880 OPERATION MANUAL

(See JEOL Manual for Details)

I. PRESETS
A. System lights should be on. ACCEL VOLTAGE and SED buttons off.
B. Vacuum <lx 10'6 T
C. DISPLAY MODE
1 P-MAG and NORM lights ON
2. CONT and BRIGHT fully CCW
D. MAGNIFICATION: 300,000x
E. SCAN MODE: RDC and PIC lights on
F. SCAN SPEED: SLOW 1 light on
G. EOS MODE: SEM light on
H. ECP FOCUS: Midscale (12:00)
I.
PROBE CURRENT (spot size): 2 x 10-12- 2 x 10-11
J. FILAMENT: Set to preheat position (-1.90 -A
Filament current) which should be -11 :00 position
K. Log onto the Scope

II. OPERATING THE PRECOOLED, ALIGNED INSTRUMENT

A. Sample insertion
1. Make sure FILAMENT is desaturated (—11 :00 position) and SED is off
2. While observing the vacuum gauge, (do not allow it to go above 1x10 T) slowly remove
the sample holder from the scope by rotating the handle CCW to the stop and
Carefully puffing it out. Place sample into the holder, making sure it is properly
seated and locked into place!
3. Carefully insert sample holder into the SEG and push it in to start the pre-
evacuation process.
4. Put SEG through 2-3 pre-evac cycles before introducing sample holder
into the column vacuum. Rotate the SEG back and forth one time during pre-
evac to release the air trapped between the o-rings (vacuum will briefly exceed
lx10-6 T)
5. Slowly and carefully introduce the specimen holder into the column by
rotating the handle CW and allowing it to slowly be drawn into the
column. Be careful not to damage the ruby at the end of the specimen
holder.

B. Obtaining an image
1. Release D-MAG and RDC buttons and adjust the mag to 10x - 500x.
2. DISPLAY MODE: CONT to -2:00 position; BRIGHT to -3:00 position
3. Adjust BRIGHT control of SE IMAGE until a dim sweep is observed on CRT.
4. Depress EMP button of EOS MODE
5. Depress ACCEL VOLTAGE ON button and the SED button
6. Turn on PANEL LIGHT paddle switch
7. Increase SE IMAGE CONT control until "snow" appears on CRT (almost max.)
 8. Slowly increase FILAMENT current from 1.90 to 2.10 and wait 8-10 minutes. (-1
minute for hot filament) and observe the emission pattern. Adjust SE IMAGE
CONT and BRIGHT for suitable image.
9. Slowly increase FILAMENT current from 2.10 to 2.30 and observe emission pattern.
Adjust CONT and BRIGHT. Wait 8-10 minutes (-- 1 minute for hot filament).
10. Slowly increase FILAMENT current for proper emission pattern ( FILAMENT
CURRENT should be 2.50-2.60 and EMISSION CURRENT 35-40). Adjust
CONT and BRIGHT and wait 8-10 minutes.
Important: Check saturation point periodically It should stabilize once
filament, Wehnelt and gun chamber reach a constant temperature (about 45
minutes after initial saturation).
11. Depress SEM button of EOS MODE and SR of SCAN SPEED. Adjust XY TILT
controls of GUN ALIGNMENT and CONT and BRIGHT controls of the
SE IMAGE for maximum signal and focus/stigmate the image. The GUN
TILTS may be used anytime during operation. (For critical, high resolution
focusing and stigmating, use D-MAG and SLOW-1)

C. Sample Movement
1. Sample Tilt -30° to +60°.
2. Stage Drive 0 to 2.42 mm X and Y.
3. Y coarse control -back side of SEG.

D. Recording an Image
1. Electronically- see IXRF Manual for details.
a. Open EDS 2000 Program
b. Open new image file (File; New; Image; OK)
c. Push WFM button on DISPLAY MODE module and adjust DISPLAY MODE
BRIGHT to max.
d. Adjust waveform and press NORM button.
e. Click on ACQUIRE button.
1) Acquisition parameters plus Magnification Calibration and
Color Palette can be adjusted under the Properties button.
2) The scale bar can be added or deleted from the image and its
scale changed with the Edit; Annotations button.
f. Image can be saved as a .imx file or exported in a number of other
formats. Remember, .imx is a proprietary format (see IXRF Manual for
details).
2. On Film
a. Adjust waveform as previously outlined.
b. Press PHOT button.
c. Develop film.

E. Removing/Exchanging samples
1. Release SED button
2. Slowly decrease filament to preheat position
3. Return SEG to 0° tilt and midscale (1.21) in X and Y direction.
 4. While observing the vacuum gauge, (do not allow it to go above lxl0-6 T) remove the
sample holder by slowly puffing it out to the stop and rotating it CCW to the
second stop. Then carefully withdraw it from the column and change the sample
as above.
5. Reinsert into the column as before.

F. Shut Down
1. Reestablish Preset conditions and turn PANEL LIGHT switch off.
2. After removing your sample from the holder, prepump the SEG and turn the
sample holder 900 CW (halfway).
3. Remove aperture from beam path.
4. Remove the funnel from the cold trap LN2 Dewar and put the heater coil into the Dewar
(be careful of LN2 splashing!!) and push the ACD button.
5. Fill out LOGBOOK.
 880 COLUMN ALIGNMENT PROCEDURE

I. COLUMN PREPARATION

A. Check PRESETS (See 880 OP MANUAL)

B. Check OBJ. aperture size and place it into the beam path. (Lever left)
C. Remove heating coil from anticontamination device dewar.
D. Using the small plastic funnel, fill the dewar with LN2. Continue to add LN2 as
needed.
E. Choosing an appropriate sample, place it into the column and properly saturate the
filament. (See 880 OP MANUAL)

II. ALIGNMENT PROCEDURE

A. CRT Display
1. SCAN MODE: PIC and B-UP on with cross hairs at center of screen.
2. SCAN SPEED: SR
3. EOS MODE: SEM 1
B. GUN ALIGNMENT
1. Find a suitable feature at 50,000x and place it at the center of the screen.
2. Increase and decrease the PROBE CURRENT (Spot size) four divisions several
times and observe any shift in position of the feature.
3. WHILE AT THE HIGHER PROBE CURRENT (larger spot size), use the GUN
ALIGNMENT XY SHIFT controls to move the feature to the same position it
had at the lower probe current. Continue to move between the two spot sizes,
always adjusting the position at the larger spot size, until the position is the
same at both probe currents. The image will shift between the two extremes,
but should correspond at the two ends. Use GUN TILTS to center beam.
C. OBJECTIVE APERTURE ALIGNMENT
1. EOS MODE: ECP
2. MAGNIFICATION (ECP ANGLE): 2.2°
3. ECP FOCUS: Midscale (12:00)
4. Focus image using COARSE FOCUS control.
5. Using the ECP FOCUS control, rock the image through focus and observe any
image movement.
6. While rocking through focus, adjust the aperture drives until the image does not
move when going through focus.
7. Return EOS MODE to SEM 1 and refocus the image.
D. CL ALIGNMENT
1. CL TILT
a. Focus/stigmate feature at 300,000x and center it on screen.
b. Push the WOBBLER button and adjust AMPLITUDE to comfortable level.
c. Observe any movement of image.
d. Using XY TILT controls, move the image in the direction of sway until
movement is eliminated.
 e. Release WOBBLER button.
2. CL SHIFT
a. Center and focus a feature at 50,000x
b. Using the CLEAR paddle switch, degauss the lens 10 times.
c. Recenter and refocus the feature. This is position O. See Fig. 1.
d. Push the OBJ POL button, which reverses the current through the lens,
and degauss the lens 10 times.
e. Move the FINE FOCUS control through its entire range a few times and
then focus the image.
f. Using the dry board marker, mark the position of the feature on the CRT
screen. This is position A. See Fig. 2.
g. Move the feature back to the center using the stage drives.
h. Release the OBJ POL button and degauss the lens 10 times.
i. Move the FINE FOCUS control through its entire range a few times
and then focus the image.
j. Using the dry board marker, again mark the position of the feature on the
CRT screen. This is position B. See Fig. 3.
k. Draw lines AO and BO on the CRT screen. See Fig. 4
1. Bisect AO and BO with perpendicular lines. See Fig. 5
m. Using the stage drives, move the feature to the point where the two
perpendicular lines intersect.
n. Using the CL ALIGNMENT XY SHIFTS, move the feature back to the center
of the screen.
o. Continue to reverse the current, degauss and refocus until the feature remains
within 1 100nm of the center. The final condition should be with the OBJ
POL released
n. Go to 300,000x and push the WOMB and recheck CL TILTS.

Alignment is now complete. Release the B-UP button, return to a convenient magnification
and place desired sample into scope.

©1988-2006, Operating Manual, Samuel Roberts Noble Electron Microscopy

Lab, University of Oklahoma, Norman, OK USA. This manual is NOT a
substitute for training by SRNEML personnel. Not liable for omissions or
misuse of equipment based on information in this manual. Resident training is
required for all equipment in the Lab.