INTERNSHIP WORK ON CONTROL LOOP

OF MEMS GYROSCOPE
KOPPULA SATYA SAI SIVA SRINIVAS
July 2, 2022

PROF.ASHOK KUMAR PANDEY SIR

Dept. of MECHANICAL ENGINEERING
INDIAN INSTITUTE OF TECHNOLOGY HYDERABAD

1 Abstract
This paper deals with building control loop of dual mass MEMS gyroscope
which is the most used inertial sensor for calculating angular rotation.Deriving
the transfer functions of drive and sense modes control loops simulating them
for results and stability analysis
KEYWORDS: combs,quadrature,closed loop,system,poles,zeroes,quality fac-
tor,drive,sense,stiffness,damping,coupling

2 Introduction
Micro-Electro-Mechanical System (MEMS) gyroscopes used to measure any
device angular motion,this sensor is popular due to its compatible size and
ease of operating.Draper reported the first silicon MEMS gyroscope with
useful performance in 1992. This work became the basis for the successful
Honeywell inertial systems and the starting point for other MEMS angular
rate sensors applied to automobiles, gaming, and control.

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3 Structure of Dual mass MEMS Gyroscope

Figure 1: schematic structure (source: mdpi.com)

3.1 Structural details

Model is constituted by two symmetrical parts.Dual mass structure is pre-
ferred as of its differential detection technique which minimizes error due
to external unwanted forces which are connected by two U-shaped center

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connect springs whose parameters are the same with drive U-shaped spring.
The left and right Coriolis mass are sustained by 2 U-shaped drive springs
(DS-A,B) and 4 U-shaped sense springs (SS-C,D,E,F), respectively, and these
springs are linked by drive and sensing frames. The moving comb fingers are
combined with frames while the static ones are fixed with the substrate. The
whole structure is suspended and supported by 8 drive (DS-C,D,E,F,I,J,K,L)
and 4 sense (SS-A,B,C,D) springs

3.2 Combs and their functions

Drive comb is used to stimulate the drive mode of the gyroscope
Drive sense comb is utilized to detect the amplitude of drive mode
Sense comb is employed to pick up the movement of sense mode;
Force balances comb is used to generate the sense feedback force.

4 Location of MEMS gyroscope in a device

Figure 2: Location of MEMS gyroscope (source: https://ieeexplore.ieee.org/)

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5 Working of MEMS gyroscope
5.1 Principle
MEMS gyroscope works on the principle of Coriolis force

• Consider a mass moving in direction v

• When an angular movement is applied(red arrow),the mass experiences

a force in the mass experiences a force in the direction perpendicular
to both rotation and velocity(yellow arr)

• In a MEMS gyroscope,the resulting physical displacement is then read

using a capacitive sensing interface

Figure 3: coriolis force (source: st.com)

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The Coriolis force has a very simple mathematical form

FC = −2m(Ω × v)
Fc = coriolisf orce

m=mass
Ω = angularvelocity
v=tangential velocity

5.2 Motion of Coriolis mass

The drive U-shaped springs stiffness coefficients are large along y-axis and
very small in x direction while sense springs have the adverse characteristic.
When the structure works, the drive combs support the electrostatic force to
stimulate the drive frame and the Coriolis mass (together with SS-C,D,E,F)
to move along x direction, and no displacement is generated in sense direc-
tion because of SS-A,B. When there is an angular rate z input around the
z-axis, the Coriolis mass together with sense frame and DS-A, B will have a
component motion in y orientation under the influence of Coriolis force (the
drive frame will not move in y-axis because of the effect of DS-C,D,E,F), and
then this displacement involved with ΩZ is detected by the sense combs.

5.2.1 Four order modes

1st order mode : Drive in-phase mode
2nd order mode : Sensing in-phase mode
3rd order mode : Sensing anti-phase mode
4th order mode : Drive anti-phase mode

a)Drive in-phase mode : in which both masses together with drive

frames vibrate toward same direction along drive axis (x direction)

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 b)Sensing in-phase mode : in which both masses together with sense
frames vibrate in same directions along sensing axis (y direction)

c)Sensing anti-phase mode : in which both masses together with sense

frames vibrate in inverse directions along sensing axis (y direction)

d)Drive anti-phase mode : in which both masses together with drive

frames vibrate in inverse directions along drive axis (x direction)

Figure 5: sensing in-phase

Figure 4: drive in-phase mode mode

Figure 7: drive anti-

Figure 6: sensing anti-phase phase mode(source:
mode link.springer.com)

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5.2.2 Working modes
Out of the four order modes.The real working drive mode is considered to be
pure anti-phase drive mode (the fourth mode). Considering the real working
sensing mode is formed by second and third modes we derive the motion
equations
1.Drive anti-phase
2.Combination of sense in-phase and anti-phase

5.3 Drive and sense mode movement equation

Considering the real working drive mode ie anti-phase drive mode (the fourth
mode) and real working sensing mode is formed by second and third modes
Therefore,sensing mode displacement for ideal gyro structure model given by

y=y1+y2

y1=displacements of sensing in-phase; y2 = displacements of sensing anti-

phase modes.Drive mode is stimulated with amplitude ωd and sense modes
with coriolis force Fcor

5.3.1 Damping and Stiffness

we consider gyroscope working as spring mass damping system so there arises
damping and stiffness during the movement of coriolis mass
There are 3 types of each damping and stiffness in the movement of coriolis
mass
Types of damping :
1.Drive mode effective damping
2.Sense mode effective damping
3.Coupling damping between drive and sensing in-phase and anti-phase modes
Types of stiffness :
1.Drive mode effective stiffness
2.Sense mode effective stiffness
4.Coupling stiffness between drive and sensing in-phase and anti-phase modes

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5.3.2 Abbreviations
x=displacement of drive anti-phase mode;
y1=displacements of sensing in-phase
y2 = displacements of sensing anti-phase modes.
ω x2 = frequency of drive anti phase;
ω y1 = frequency of sense in phase;
ω y2 = frequency of sense anti phase
we know stiffness(k)=ω 2 m so
kxx = ωx 22 mx =Drive mode effective stiffness
ky1y1 = ωy 21 my =Sense in-phase mode effective stiffness
ky2y2 = ωy 22 my =Sense anti-phase mode effective stiffness
kxy1 , kxy2 , ky1x , ky2X =Coupling stiffness between drive, sense-in;drive,sense-
anti;sense-in,drive;sense-anti,drive modes respectively
similarly effective damping(c)= ωm Q
so
cxx = ωx2 mx /Qx2 =Drive mode effective damping
cy1 y1 = ωy1 my /Qy1 =Sense in-phase mode effective damping
cy2y2 = ω y2 my /Qy2 =Sense anti-phase mode effective damping
cxy1 , cxy2 , cy1x , cy2X =Coupling damping between drive,sense- in;drive,sense-
anti;sense-in,drive;sense-anti,drive modes respectively

5.3.3 Derivation
m dD2 /dt2 + c dD/dt + kD = F (1)

m=[mass in drive anti ,sense in ,sense anti modes]

D=[displacement in drive anti ,sense in ,sense anti modes]
F=[Force in drive anti , coriolis force(−2mc Ωz Vdrivemode )
i.eVdrivemode = ẋ in both sense in and sense anti modes]
 
mx
m = my 

my
 
x
D = y1 

y2

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  
Fd sinωd t
F = −2mc Ωz ẋ
−2mc Ωz ẋ
 
kxx kxy1 kxy2
k = ky1x ky1y1 0 
ky2x 0 ky2y2
 
cxx cxy1 cxy2
c = cy1x cy1y1 0 
cy2x 0 cy2y2
so from equation(1) we have
x(t) = Ax cos(ωd t) (2)
y1,2 (t) = Ay sin(ωd t) (3)
and Fcoriolis (t) = −2mc Ωz ẋ = −2mc Ωz Ax ωd sin(ωd t) (4)

6 Control system
we are able to derive the movement equation of both drive and sense modes
now we try to implement control loop for the gyroscope system.

6.1 Definition and classification

Input output and connecting devices combines to form a system and a Control
system just regulates the behavior of other devices in the loop to provide the
desired output.Based on feedback paths control systems can be classified as
open and closed loop.if it has a feedback its closed system in which we can
have much control on output.

Figure 8: control system (source: circuitbread.com)

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6.2 Transfer function of control system
The transfer function defines the relation between the output and the input
of a dynamic system, written in complex form (generally s variable).
Generally it is the fraction of output to input frequency domain signals which
we get after Laplace transforming the time domain signals.we need Laplace
transform because it converts time domain signals to frequency domain which
is more convenient for measurements of systems performance,sensitivity to
noise of any higher order and to apply techniques which could be used to
determine the stability of the system.

Figure 9: System response in the time and frequency domains (source:

en.wikipedia.org)

where r(t)=input and c(t)=output

now taking Laplace transform
the transfer function G(s) is given by
C(s)
G(s) =
R(s)

6.2.1 Laplace transform synopsis

Let us assume that the function f(t) is a piece-wise continuous function, then
f(t) is defined using the Laplace transform. The Laplace transform of a func-
tion is represented by L[f(t)] or F(s)

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 R∞
F (s) = 0
f (t)e−st t′

6.3 Frequency domain analysis in control system

Given Time domain signals(r(t);u(t)) are Laplace transformed to enter a
mathematical domain where processes are viewed in the frequency domain
and Laplace transforms are graphed on a complex plane called as S plane

6.4 Block reduction

Figure 10: block reduction (source: electronicscoach.com)

Y1 (s) = X(s)G1 (s)

Y2 (s) = X(s)G2 (s)
Y (s) = Y1 (s) + Y2 (s)
Y (s) = X(s)G1 (s) + X(s)G2 (s)
Y (s) = X(s)[G1 (S) + Gs (s)]

6.5 Order of the system

The order of a control system is determined by the power of ’s’ in the denom-
inator of its transfer function.Order of the system is defined as the order of
differential equation governing the system.Order of the system helps to find
out the number of poles of the transfer function

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6.5.1 First order system
If the power of s in the denominator of the transfer function of a control
system is 1, then the system is said to be first order control system.

6.5.2 Time response of First order system

Figure 11: Time response of First order system with unit step input(source:
simulink)

6.5.3 Second order system

If the power of s in the denominator of the transfer function of a control
system is 2, then the system is said to be second order control system.

6.5.4 Time response of Second order system

Time response of second order transfer function
s+2
T (s) = s2 +6s+3 is plotted in MATLAB software and matlab SIMULINK.

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 Figure 12: Time response of second order system(source:matlab)

Figure 13: Time response of second order system using simulink(source:

simulink)

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6.6 Poles and zeroes
Transfer function=numerator/denominator
Zeros=roots of numerator
poles=roots of denominator
Usually, pole-zero diagram is created by plotting the roots in the s-plane
(real and imaginary axes)

Figure 14: pole zero map (source: matlab)

s+2
Pole zero map of transfer function T (s) = s2 +6s+3 is plotted above in
matlab simulink

6.7 Stability of control system

System stability is one of the most important performance specification of a
control system. A system is considered unstable if it does not return to its
initial position but continues to oscillate after it is subjected to any change
in input or is subjected to undesirable disturbance.
The stability of the system depends only on the location of poles but not
on the location of zeros.If the poles are real and left side of s-plane, the step

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response approaches a steady state value without any oscillations.If the poles
are the complex and left side of the s-plane, the step response approaches a
steady-state value with the damped oscillations.

Figure 15: Figure 16:

Figure 17: Stability of the with respect to poles location in the s-plane
(source: testbook.com)

The above figures 12,13 and 14 shows the variation in stability of the
system based on the location of poles.

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6.8 Transfer function of damping system
Transfer function of Gyroscope could be derived by assuming it as a spring
mass damping system

Figure 18: spring mass

damper system (source: cook- Figure 19: free body diagram
ierobotics.com) (source: cookierobotics.com)

dx d2 x
kx(t) + c + M 2 = f (t) (5)
dt dt
applying laplace transform
(∵ L(x′ ) = SX(s)andL(x”) = S 2 X(s) )

kX(s) + cSX(s) + M S 2 X(S) = F (s) (6)

X(s)[k + cS + M S 2 ] = F (s) (7)
1
M
X(s)/F (s) = (8)
(S 2 + ( Mc )S + ( Mk ))
1
M
T ransf er f unction G(s) = (9)
(S 2 + ( Mc )S + ( Mk ))

∵ stif f ness and damping given by k/M =ω 2 ;c/M=ω/Q

1
M (10)
G(s) =
S 2 + ωS + ω 2
.

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7 DRIVE MODE CONTROL LOOP
Drive mode displacement given by from equation (2)

x(t) = Ax sin(wd t)

This displacement is sensed by drive sense combs then amplified,phase shifted

to meet the coriolis force condition of drive signal modulator reference, passed
through full wave rectifier to attain max power signal and at last through
the low pass filter and PID controller this output is driven by voltage Vdc
and given to 4 drive combs to stimulate the drive mode perfectly

7.1 Simulating drive mode in simulink

input:given is drive sense comb signal (sine wave)
ouput:drive comb stimulation force

Figure 20: drive mode control loop(source: simulink)

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 Figure 21: drive mode control loop result(source: simulink)

8 SENSE MODE CONTROL LOOP

8.1 Sense mode open loop

Figure 22: Sense mode open loop (source: ieeexplore.ieee.org)

8.1.1 Transfer function of sense mode open loop

Driving force for sense mode is coriolis force which is obtained by differenti-
ating displacement signal from drive loop.

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 from equation (4) we have
Fcoriolis (t) = −2mc Ωz ẋ = −2mc Ωz Ax ωd sin(ωd t) (11)
∵ sin(ωd t) = 12 (ejωd t − e−jωd t ) and L[eat U (t)] = U (s − a)
1
L[Fc (t)] = Fc (s) = −2mc Ax ωd (Ω(s + jωd ) + Ω(s − jωd ) (12)
2
C(t) = Vdac sin(ωd t + ϕd0 )Vs (t)
∵ sin(ωd t) = 21 (ejωd t − e−jωd t ) and L[eat U (t)] = U (s − a)
1
L[C(t)] = C(s) = Vdac Vs (s + jωd ) + Vs (s − jωd ) (13)
2
and f rom equation (10) we have
1/M
G(s) = S 2 +ωS+ω 2

Vstotal (s) = Fc (s)Gs V (s) (14)

F

∴ Vs (s + jωd ) = Kyc Kpre Fc (s + jωd )G(s + jωd )

(15)
and Vs (s − jωd ) = Kyc Kpre Fc (s − jωd )G(s − jωd )
substituting in equation (13)
1
C(s) = Kyc Kpre Vdac [Fc (s + jωd )G(s + jωd ) + Fc (s − jωd )G(s − jωd )]
2
(16)
by expanding we get
1
C(s) = −2mc Ax ωd Kyc Kpre Vdac [[G(s + jωd ) + G(s − jωd )]Ω(s)
4 (17)
+G(s − jωd )Ω(s − 2jωd ) + G(s + jωd )Ω(s + 2jωd )]
The last two terms in this equation (17) are high harmonics with respect to
Ω(s) and will be negligible af ter the LP F.
1
L[VOopen (t)] = VOopen (s) = −2mc Ax ωd Kyc Kpre Vdac [G(s + jωd ) + G(s − jωd )]Ω(s)
4
(18)
1
letT (s) = [G(s + jωd ) + G(s − jωd )] (19)
4
L[VOopen (t)] VOopen (s)
∴ T ransf erf unction = = = −2mc Ax ωd Kyc Kpre Vdac T (s)
L[Ω(t)] Ω(s)
(20)

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8.2 Sense mode closed loop

Figure 23: sense mode closed loop (source: ieeexplore.ieee.org)

8.2.1 Transfer function of sense mode closed loop

Vs (s) = (Fc (s) − Fyf c (s))Gs V Kamp (21)
F

Fyf c (t) = Vdac sin(ωd t + ϕd0 )Vbf c (t)KF By (22)

VOclose (t) = FLP F f Vbf c (t) (23)
Vbf c = FSCLC Vdem (t) (24)
Vdemclose (t) = C(t)FLP F 1 (25)
∴ VOclose (t) = FLP F f FSCLC Vdem (t) (26)

applying laplace and solving

VOclose (s) 2Vdac Kyc Kpre Kamp FLP F 1 (s)FSCLC (s)FLP F f (s)Ax ωd Gequal (s)
= V2 K
Ωz (s) 4 + dacmyF By Kyc Kpre Kamp FLP F 1 (s)FSCLC (s)Gequal (s)
(27)
keeping FSCLC too big can neglect adding 4 in denominator

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 VOclose (s) 2Vdac Kyc Kpre Kamp FLP F 1 (s)FSCLC (s)FLP F f (s)Ax ωd Gequal (s)
= 2 K
Vdac
Ωz (s) F By
Kyc Kpre Kamp FLP F 1 (s)FSCLC (s)Gequal (s)
my
(28)
VOclose (s) 2my FLP F f (s)Ax ωd
= (29)
Ωz (s) KF By Vdac

9 Monitoring system schematic

Figure 24: Monitoring system schematic (source: ieeexplore.ieee.org)

10 Quadrature error correction:

The quadrature is an unwanted force resulting from the coupling stiffness
between the excitation mode displacement and the sensitive-mode of the
gyroscope.

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 Figure 25: Quad error correction (source: pubmed.ncbi.nlm.nih.gov)

.
Charge injecting correction (CIC): quadrature error electrical signal in
the sense loop
Quadrature force correction (QFC): generates electrostatic force and
balance the quadrature error force.
Coupling stiffness correction (CSC): generates negative electrostatic
stiffness, and corrects quadrature error coupling stiffness.

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11 Simulating control loop in simulink

Figure 26: simulating control loop of gyroscope(source: simulink)

Figure 27: Result of simulating control loop of gyroscope(source: simulink)

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12 Static state results

Figure 28: sense out signal in static state(source: simulink)

13 Conclusion
A sensing closed-loop controller system for a dual-mass gyroscope was pro-
posed in this study, and the controller has advantages of stability and reduced
controlling error.The gyroscope’s performance was enhanced by re balancing
and reducing the Coriolis force that was responsible for sensing mode dis-
placement.The closed-loop sensing circuit and system is created and simu-
lated, and the results of the simulation demonstrate the speed-ability, sta-
bility of the closed-loop sensor system.It is shown that the outcomes of the
experiments closely match the theoretical analyses. The calculated transfer
functions and the simulations can offer helpful recommendations for gyro-
scope sensitivity designs.

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14 Acknowledgment
I would like to express my sincere thanks and gratitude to Prof.Ashok kumar
pandey sir for letting me work on this project. I am grateful for his support
and guidance in completing this project.
I am very thankful to J. Sai Kishore sir and Rakesh Dash sir. I was
able to successfully complete this project with the help of their guidance and
support. Finally, I want to thank all my supporters in this project.

15 References
[1] Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-
Loop System DOI: 10.1109/ACCESS.2020.2977223
[2] Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-
Gyroscope Operating at Atmospheric Pressure Sensors 2015, 15, 2453-2472;
doi:10.3390/s150202453
[3] Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Com-
pensation http://dx.doi.org/10.5772/intechopen.74364
[4] Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical
coupling DOI:10.1007/s00542-013-1947-0
[5] Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadra-
ture Error Correction Methods DOI: 10.3390/s16010071

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