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ABSTRACT: Band engineering using the van der Waals heterostructure of two-dimensional materials allows for the realization of
high-performance optoelectronic devices by providing an ultrathin and uniform PN junction with sharp band edges. In this study, a
highly sensitive photodetector based on the van der Waals heterostructure of WSe2 and MoS2 was developed. The MoS2 was utilized
as the channel for a phototransistor, whereas the WSe2−MoS2 PN junction in the out-of-plane orientation was utilized as a charge
transfer layer. The vertical built-in electric field in the PN junction separated the photogenerated carriers, thus leading to a high
photoconductive gain of 106. The proposed phototransistor exhibited an excellent performance, namely, a high photoresponsivity of
2700 A/W, specific detectivity of 5 × 1011 Jones, and response time of 17 ms. The proposed scheme in conjunction with the large-
area synthesis technology of two-dimensional materials contributes significantly to practical photodetector applications.
KEYWORDS: photodetector, MoS2, WSe2, van der Waals heterostructure, phototransistor
Figure 1. Phototransistor based on WSe2−MoS2 van der Waals heterojunction. (a) Optical microscopy image of phototransistor with Ni as source
and drain electrode. (b) Atomic force microscopy image of device based on WSe2 and MoS2 with 9 nm. (c) Raman spectra of the heterojunctions
of WSe2−MoS2, WSe2, and MoS2. (d) Schematic diagram of the device under laser irradiation at the heterojunction.
The stacking of 2D semiconductors allows for the formation states. Therefore, the WSe2−MoS2 van der Waals hetero-
of van der Waals heterostructures, which have spatially uniform structure can serve as suitable channel materials for high-
PN heterojunctions with low trap states. Hence, various performance photodetectors.
heterostructures of 2D semiconductors were investigated for
carrier transport and photonics.25−45 For example, WSe2− 2. RESULTS AND DISCUSSION
MoS2 van der Waals PN heterostructures have been The MoS2 flakes with several layers were exfoliated onto the 90
investigated with respect to electron and hole carrier nm-SiO2/Si substrate by a micromechanical cleavage technique
transport.36,40,44 Although WSe2−MoS2 heterostructures dem- using adhesive tape. The WSe2 flakes with several layers were
onstrate excellent physical properties, limited research has been then exfoliated onto another 90 nm-SiO2/Si substrate. For the
conducted on optoelectronic devices for practical applications. development of the van der Waals heterojunction of WSe2 and
In this study, a high-performance phototransistor based on MoS2, MoS2 flakes with several layers were transferred onto the
WSe2−MoS2 van der Waals heterostructures with a photo- WSe2 flakes with several layers using the pick-up transfer
sensitizing scheme was developed. The phototransistor exhibits method. Thereafter, the 50 nm-Ni electrodes were patterned
a high responsivity (R) of 2700 A/W, specific detectivity (D*) using e-beam lithography and deposited using a thermal
of 5 × 1011 Jones, and response time of 17 ms. The WSe2− evaporator (see the Supporting Information, Figure S1). The
MoS2 heterostructure offers several advantages for the optical microscope and atomic force microscope images of the
photodetector. First, a high photocurrent with dozens of phototransistor based on the van der Waals heterojunction of
microamperes (μA) could reduce the complexity of the sensing WSe2 and MoS2 are shown in Figures 1a and b, respectively.
circuit as the addition of the amplification circuit becomes The thicknesses of the WSe2 and MoS2 layers were measured
unnecessary. Second, it shows a broader spectral response as 9 nm, respectively. The total thickness of the device was 18
compared to a single MoS2 channel due to the absorption nm, thus indicating that the WSe2−MoS2 PN junction in the
resonance of WSe2. Third, an atomically uniform and thin film out-of-plane direction of the channel contained approximately
without-doping process not only simplifies the fabrication 24 layers. Moreover, several devices were fabricated with PN
process but also enables the image sensor array to be of high junctions of various thicknesses, to verify the optimized
resolution. In the proposed device, MoS2 acts as the main performance. The thickness of 9 nm-WSe2 and MoS2 layers
conduction channel; whereas, the heterojunction region of resulted in the highest performance among the devices. We
WSe2−MoS2 acts as a photosensitizer, given that the WSe2− designed the thickness of MoS2 and WSe2 in accordance with
MoS2 heterojunction forms type-II staggered structures in the the depletion layer model for a conventional PN junction
out-of-plane direction. The built-in potential of the PN heterostructure (see the Supporting Information, Figure S2).
junction creates an electric field, thus resulting in the By the stacking of the WSe2 onto MoS2, the PN heterojunction
separation of the photoinduced electron−hole pairs. Con- was formed without doping techniques, given that WSe2 and
sequently, the PN junction enhances the lifetime of the charge MoS2 are intrinsically p-type and n-type semiconductors.
carrier and photogain. In addition, the van der Waals structure Hence, an atomically uniform PN junction can be developed.
provides spatial uniformity and a clean interface with low trap In addition, the van der Waals heterojunction provides a high-
5742 https://dx.doi.org/10.1021/acs.nanolett.0c01460
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Figure 2. Electrical I−V characteristics of the phototransistor based on the WSe2−MoS2 van der Waals heterojunction under the nonillumination
condition. (a) IDS−VGS transfer characteristics at drain voltages of 0.01−5 V. (b) IDS−VDS output characteristics at gate voltages of −10 to 10 V.
Figure 3. Photoresponse of a phototransistor based on the WSe2−MoS2 van der Waals heterojunction. (a) Spatial map of the photocurrent
measured by conducting scan over the surface of the device using a focused laser beam (scale bar: 10 μm) at VDS = 5 V, VGS = −5 V, and Pinc = 2
μW. (b) Energy band diagram of the WSe2−MoS2 van der Waals PN heterojunction with photogenerated carriers under focused laser beam
irradiation. (c) Photoresponse of the IDS−VGS transfer characteristics under nonillumination and illumination conditions, obtained for a back-gate
voltage in the range of −20 to 20 V and drain voltage of 5 V. The illumination wavelength was 532 nm, and the power increased from 0.005−1 μW.
(d) Photocurrent as a function of wavelength from 450−800 nm, thus exhibiting a broad band spectral response for VDS = 5 V, VGS = −5 V, and Pinc
= 50 μW.
quality interface, in addition to low trap states and defects attributed to the strong interfacial coupling between WSe2 and
without lattice mismatch. Figure 1c presents the Raman MoS2, which generated the charge transfer, thus resulting in
spectra of a sample at different positions, namely, the the reduction of the Raman intensity.40 A similar quenching
heterojunctions of WSe2 and MoS2, WSe2, and MoS2. The effect was confirmed in the photoluminescence spectra of the
spectrum of WSe2 exhibited one strong peak at 248 cm−1 and same sample (see the Supporting Information, Figure S3).
two weak peaks at 371 and 392 cm−1, respectively. Moreover, Figure 1d presents the schematic of the device under the
in the MoS2 region, there were two strong peaks at 380 and illumination of a focused laser beam. The photoresponse of the
404 cm−1. However, the intensities of the MoS2 peaks were device was measured due to laser irradiation on the
reduced at the heterojunction of WSe2 and MoS2. This can be heterojunction. The spot size of the laser beam was about 1
5743 https://dx.doi.org/10.1021/acs.nanolett.0c01460
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Figure 4. Dependence of photoresponse on gate voltage and illumination intensity. (a) Photoresponsivity of the transistor based on the WSe2−
MoS2 van der Waals heterojunction, thus indicating a high responsivity of 2700 A/W at an illumination power of 5 nW and gate voltage of 20 V, for
VDS = 5 V, VGS = −10 to 20 V, and wavelength of 532 nm. (b) Specific detectivity of the device as a function of the gate voltage from −2.5 to 20 V
for VDS = 5 V and Pinc = 5 nW. (c) Photocurrent and (d) photoresponsivity of the device as a function of the incident laser power from 0.005−1
μW, for VGS = 20 V, VDS = 5 V, and Pinc = 5 nW.
μm. In the device structure, the MoS2 is the main conduction diagram (see the Supporting Information, Figure S4). The field
channel, whereas the heterojunction of WSe2 and MoS2 acts as effect mobility of the device was found to be 8.42 cm2/V·s
a photosensitizer, which enhances the separation of the based on the maximum transconductance (gm) method. The
photogenerated carriers due to the built-in voltage of the PN gate capacitance Cg = 3.71 × 10−8 F/cm2 for the 90 nm thick
junction in the vertical direction. Moreover, the WSe2 is SiO2 layer and 9 nm WSe2 layer was used in the mobility
isolated from the source and drain contact. calculation. Figure 2b presents the output I−V characteristics,
To investigate the I−V characteristics of the transistor, the in which the drain current gradually increased at drain voltages
transfer IDS−VGS and output IDS−VDS characteristics under between −1 and 1 V in accordance with an increase in the gate
nonillumination were determined. Figure 2a presents the back- voltage from −10 to 10 V. The inset figure presents the Ohmic
gate modulated transfer characteristics of the device, which characteristics of the device. Moreover, the results indicate that
indicates the transport properties of the carriers. At the the MoS2 conduction channel is effectively modulated by the
negative gate voltages from −20 V to −10 V, the drain current back-gate, whereas the screening effect of WSe2 is negligible.
was suppressed at a low drain voltage of 0.01 V; however, it The optoelectronic characteristics of the device were then
increased in accordance with an increase in the drain voltage evaluated under the irradiation of a focused laser beam (λ =
from 0.05−5 V. The hole carriers from WSe2 are injected into 532 nm). The diameter of the laser beam spot is recorded as
the MoS2 channel when the gradient of the MoS2 energy band 872 nm by the formula of d = k(λ/NA), where k = 0.82 for the
is changed by the drain voltage. At a gate of −10 to 0 V, the Gaussian beam shape and the NA is 0.5, which is small enough
drain current exhibited negative differential resistance (NDR) to illuminate on the WSe2−MoS2 heterostructure. Figure 3a
characteristics. This can be attributed to the decrease in the presents the spatially resolved photocurrent map obtained
majority carriers of the main conduction channel of the MoS2 from a scan conducted over the surface of the device using a
due to recombination between the electrons in the MoS2 and positioning stage. The photocurrent was measured at the
holes in the WSe2. Similar results for the NDR of the transistor heterojunction of WSe2 and MoS2, thus indicating that the
based on the heterostructure were reported.36,37,40 At a gate photogenerated carriers in the PN junction were effectively
voltage of 0−20 V, the drain current exhibited the typical separated by the built-in electric field. The photovoltaic effect
characteristics of an MoS2-based transistor. In this region, was observed at a gate and drain voltage of 0 V, thus
WSe2 are depleted, whereas MoS2 electrons are accumulated. confirming that the PN junction was well-formed in the device
In general, with an increase in the drain voltage, the drain (see the Supporting Information, Figure S5). Information on
current increased due to its proportional relationship with the the equipment used for the photocurrent mapping is shown in
electric field between the source and drain. This charge Figure S5. Figure 3b presents the energy band diagram of the
transport mechanism can be explained by the energy band PN junction under laser beam irradiation in the out-of-plane
5744 https://dx.doi.org/10.1021/acs.nanolett.0c01460
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Figure 5. Photoresponse dynamics. (a) Time-resolved photoresponse of the device, thus indicating excellent ON/OFF switching characteristics,
which were achieved using an optical chopper with a frequency of 5 Hz, for VGS = −5 V, VDS = 5 V, and Pinc = 400 nW. (b) Response time as a
function of the gate voltage, inclusive of the rise and decay time. (c, d) Energy band diagram of MoS2 under illumination conditions upon the
application of gate voltages below and above the threshold voltage. The gate-voltage-dependent response time can be explained by the energy band
diagram with trap states, where CB is the conduction band, VB is the valence band, and EF is the Fermi-level.
direction. When the focused laser beam irradiation was respectively. For energy band structures of multilayer MoS2
incident on the heterojunction of WSe2 and MoS2, the and WSe2, the conduction band minimum and valence band
electrons in WSe2 were transferred to MoS2, whereas the holes maximum for different values of momentum are located along
in MoS2 were transferred to WSe2. This resulted in the the Γ−K direction, which means that the indirect-gap
photogating effect, wherein the charges modulated the transition is dominant.46 However, the direct-gap transition
conductance of the MoS2 channel. Figure 3c presents the can also be realized at the K or H point of the Brillouin zone
photoresponse of the IDS−VGS transfer curve at a drain voltage between the conduction and valence bands with relatively
of 5 V under the focused laser beam irradiation within a power lower quantum efficiency compared to the monolayer MoS2
range of 5 nW−1 μW, (λ = 532 nm). At gate voltages greater and WSe2, which are direct-gap materials.46 In addition, we
than −10 V, the photocurrent (IPH = Iilluminated − Idark) observed the photoluminescence spectra as shown in Figure
gradually increased in accordance with an increase in the S3, which provides evidence of direct transition in WSe2 and
incident laser power. As the illumination laser intensity MoS2. Therefore, it is considered that the absorption
increases, the number of photoexcited carriers increases, and resonances occur at laser wavelengths of 680 and 760 nm.
they are separated by the WSe2 and MoS2 PN heterojunction. Photoresponsivity is a significant figure of merit for a
Hence, the magnitude of the photocurrent is enhanced with photodetector. Figure 4a presents the photoresponsivity at
increasing incident power. With an increase in the electric field different gate voltages and incident laser powers. The
strength between the source and drain, the drift velocity of the
wavelength of the laser was 532 nm, and a drain voltage of 5
photogenerated electrons in the MoS2 channel increased, thus
V was applied. The photoresponsivity was determined as the
resulting in a decrease in the carrier transit time Ttransit. In
l2
ratio of the photocurrent (IPH) to the incident laser power
particular, Ttransit = , where l, μ, and VDS are the length (Pinc), i.e., or (IPH /Pinc). At gate voltages of −10 to 5 V, the
μVDS
between the source and drain, carrier mobility, and drain photoresponsivity increased in accordance with an increase in
voltage, respectively. The carrier transit time of the device was the gate voltage. However, saturation was reached at a gate
calculated as 25 ns. A shift in the threshold voltage indicates a voltage of 5 V. When the electrons were accumulated in the
photogating effect where charges separated from the PN MoS2 channel by the modulation of the back-gate voltage,
junction modulate the conductance of the MoS2 channel. traps states were occupied by the electrons, thus enhancing the
Figure 3d presents the spectral photocurrent response of the conversion efficiency of the light to electrons. The device
device at wavelengths of 450−800 nm, bias of VGS = −5 V, VDS demonstrated a high photoresponsivity of 2700 A/W at a laser
= 5 V, and Pinc = 50 μW. Two peaks were observed at 680 and power of 5 nW. This value is higher than or comparable with
760 nm, which correspond to photon energies of 1.8 and 1.6 those reported in previous studies on phototransistors based
eV, in addition to the bandgaps of MoS2 and WSe2, on 2D materials. The PN heterojunction of WSe2 and MoS2
5745 https://dx.doi.org/10.1021/acs.nanolett.0c01460
Nano Lett. 2020, 20, 5741−5748
Nano Letters pubs.acs.org/NanoLett Letter
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Heterojunction Phototransistors for Wide-Dynamic-Range Image
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ASSOCIATED CONTENT (4) Park, S.; Kim, S. J.; Nam, J. H.; Pitner, G.; Lee, T. H.; Ayzner, A.
*
sı Supporting Information L.; Wang, H.; Fong, S. W.; Vosgueritchian, M.; Park, Y. J.;
The Supporting Information is available free of charge at Brongersma, M. L.; Bao, Z. Significant Enhancement of Infrared
https://pubs.acs.org/doi/10.1021/acs.nanolett.0c01460. Photodetector Sensitivity Using a Semiconducting Single-Walled
Carbon Nanotube/C60 Phototransistor. Adv. Mater. 2015, 27 (4),
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photoluminescence spectra of WSe2−MoS2, MoS2, and (5) Rim, Y. S.; Yang, Y.; Bae, S.-H.; Chen, H.; Li, C.; Goorsky, M. S.;
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nism of the device; photocurrent maps of photovoltaic Organic−Inorganic Hybrid Phototransistor for Flexible Electronics.
effect; temporal response of the device at the different Adv. Mater. 2015, 27 (43), 6885−6891.
gate voltages; physical parameters for the calculation of (6) Wang, Q. H.; Kalantar-Zadeh, K.; Kis, A.; Coleman, J. N.;
the photoconductive gain; and performance comparison Strano, M. S. Electronics and Optoelectronics of Two-Dimensional
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(7) Fiori, G.; Bonaccorso, F.; Iannaccone, G.; Palacios, T.;
AUTHOR INFORMATION Neumaier, D.; Seabaugh, A.; Banerjee, S. K.; Colombo, L. Electronics
Corresponding Author based on Two-Dimensional Materials. Nat. Nanotechnol. 2014, 9 (10),
Sung-Yool Choi − School of Electrical Engineering, Graphene/ 768−779.
2D Materials Research Center, Center for Advanced Materials (8) Xia, F.; Wang, H.; Xiao, D.; Dubey, M.; Ramasubramaniam, A.
Discovery towards 3D Display, KAIST, Daejeon 34141, Two-Dimensional Material Nanophotonics. Nat. Photonics 2014, 8
Republic of Korea; orcid.org/0000-0002-0960-7146; (12), 899−907.
Email: sungyool.choi@kaist.ac.kr (9) Castellanos-Gomez, A. Why all the fuss about 2D Semi-
conductors? Nat. Photonics 2016, 10 (4), 202−204.
Authors (10) Radisavljevic, B.; Kis, A. Mobility Engineering and A Metal−
Gwang Hyuk Shin − School of Electrical Engineering, Insulator Transition in Monolayer MoS2. Nat. Mater. 2013, 12 (9),
Graphene/2D Materials Research Center, Center for Advanced 815−820.
(11) Kim, S.; Konar, A.; Hwang, W.-S.; Lee, J. H.; Lee, J.; Yang, J.;
Materials Discovery towards 3D Display, KAIST, Daejeon
Jung, C.; Kim, H.; Yoo, J.-B.; Choi, J.-Y.; Jin, Y. W.; Lee, S. Y.; Jena,
34141, Republic of Korea D.; Choi, W.; Kim, K. High-Mobility and Low-Power Thin-Film
Cheolmin Park − School of Electrical Engineering, Graphene/ Transistors based on Multilayer MoS2 Crystals. Nat. Commun. 2012,
2D Materials Research Center, Center for Advanced Materials 3 (1), 1011.
Discovery towards 3D Display, KAIST, Daejeon 34141, (12) Zhang, W.; Huang, J.-K.; Chen, C.-H.; Chang, Y.-H.; Cheng,
Republic of Korea Y.-J.; Li, L.-J. High-Gain Phototransistors Based on a CVD
Khang June Lee − School of Electrical Engineering, Graphene/ MoS2Monolayer. Adv. Mater. 2013, 25 (25), 3456−3461.
2D Materials Research Center, Center for Advanced Materials (13) Kufer, D.; Konstantatos, G. Highly Sensitive, Encapsulated
Discovery towards 3D Display, KAIST, Daejeon 34141, MoS2 Photodetector with Gate Controllable Gain and Speed. Nano
Republic of Korea Lett. 2015, 15 (11), 7307−7313.
Hyeok Jun Jin − School of Electrical Engineering, Graphene/2D (14) Choi, W.; Cho, M. Y.; Konar, A.; Lee, J. H.; Cha, G.-B.; Hong,
S. C.; Kim, S.; Kim, J.; Jena, D.; Joo, J.; Kim, S. High-Detectivity
Materials Research Center, Center for Advanced Materials
Multilayer MoS2 Phototransistors with Spectral Response from
Discovery towards 3D Display, KAIST, Daejeon 34141, Ultraviolet to Infrared. Adv. Mater. 2012, 24 (43), 5832−5836.
Republic of Korea (15) Lee, H. S.; Min, S.-W.; Chang, Y.-G.; Park, M. K.; Nam, T.;
Complete contact information is available at: Kim, H.; Kim, J. H.; Ryu, S.; Im, S. MoS2 Nanosheet Phototransistors
https://pubs.acs.org/10.1021/acs.nanolett.0c01460 with Thickness-Modulated Optical Energy Gap. Nano Lett. 2012, 12
(7), 3695−3700.
Author Contributions (16) Kufer, D.; Nikitskiy, I.; Lasanta, T.; Navickaite, G.; Koppens, F.
† H. L.; Konstantatos, G. Hybrid 2D−0D MoS2−PbS Quantum Dot
These two authors contributed equally to this work.
Photodetectors. Adv. Mater. 2015, 27 (1), 176−180.
Notes (17) Huo, N.; Konstantatos, G. Ultrasensitive All-2D MoS2
The authors declare no competing financial interest.
■
Phototransistors Enabled by An Out-of-Plane MoS2 PN Homo-
junction. Nat. Commun. 2017, 8 (1), 572.
ACKNOWLEDGMENTS (18) Kim, S.-G.; Kim, S.-H.; Park, J.; Kim, G.-S.; Park, J.-H.;
This work was supported by the National Research Saraswat, K. C.; Kim, J.; Yu, H.-Y. Infrared Detectable MoS2
Phototransistor and Its Application to Artificial Multilevel Optic-
Foundation of Korea (NRF) through the Creative Materials
Neural Synapse. ACS Nano 2019, 13 (9), 10294−10300.
Discovery Program (2016M3D1A1900035) and Basic Re- (19) Zhang, Q.; Bao, W.; Gong, A.; Gong, T.; Ma, D.; Wan, J.; Dai,
search Program (2019R1A2C2009171).
■
J.; Munday, J. N.; He, J.-H.; Hu, L.; Zhang, D. A Highly Sensitive,
Highly Transparent, Gel-Gated MoS2 Phototransistor on Biodegrad-
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