You are on page 1of 13

1202 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO.

5, OCTOBER 2018

A 12.8 k Current-Mode Velocity-Saturation ISFET


Array for On-Chip Real-Time DNA Detection
Nicholas Miscourides , Student Member, IEEE, Ling-Shan Yu, Jesus Rodriguez-Manzano ,
and Pantelis Georgiou , Senior Member, IEEE

Abstract—This paper presents a large-scale CMOS chemical- (LoC) [3]–[6]. Recently, ISFET-based LoC platforms have been
sensing array operating in current mode for real-time ion imaging used to address the expanding field of rapid diagnostics with
and detection of DNA amplification. We show that the current- applications in infectious diseases [7], cancer [8], SNP identifi-
mode operation of ion-sensitive field-effect transistors in velocity
saturation devices can be exploited to achieve an almost perfect lin- cation [9] and multi-ion detection [10].
earity in their input–output characteristics (pH-current), which are From a commercial perspective, ISFET sensors are most
aligned with the continuous scaling trend of transistors in CMOS. widely used as the sensing front-end in massively-parallel and
The array is implemented in a 0.35-µm process and includes 12.8 k large-scale arrays targeting DNA detection and sequencing [11],
sensors configured in a 2T per pixel topology. We characterize the [12]. Interestingly, the introduction of ISFET technology was
array by taking into account nonideal effects observed with float-
ing gate devices, such as increased pixel mismatch due to trapped accompanied by a paradigm shift in sequencing methods since
charge and attenuation of the input signal due to the passivation for the first time the economies of scale of semiconductors were
capacitance, and show that the selected biasing regime allows for leveraged to drive the cost of DNA detection down, eventually
a sufficiently large linear range that ensures a linear pH to current to the $1000 genome milestone [13]. Such sequencing platforms
despite the increased mismatch. The proposed system achieves a are designed in an imager-like configuration where each pixel
sensitivity of 1.03 µA/pH with a pH resolution of 0.101 pH and
is suitable for the real-time detection of the NDM carbapenemase aims to identify a fraction of the target sequence. As a result, the
gene in E. Coli using a loop-mediated isothermal amplification. sensor density directly affects the throughput of these platforms
and the pixel area dictates the overall silicon area and thus cost.
Index Terms—Array, carbapenemase, current-mode, DNA,
E. coli, ISFET, LAMP, NDM, velocity saturation.
Therefore, scalable sensor architectures have apparent benefits
in this regard in order to facilitate chemical sensing arrays with
I. INTRODUCTION similar order of magnitude resolution as optical imagers.
CMOS compatibility ensures that the sensors conform to a
HE last decade has overseen a proliferation of CMOS-
T based chemical sensing systems being used in a variety of
biomedical applications [1]. One enabling pH sensor which has
scaling trend according to Moore’s law [14] which has apparent
benefits in terms of sensor density and thus increased in-parallel
detection. However, analogue operation in sub-micron processes
contributed towards the successful development of such fully is significantly impacted by short-channel effects which have
integrated sensing systems in CMOS is the Ion-Sensitive Field- changed the operational characteristics of transistors. In sub-
Effect Transistor (ISFET) [2]. Owing to their compatibility with micron processes the typical FET regions of operation have
standard CMOS processes, ISFETs require no post-processing shrunk to include the velocity saturation (VS) region at high
steps after fabrication which would typically require clean room electric fields. In general, this region is being avoided by de-
facilities and expensive equipment. As a result, ISFETs are signers due to its low-gain properties for single transistor am-
uniquely suited to address and bridge major limitations in the plifiers [15] since the transconductance of the device no longer
area of electrochemical instrumentation offering sensor minia- follows a quadratic relationship but reduces to linear due to
turization, scalability, mass fabrication and low cost. Numerous carrier saturation effects. In practice, this region is suitable for
sensor architectures have appeared in the literature which lever- applications which benefit from a linear gate voltage-drain cur-
age on the coexistence of sensors and instrumentation on the rent (VG S − ID ) relationship, something that we have previ-
same IC to facilitate the transition from System to Lab-on-Chip ously argued that is the case for the pH-induced gate voltage
variations with ISFETs operating in current-mode [16]. Con-
Manuscript received February 20, 2018; revised April 18, 2018 and June 2, sequently, velocity saturation holds potential as an alternative
2018; accepted June 25, 2018. Date of publication July 16, 2018; date of current
version October 19, 2018. This paper was recommended by Associate Editor region of operation since it provides a linear input-output rela-
H. Yu. (Corresponding author: Nicholas Miscourides.) tionship (pH − ID ) for sensing and is expected to become more
The authors are with the Department of Electrical and Electronic Engineer- dominant in the increasingly accessible sub-micron processes.
ing, Centre for Bio-Inspired Technology, Institute of Biomedical Engineering,
Imperial College London, London SW7 2AZ, U.K. (e-mail:, n.miscourides@ Linearity is crucial for sensor instrumentation design, yet
imperial.ac.uk; ling-shan.yu10@imperial.ac.uk; j.rodriguez-manzano@impe there are still inherent non-idealities for ISFET sensing that
rial.ac.uk; pantelis@imperial.ac.uk). limit its wider adoption for fully-electronic pH detection. Ma-
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. jor limitations include pixel mismatch due to trapped charge in
Digital Object Identifier 10.1109/TBCAS.2018.2851448 the passivation layer typically built up during fabrication and

1932-4545 © 2018 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications standards/publications/rights/index.html for more information.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1203

drift of the sensing signal due to interfacial phenomena at the


sensing surface. There are two main methods for addressing
the aforementioned which call for additional complexity in the
form of introducing a programmable gate [17] or gate reset
switch [18]. The first method reduces the effective pH sensi-
tivity whereas the latter introduces leakage at the gate which
manifests as electrical drift on top of the chemical. Addition-
ally, the capacitive network created due to the formation of a
passivation capacitance in conjunction with the gate parasitics
attenuates the input signal from the electrolyte especially in the
case of the passivation capacitance being of similar order of
magnitude as the parasitics. Current approaches typically trade-
off different attributes such as pixel size vs attenuation to tailor
the configuration to its target application.
In this paper, we present a scalable architecture for ISFET
arrays implemented in 0.35 μm CMOS which operates in the
velocity saturation (VS) regime. We show that adopting VS bi-
asing can be exploited to make significant simplifications to
the pixel design since the ISFET serves as both the sensing Fig. 1. ISFET cross-section in unmodified CMOS and equivalent
macromodel.
and transconductor device while ensuring that the output cur-
rent is linearly depended to the pH. This way, minimum size
or very small devices are required which result in a small area was that an electrically-floating electrode was left between the
footprint, large pixel density and thus array resolution. Fur- polysilicon layer (needed to define the gate) and the top metal
thermore, we demonstrate that contrary to typical calibration layer in the CMOS process. This ensures that the surface prop-
schemes which operate on a pixel-by-pixel basis, the large lin- erties of the passivation layer are not affected while removing
ear range of VS allows for the trapped charge spread to be ac- the need for further post processing in order to expose the gate.
commodated. Therefore, global biasing of the sensors through What has established however the popularity of ISFETs as a
the reference electrode can be optimized to maximise the num- semiconductor-based ion-sensitive sensor is that the typical ma-
ber of active pixels irrespective (to a degree) of trapped charge terial serving as the top insulating and passivation layer in the
mismatch while delivering linear input-output transduction. Fi- CMOS stack is silicon nitride (Si4 N3 ) which is a pH sensitive
nally, we demonstrate the system for the rapid and real-time material. Therefore, during metal layer deposition, ISFETs are
on-chip DNA amplification and detection of the NDM-1 gene created with metal layers and interconnecting vias providing a
isolated from Escherichia coli using the Loop-Mediated Isother- path from the gate of the underlying FET to the top metal layer
mal Amplification (LAMP) method. Bacterial strains that carry which resides directly below the passivation. When in contact
the NDM gene represent a major health care challenge world- with an aqueous solution, silicon nitride is used as a hydrogen
wide since they are resistant even to carbapenems antibiotics ion sensing layer due to the electrochemical phenomena taking
which are used as a last resort when common antibiotics have place at the electrolyte/insulator interface, specifically the bind-
failed [19]. ing of hydrogen ions to the insulator surface and the formation
The paper is organized as follows: Section II describes the of a double layer capacitance [2]. As a result, ion activity taking
theoretical overview of ISFETs in CMOS and description of place at the passivation layer as well as the DC potential of the
the velocity saturation origin. Section III presents the ISFET solution set by an external reference electrode (Vref in Fig. 1)
sensor design and pixel configuration. Section IV shows the are capacitively coupled to the electrically-floating gate of the
system architecture and block description whereas Section VI transistor and jointly define the operating point of the device.
presents the chip characterisation and measured results. Finally, CMOS compatibility ensures a number of desirable properties
section VI demonstrates the system application for isothermal for fabricating chemically-sensitive yet electronic sensors. The
DNA amplification and detection using LAMP. system design can be significantly simplified by using a com-
mercial CMOS process since it takes advantage of the foundry
II. THEORETICAL OVERVIEW well-established design ecosystem. Compared to conventional
potentiometric sensors such as ISEs, monolithic integration en-
A. ISFET Fundamentals
sures miniaturization of sensors, scaling according to Moore’s,
ISFETs designed in standard CMOS processes have been pos- low-cost and mass-fabrication. Furthermore, it enables the uti-
sible since 1999 [20] with a typical structure as shown in Fig. 1. lization of the ISFET as a transistor which opens up the pos-
Compared to earlier approaches, this method circumvented a sibility of adding signal/data processing circuitry on the same
major issue with fabrication, that it is not possible to obtain a chip as the sensor.
polysilicon-insulator structure in a typical CMOS process which The chemical-electrical conversion at the electrolyte-
prevents the gate of the readout transistor from being in direct insulator interface is explained by the site-binding theory which
contact with the pH-sensitive insulating layer. The workaround leads to the formation of a Gouy-Chapman-Stern double-layer

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1204 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

capacitance [21]. Specifically, the double layer capacitance leads


to the formation of an additional term, Vchem , in the standard
transistor model which is pH dependent. As modelled by [22]–
[24], ISFET characteristics are described by:
VO V (ISFET) = Vchem + VO V (M OSFET) (1)
where VO V is the overdrive voltage VO V = VG S − Vth and
Vchem = γ + α SNernst pH (2)
where γ groups all the non-pH dependent terms and α represents
the deviation from the maximum Nernstian sensitivity SNernst .
S Fig. 2. Short channel device expected behaviour due to velocity saturation.
α= (3)
SNernst
where S indicates the observed sensitivity of the device, S < carrier velocity stays approximately constant. At higher VD S
SNernst and SNernst = 2.3 kT/q ≈ 59 mV/pH where kT /q is potentials, carriers reach the saturated velocity earlier along the
the thermal voltage. channel as they propagate from the source to drain diffusion
regions. Under these conditions we can make a first order
B. Velocity Saturation Fundamentals approximation for modelling the device by assuming that:

In sub-micron processes, second-order effects such as carrier μn E(x) for E ≤ EC
v= (6)
velocity saturation, threshold voltage variations and hot carrier μn EC = vsat for E ≥ EC
effects which were often ignored with long channel devices
Additionally, we can assume that the drain-source potential
(L > 1 μm) are becoming more prominent and have already
at which EC is reached is constant and given by:
started to dictate the operation of devices. Velocity saturation
of the charge carriers when travelling along the channel is the vsat
VD S,sat = L × EC = L (7)
most impactful effect on the characteristics of the device and is μn
described in more detail below since it is a mode of operation that Therefore, operation in the triode region remains the same as
we are exploiting to linearise the voltage-to-current operation of the case of a long-channel device whereas the saturated current
the device. On the other hand, hot carrier effects (which cause ID S,sat equation is obtained by substituting Eq. (7) to Eq. (4).
a slow modification of Vth from extensive use due to electrons As shown in Fig. 2(b), we can see that VD S,sat occurs earlier
tunnelling in the oxide) and additional variations to the threshold than VG S − Vth and an extended saturation region is obtained.
voltage (due to Vth becoming a function of L, W and VD S on Furthermore, ID S,sat and the maximum transconductance (gain)
top of VB S and process parameters) cause smaller deviations in this region are described by:
especially when the device is biased in velocity saturation. In  
this case, we focus on the most impactful effect and how the VD S,sat
ID S,sat = vsat Cox W (VG S − Vth ) − (8)
deviation from the expected characteristics is caused. 2
In brief, the behaviour of a MOSFET is typically described with ∂ID
the model shown below: gm = = vsat Cox W (9)
  ∂VG S
W V2
ID = μn Cox (VG S − Vth )VD S − D S (4) According to the equations above, in velocity saturation the
L 2 drain current is linearly dependent on the overdrive voltage
where μn is the mobility of carriers (electrons), Cox the ox- VG S − Vth s and the width W of the device while being insensi-
ide capacitance and W &L the device dimensions. The carrier tive to VD S . Additionally, the saturated current is less dependent
mobility μn determines the electron velocity vn scaled by the on second order effects such as mobility (μ) degradation as well
electric field E along the channel (E ∝ VD S ). as the device’s length (L) which suggests that infinite output
impedance is expected and that operation is insensitive to length
vn = −μn E(x) (5)
mismatches which usually occur with minimum length devices.
where x denotes distance. Typically, for decreasing transistor In practice, the device exhibits a high output impedance and
size, the effective channel length decreases which causes channel length modulation similar to normal saturation due to
the electrical field along the channel (E(x)) to increase. the fact that different regions along the channel might behave as
Consequently, the electron velocity should increase at a rate in different regions of operation, specifically velocity saturation
proportional to the rising electric field as described in Eq. (5). at the start of the channel and normal saturation throughout the
However when a critical value is reached, EC = 1.5 × 106 V/m rest. However, higher output impedance is expected in general
for p-type silicon, the carrier velocity tends to saturate at a which reduces the susceptibility to bias voltage variations and
value vsat = 105 m/s (shown in Fig. 2(a)) due to collision and increases its usability as a programmable current source. Fur-
scattering effects. The drain-source potential that corresponds ther information on device modelling and higher order effects
to the EC field value is denoted VD S,sat , above which the can be found in [15], [25].

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1205

III. ISFET SENSOR AND PIXEL DESIGN


A. ISFET in Velocity Saturation
In the case of an ISFET, an additional Vchem term is included
in the device model which appears in series with the over-
drive voltage. Therefore, in velocity saturation an ISFET will
behave as:
 
VD S,sat
ID ,ISFET = vsat Cox W (VG S − Vchem − Vth ) −
2
(12)
Thus, ID is linearly proportional to pH and the pH sensitivity
Fig. 3. Capacitive network created due to the formation of an equivalent is given by:
passivation capacitance in series with the gate parasitic capacitances.
∂ID
gm (pH) = = −vsat Cox W (αSNernst ) (13)
∂pH
C. Expected Attenuation
We can see that the pH transconductance of the device evaluates
The passivation layer (Si3 N4 ) that is used for sensing, leads to a constant which depends on the device’s width, process
to the formation of an equivalent capacitance, (Cpass ), and thus parameters and the quality of the sensing layer. As long as the
a series capacitive network in conjunction with the gate para- transconductance is constant, given the operating conditions,
sitic capacitances as shown in Fig. 3. This capacitance can be then linear pH-to-current conversion is ensured. From the above
estimated using the process parameters (passivation thickness equations we can also gain insight on how to size an ISFET for
and dielectric constant) and the size of the top metal electrode.1 operation in velocity saturation. Specifically, a short length is
Additionally, the attenuation is a function of the gate parasitics naturally selected to ensure that velocity saturation is reached
which depend on the gate area and device biasing region as de- whereas a short width might also be preferred in order to limit
scribed in [14]. Different readout schemes will also affect the the biasing current occurring at high VG S and VD S potentials.
attenuation, for instance Cg s in a source follower configuration Effectively, sizing the sensing device comes down to a trade-
has a non-unity gain across it (typically around 0.85) and will off between DC current bias in velocity saturation and device
scale according to Miller effect. Nevertheless, in current mode gain in this region (gm (pH) ). In the 0.35 μm process, the device
the source and drain potentials are kept constant therefore the has bee sized such that the velocity saturation current is below
overall effect is that any input voltage signal will be attenuated 200 μA which is in accordance with the expected current range
according to: for the peripherals blocks while providing sufficient gain for the
Vg Cpass target application.
= (11) To verify the expected characteristics, Figs. 4(a)–(c) show
Vin Cpass + Cg d + Cg b + Cg s
simulation results of the drain current and transconductance of
where Cg d + Cg s + Cg b = Cg g denote the gate parasitic capac- a short length device in a 0.35μm commercial CMOS process.
itances. From Eq. (11) we can see that the attenuation minimizes Both ID and gm are plotted on linear axes and shown as a
for a large passivation capacitance and/or small gate parasitics. function of the VG S and VD S potentials of the device with the
In a given CMOS process (thus materials with fixed thickness substrate tied to ground (VB S = 0 V).
and dielectric constants), Cpass is directly proportional to the We can see from Fig. 4(a) that velocity saturation causes the
size of the top metal electrode therefore a larger metal area is device to display an extended saturation region since VD S,sat
beneficial. Nevertheless, this comes at the expense of a larger occurs earlier than the typical “knee” of the ID − VD S response
pixel area with trade-offs associated with increased silicon area, (when VD S ≥ VG S − Vth ) with a long channel device. As a
array resolution and compactness. Alternatively, the attenuation result, we expect a linear ID − VG S response with the gradient
can be reduced by using a small size device which ensures Cg g (gain) given by the transconductance of the device. Looking at
is small. In current-mode, having a small device is favourable the 3D transconductance of the same transistor on Fig. 4(b), we
to reach the in velocity saturation region. Therefore, the gate can see that for a given VD S , gm increases with increasing VG S
parasitics are reduced to a minimum thus attenuation in current- until it reaches a relatively flat peak and subsequently decreases
mode is a function of the size of Cpass which constitutes a due to second order effects such as mobility degradation. This
trade-off with pixel size. In our design we optimised the pixel behaviour is similar to the expected response for a long channel
size vs attenuation trade-off so we could create a dense array, but transistor which exhibits only traditional saturation however in
also still achieve sufficient resolution for the target application. this case gm will not reach as high values and will show a flatter
peak. Additionally, for very high VD S potentials, VD S > V D2 D ,
1 For a structure as shown in Fig. 1 the passivation capacitance can be estimated gm increases monotonically with increasing VG S and reaches
as below where (W L)ch e m denotes the size of the top metal, εx the dielectric its highest point when VG S approaches the power supply.
constant and tx the thickness: In the case of designing an ISFET for linear VG S − ID con-
εS iO 2 × εS i 3 N 4 version, we are interested in a high gm to maximize the intrin-
C p a ss = (W × L)ch e m × ε0 (10)
εS i 3 N 4 × tS iO 2 + εS iO 2 × tS i 3 N 4 sic gain as well as obtaining a wide peak to ensure linearity.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1206 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

Fig. 4. Simulation of a short channel transistor with W/L = 0.5/0.4 μm/μm, in a 0.35 μm process with 3.3V supply showing (a) the drain current, (b) the
transconductance and (c) cross-sections of (a) as a function of the V D S and V G S potentials, V B S = 0 V. (Color version of the figure available online.) The region
with the flatter gm is annotated with peak gm = 100.9 μS and variation of ±3.88% for a 826 mV range at V D S = 1.5 V. (c) Indicative cross-sections of the drain
current 3D plot at V D S = 1.5 V (blue) and V G S = 2 V (orange).

TABLE I TABLE II
ISFET LINEARITY IN VELOCITY SATURATION COMPARISON WITH STANDARD CONFIGURATIONS

linearisation method considered other than designing the under-


lying device to operate in velocity saturation.
For velocity saturation ISFET sensors both linearity and linear
Furthermore, it is preferable to do so without resorting to very range are important since high linearity allows us to obtain lin-
high VG S and VD S potentials (and thus drain current) which ear input-output characteristics (pH-to-current) which is crucial
will increase the power consumption of the sensor. As a result, in sensor instrumentation to facilitate subtraction/double sam-
the best biasing point for a current-mode ISFET is annotated in pling whereas a large linear range allows us to accommodate
Fig. 4(b) where the widest linear range is recorded as a trade-off a large extent of trapped charge across multiple sensors. Typi-
with biasing current. cally, for ISFET sensing we are interested in the differences in
To determine the expected operating range for a single device, pH of successive measurements rather than the absolute value
we assume a maximum pH sensitivity of 59 mV/pH (α = 1) which can be achieved this way by subtracting a reference frame
therefore the entire pH scale would need 14 × 59 = 826 mV. from any subsequent while still producing linearly proportional
Nevertheless, this model doesn’t take into account the attenua- differences to successive samples.
tion that charge coupling at the passivation layer will experience Comparing with other standard topologies, Table II shows
to reach the floating gate as well as trapped charge at the passiva- a qualitative comparison of an ISFET in velocity saturation
tion layer which typically occurs with floating gate devices. For with regards to normal saturation configurations. Even though
a single device, both effects can be mitigated with precise bias- the comparison is not straightforward given the two different
ing of the reference electrode, however for an array of sensors modes of operation (current vs voltage), operating in VS ensures
sharing a common reference electrode different biasing points linearity over a large range, similar to a source follower, with a
across devices can be expected. As a result, it is preferable to transconductance gain as opposed to attenuation with the source
operate in a region which offers the widest linear range possible. follower. On the contrary, a common source amplifier has a
In order to quantify the linearity of the device for a given very short input range which might saturate the output for the
VG S range, the coefficient of determination R2 is used which expected pH range. Overall, operating in velocity saturation
indicates the extent to which the data points approximate a allows for a wide pH range and is consistent with modern CMOS
straight line. Table I shows indicative VG S ranges and the cor- processes.
responding linearity in ID for the device plotted in Figs. 4–4(c). The 0.35 μm process ensures that velocity saturation is
We can see that a short channel device biased in velocity satu- reached with a short channel device while allowing for a wide
ration achieves almost perfect linearity, remarkably consistent range of input VG S voltage (1.4 V) for which the output current
throughout a large range of VG S . This is a consequence of car- is linear. As a result, this wide range can accommodate trapped
rier velocity saturation (VD S = 1.5 V) which corresponds to a charge commonly found in ISFET sensors to a large extent
peak gm = 100.9 μS varying only by ±3.88% across a 826 mV
range. Therefore, it is possible to convert the pH-induced VG S 2 Linearity has been evaluated as the extent for which the output is linear for
variations to drain current variations in a linear fashion with no the available input range i.e., derivative is constant.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1207

an array only one pixel is selected at any given time, to ensure


that no more than one ISFET is sinking the velocity satura-
tion current which is typically high in this region (> 80 μA) in
the 0.35 μm process. Similar imager configurations for photo
sensing in current mode have been presented in [26], [27].
Fig. 7(a) shows the expected output current range for step pH
changes with VS biasing assuming 30 mV/pH net effect at the
floating gate which is expected for unmodified CMOS [28]. The
corresponding step changes in drain current effectively show
the transconductance of the device and are perfectly linear as
shown in Fig. 7(b). This is a consequence of the gm being ap-
proximately flat throughout VS and shows that linear pH-current
Fig. 5. ID − V G S and gm characteristics in a 65 nm commercial process
with V D S = V D D /2 = 0.6 V. The device in is (a) minimum size and (b) the conversion occurs with around 3 μA/pH sensitivity which re-
same size as the device in Fig. 4. (a) W/L = 120/60 nm/nm. (b) W/L = quires no additional amplification for detection.
500/400 nm/nm.

TABLE III IV. SYSTEM IMPLEMENTATION


LINEAR V G S RANGE FOR A W/L = 500/400 NM/NM DEVICE
Following the analysis on the current-mode pixel and ISFET
linearity in velocity saturation, this section describes the imple-
mentation of a complete system-on-chip which demonstrates the
feasibility and scalability of this approach. Fig 6 shows the com-
plete system architecture comprising the major block schematics
whereas Fig. 8 shows the chip floorplan. Descriptions of major
without the need for mismatch calibration since the difference design blocks are shown below.
in successive measurements will be linear even if they start at
different DC points. Compared to more advanced processes, a A. ISFET Array
standard device in a 65 nm commercial process operates with The sensing part of the system consists of a 64 × 200 ISFET
a power supply of 1.2 V which reduces the available range of array with a global reference electrode used to bias the solution
linear VG S . To demonstrate this, Fig. 5 shows simulation re- and determine the large signal response. As a result, all ISFETs
sults of the I–V characteristics in velocity saturation in a 65 nm will establish a VG S set by the combined effect of the reference
process and Table III shows the corresponding VG S range for electrode and any attenuation occurring due to the passivation
which ID if perfectly linear. This range has been obtained as the capacitance. Since the reference electrode is externally con-
VG S range at which gm is maximally flat to within ±10% of its trolled, it can be arbitrarily adjusted to maximize the number of
maximum. Alternatively, advanced process nodes typically of- sensors with a uniform output, correspondingly minimizing the
fer the option of higher VD D devices for analogue applications. effect of trapped charge and mismatch.
In the 65nm process, devices with 2.5 V supply can be used to Addressing the array takes place by setting a fixed potential to
increase the available linear VG S range in velocity saturation. the drain of each ISFET using a current conveyor on a row-by-
However, these devices have an increased minimum device size row basis. This way a single switch can be used to address each
of W/L = 400/280 nm/nm which is comparable to minimum row independently rather than in-pixel switch, thus its aspect ra-
size in the 0.35 μm process and offer comparable performance tio can be made very large to minimize any voltage drop across.
with similar silicon area. Subsequently, an in-pixel column switch allows for individual
pixel selection as shown in Fig. 6. Accessing each pixel takes
B. Pixel Design place by establishing the current conveyor reference potential
Following the previous analysis, we can see that biasing the VD as the drain row potential VD R and thus as the VD S of each
ISFET in velocity saturation allows for a single device to act ISFET, assuming minimum voltage drop across the row and
as both the sensing and gain components of the input chemical column switches. As a result, this configuration allows for pro-
signal. For optimum operation in VS, this device is of small size grammable VD S and VG S ISFET voltages to target the velocity
(shown in Fig. 6(a)) with the pixel gain given by the pH transcon- saturation region. Additionally, the high output impedance in
ductance gm (pH) . Overall the pixel comprises two devices, this region reduces the variability of the output current to VD R
the ISFET and a column selection switch which is designed to variations observed at different places regions of the array and
have a very small drop across it when the pixel is selected. The different bus lengths.
pixel size is defined by the size of the top metal area that capaci-
tively senses the changes at the passivation layer. In this case, the B. Current Conveyor
pixel size is set as 6.5 × 7.8 μm2 with a 2 μm inter pixel distance The current conveyor block is shown on Fig. 6(c) and is
as shown in Fig. 8 (left). Each pixel is accessed by establishing used to provide the velocity saturation current to each pixel
a non-zero VD R across the pixel and the output is recorded as while applying a fixed potential VD R . Additionally, it mirrors
the drain current of the ISFET. With this configuration scaled in the velocity saturation current to both an on-chip I–V & ADC

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1208 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

Fig. 6. Schematic of the system showing (a) 2T pixel architecture configured in a 64 × 200 array, (b) row selection switches placed outside pixel, (c) current
conveyor architecture which applies an externally controlled voltage V D as the V D R row potential (V D S of the ISFETs) and mirrors the drain current to (d) a
transimpedance amplifier and ADC for sampling. External ADC option is available and is used to sample at a higher resolution.

provided by the 0.35 μm process.3 The TIA is designed to con-


vert a 0–200 μA current range to a 1.6 V range. The converted
value is sampled by an on-chip 10 bit SAR ADC also provided
as a standard cell. To maximize bit utilisation, the positive ref-
erence VR P is the same as the TIA reference (2V) to sample a
0.4–2 V linear signal. Additionally, the analogue signal is out-
put to allow for external sampling of either the current or the
voltage signal. In this case, the voltage signal after the tran-
simpedance amplifier is sampled using an external 16b ADC
for higher resolution.
Using the on-chip ADC and a clock frequency of 1.1 MHz, a
Fig. 7. Transient simulation showing the sensitivity to pH steps assuming a
sensing layer sensitivity of 30 mV/pH, V D S = 1.5 V and V G S of max gm . raster scan requires 11 clock cycles per pixel which corresponds
(a) Transient pH steps. (b) Corresponding pH sensitivity. to 7.8 fps. The readout time can be adjusted by specifying a
programmable digital instruction that controls the number of
block and to an analogue pad for external sampling. The current clock cycles per pixel in case of external sampling or ADC
conveyor is based on a stacked configuration of cascode current conversions per pixel in case of the on-chip ADC. Additionally,
mirrors operating such that the upper current mirror sets equal in both cases the readout speed can be varied by modifying the
currents flowing through each branch whereas the bottom one master clock frequency.
will have equal currents in both branches only when the source
voltage of the bottom devices is the same. Cascoding boosts V. EXPERIMENTAL CHARACTERIZATION AND RESULTS
the output impedance and increases the current range for which
The following section describes the materials and methods
VD R ≈ VD whereas the aspect ratio of all devices is designed
used to experimentally verify the operation of the chip and
very large to allow a sufficient voltage headroom for VD R to
the sensing platform. All following measurements describe wet
be set in velocity saturation i.e., up to 1.5V for a current range
measurements with the setup described below.
IR O W ≤ 200 μA.

C. Digital Control Block A. Fabricated Chip


System timing and synchronization is carried-out by an on- The fabricated chip is shown on Fig. 8 with the sensing array
chip control block comprising a synthesized FSM and an SPI highlighted and the block floorplanning on the right. This sys-
communication block. The FSM includes multiple modes which tem forms part of a larger platform fabricated using the AMS
allow for individual pixel addressing, continuous array raster 0.35 μm process on a 2 × 4 mm2 silicon chip. All peripheral
scan and timing control for the on-chip or off-chip ADCs. All circuits and bondpads are placed at the bottom to ensure that en-
these actions can be carried-out at various integer multiples of capsulation will not affect the middle part of the chip which will
clock cycles with the maximum readout speed set at 1 clock be exposed to a solution. A custom made PCB cartridge has
cycle per pixel using external sampling and 11 clock cycles been designed to host the chip and microfluidic arrangement
per pixel using internal sampling. Data communication takes whereas a motherboard PCB is used to handle communication
place through a 16-bit SPI protocol which includes incoming and power to the cartridge via a ribbon cable. The motherboard
commands specifying the FSM state and corresponding output also includes a microcontroller, bias voltage generation and an
depending on the command selected. external ADC with a higher resolution readout than the on-chip.

D. Readout Block
The VS current is converted to a voltage using a tran- 3 The standard cell is provided from the Austrian Micro Systems (AMS) Hitkit
simpedance amplifier (TIA) based on a wide-bandwidth op-amp Analogue Cells library.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1209

Fig. 8. Chip floorplan and system architecture showing the 64 × 200 array as well as the peripheral blocks used in the proposed system.

Fig. 9. Measurement setup for wet characterization of the sensing platform and experimental validation. (a) Complete platforn showing the motherboard PCB,
cartridge PCB, chip and microfluidics manifold. (b) Cross-section of the fabricated chip and the microfluidic manifold. Figure not drawn to scale.

part of the arrays are exposed. The manifold and chamber have
B. Encapsulation and Microfluidic Manifold been laser cut from an acrylic sheet and are screwed down on the
For wet experiments, the bare chip is glued on a ground plane cartridge PCB. Additionally, double sided biocompatible adhe-
(gold) on the cartridge PCB shown in Fig. 9(a). Additionally, sive tape has been added around the microfluidic chamber that
electrically insulating epoxy (EPO-TEK T7139) was used to is in contact with the chip to ease the stress from screwing and
cover the bond pads and serve as glob top encapsulant while prevent leakage during the amplification reaction.
only covering the bottom part of the chip to keep all arrays Large-signal biasing of the solution is provided by a reference
exposed. Ag/AgCl electrode obtained by galvanostatic oxidation on sil-
A custom build microfluidic manifold forms a reaction cham- ver tubes as proposed in [29]. Following the oxidation process,
ber and brings the top surface of the chip in contact with a solu- an aluminium wire was soldered on both tubes and connected
tion as shown on Fig. 9(b). The chamber allows for ∼ 300 μm to a voltage reference to be used for biasing. Two silver tubes
of space on each side of the chip thus ensuring that the larger of outside diameter 1 mm and wall thickness 0.175 mm were

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1210 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

Fig. 10. Reference voltage sweep in a solution of pH = 7 showing the ini-


tial trapped charge spread along the array. The bottom part is covered by the
microfluidic manifold and shows no sensitivity to reference voltage when the
solution is not in contact. The trapped charge spread of the exposed pixels is
described by the output standard deviation σ p ix e ls = 11.3 μA. Fig. 11. Mean output of the exposed pixels in the array showing the transient
response to pH changes. The inset shows the resulting pH sensitivity.

usedwhich also provided the inlet and outlet of the reaction


chamber. Additionally, a heatshrink tube was added for protec- attenuation obtained through simulating an ISFET in Cadence
tion of the tubes and prevention of any other conducting material Virtuoso was Asim = 0.57 i.e., less attenuation. The expected
getting in touch with the reference. attenuation was obtained by estimating the passivation capac-
itance value Cpass = 1.14 fF (see footnote 1) and obtaining a
C. Trapped Charge and Attenuation simulated value of the gate parasitic capacitances in velocity
saturation as Cg g = 0.865 fF, where Cg g = Cg s + Cg d + Cg b .
To verify the sensitivity to the reference voltage and bias of The deviation of the actual and expected values can be explained
the solution, the reference electrode was swept in a solution if the parasitics are larger and/or the passivation capacitance is
of constant pH = 7 and the array output recorded as shown in smaller than the estimated. Since, the Cpass estimate ignores
Fig. 10. The bottom part of the array is covered by the acrylic any fringing effects on the passivation layer, it is thus a con-
manifold and is not in contact with the solution causing 2816 servative estimate and the actual value is probably larger rather
out of 12800 pixels to show no sensitivity to the sweep. This part than smaller. As a result, the above indicate that the parasitic
has been disregarded from measurements. The remaining part of capacitances at the floating gate are larger than Cg g which is
the array shows the effect of trapped charge at the floating gate expected due to additional parasitics from metal buses, adjacent
which causes the pixels to operate above threshold even when gates etc. which increase the attenuation of the input signal to
the solution is grounded, Vref = 0 V as shown in Fig. 10. To the observed value Aactual .
counteract this effect, the reference electrode voltage is varied
to modify the VG S of each sensor and allow for the target biasing
region (velocity saturation) to be reached. D. pH Sensitivity
Trapped charge is randomly left during fabrication at the The pH sensitivity of the sensor array was verified by inserting
floating gate of ISFETs which effectively creates significant in sequence pH buffers ranging 4–10 with a step change of 1.
mismatch between pixels. Current mode is beneficial in this case All buffers were prepared by increasing or decreasing the pH
since it ensures linearity over a wide VG S range and reduces the of a template solution with 1M HCl (SigmaAldrich 318949) or
susceptibility to mismatch. We use the standard deviation of 1M NaOH (SigmaAldrich 71463). The template solution was
active pixels to quantify the extent of trapped charge across the prepared using 3M KCl (Sigma Aldrich 60137), 1M Tricine
array. For the active pixels shown in Fig. 10 the trapped charge (Sigma Aldrich T0377) and de-ionized water. Subsequently,
standard deviation is 11.3 μA. Therefore, this will not affect a peristaltic pump was used to create a continuous flow and
the measurements since the output current is linear for a wider sequentially pump each solution to the chip surface using the
range and the difference in measurements will be accurate even manifold of Fig. 9(a). In between measurements, a solution of
if the DC starting point is different. pH 7 was inserted to accurately record the differences between
When the exposed part of the array is operating in velocity pH 7 and the step change.
saturation and maximally linear range (i.e., 80 < ID < 200 μA Pixels not in contact with the solution were disregarded from
with Vref = −2 V), 83.1% of the available pixels are used for any subsequent analysis such that the mean of the array can
sensing. To estimate the attenuation, the average current dif- provide a suitable indicator of the pH change. Fig. 12 shows the
ference of active pixels for step changes in Vref was compared array output as a histogram for representative solutions of pH
against ID − VG S simulations such that the actual VG S values 4, 7 and 10. The trapped charge spread causes an output current
at the gate could be determined. This resulted into an aver- spread of around 50 μA with an average variance σ ≈ 11.3 μA.
age attenuation of Aactual = 0.424 that the input signal ex- Nevertheless, since the sensors are biased in velocity saturation
periences to reach the floating gate. In contrast, the expected which allows for a large linear range, pH differences will cause

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1211

Fig. 12. Mean current change for a pH step of 4, 7 and 10, also showing the
trapped charge spread.

a linear change in current after subtracting the initial value. Fi-


nally, Fig. 11 shows the final pH sensitivity obtained throughout
this characterization step. Using pH 7 as the reference point,
the final sensitivity is SpH = −1.03 μA/pH with R2 = 99.72% Fig. 13. Power spectral density of input referred current noise at the TIA
input. Inset shows the time domain output signal.
linearity. Taking into account the attenuation experiment result,
the intrinsic pH sensitivity of the passivation layer is deter-
mined at SSi 3 N 4 = 24.1 mV/pH, which is expected for ISFETs
in CMOS [28].
Evidently the quality of the measurements is affected by drift
at the sensor’s output, as shown in Fig. 11, caused by a slow
modification of the Si3 N4 insulator surface after exposure to an
electrolyte. Silicon nitride has been shown to slowly convert to a
hydrated SiO2 or oxynitride layer which modifies the equivalent
insulator capacitance over time [30]. For long measurements, an
exponential decay model has been shown to describe drift [31]
which can be reduced to linear for sufficiently short intervals.
Assuming a relatively small instantaneous drift rate, derivative-
based methods have been developed that deal with drift even for
long term measurements [31]. In our case, the time course of
drift is much slower compared to pH changes therefore it can
be assumed to be locally linear. As such it can be subtracted
for short time intervals around one pH step change which has
been taken into account when obtaining the pH sensitivity of
the sensor.
Fig. 14. Measurement setup for the DNA amplification experiment.

E. Current-Mode Noise
ISFET flicker noise by at least an order of magnitude compared
To characterize the total noise of the pixel including both to its MOSFET counterpart [33]. Since our target application is
electrical and chemical contributions, a current-mode pixel was low frequency and the DNA amplification reaction occurs in
connected to the on-chip transimpedance amplifier and sampled the time span of several minutes, the current noise has been
externally using a high precision data acquisition unit (Power- obtained at 1 Hz, which corresponds to 104.28 √nHz A
. As such,
Lab 8/35, ADInstruments). The output signal was continuously the pH resolution is 0.101 pH with an SNR of 19.9 dB.
sampled for 10 minutes at fs = 20 kHz with 16-bit accuracy
and a ±2 V maximum input signal i.e., 31 μV resolution. Sub-
sequently, the input referred current noise at the input of the TIA VI. REAL-TIME DNA AMPLIFICATION DETECTION
was obtained using SI = SV /RF2 as in [32] where SV and SI To demonstrate the feasibility of the proposed system as a
represent the power spectral densities at the output and input of Lab-on-Chip platform, this section presents its application in
2 2
the TIA specified in VHz and AHz . real-time DNA amplification and the rapid detection of the
Fig. 13 shows the power spectral density of the current-mode NDM gene taking place in a microfluidic chamber on top of
signal in √AHz whereas the inset shows the sampled signal in the the chip. For this experiment, the acrylic manifold was replaced
time domain which contains chemical drift with an average rate with one of open top such that cartridge PCB can be inserted
of 9.2 mV/min. Evidently, at frequencies of typical pH reactions in a flat block PCR machine (Veriti Thermal Cycler, Applied
(< 100 Hz) flicker noise is dominant which is expected since we Biosysems) for temperature control, as shown in Fig. 14. One
have opted for a very small sensing and pixel area. Additionally, drop of mineral oil was added to the reaction chamber to pre-
chemical noise contributes to the overall noise response since vent evaporation during the amplification reaction. Additionally,
it is typically low frequency and has been shown to increase a 0.1 mm diameter Ag/AgCl wire was inserted in the chamber

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1212 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

TABLE IV
DNA REACTION SPECIFICATIONS

TABLE V
SYSTEM SPECIFICATIONS

Fig. 15. Results from the DNA amplification experiment for the detection
of the NDM gene in E. coli in (a) the benchtop instrument and (b) on-chip.
(a) Fluorescence output from positive and negative reactions conducted in the
LC96 System. (b) Mean output of exposed pixels in VS after positive and
negative pH LAMP reactions with the standard deviation indicated by the shaded
bars.

for biasing. DNA amplification and a corresponding pH change


is facilitated using the loop-mediated isothermal amplification
technique [34] which was selected since it imposes no require-
ments for temperature cycling typically needed by PCR. On
the contrary, DNA detection using LAMP takes place at a con-
stant temperature, typically 63 ◦ C, thus ensuring no temperature
interference in CMOS at the time of amplification.
For this experiment, genomic DNA was isolated from pure
cultures of carbapenem-resistant Escherichia coli carrying the Fig. 16. Distribution of active pixels along the timecourse of DNA amplifica-
tion. (a) t = 200 s. (b) t = 1200 s. (c) t = 2000 s.
NDM gene. The purified DNA was analysed immediately or
stored at −80 ◦ C until further experiments. Specific LAMP
primers published in [35] were used to confirm the presence of array mean output of all active pixels for both negative and
target NDM gene in the extracted samples. All oligonucleotides positive reactions, with Table V outlining the measured DNA
used in this experiment were synthesised by IDT (Integrated concentrations and pH. We can see that when using both the
DNA Technologies, Germany). Negative and positive real-time LC96 instrument and on-chip DNA amplification takes place
LAMP experiments (105 genomic copies/reaction) were per- and the positive is clearly identifiable. The reaction starts after
formed in parallel using a conventional real-time instrument the temperature has settled and lasts approximately 1000 s after
(LightCycler 96 System, Roche) and on-chip. The LAMP as- which DNA amplification plateaus as shown in Fig. 15(a). At
say was optimised for pH-based on-chip detection. Twenty-μL that point, the array produced a mean output change of 0.53 μA
solution was loaded into 0.2 mL PCR tubes or into the microflu- between negative and positive runs which corresponds to 0.55
idic chamber on the chip and heated at 63 ◦ C for 20 min. A pH using the SpH figure obtained earlier. After that point, the
fluorescent intercalating dye (SYBR green) was added for the pH stays the same with differences in output attributed to drift.
detection of the dsDNA products using the LightCycler 96 Sys- In comparison, the corresponding pre and post pH values of
tem, which was used to compare with the on-chip positive and the solutions obtained using a commercial pH meter is shown in
negative reactions. Table IV and indicates a pH change of 0.6 which is in agreement
Fig. 15(a) shows the fluorescent response over time obtained with the measured. We anticipate that the high temperature adds
from the LightCycler instrument whereas Fig. 15(b) shows the to the drift which is similar during both the negative and positive

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
MISCOURIDES et al.: 12.8 K CURRENT-MODE VELOCITY-SATURATION ISFET ARRAY FOR ON-CHIP REAL-TIME DNA DETECTION 1213

TABLE VI surface, paving the way for new applications in fully-electronic


COMPARISON OF ISFET SENSING ARRAYS
diagnostic technology.

ACKNOWLEDGMENT
The authors would like to thank the EPSRC Centre for Doc-
toral Training in High-Performance Embedded and Distributed
Systems (HiPEDS) under Grant EP/L016796/1.

REFERENCES
[1] H. Li, X. Liu, L. Li, X. Mu, R. Genov, and A. J. Mason, “CMOS electro-
chemical instrumentation for biosensor microsystems: A review,” Sensors,
vol. 17, no. 1, 2017, Art. no. 74.
[2] P. Bergveld, “Thirty years of ISFETOLOGY: What happened in the past
30 years and what may happen in the next 30 years,” Sens. Actuators B:
Chem., vol. 88, no. 1, pp. 1–20, 2003.
[3] N. Moser, T. S. Lande, C. Toumazou, and P. Georgiou, “ISFETs in CMOS
runs. Nevertheless, since the reaction is isothermal, temperature and emergent trends in instrumentation: A review,” IEEE Sens. J., vol. 16,
transients do not interfere with the output signal and differences no. 17, pp. 6496–6514, Sep. 2016.
[4] N. Moser, T. S. Lande, and P. Georgiou, “A robust ISFET array with in-
in drift rate between the positive and negative reactions can pixel quantisation and automatic offset calibration,” in Proc. IEEE Biomed.
be used to distinguish the pH difference. Additionally, Fig. 16 Circuits Syst. Conf., Oct. 2016, pp. 50–53.
shows the distribution of active pixels at the beginining, post- [5] Y. Hu, N. Moser, and P. Georgiou, “A 32 × 32 ISFET chemical censing
array with integrated trapped charge and gain compensation,” IEEE Sens.
amplification and end of the DNA amplification reaction. In this J., vol. 17, no. 16, pp. 5276–5284, Aug. 2017.
case, the distributions capture the differences in output current [6] Y. Jiang et al., “A high-sensitivity potentiometric 65-nm CMOS ISFET
after subtracting the initial offsets due to trapped charge which sensor for rapid E. coli screening,” IEEE Trans. Biomed. Circuits Syst.,
vol. 12, no. 2, pp. 402–415, Apr. 2018.
is possible since all the active pixels are operating in the linear [7] N. Moser et al., “Live demonstration: A CMOS-based ISFET array for
velocity saturation region. rapid diagnosis of the Zika virus,” in Proc. IEEE Int. Symp. Circuits Syst.,
May 2017.
[8] M. Kalofonou and C. Toumazou, “Semiconductor technology for early
VII. CONCLUSION detection of DNA methylation for cancer: From concept to practice,”
Sens. Actuators B: Chem., vol. 178, pp. 572–580, 2013.
This paper presents a large-scale ISFET array which demon- [9] D. M. Garner et al., “A multichannel DNA SoC for rapid point-of-care
strates novel operation in current-mode regarding the sensing gene detection,” in Proc. IEEE Int. Solid-State Circuits Conf., Feb. 2010,
pp. 492–493.
front-end. By exploiting short-channel characteristics in stan- [10] N. Moser, C. L. Leong, Y. Hu, M. Boutelle, and P. Georgiou, “An ion
dard CMOS, we show that the velocity saturation region of imaging ISFET array for potassium and sodium detection,” in Proc. IEEE
operation is suitable and beneficial for ISFET-based pH sens- Int. Symp. Circuits Syst., May 2016, pp. 2847–2850.
[11] J. M. Rothberg et al., “An integrated semiconductor device enabling non-
ing since it linearly converts the small-signal pH variations to optical genome sequencing,” Nature, vol. 475, pp. 348–352, 2011.
the drain current of the device. Furthermore, by investigating [12] C. Toumazou et al., “Simultaneous DNA amplification and detection using
the short channel I–V characteristics we show that the linear a pH-sensing semiconductor system,” Nature Methods, vol. 10, pp. 641–
646, 2013.
region covers a very wide range of VG S voltages where the [13] E. C. Hayden, “Technology: The $1,000 genome,” Nature, vol. 507,
transconductance stays approximately flat. As a result, an IS- no. 7492, pp. 294–295, 2014.
FET in standard CMOS with appropriate biasing can serve as a [14] N. Miscourides and P. Georgiou, “Impact of technology scaling on IS-
FET performance for genetic sequencing,” IEEE Sens. J., vol. 15, no. 4,
front-end for pH sensing while being relatively insensitive to the pp. 2219–2226, Apr. 2015.
effects of trapped charge (as long as the device is on) and with- [15] B. Razavi, Design of Analog CMOS Integrated Circuits. New York, NY,
out the need to further amplify the ISFET transconductance. USA: McGraw-Hill, 2001.
[16] N. Miscourides and P. Georgiou, “Linear current-mode ISFET arrays,” in
Moreover, current-mode operation allows for a scalable pixel Proc. IEEE Int. Symp. Circuits Syst., May 2016, pp. 2827–2830.
architecture which has been demonstrated as a 12.8 K pixel ar- [17] P. Georgiou and C. Toumazou, “CMOS-based programmable gate ISFET,”
ray spanning approximately 1 mm2 silicon area. Compared to Electron. Lett., vol. 44, no. 22, pp. 1289–1290, Oct. 2008.
[18] Y. Hu and P. Georgiou, “A robust ISFET pH-measuring front-end for
previous works, shown in Table VI, this is the only approach chemical reaction monitoring,” IEEE Trans. Biomed. Circuits Syst., vol. 8,
demonstrating an array in current-mode of the smallest footprint no. 2, pp. 177–185, Apr. 2014.
size and linear pH to current conversion. [19] P. Nordman, T. Naas, and L. Poirel, “Global spread of carbapenemase-
producing enterobacteriaceae,” Emerging Infect. Dis., vol. 17, no. 10,
Furthermore, this paper shows that the real-time rapid detec- pp. 1791–1798, 2011.
tion (within 15 min) of genes associated to antibiotic resistance [20] J. Bausells, J. Carrabina, A. Errachid, and A. Merlos, “Ion-sensitive field-
can be achieved with minimal equipment while bypassing the effect transistors fabricated in a commercial CMOS technology,” Sens.
Actuators B: Chem., vol. 57, no. 13, pp. 56–62, 1999.
need for fluorescent tagging. As a result, this approach shows [21] L. Bousse, N. F. De Rooij, and P. Bergveld, “Operation of chemically
significant potential as a rapid point-of-care diagnostic test with sensitive field-effect sensors as a function of the insulator–electrolyte
demonstrated application in detecting infectious diseases. Mov- interface,” IEEE Trans. Electron Devices, vol. 30, no. 10, pp. 1263–1270,
Oct. 1983.
ing forward, we anticipate that such a platform can leverage [22] L. Shepherd and C. Toumazou, “Weak inversion ISFETs for ultra-low
on the large resolution of current-mode arrays to facilitate the power biochemical sensing and real-time analysis,” Sens. Actuators B:
simultaneous detection of multiple samples on the passivation Chem., vol. 107, no. 1, pp. 468–473, 2005.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.
1214 IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 5, OCTOBER 2018

[23] M. J. Milgrew and D. R. S. Cumming, “A proton camera array technol- Ling-Shan Yu received the B.S. (Hons.) degree
ogy for direct extracellular ion imaging,” in Proc. IEEE Int. Symp. Ind. in 2010 and the Ph.D. degree in 2016. She is
Electron., Jun. 2008, pp. 2051–2055. currently a Visiting Researcher with the Cen-
[24] R. van Hal, J. Eijkel, and P. Bergveld, “A novel description of ISFET tre for Bio-inspired Technology, Imperial College
sensitivity with the buffer capacity and double-layer capacitance as key London, London, U.K. She was the recipient of a
parameters,” Sens. Actuators B: Chem., vol. 24, no. 1, pp. 201–205, 1995. Taiwanese scholarship in 2011 and also an outstand-
[25] K. Takeuchi and M. Fukuma, “Effects of the velocity saturated region ing performance Ph.D. student scholarship from the
on MOSFET characteristics,” IEEE Trans. Electron Devices, vol. 41, no. 9, Department of Life Sciences, Imperial College Lon-
pp. 1623–1627, Sep. 1994. don, from 2013 to 2015. In 2017, she was the recipient
[26] R. Njuguna and V. Gruev, “Current-mode CMOS imaging sensor with of a Postdoctoral Fellowship sponsored by the gov-
velocity saturation mode of operation and feedback mechanism,” IEEE ernment of Taiwan and of U.K. Her research interests
Sens. J., vol. 14, no. 3, pp. 710–721, Mar. 2014. include bioinformatics, phylogenetic analysis, and development of isothermal
[27] Z. Yang, V. Gruev, and J. V. der Spiegel, “Low fixed pattern noise current- chemistry for viral detections as well as point-of-care devices for the detection
mode imager using velocity saturated readout transistors,” in Proc. IEEE of infectious diseases.
Int. Symp. Circuits Syst., May 2007, pp. 2842–2845.
[28] P. Georgiou and C. Toumazou, “ISFET characteristics in CMOS and
their application to weak inversion operation,” Sens. Actuators B: Chem.,
vol. 143, no. 1, pp. 211–217, 2009.
[29] E. Accastelli, P. Scarbolo, T. Ernst, P. Palestri, L. Selmi, and C. Guiducci,
“Multi-wire tri-gate silicon nanowires reaching milli-pH unit resolu-
tion in one micron square footprint,” Biosensors, vol. 6, no. 1, 2016,
Art. no. 9. Jesus Rodriguez-Manzano received the B.Sc. de-
[30] S. Jamasb, S. Collins, and R. L. Smith, “A physical model for drift in pH gree in biological sciences and the Ph.D. degree in
iSFETs,” Sens. Actuators B: Chem., vol. 49, no. 1, pp. 146–155, 1998. biotechnology and environmental microbiology from
[31] S. Jamasb, “An analytical technique for counteracting drift in ion-selective the University of Barcelona, Barcelona, Spain, in
field effect transistors (ISFETs),” IEEE Sens. J., vol. 4, no. 6, pp. 795–801, 2005 and 2012, respectively.
Dec. 2004. He is currently a Research Fellow with the Depart-
[32] D. Kim, B. Goldstein, W. Tang, F. Sigworth, and E. Culurciello, “Noise ment of Electrical and Electronic Engineering, Centre
analysis and performance comparison of low current measurement sys- for Bio-Inspired Technology, Imperial College Lon-
tems for biomedical applications,” IEEE Trans. Biomed. Circuits Syst., don, London, U.K. His background in microbiology
vol. 7, no. 1, pp. 52–62, Feb. 2013. and molecular biology was followed by a three-year
[33] Y. Liu, P. Georgiou, T. Prodromakis, T. Constandinou, and C. Toumazou, Postdoctoral position with the Division of Chemistry
“An extended CMOS ISFET model incorporating the physical design and Chemical Engineering, California Institute of Technology, Pasadena, CA,
geometry and the effects on performance and offset variation,” IEEE Trans. USA, where he was involved with the development of cutting-edge point-of-care
Electron Devices, vol. 58, no. 12, pp. 4414–4422, Dec. 2011. diagnostic technologies for infectious diseases. He has authored or co-authored
[34] T. Notomi et al., “Loop-mediated isothermal amplification of DNA,” 25 scientific publications and 3 international patents with more than 1200 ci-
Nucleic Acids Res., vol. 28, no. 12, 2000. tations. His research interest includes the interface of biology and engineer-
[35] C. Cheng, F. Zheng, and Y. Rui, “Rapid detection of blaNDM, blaKPC, ing, such as the development of low-cost sample preparation methods, innova-
blaIMP, and blaVIM carbapenemase genes in bacteria by loop-mediated tive molecular tools for the detection, quantification, and typing of microbial
isothermal amplification,” Microb. Drug Resist., vol. 20, no. 6, pp. 533– pathogens, microfluidics, isothermal nucleic acid amplification chemistries, and
538, 2014. digital single-molecule analysis.
[36] X. Huang, H. Yu, X. Liu, Y. Jiang, M. Yan, and D. Wu, “A dual-mode
large-arrayed CMOS ISFET sensor for accurate and high-throughput pH
sensing in biomedical diagnosis,” IEEE Trans. Biomed. Eng., vol. 62,
no. 9, pp. 2224–2233, Sep. 2015.
[37] B. Nemeth, M. S. Piechocinski, and D. R. S. Cumming, “High-resolution
real-time ion-camera system using a CMOS-based chemical sensor array
for proton imaging,” Sens. Actuators B: Chem., vol. 171–172, pp. 747– Pantelis Georgiou (A’5–M’08–SM’13) received the
752, 2012. M.Eng. degree in electrical and electronic engineer-
[38] C. Z. D. Goh, P. Georgiou, T. G. Constandinou, T. Prodromakis, and ing, and the Ph.D. degree from Imperial College
C. Toumazou, “A CMOS-based ISFET chemical imager with auto- London (ICL), London, U.K., in 2004 and 2008, re-
calibration capability,” IEEE Sens. J., vol. 11, no. 12, pp. 3253–3260, spectively.
Dec. 2011. He is currently a Reader with the Department of
Electrical and Electronic Engineering, ICL, where
he is also the Head of the Bio-Inspired Metabolic
Nicholas Miscourides (S’15) received the M.Eng. Technology Laboratory, Centre for Bio-Inspired
degree in electrical and electronic engineering in Technology. His research interests include bio-
2014, and the M.Res. degree in advanced com- inspired circuits and systems, CMOS-based lab-on-
puting in 2015, both from Imperial College Lon- chip technologies, and the application of microelectronic technology to cre-
don, London, U.K. He is currently working to- ate novel medical devices. He has made significant contributions to integrated
ward the Ph.D. degree at the EPSRC Centre for chemical-sensing systems in CMOS, conducting pioneering work on the devel-
Doctoral Training in High-Performance Embed- opment of ISFET sensors, which has enabled applications, such as point-of-care
ded and Distributed Systems and the Centre for diagnostics and semiconductor genetic sequencing. He has also developed the
Bio-inspired Technology, Department of Electrical first bio-inspired artificial pancreas for the treatment of Type-I diabetes using
and Electronic Engineering, Imperial College Lon- the silicon-beta cell. He was the recipient of the IET Mike Sergeant Medal of
don. Outstanding Contribution to Engineering in 2013 and the IEEE Sensors Council
His research interests include mixed-signal IC design for integrated chemical Technical Achievement Award in 2017. He is a member of the IET and serves
sensing in CMOS and large-scale ion imaging. He was the recipient of the Sir on the BioCAS and Sensory Systems technical committees of the IEEE CAS
Bruce White Prize 2014 for the best M.Eng. project with a focus on analog IC Society. He is also a CAS representative of the IEEE Sensors council and an
design. IEEE Distinguished Lecturer in circuits and systems.

Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on April 05,2022 at 20:05:26 UTC from IEEE Xplore. Restrictions apply.

You might also like