving part, Rotor,
assembled inside a casing.
Rotor
• Moving component is an
Stator eccentrically placed slotted rotor,
which turns inside cylindrical stator.
Stator
11
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Rotary Vane Pump
102 • The adjacent figure shows the
Single stage Two stage
___ with ballast
pump characteristics for Single
---- without ballast
and Two stage Rotary pumps.
101
• The solid and dotted lines
correspond to pumps with and
without gas ballast arrangements
100
respectively.
−1
• Two stage or multi stage pumps
103 are used to improve the
10 −5
10 10−3 10−1 101
Pressure, mbar
performance and the ultimate
pressure (pu) of the system.
12
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Classification
Vacuum Pumps
13
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Roots Pump
• The schematic of a Roots pump is as
shown in figure.
Inlet
16
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Roots Pump
• The over heating of casing results in
thermal expansion of lobed rotors
Inlet and thereby, the possible contact
between the moving parts.
Outlet
17
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Roots Pump
103 • The adjacent figure shows the
pump characteristics for a single
stage Roots pump.
102
• Initially, the pumping speed (S)
increases steadily with the drop
in pressure.
101
18
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Classification
Vacuum Pumps
19
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Kinetic Pumps
• Kinetic pumps are used when a higher degree of
vacuum, in comparison to Rotary or Roots pump,
is needed.
24
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Diffusion Pump
• The figure shows the variation of
pump speed (S) with pressure.
−8 −6 −4 −2
• The schematic of a Diffusion pump
10 10 10 10
Pressure, mbar together with a Rotary pump is as
shown in the next slide.
25
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Diffusion Pump
• As mentioned before, diffusion
pump is effective in free
Vacuum molecular regime, the initial
Chamber
pump down of the system is
Roughing valve done using a Rotary pump.
26
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Diffusion Pump
• When the pressure in system
falls well below, to ensure a
Vacuum free molecular regime, the
Chamber
diffusion pump is put to use.
Roughing valve
27
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Diffusion Pump
Roughing valve
Backing valve
Diffusion Pump
Rotary Pump
28
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Classification
Vacuum Pumps
29
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Turbo Molecular Pump
• The schematic of a Turbo Molecular
Rotor Pump (TMP) is as shown.
Stator
31
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Turbo Molecular Pump
• A TMP has 6 to 7 stages depending
Rotor upon the level of vacuum required.
Stator
Turbine stages
Rotary Pump
33
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Classification
Vacuum Pumps
34
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Cryo Pump
103 • The adjacent figure
He
shows the variation of
10 equilibrium vapor
H2 pressure with
10−1 O2
Xe temperature for
Ne H20
10 −3
N2 different gases.
10−5
• When the temperature
10−7 is less than 20 K, the
vapor pressure of
10−9 gases other than He,
2 10 20 50 100 200 300
Temperature, K H2 and Ne are close
to 10-9 mbar.
35
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Cryo Pump
Louvered • The schematic of a Cryo pump is
Radiation
Vacuum Space Baffle
as shown in the figure.
20 K
Shield
• A two stage cold head unit
produces temperatures of 70 K (1st
70 K
Shield
stage) and 20 K (2nd stage).
20 K IInd
Stage
70 K Ist
• Adequate shielding and insulation
Stage is provided to avoid various heat in
leaks.
Cold
Head
Drive • This pump can reach pressures as
10-10 Torr.
36
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Cryo Pump
Louvered
• The vacuuming process involves
Radiation
Vacuum Space Baffle
condensation of the gases onto the
cold head.
20 K
Shield
• As mentioned earlier all the gases,
70 K
Shield
except He, H2 and Ne are frozen at
20 K IInd 70 K baffle and 20 K cold head.
Stage
70 K Ist
Stage • Gases He, H2 and Ne are adsorbed
onto the charcoal provided on the
Cold underneath of the 20 K shield.
Head
Drive
37
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Cryo Pump
Louvered
• Hence, it is clear that Sp of this
Radiation
Vacuum Space Baffle
pump is directly proportional to the
surface area of cold head.
20 K
Shield
• These pumps are self contained,
70 K
Shield
hydrocarbon free and are cooled by
20 K IInd a two stage cryocooler.
Stage
70 K Ist
Stage
Cold
Head
Drive
38
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Other Pumps
• The other commonly used pumps are
• Getter Pump
• Sputter Ion Pump
• Sublimation Pump
• Adsorption Pump
39
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Pump Selection
• The correct selection of a vacuum pump depends
on the following factors.
• Working process
• Ultimate pressure (pu) required
• Total volume, surface area of the chamber
• Out gassing rate and operating pressure
• Pump down time required from atmosphere and
special venting or gas recovery requirement
• Dimensions, weight, vibration limits and costs
• Special requirements : Hydrocarbons, reactive
gases, bake out etc
40
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Operating Range
• The adjacent figure
Single Stage Mechanical
shows the operating
Two Stage Mechanical
range for different
vacuum pumps.
Diffusion Pumps
Ion Pumps
Sorption Pumps
Cryo Pumps
41
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
• A self assessment exercise is given after
this slide.
42
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Self Assessment
1. Rotary vane pump is a ___ pump.
2. In a rotary pump, spring loaded exhaust valves
expel ____.
3. In ___ a metered amount of non – condensable
gas is admitted at the high pressure side.
4. ____ is best suited for high mass flow rates.
5. In a kinetic pump, ___ is used in expelling gas
molecules.
6. TMPs operate in ______ regime.
7. Diffusion pump, TMP are coupled with ____ pump.
8. ______ of oil is a common problem in diffusion
pumps.
43
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Answers
1. Positive displacement
2. Compressed gas
3. Gas ballast
4. Roots pump
5. Kinetic energy
6. Free molecular flow
7. Backing pump
8. Back streaming
44
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Thank You!
45
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay