SOFT LITHOGRAPHY

Exp No. 04 Sparsh Kumar Agarwal ,B201262MT

Aim:
1) To fabricate/prepare elastomeric (PDMS) stamp
2) To characterize the prepared PDMS stamp by using Raman imaging and AFM.

Materials required:
PDMS (poly-di-methyl siloxane) - 4g, Chlorosilicone - 0.4 g, acetone, vacuum
desiccator, glass rod, heating oven, beaker

Characterization:
Raman Imaging, Atomic force microscope (AFM).

Procedure:
1) Before the exp. all the required equipment was cleaned by using acetone.
2) We have taken 4 g of PDMS and the curing agent (chlorosilicone 0.4 g) in a
10:1 weight ratio with the help of weighing balance. Then mixed them
strongly.
3) This mixture was poured on the mold by using glass rod.
4) Put the mold inside the vacuum desiccator and dis gas it for 3- 4times, to
remove air bubbles.
5) Now, placed the sample inside the oven at 120 ⁰C for 20 minutes
6) The mold and the PDMS is allowed to cool down.
7) Then, gently peeled off the PDMS from the mold
8) Finally, the characterized the sample using Raman imaging and AFM

Results
Raman Imaging
Conclusion: -
The PDMS stamp has been prepared using soft lithography technique and the
prepared stamp is characterized by using Raman imaging and AFM.
 Fig 4 -Grain boundaries
Using the grain boundaries information obtained from AFM, we plotted
histograms ofarea, volume, length and perimeter as shown in Fig 4.
From the Area histogram, most of the Grains have an area of 0.3-0.5 µm².
From the Volume histogram, we can clearly see that most of the grains have
volume inthe range of 0.01 μm3.

The Length histogram shows that the majority of the grain has a Length in the
range of 0.5-1 μm.
From the Perimeter histogram, we can observe that majority of grains have
perimeter in the range of 2-3 μm.