Introduction

AS-74.3136 Introduction to Microsystems

Quan Zhou
Course in a Nut Shell
 AS-74.3136 Introduction to  Literature
Microsystems, 3 ECTS ◦ Lecture notes
 Lectures 24 h, including ◦ Complimentary materials
seminars,  e.g. S. Fatikow & U. Rembold: Microsystem
Technology and Microrobotics
 Exercises, design work
 Home page
 Requirements
◦ https://noppa.tkk.fi/noppa/kurssi/as-
◦ Exam 74.3136/
◦ Exercises
◦ Design work with final seminar
 Responsible lecturer
◦ Quan Zhou, Dr. Tech.
 Assistant
◦ Ville Liimatainen
Requirements
 Exams
◦ Check noppa, oddi

 Grade
◦ Final exam, 30 points, 50 % to pass the course

 Bonus
◦ Design work: written report + seminar presentation (maxiumum10 bonus points);
◦ Bonus from attendance at lectures: 0.5 point for each lecture
(2 hrs), maximum 5 points

 Exercises, design work and attendance at seminar presentations are obligatory

 Number of exercise and time are tentative

◦ Changes will be anounced on the course webpage
Design Work
 Maximum 10 bonus points
 proposal of your innovative
microsystem or application of
microsystems
 Topics and instructions will be given on
11.02.2010
◦ You can also propose your own topic
 Work in group of two
 Groups that create good designs can
carry over the designs and implement
them in the project course AS-0.3200
Automaatio- ja systeemitekniikan
projektityöt (2-9 op)
 The best group will automatically be
given 10 points bonus
 Written report
◦ Recommended length of the report: 5-10
pages (A4)
◦ Language: English
◦ Instructions for report writing will be given
later
◦ Return by email with attached MS Word
document to the assistant
◦ Dead-line for submitting the report
27.04.2010
 Oral presentation
◦ Date: 29.04.2010
◦ Prepare you Powerpoint file and send it to
the assistant by 28.04.2010
◦ Time for presentation: 10 minutes + 5
minutes questioning
◦ Presentation is necessary to pass the
course
◦ Presentation should help understanding
your design (and affects your mark)
Objectives
 The objectives of the course
◦ To give an overview to microsystems
technology (MST)
◦ Being familiar with the possibilities of
microsystems technology
 Facilities for utilizing microsystems in
the future products at different
application areas
Microsystem
User

Human/Machine Interface

Microsystem
Microactuator(s Processing
) circuits

Micromechanis
Microsensor(s)
m

Microworld
Microsystem ...
 No general agreement concerning
the dimensions of a microsystem
(cm...µm)
 One compromise is to refer
microsystems as systems realized
within a very small space and
having at least one microfabricated
component [Fatikow]
 -12
Atom

picometer
-9
Nucleotide
amino acid

nanometer
Virus

log
10
-6
E. Coli bacteria
The size of things

meters
Red blood cell

Hair
micrometer
-3

Flea

Eye
millimeter
0

Human

Blue whale
Terms
 Microelectromechanical system (MEMS)
◦ Used mainly in the USA
◦ Background in IC technology => mass-
production
 Micromachine
◦ Used mainly in Japan
◦ Background in precision engineering
 Microsystems (Microsystems Technology
or MST)
◦ Used mainly in Europe
Benefits of Microsystems
 Reduction in size
◦ integrated, massively parallel systems
◦ portable devices
 Lower manufacturing and operation costs
◦ mass production
◦ less materials
 Performance improvement
◦ higher accuracy, faster response times, etc
◦ new applications
History
 The invention of a transistor in
1947 started the microelectronics
revolution
 The integrated circuit (IC) concept
was proposed in the middle of
1950’s
 The first monolithic integrated
piezoresistive pressure sensor
was built in 1971
 The first high-volume commercial
pressure sensor in 1974
 The first monolithic integrated
capacitive pressure sensor was
reported in 1980
 Development of silicon microsensors
often required the fabrication of micro-
mechanical parts
 Parts were fabricated using etching
techniques
 The term bulk micromachining in 1982
 Surface micromachning was born in
1985
 Fabrication of moving micromechnical
parts were introduced in 1987
 An electrostatic micromotor in 1988
 The term MEMS came into use around
1987
 The term MST came into use around
1990
MST, fabrication
 Silicon techniques
 LIGA technology
 Material removal methods
 Material deposition methods
Microfabrication examples
Microfabrication examples ...
Energy transformation methods
 Effects used in sensor ◦ Hall effect
and actuation ◦ Magnetoresistive effect
applications ◦ Shape Memory and
◦ Piezoelectric effect Magnetic Shape Memory
effect
◦ Piezoresistive effect
◦ Thermal effects
◦ Electrostatic
◦ Radiation effects
◦ Electro- and
magnetostrictive effects
◦ Electro- and
magnetorheological
effects
Microsensors
 So far commercially the most successive
MST application
 Pressure and acceleration sensors have had
the largest market volumes
Microsensors ...
 Mechanical microsensors
◦ Inertial sensors
◦ Pressure sensors
 Chemical microsensors and biosensors

www.imec.be
Microsensing
 Optical Microscopy, TEM, SEM, STM, AFM…
 Laser, encoder, interferometer, LVDT, resistive sensor…
Microactuators
 Actuators that generate precise displacement
or motions at micrometer or nanometer scale
 Usually coupled with mechanics, application
specific
Microactuators ...
 Piezoelectric actuators
 Electrostatic and electromagnetic actuators
 SMA/MSMA actuators
 Electro- and magnetostrictive actuators
 Electro- and magnetorheological actuators
Micromechanics
 Micromachined parts
◦ membranes, cantilevers, grooves, gears,
grippers
 Materials
◦ silicon and its oxide, ceramics, quartz, glass,
metals…
Scaling effect
 Dominant physical phenomena
are different from those of the
macro world 1000

10
100
 Adhesive forces (van der Waals
force, electrostatic forces, surface
1 1

1
tension) are more dominant than
gravity in microworld

Capillary
Van der Waals
Electrostatic
Friction
Viscous

Gravity
Inertia
System techniques
 Interconnection issues
 Assembly and packaging
 Modelling and simulation of
microsystems
 Process control and automation
Microrobotics
 Micromanipulation and
microassembly
 Mobile microrobots
Microfluidics
 Phenomena in microfluidics
 Microfluidic devices
◦ Micropumps, microvalves, micromixers,
etc.
 Microfluidic systems
◦ Chemical analysers, drug delivery
systems, etc.
Applications
 Vehicles  Industry process
◦ Automotives, aircrafts ◦ Microfactory
 IT products ◦ Assembly and production
◦ Wireless  Science and
communications Technology
◦ Hard disk drives ◦ Micro- and
◦ Electronic paper nanotechnology
◦ Intelligent clothes ◦ Biotechnology
 Biomedical
applications
◦ Health care
Microsystems
in automobiles
Microsystems in automobiles
 Airbag control
 Control in active suspension
 ABS
 Micromechanical gyroscopes
◦ Handling of car, GPS systems
 Intelligent tire
 Pressure sensors for optimizing fuel
consumption
 Fluid delivery in engines
ESP = Electronic Stabilization
Program
 Introduced with Mercedes Benz A
Capacitive Microsensors
 VTI Hamlin in Finland
◦ Acceleration
 Front and side airbag
sensing
◦ Vibration
 Rough road detection
◦ Inclination
 Vehicle stability
◦ Angular rate
 Vehicle dynamics and
stability
◦ Pressure
 Engine management
Microsystems in airplanes –
UCLA, C-M Ho
Inject Printer Head
Hard disk drives: Read-write head
DMD in DLP Projector
MEMS Based Optical Switch
Smart labels
Chemical analysis system, Micro TAS,
Lab-on-chip
Chemical microplant
Medical Diagnosis
 Gastroscope, size
11x30mm
 to be swallowed
 coulor video camera
 light source
 power
 wireless
communication
 sensors
Medical Diagnosis
Planetary Exploration
Monitoring and Surveillance
Service and Maintenance
 Distributed microsensors /
microsensor arrays in the
process
 Mobile micro inspection
robots
Microhandling and Microassembly
Nanohandling and
Nanomanufacturing
Future microsystem products in
healthcare
Future microsystem products
 Name list + tour