1.

Name of each part

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P2 ~ 3

2. Structural drawing
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P4

3. Electrical wiring diagram

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P5 ~ 7

4. Piping diagram
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P8

5. Vacuum control
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P9

6. Control unit (Back of the display)

7. Power supply board
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P10

8. Memory parameter setting

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P11

9. Error detection
10. Heater arrangement
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P12

11. Trouble shooting (temperature)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P13

12. Trouble shooting (pressure)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P14

13. Dismantling the exterior

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P15 ~ 18

14. Adjustmentment of the indicator

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P19

15. Replacement, adjustment, and analysis

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P20 ~ 31

MaintenanceManual THERMOVAC- 1
 SERVICE MANUAL

1. Name of each part

No. Name Outline

1 Door handle
2 Control unit
3 Vacuum pump control terminal
4 Breaker
5 Exhaust air outlet Outside diameter : 19mm
6 Air inlet Outside diameter : 19mm Inside screw: PT1/4
7 Grounding adapter
8 Power cord 1.5m

MaintenanceManual THERMOVAC- 2
 SERVICE MANUAL

NO. Name Outline

1 Door handle
2 Control unit
3 Vacuum pump control terminal
4 Earth leakage breaker
5 Exhaust air outlet Outside diameter 20mm & 30mm (two vents)
6 Air inlet Outside diameter 20mm & 30mm Inside screw PT/4
7 Power cord 2m

MaintenanceManual THERMOVAC- 3
 SERVICE MANUAL

2. Structural drawing

No. Name
1 Heater
2 Temperature sensor
3 Pressure sensor
4 Vacuum valve
5 Step motor
6 Tempered glass 15–20mm
7 Polycarbonate

MaintenanceManual THERMOVAC- 4
 SERVICE MANUAL

3. Electrical wiring diagram

+ AC
– PU
FG AC
CB
J7 P1
HN1
J5 1 J5

P2

H4 H3 H2 H1
P3

PCB1 12 PCB2
HN2 P7
J6 1 J6

Temperature Power COM

J8 1
controller 5 supply A
A
circuit J3 1
board B
M1
B
board 2 PS Pressure sensor 5
3
4 COM
J9 1 A
J10
J4
MV1 A
B
M2
B
J11 J12 J13 5
MV2
CN
4

+ TA
J2 1
–

Code Item Specifications

CN Vacuum pump control terminal DIN4P
CB Breaker 20A
H1–3 Heater 200/300W*
H4 Heater 300/400W*
M1 Vacuum valve
M2 Intake valve
MV1 Pressure control valve VT210P and VT220P only
MV2 Leak valve VT210P and VT220P only
PS Pressure sensor
PU Power unit 12V 4.2A
TA Thermocouple JIS K
PCB1 Control circuit board
PCB2 Driver circuit board
*VT210/VT220

MaintenanceManual THERMOVAC- 5
 SERVICE MANUAL

AC DC 12V

+ AC
– PU
FG AC
ELB
J7 P1
HN1
J5 1 J5

P2

H
P3

PCB1 12 PCB2
HN2 P4
J6 1 J6
CT

PCB3 J8 1
COM
5 A
A
B
M1
J3 1
2 PS B
5 PCB3
3
COM HEATER
4 J9 1 A (Only upper heater)
J10
J4
MV1 A
B
M2
B
J11 J12 J13 5
MV2
CN
4

+ TA
J2 1
–

Code Item Specifications

CN Vacuum pump control terminal DlN 4P
ELB Earth leakage breaker 20A
H Heater 135W 17/23*
M1 Vacuum valve
M2 Intake valve
MV1 Pressure control valve VT230P and VT240P only
MV2 Leak valve VT230P and VT240P only
PS Pressure sensor
PU Power unit 12V 4.2A
TA Thermocouple JIS K
CT Current detection element
PCB1 Control circuit board
PCB2 Driver circuit board
PCB3 Electric current detection circuit board
*VT230/VT240

MaintenanceManual THERMOVAC- 6
 SERVICE MANUAL

MV1
Pressure control (P type only)

MV2
M1
Leak valve
Vacuum valve

Test area
Exhaust air outlet pump

M2
Intake valve
Air inlet

PS
Pressure sensor

Code Item Specifications

M1 Vacuum valve
M2 Intake valve
MV1 Pressure control valve VT210P and VT220P only
MV2 Leak valve VT210P and VT220P only
PS Pressure sensor

MaintenanceManual THERMOVAC- 7
 SERVICE MANUAL

4. Piping diagram
Piping diagram (C type)

Test area Test area

(A) : VT210. 220

(B) : VT230. 240

6 10(A)
SUS 12(B)
SUS

Vacuum valve
Three directional ball valve PT3/8

Exhaust air outlet

10(A) Drawing No. 1220
12(B)
Purge valve
Teflon
Ball valve PT3/8

6
Plug There is a small hole. (0.8mm)
Teflon

Intake inlet
Drawing No. 1221

Piping diagram (P type)

Test area Test area

10 (A) : VT210. 220

(B) : VT230. 240

10(A)
6 12(B)
SUS
Pipe (B)

10 Drawing No. 1014

SUS
Vacuum valve
Pressure- Three directional ball valve PT3/8
adjustable M1
valve Exhaust air outlet
Solenoid valve 10(A) Drawing No. 1220
MV1 12(B)
Teflon

MV2

10
6
Purge valve SUS
Teflon
Ball valve PT3/8

Pipe(A) Intake inlet

Drawing No. 1030 Drawing No. 1221
3

Leak valve
Solenoid valve

MaintenanceManual THERMOVAC- 8
 SERVICE MANUAL

5. Vacuum control
(1) Functions of vacuum valve and Pressure-regulating valve (P type)

Under depressurization: Under control:

Vacuum valve : open Vacuum valve : close
Pressure-adjustable valve : close Pressure-adjustable valve : open

Orifice

Vacuum pump

(2) Switching on and off the vacuum valve and pressure-regulating valve
(atmospheric
pressure)
the vacuum valve
Air release from

Normal

A great amount of gas is generated from the specimen or

the capacity of the pump is not large enough.
(pressure)
PB(Tom)
the pressure-adjustable valve
Air release from

Orifice
Set pressure

Air release from the pressure-adjustable valve

PA (%).

±3%
Set pressure 6(%)

(set pressure)

(Time)

MaintenanceManual THERMOVAC- 9
 SERVICE MANUAL

6. Control unit (Back of the display)

Pressure sensor terminal (J3)

Power supply line (connected to J6 of humidity sensor terminal (J2.1) +

the power supply board)
Signal line (connected to J5 of Humidity sensor terminal (J2.2) –
the power supply board)

J4

J5

J3

J2
NCPU-A J5

TM-E13267B G7 M54563 RA4

1
1 2
12 1 4 1 5 1 4
1

G6 S D B

C15

C14
R17 R1 R4
C9 4949UBP RA5 R30

R18 R2 R5

OUT
G4 M54563

IN
R31
ROM chip
J1

R19 R9 R3

C8

C8

C7
R39 R A K

UPC7805H
R20 R12

R16

R15
C10 D1

R32

R33

R34

R35
C13

G2
1
G16 G14 R21 R13 R6
X1

C11
R22 R14 R10
Direction E C B E C B

BP

BP

BP
G4 G5 G13 G3
R7 R11

C17

C2

C3

C4
D3 D11
D4
HD647180XCP4

VR3

VR4

VR1

VR2
D5
UPC339C 49528P OPCB12C
D6

C18
C16

C5
R38

R37

R36

R29

R28

R27

R26

R25

R24
D7
G12 G2 G1
D8 R23
RA3
K
D9
RA1

RA2

A
33

34

C1
C5
D10 R
83C46 OPCB12C OPCB12C

D10
BP

BP
Pressure-adjustable trimmer(zero adjustment)

Pressure-adjustable trimmer (span adjustment)

Humidity-controlling trimmer (zero adjustment)

Humidity-controlling trimmer (span adjustment)

7. Power supply board

Voltage of the pressure-control solenoid valve
12(V) power supply 1 — (+)
(DC power supply) 2 — (–) Voltage of the leak solenoid valve
Humidity controller power
supply line Voltage of the pump control unit
DC power supply circuit board
(Connected to J6 of the
humidity controller circuit Voltage of the automatic Leak valve Optional
board)
Breaker AC power supply
J6 J7 J10 J11 J12 J13
1 6 1 1 1 1

Heater
Relay

Purge valve
1

Intake valve step motor

power supply
J9
1 6

Triac Vacuum valve

Vacuum valve step motor
power supply
J8

Buzzer
6

6 1
J5

Humidity controller signal line

(connected to J5 of the humidity
controller circuit board)

MaintenanceManual THERMOVAC- 10
 SERVICE MANUAL

8. Memory parameter setting

Memory
Description No. 0 1 2 3 4 5 6 7 8 9
When depressurizing
under control, close the
vacuum valve just before
reaching the set pressure To be PA= PA= PA= PA= PA= PA= PA= PA= PA=
(set pressure PA (%)). 1 set for 200 100 80 60 40 20 10 10 10
Depressurize or control C type. (%) (%) (%) (%) (%) (%) (%) (%) (%)
the pressure with the
pressure-adjustable
valve.
When the pressure
rises from the set
PB=
pressure to the (set PB= PB= PB= PB= PB= PB= PB= PB=
pressure PA (%) + PB3
2 – 0 3 5 10 20 30 50 100
PB (Torr)), close the 1
pressure-adjustable (Torr) (Torr) (Torr) (Torr) (Torr) (Torr) (Torr) (Torr)
(Torr)
valve to depressurize
the vacuum valve.

Timer change:Timer
display and parameter
hour: minute:
setting changes from 3 – – – – – – – –
minute second
hour: minute to minute:
second or vice versa

Pressure display change:

Minimum unit changes Minimum Minimum
from 1 (Torr) to 0.1 4 unit: 1 unit: 0.1 – – – – – – – –
(Torr). Decimal numbers (Torr) (Torr)
are not displayed.

Three-
Power supply input Single
5 phase – – – – – – – –
change phase
circuit
If the temperature
D constant change
6 – 1 4 8 8 exceeds the set value, – –
(minute)
increase the control value.
Maximum gas pressure to
400 450 500 600 700
be reached in the program 7 – – – – –
(Torr) (Torr) (Torr) (Torr) (Torr)
3 - purge process

Zero and span Zero and span

Pressure display and
8 parameter setting by the parameter
adjustment change –
pressure-adjustable setting by
trimmer. software
9-0 hpa
Pressure display change 9
9-1 Torr

MaintenanceManual THERMOVAC- 11
 SERVICE MANUAL

9. Error detection
Type Description Action Detection method
Err1 The temperature sensor Shut off the When the output from the temperature sensor is 24˚C
is defective. heater. or greater.
Err2 The triac for the heater Shut off the The heater output signal sent from the temperature
control is defective. heater. controller and the electric current that flows to the
heater circuit are different.
Err5 Temperature increase Shut off the When the temperature of the set value +10˚C or
exceeds the set value. heater. greater is detected by the temperature sensor
Err6 Pressure sensor is Close valves. When no few than 800 (Torr) 1000hpa no more than 0
defective. (Torr) hpa is detected.

10. Heater arrangement

Type VT210 VT220 VT230 VT240
100 (V) 100 (V)
Side and top 200 (W) 300 (W)
200 (V) 200 (V)
50 (Ω) 33.3 (Ω)
135 (W) 135 (W)
100 (V) 100 (V)
296 (Ω) 296 (Ω)
Bottom 300 (W) 400 (W)
33.3 (Ω) 25 (Ω)

MaintenanceManual THERMOVAC- 12
 SERVICE MANUAL

11. Trouble shooting (temperature)

Temperature rise is irregular and temperature control is defective.

Sensor is disconnected.
Err1 is indicated.
Adjustment is inaccurate.

Heater is disconnected (sensor).

Err2 is indicated immediately after
the chamber is turned on. Open circuit detector is defective.

Err2 is indicated after Triac is defective.

chamber is turned on and
the temperature is set.

Heater is disconnected. (Excluding sensor.)

Chamber starts hunting.
Sensor is floating.

Sensor is floating.
Err5: Temperature is higher than
the set value. Disconnection of heater (sensor) is
not detected.

Temperature heat-up rate is slow. Heater is disconnected.

Sensor is floating

There is a difference between Sensor is defective.

the temperature in the test area
and displayed temperature.
Heater is disconnected. (Excluding sensor. )

Temperature distribution in Heater is disconnected. (Excluding sensor.)

the test area is not uniform.

MaintenanceManual THERMOVAC- 13
 SERVICE MANUAL

12. Trouble shooting (pressure)

Abnormal depressurization
The vacuum valve is not open (though it is indicated “open”).
No depression. Air is not supplied The valve does not respond to the command from the key board.
Standard (The door packing to the test area.
chamber does not stick to the The vacuum pump is connected to the purge valve.
main body tightly.)
There is a gap between glass and packing or foreign matter is blocked.

The purge valve is open (though it is indicated “close”).

Air is supplied The valve does not respond to the command from the key board.
to the test area.
Capacity of the pump is not enough.
Connection hose is too thin or too long.

Pressure is Air leaks from the joint between exhaust outlet and the valve.
A vacuum is not maintained by Capacity of the pump is not enough.
created in the test closing the vacuum
area. valve. Pressure sensor or pressure adjustment is defective.

Air leaks from the joint between the vacuum valve and test area.
Air leaks from the joint between the purge valve and test area.
Pressure is not Foreign matter enters between glass and packing or in
maintained by the sealed area such pipe joint and sealing tape.
closing the
vacuum valve.
The vacuum valve is not closed completely.
(Valve stopper and coupling do not contact.)

There are scratches on the ball valve sealed surface.

(900hpa)

Chamber takes in air Packing is not tight enough against the door.
Oxygen and nitrogen
replacement error at 700Torr or less.
Gas supply pressure is too high.

Optional Solenoid valve does not open. Foreign matter enters.

components Air discharge from the pump is not enough
Pressure does (Pressure in the orifice is high.)
not reach the
setting.
Memory parameter setting is defective. (1-X)
Leak solenoid valve is open. .
Pressure- controlling Pressure is much
components P type Solenoid valve does not close.
lower than the
setting. Memory parameter setting is defective. (1-X)

Pressure is not Solenoid valve does not open. Foreign matter enters.
stable
Leak solenoid valve is open.

Pump does not

work when the
vacuum valve is The controller does not output the voltage of 12 (V).
open. which is necessary to control the relay coil.
Pump control
Unit
Output of the voltage of 12(V) for the relay coil does not
synchronize with the opening and closing of the vacuum valve.
Pressure is not
stable.
Wiring in the control unit is not correct. It is connected
to the output terminal side for automatic leak.)

MaintenanceManual THERMOVAC- 14
 SERVICE MANUAL

13. Dismantling the exterior

Remove the hinge cover and unscrew screws which secure the hinge.

Remove the screws under the control box. Pull the control box forward and lift up the
bottom to remove the box.

Disconnect all wire connectors which are connected to the control panel (temperature
controller circuit board).

Front

Main body

MaintenanceManual THERMOVAC- 15
 SERVICE MANUAL

Remove the rail which secures the control panel and release the hook lock at the
door.

For VT230 and 240. remove the door stopper.

MaintenanceManual THERMOVAC- 16
 SERVICE MANUAL

Remove the two back plates at the top and bottom.

For VT230 and 240, remove the screws at the back of the exterior ceiling.

MaintenanceManual THERMOVAC- 17
 SERVICE MANUAL

Remove the exterior.

230・240

MaintenanceManual THERMOVAC- 18
 SERVICE MANUAL

14. Adjustmentment of the indicator

Adjustment of the indicator (temperature display)
1. Remove the temperature sensor terminal J2 and connect the reference supply terminal instead.
2. Enter the voltage at 20˚C (K thermocouple) as the reference voltage into the mv generator (reference
voltage generator) and turn on the power.
3. Turn the trimmer VR1 so that the indicator indicates 200˚C.
4. Enter the voltage at 220˚C (K thermocouple) as the reference voltage into the mv generator (reference
voltage generator).
5. Turn the trimmer VR2 so that the indicator indicates 200˚C.
6. Again enter the voltage at 20˚C (K thermocouple) as the reference voltage into the mv generator (reference
voltage generator) and check the indicator. If there are any changes, repeat the above procedures.
J4

J5

J3

J2

1 2
12 1 4 1 5 1 4
S D B
C15

C14

R17 R1 R4
RA5 R30

R18 R2 R5
OUT

IN

R31

R19 R9 R3
C7

R39 R A K
UPC7805H

R20 R12
R16

R15

D1
20˚C adjustment
R32

R33

R34

R35
G2

R21 R13 R6

R22 R14 R10

B
200˚C adjustment
BP

BP

BP

G5 G13 G3
R7 R11
C17

C2

C3

C4

D11
VR3

VR4

VR1

VR2

49528P OPCB12C
C18
C5
R29

R28

R27

R26

R25

R24

G2 G1
R23
K
A
C1
C5

R
OPCB12C OPCB12C
D10
BP

BP

Adjustment of the indicator (pressure display)

1. Turn on the power, then turn the trimmer VR4 so that the display matches to the atmospheric pressure at that time.
2. Vacuumize the test area with the vacuum pump and leave it for a short time. Turn the trimmer V3 so that
the indicator indicates 0.
3. Return the pressure inside the test area to the atmospheric pressure again and check the indicator. If
there are any changes, repeat the previous procedures.
J4

J5

J3

J2

1 2
12 1 4 1 5 1 4
S D B
C15

C14

R17 R1 R4
RA5 R30

R18 R2 R5
OUT

IN

R31

R19 R9 R3
C7

R39 R A K
UPC7805H

R20 R12
R16

R15

D1
R32

R33

R34

R35
G2

R21 R13 R6

R22 R14 R10

B
BP

BP

BP

G5 G13 G3
R7 R11
C17

C2

C3

C4

D11
VR3

VR4

VR1

VR2

49528P OPCB12C
C18
C5
R29

R28

R27

R26

R25

R24

G2 G1
R23
K
A
C1
C5

R
OPCB12C OPCB12C
D10
BP

BP

Adjustment of the atmospheric pressure

0 Torr (hpa) adjustment

MaintenanceManual THERMOVAC- 19
 SERVICE MANUAL

15. Replacement, adjustment, and analysis

Replacing the heater
1. Unscrew the three screws from the control unit and remove the control box.
2. Detach the door.
3. Remove the control unit mounting bracket.
4. Remove the back plate.
5 Unscrew the three screws (M4) which secure both side panels and remove the exterior and insulation
material.
6. Replace the heaters at the side and on top.
7. To replace the heater at the bottom, remove the pipes behind, remove the two bolts which secure the test
room unit, remove the fitting metals located in front, and pull up the wall to separate the unit from the rack.

8. For VT230 and 240, wind the heater lead wire which is connected to the temperature sensor four times
around the heater open circuit detection CT and connect it to the heater terminal.

Sensor
Heater

Heater
terminal

Heater open circuit

detection CT To J6 of the power
supply board

To J6 of the control panel

(temperature controller circuit board)

MaintenanceManual THERMOVAC- 20
 SERVICE MANUAL

Replacing the temperature sensor

1. For VT210 and 220: Remove the door, control box, back plate, and exterior in a sequential order. For
VT230 and 240: Remove the control box, back plate, right panel, and ceiling board.
2. Remove the heater fitting plate and detach the sensor.
3. Place the new sensor along the heater mica plate and secure the heater fitting plate.

Heater

Sensor

Note) Make sure that the sensor is tightly secured to the protector tube.

MaintenanceManual THERMOVAC- 21
 SERVICE MANUAL

Replacing the triac

1. Remove the two screws from the control unit and hold the control box. Disconnect all connectors which
are connected to the control circuit board and remove the control box.
2. Disconnect all connectors and terminals which are connected to the power supply board, loosen the four
screws (M4) which secure the radiator, and detach the power supply board.
3. Replace the triac.

Heater

MaintenanceManual THERMOVAC- 22
 SERVICE MANUAL

Adjustment of the tightness of the door and packing

Check the pressing strength of the glass and packing using a zonal paper of about 50mm in width.

Paper

Glass

Test area

Place the paper in between and close the door. Then, pull out the paper to see how tightly the door is closed
against the packing.
If the tightness greatly varies depending on the location, adjust the door.

Hinge Hook

Press 1 and 2 — Lower the hook of the main body.

Press 3 and 4 — Pull the door hinge towards the main body.
Press 1 — Separate the lower part of the door hinge from the main body. Check the pressing strength of 4 .
Press 2 — Separate the upper part of the door hinge from the main body. Check the pressing strength of 3 .
Press 1 and 3 — Pull the upper part of the door hinge towards the main body and separate the lower part of
the hinge from the main body. Check the pressing strength of 4 .
Press 2 and 4 — Pull the lower part of the door hinge towards the main body and separate the upper part of
the hinge from the main body. Check the pressing strength of 3 .

MaintenanceManual THERMOVAC- 23
 SERVICE MANUAL

Replacing the door packing

1. Pull and peel off the old packing.
2. Completely remove the rubber which remains on the edge of the test room unit.
3. Apply silicone sealant (KE-45) evenly inside the new packing and place it over the edges of the test room
unit.

Fix of the piping (replacing pipes)

1. Remove the defective pipe.
2. Prepare the pipe to the same length as the defective one and check the circularity and scratches if there
are any on the surface.
3. Check whether there are any scratches on the inner surface of the joint.
4. Prepare a new ferrule and connect the pipe. Make sure that there are no foreign particles such as
insulation material between the joint and the ferrule.
5. Tighten the joint by hand, and turn the 3mm tube a 3/4 rotation and other tubes one and 1/4-rotation
respectively with a spanner.
Ferrule

Fix of the piping (joint)

1. Remove the defective pipe and disconnect the joint as well.
2. Wind the sealing tape around the new joint and screw it in. Turn the joint clockwise with a spanner until it stops.
3. Make sure that the ferrule which was attached to the original pipe is not scratched, insert it in the joint, turn
the nut by hand until it stops, and turn the nut with a spanner slightly.

MaintenanceManual THERMOVAC- 24
 SERVICE MANUAL

Replacing the ball valve

1. Remove the backplate and insulation material at the back.
2. Remove all defective pipes from the ball valves.
3. Unscrew the four screws (M4) which secure the valve mounting bracket and remove the valve.
4. Wind the sealing tape around the joint which was attached to the old ball valve and screw it into the same
position of the new ball valve. If there are any scratches on the inner surface of the joint, replace it with a
new joint.
5. Remove the coupling which was attached to the old ball valve and reattach it to the new ball valve. Tighten
the nut with moderate power. (The weight of the valve shaft changes by the amount of tightening of this
nut. For a guideline, coupling should be able to be turned by hand after the nut is tightened.)
6. Align the motor shaft and the hole of the coupling and secure the ball valve.

Step
Stainless steel motor
Ball valve

Hand operated
valve
Teflon

C type

P type

Pressure sensor is defective.

•Replacing the pressure sensor
1. Remove the control box and pull out the connector J3 which is connected to the control unit.
2. Remove the back plate (lower side).
3. Remove the fitting metal, disconnect the pipe, and replace the pressure sensor.

MaintenanceManual THERMOVAC- 25
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Valve does not open and close properly

•Diagnosis
With a push of a finger, the valve handle (for vacuum valve) or coupling (for purge valve) rattles easily.

•Action
Press the coupling against the ball valve and tighten the nut.

Normal Coupling

Step motor Ball valve

The stopper and coupling

hit against each other.

Abnormal

Step motor Ball valve

The coupling comes off

The nut loosens. from the stopper.

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Ball valve is defective

•Diagnosis and action
1. The connector is pulled out.
2. The connector needs to be reconnected.
If the purge valve does not move: J8 — Purge valve side
If the vacuum valve does not move: J9 — Vacuum valve side
The valve moves. : Go to 3.
The valve does not move. : Go to 4
3. Replace the power supply board.
4. Replace the step motor.
(1) Disconnect the connector for J8 (vacuum valve) and J9 (intake valve) in the power supply board.
(2) Remove the valve fitting metal.
(3) Remove the nut on the valve side in the coupling.
(4) Unscrew the motor base and remove the step motor together with the base.
(5) Unscrew the three M5 screws and remove the step motor from the base.

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Leak solenoid valve is defective

•Diagnosis and action
1. Pull out the lead wire from the J11 connector in the power supply board to check the voltage output and
connect the wire to the tester.
2. Turn on and off the vacuum key, and check whether the voltage output is 0 (V) when the key is turned on
and is 12 (V) when the key is turned off.
If ON — 0 (V) OFF — 12 (V) . . . . . . . 3
If ON — 0 (V) OFF — 0 (V) . . . . . . . . 4
If ON — 12 (V) OFF — 12 (V) . . . . . . . 4
3. (1) Remove the nut used for piping.
(2) Unscrew the screws which secure the main body and solenoid valve fitting metal.
(3) Unscrew the screws which secure the solenoid valve and fitting metal.
(4) Remove the plug from the old solenoid valve, attach the plug to the new solenoid valve, and secure the
valve to the fitting metal with the screws.
(5) Secure the valve to the main body.
4. Replace the power supply board.

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Solenoid valve is defective

•Diagnosis and action
1.Pull out the lead wire from the J10 connector in the power supply board to check the voltage output and
connect the wire to the tester.
2.Set the memory parameter setting to 1-1.
3.Select the program 1, set 500 (Torr), and turn on the chamber.
4. J10 outputs 12 (V)…………………………….5
J10 does not output 12 (V). ………………… 6
5. Replace the solenoid valve.
(1) Remove the nuts used for piping (see the figure below).
(2) Remove the screws which secure the solenoid valve and two-directional valve base.
(3) Remove the solenoid valve.
(4) Reconnect the piping to the new solenoid valve.
(5) Secure the valve to the main body.
6. Replace the power supply board.

The solenoid valve should be removed

and reattach as shown in the figure here.

Vacuum pump control unit is defective

•Diagnosis and action
1. Pull out the lead wire from the J12 connector in the power supply board to check the voltage output and
connect the wire to the tester.
2. Turn on and off the vacuum key, and check whether the voltage output is 12 (V) when the key is turned on
and is 0 (V) when the key is turned off.
If ON — 12 (V) OFF — 0 (V) . . . . 3
If ON — 12 (V) OFF — 12 (V) . . . .4
If ON — 0 (V) OFF — 0 (V) . . . . .4
3. Check the connection of wires in the vacuum pump control unit.
If the wires are correctly connected, replace the control unit.
4. Replace the power supply board.

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Malfunction detection and after-sales service

The following malfunction detection is built in this chamber.

Display Description Action

Er1 Temperature sensor is defective. Shut off the heater.
Er2 Triac for the heater control is defective. Shut off the heater.
Er5 Temperature exceeds the set temperature more than +10˚C. Shut off the heater.
Er6 Vacuum sensor is defective. No rectification.

Forced air supply into the test area

This chamber controls the start and stop of decompression and air supply into the test area with only an
electric valve.
Therefore, if there is a power failure when the chamber is decompressed, the air will not be supplied into the
test area. In such a case, follow the procedure below to forcibly supply air into the test area.
1. Turn off the breaker.
2. Remove the rubber tube from the exhaust vent.
3. Unscrew the two setscrews under the control unit and remove the control box.
4.Turn the lever to 9 o’clock direction to supply air into the test area.

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Pressure display zero and span adjustments

If the difference between the atmospheric pressure and the pressure display is great or if the pressure does
not reach 1 Torr after the vacuuming is done for a long time, adjust the zero and span of the pressure display

•Confirmation of vacuum leak

If the pressure does not reach 1 Torr after vacuuming, there is a possibility of a vacuum leak. Therefore,
check for the vacuum leak before executing zero and span adjustments.
1. Press ENTRY and STEP at the same time, set 4-X of the memory parameter setting to 4-1, and press
ENTRY. (See 8 for the memory parameter setting method.)
2. Turn on the vacuum pump and leave it for about 15 minutes.
3. Turn off the vacuum valve to stop the vacuum pump and leave it for about 30 minutes.
4. Make sure that the variation of the pressure display is less than 3 (Torr/hour). If the rate of change is large,
there is a possibility of a vacuum leak. Please contact the distributor listed in the "P.30 Malfunction
detection and after-sales service” or our company.

Atmospheric pressure

Amount of pressure
variation

Vacuum
Check the rate
15 minutes 30 minutes of change

•Zero and span adjustment

1. Set the memory parameter setting to 4-0 and 8-1.
2. Close the purge valve, turn on the vacuum pump and leave it for about 30 minutes.
3. While vacuuming as instructed in the above 2., press STEP and at the same time (Set at 1 Torr.)
4. Return the pressure to the atmospheric pressure.
5. Press STEP and at the same time. (Set at 760 Torr.)
6. Vacuum the chamber and make sure that the pressure gauge indicates 1 Torr.

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