96M11453 1. Use an insulated stabilizing supply for the power supply.

Caution 2. Do not apply excessive tensile force to the cable.

3. Ensure that the cable tip is not submersed in water during wiring work.
4. Isolate the cable from power supply lines or power lines.
5. Isolate the cable as far as possible from any source of noise.
Electromagnetic Digital Flow Sensor n Precautions for grounding

FD-M Series (Version A) Caution

• FD-M  A Series
The bore and the metal areas contain the same electrical potential as the
internal ground (blue wire). Make sure to use an independent, insulated
power supply when using a positive grounding system. A positive-

Instruction Manual grounded power supply cannot be used as it may cause damage, so use
the FD-MZ  A Series. We also recommend using a system design that
insulates the flow sensor and its peripherals from other controllers to pre-
vent the effects of stray currents. The ground line and the protection circuit
may be damaged also in a negative grounding system because a large
difference in electrical potential occurs between the power supply unit and
the pipes. Use the FD-MZ  A Series in this case as well.
• FD-MZ  A Series
The bore and the metal areas are insulated from the power supply
line. This can be used in both the positive grounding system and the
negative grounding system.

n Precautions for piping

Danger Failure to follow instructions may lead to death or serious injury.
Warning Failure to follow instructions may lead to injury.
Failure to follow instructions may lead to product damage, such as
Caution product malfunctions.
Provides additional information on proper operations that can be
Note
easily mistaken.
It indicates cautions and limitations that must be followed during
Important
operation.
Safety Precautions
n General cautions
1. Do not use the FD-M Series out of the specification ranges. Comply with the
Danger contents described in this instruction manual when using the product.
2. Do not use the FD-M Series for applications requiring safety measures,
such as any nuclear, railroad, aircraft, vehicle, or playground equipment.
3. Do not modify the FD-M Series.
4. The FD-M Series is not designed to sanitary specifications. Do not use
the product for applications such as drinks, foods, or medical liquids.
5. The FD-M Series is not designed to explosion-proof specifications. Do not
use the product in an environment with materials such as flammable gas.
6. Do not use the FD-M Series with corrosive liquids.
1. Use the FD-M Series within the detectable fluid temperature range.
Caution When using the FD-M Series at a low temperature, take proper
anti-freezing measures. If freezing occurs, the FD-M Series body
will become damaged, possibly resulting in leakage.
2. Use the FD-M Series within the withstanding pressure range. The with-
standing pressure applies to instantaneous pressure. Use the FD-M Series
within the operating
pressure range in normal circumstances.
3. Use the FD-M Series within the detectable flow range.
This product cannot be used as a measuring instrument for use in trad-
Important
ing/commerce.
n Precautions for handling
1. Do not drop the FD-M Series, bang it against something, or apply
Caution excessive force. Handle the product by holding its body.
2. Do not pull strongly on the cable.
3. Do not use a sharply pointed object to press the setting keys.
n Precautions for detectable fluid
1. A detectable fluid is a non-corrosive fluid with a conductivity of 5
Caution μS/cm or greater. Do not use the FD-M Series for other types of flu-
ids. In particular, note that the product cannot be used for a fluid
with low conductivity such as pure water or oil.
2. When mixing fluids with different water qualities, mix them on
the downstream side of the sensor.
3. The FD-M Series may malfunction if a stray current flows through the mea-
sured fluid.
4. When large amounts of the insulating materials in the fluid stick to
the measurement pipes in the FD-M Series, the detected value
may fluctuate. If this happens, clean the measurement pipes to
remove the insulating materials.
5. When large amounts of the conductive component in the fluid stick
throughout the measurement pipes in the FD-M Series, the detected
value may fluctuate or becomes "0". If this happens, clean the
measurement pipes to remove the conductive component.
n Precautions for wiring
1. Before wiring the FD-M Series, check the color of the wires.
Warning
2. Use the FD-M Series within the rating range. The FD-M Series is a
sensor that uses a DC (direct current) power source. Do not apply
alternating current or other power supplies. Do not use a load that
exceeds the allowable limit.
Warning Do not install the FD-M Series in locations used as footholds.
1. Although the FD-M Series can be installed in any orientation, we recom-
Caution mend that it is installed so that the display face is vertical to the ground to
minimize the effects of bubbles.
2. Arrange piping so that the measuring pipe is always filled with the liquid. If it
is not filled with fluid, a value may appear for flow even when the fluid is not
flowing.
3. Arrange piping so that gas will not enter it. When the fluid contains bubbles,
install the FD-M Series in a location where it is less affected by bubbles.
(1) When installing the FD-M Series to vertical piping, make sure that the liq-
uid flows upward from the lower part to the higher one.
(2) Do not install the FD-M Series in locations where bubbles collect.
4. Do not install the FD-M(Z) Series in locations where load, tensile force,
strong compressive force, or strong pipe stress caused by axis shift or other
reasons is applied during or after the installation. The excessive stress or
weight on the FD-M(Z) Series may cause unstable operation.
5. Make sure that sealing tape or adhesive agents do not protrude from the
threaded portion of the piping.
6. Make sure that the pipe directly in front of the sensor is as straight as possi-
ble. Ensure that the flow is not disturbed by material such as protruding rub-
ber seals. We recommend that you use a pipe with a straight section that is
at least 5 times longer than the bore diameter, and at least 20 times longer
than the diameter when crosscurrents occur.
7. Install the flow regulating valve or its equivalent to the downstream side of
the sensor.
8. We recommend that you provide a maintenance space around the FD-M
Series to facilitate maintenance work.
9. Do not install the FD-M Series to a piping system that receives impact pres-
sure.
10. When any oil or foreign matter exists in the pipes, clean them before install-
ing the FD-M Series.
11. When piping expands thermally, release the stress using a method such as
bending the pipes to properly arrange the system.
12. Do not install the FD-M Series in a location exposed to intense light, such
as direct sunlight, or radiation from a heat source.
13. Do not install the FD-M Series in a location where it may become sub-
merged.
14. When installing the FD-M Series in a location where vibrations occur, fix the
piping in place with tubes or supports as close to the unit as possible. The
excessive vibrations on the
FD-M(Z) Series may cause unstable operation.
15. When multiple FD-M Series or FD-MH Series units are installed next to
each other, keep at least a 70 mm gap between the measurement pipes.
n Other precautions
1. The power ON reset time for the FD-M Series is 10 seconds after power
Caution is turned on. Do not use outputs from the sensor during this period.
2. Initial drift may occur after supplying power to the FD-M Series. To detect a
minute difference in the flow rate, let the FD-M Series warm up for approxi-
mately 15 to 30 minutes.
3. Do not bring a strong magnet or magnetic field close to the main body for
the FD-M Series.
n Precautions on CE and UKCA Marking
KEYENCE has confirmed that the FD-M Series comply with the essential requirements of
EMC Directive (CE) and Electromagnetic Compatibility Regulations (UKCA) by assessing
its conformity to the requirements with a ferrite core (OP-84289) attached to the input and
output cable. (Applicable standards - EMI: (BS)EN61326 Class A/EMS: (BS)EN61326)
When using the FD-M Series in the Member States of European Union and in the United
Kingdom, make sure to prepare a ferrite core (OP-84289).
l Attaching the ferrite core
Attach the ferrite core at a position within 60
mm from the FD-M Series by winding the
cable once as shown in the diagram.
60 mm

E FD-M-IM 1
 [Ex: FD-M(Z) ∗ ∗AY Series]
Piping and Installation Bubbles
■ Installation
Install joints (or pipes) to the two bores on the main unit.
Installation-side bore Bore

L = At least 5 times longer than the

L*
bore diameter of the unit
* Make sure that the straight sec-
tion of the pipe that is directly
Bubbles connected to the inlet bore of the
unit is at least 5 times longer than
Joint or pipe the bore diameter. (At least 20
* The above diagram shows the FD-M(Z) ∗ ∗ AY Series. The display direction of times longer is recommended
the FD-M(Z) ∗ ∗ AT Series is different in 90 degrees. L* when the turbulent flow occurs)
■ Precautions for piping and installation
● Installation direction ● Installing joints
There are not any restrictions to the direction that the FD-M Series can be installed, but
installing the unit with the display screen perpendicular to the ground reduces the
effects of bubbles and enables more stable measurements. When installing joints to the FD-M Series, you must use a tool to hold the
Caution
bore on the installation side of the unit. Holding the body or the bore on
Display screen is perpendicular to the ground Display screen is not perpen- the other side of the FD-M Series may cause damage to the unit.
dicular to the ground

Hold the bore on the installation side of the unit Holding the body or the bore on the other
side of the FD-M Series may cause damage

FD-M(Z) ∗ ∗ AT Series FD-M(Z) ∗ ∗ AY Series

Tightening torque for joints
Use a tightening torque for installing the joint that is less than the value listed in the
● Flow direction table below.
The flow direction of the fluid can be switched by the settings. For more information
about changing the settings, see page 7 of this instruction manual. Series name Tightening torque
The flow is set to the direction shown in the diagram below when the sensor is shipped FD-M(Z)5A Series 23 N⋅m
from the factory.
FD-M(Z)10A Series 23 N⋅m
FD-M(Z)50A Series 35 N⋅m
Flow o
f fluid FD-M(Z)100A Series 40 N⋅m
Flow of fluid

Note If fluid leaks from the pipes even when using the torque shown above, do not
attempt to tighten the joints further. Instead, check for flaws in the threaded
portion or sealing tape.

● Installation to the pipe area

FD-M(Z) ∗ ∗ AT Series FD-M (Z)∗ ∗ AY Series Be careful not to apply an excessive stress or vibration from the pipes to the FD-M
Series.
Note Install the FD-M**AT Series so that the fluid flows upward.
An excessive stress or vibration on the FD-M Series may cause dam-
If the FD-M Series is installed so that the fluid flows downward, bubbles may Caution
appear, making it difficult to completely fill the pipes. This can cause the values age or unstable operation.
to fluctuate and errors to appear on the display.
• Align the pipes directly connected
to the FD-M Series.
● Measurement pipes
• Arrange piping so that the measurement pipes are always filled with the liquid.
[Ex: FD-M(Z) ∗ ∗AY Series]

Axis shift

Do not pipe the FD-M Series to correct the axis shift. Doing so applies
L* Caution an excessive stress to the bore.

L = At least 5 times longer than the bore diameter of the unit
* Make sure that the straight section of the pipe that is directly connected to the
inlet bore of the unit is at least 5 times longer than the bore diameter. (At least 20
times longer is recommended when the turbulent flow occurs)
[Ex: FD-M(Z) ∗ ∗ AT Series]
Bubbles
L = At least 5 times longer than the
bore diameter of the unit
* Make sure that the straight sec-
tion of the pipe that is directly con-
nected to the inlet bore of the unit
L* is at least 5 times longer than the
bore diameter. (At least 20 times
longer is recommended when the
turbulent flow occurs)
• Arrange piping so that gas will not enter it. When the fluid contains bubbles, install
the FD-M Series in a location where it is less affected by bubbles.
• When the axis shift cannot be corrected, use a
Flexible pipe
flexible pipe or similar thing to connect the pipe
so that the stress is not applied to the bore.
* Make sure that the straight section of the
pipe that is directly connected to the inlet
bore of the unit is at least 5 times longer
than the bore diameter. (At least 20 times
longer is recommended when the turbulent
flow occurs)
Axis shift
• Fix the connected pipes to other equipment so
that the pipe load is not directly applied to the
FD-M Series.
Fix the pipes
Vibrations and stress can be reduced by fixing to equipment
the connected pipes to other equipment. The
fixing positions of the pipes must be as close to
the bores of the
FD-M Series as possible.

Be careful not to cause axis shift when fixing the pipes.

Caution When vibrations and the load (stress) cannot be reduced, fix two or
more places.

2 E FD-M-IM
● Installation of multiple FD-M Series
When multiple FD-M Series units are installed next to each other, keep at least a 70 mm
Operations of Detection Modes
gap between the measurement pipes. This requirement is the same whether using self- ■ F-1 (Upper/lower limit detection mode)
contained or separated types.
Sets two detection points (P1 and P2) for the instantaneous flow rate at any desired value.

P2
Hys • Hys (hysteresis mar-
gin) can also be set.
P1 Hys

ON
Output 1 OFF
ON
Output 2 OFF

70 mm or greater* 70 mm or greater* • When using the bank function, P1 becomes P3 and P2 becomes P4 when the external out-
put (violet line) is turned on.

Reference When using "Alternate frequency", the sensors can be installed closer ■ F-2 (Window and Accumulation Pulse mode)
than 70 mm to each other. For more information about the alternate fre- Outputs a pulse for each accumulated flow unit and for output within the specified range for the
quency function, see "Alternate frequency" (page 7). instantaneous flow.

■ Wiring
The following diagram shows the input and output cables.
P2 Hys • Hys (hysteresis mar-
For more information about the I/O circuits, see page 9 of this instruction manual. gin) can also be set.
Hys • Outputs a pulse for the
Brown P1
24 VDC accumulated flow.
ON
Blue Output 1 OFF
0V
ON
Black Output 2 OFF
Output 1
Output 1 : The user can select a pair of upper (P1) and lower (P2) limits, and the sensor
White turns off when the instantaneous flow rate falls outside of the resulting range.
Output 2
Output 2 : One pulse is output for every amount of flow preset as the accumulated flow
Gray unit. (Output is inverted for every half quantity of the accumulated flow unit.)
Output 3 (Error output)
The pulse outputs continuously when the accumulated value is saturated.
Pink
Analog output • When using the bank function, P1 becomes P3 and P2 becomes P4 when the external out-
Violet put (violet line) is turned on.
Bank switching/Accumulation reset input/
Zero flow input ■ F-3 (Accumulated flow mode)
Sets two detection points (P1 and P2) for the accumulated flow rate at any desired value.

● Cable connectors of the FD-MZ ∗∗ A Series

P2
[Connecting the input and [Disconnecting the input and
output cables] output cables]
P1

ON
Output 1 OFF
ON
Output 2 OFF

External input (violet line)

Panel reset
External input (violet line)/Panel reset*1 : Turns off the external input and starts counting the time.
Align the white marks and *1Pressing and holding the and buttons for about 3 seconds while the
insert fully to the end. accumulated flow is displayed simultaneously resets values and starts
counting the time.

Identifying Part Names and Functions ■ A-1 (Flow level mode)

Sets four detection points (P1, P2, P3, P4) for the instantaneous flow rate at any
desired value. Two windows are specified.
Bore Output image
Flow indicator Output 1 Output 2
OFF OFF
P4 Hys P4
OFF ON
P3 P3
Hys
ON ON
Output 1 indicator Output 2 indicator
P2 Hys P2
Hys ON OFF
P1 P1
OFF OFF
ON
BANK indicator Output 1 OFF * Vertical axis: Flow
Current value display ON
ALARM indicator Output 2 OFF
Setting indicator • Hys (hysteresis margin) can also be set.
Arrow buttons
MODE button FD-M
■ A-2 (Accumulated Flow and Timeout mode)
The detection point for accumulated flow (P1) can be set at any value. Output 2 is turned
on if the detection point (P1) is not reached within a specified time limit (t).(Addition (inc)
I/O cable or subtraction (dec) can be selected as the accumulated flow display.)
Setting display

When addition (inc) is set When subtraction (dec) is set

Bore
P1 P1
Arrow buttons : Used to change the settings.
Use the buttons to select the setting menu.
Use the buttons to change the setting. ON ON
Output 1 OFF Output 1 OFF
ON ON
Flow indicator : Displays the state of flow in terms of scroll speed for the instanta- Output 2 OFF
t Output 2 OFF
t
neous flow. External input External input
The display color changes depending on whether Output 1 is on (violet line) (violet line)
or off. (The display color is green when Output 1 is on and red
when Output 1 is off as the factory default settings.) External input (violet line*1)/Panel reset*2 : Resets the accumulated flow, sets the timer to
"0", and turns off the control output.
*1 Turns off the external input and starts counting the time. When external input is
turned on, the display for the accumulated flow is reset to "0" when addition (inc)
is selected or is reset to the value for P1 when subtraction (dec) is selected.
*2 Pressing and holding the and buttons for about 3 seconds while the accu-
mulated flow is displayed simultaneously resets values and starts counting the time.

E FD-M-IM 3
 Switching the Display and Configuring Settings During Detection Function Settings
■ If the mode is F-1, F-2, or A-1 This section explains how to set the detection mode and the settings for each function. Press
and hold the MODE button for 3 seconds during detection mode to start the settings for each
Current value/setting (Configuring settings) function. For an explanation of each function, see pages 6 and 7 of this instruction manual.
Current value/setting (P1, P3) Current value/setting (P2, P4)
■ Basic settings
Press Press MODE once Press MODE for 3 seconds
once

MODE MODE
1 Selecting detection mode
• The upper part indicates the current value. Press the and buttons to select the setting.
The lower part indicates the setting.
• Press MODE to switch the displayed setting. Upper/lower limit detection mode (instantaneous)
MODE Window and accumulation pulse mode
Setting indicator 1 illuminates for setting P1.
Setting indicator 2 illuminates for setting P2. (instantaneous and accumulation)
Setting indicator 1 flashes for setting P3. Press MODE Accumulated flow mode (accumulation)
Setting indicator 2 flashes for setting P4. Flow level mode (instantaneous)
or once
• The setting can be configured by pressing the and buttons. Accumulated flow and timeout mode (accumulation)
If the mode is
If the
Press once Press once A-2
mode is
Peak/bottom hold display F-1,
F-2,
F-3,
2 Selecting direction of accumulation
Flashing alternately or A-1 Press the and buttons to select the setting.
Increment (Add from 0)
MODE MODE MODE Decrement (Subtract from setting value)

• The upper part indicates the peak value. The lower part indicates the bottom value. Press MODE or once
• Press MODE or to switch to the peak hold (P-H) setting.
Press MODE or to switch to the bottom hold (b-H) setting. 3 Setting timeout time for output 2
• The hold value can be reset by pressing and holding the and
Press the and buttons to select the setting.
buttons for 3 seconds.
• The hold value is reset when the power is turned off. Range: 1 to 99 seconds
MODE
Press once Press once
Accumulated value/accumulated flow unit Press MODE or once
• The upper part indicates the accumulated value.
The lower part indicates the accumulated flow unit.
• The displayed value multiplied by the accumulated 4 Selecting output mode
flow unit produces the actual measured value.
• The accumulated value can be reset by pressing Press the and buttons to select the setting.
MODE
and holding the and buttons for 3 seconds. Output 1 Output 2 Output 3 (Alarm output)
MODE N.O. N.O. N.O.
N.C. N.O. N.O.
Press once
Press MODE N.O. N.C. N.O.
N.C. N.C. N.O.
or once N.O. N.O. N.C.
■ If the mode is F-3 or A-2 N.C. N.O. N.C.
N.O. N.C. N.C.
Current value/setting (Configuring settings)
N.C. N.C. N.C.
Current accumulated value/setting (P1) Current accumulated value/setting (P2)

when the mode is F-3

Press MODE once
5 Setting accumulated flow unit
Press the and buttons to select the setting.
MODE MODE
Unit ( ) 0.01 0.1 1 10 100 1000
MODE
Timeout setting (P2) FD-M(Z)5A/
M(Z)10A Series
when the mode is A-2 Press MODE
FD-M(Z)50A/
Press
once Press MODE once or once M(Z)100A Series

MODE

• The upper part indicates the current value. 6 Selecting response time∗1
The lower part indicates the setting.
Press the and buttons to select the setting.
• Press MODE to switch the displayed setting.
Setting indicator 1 illuminates for setting P1.
Setting indicator 2 illuminates for setting P2. MODE
Unit (second)
• The setting can be configured by pressing the and buttons.
However, the timeout value cannot be changed. (For more information
Press MODE ∗1 This is the time until the internal evaluation
value and analog output have responded 63%.
about changing the timeout value, see page 4 of this instruction manual.) or once
• The displayed value multiplied by the accumulated flow unit produces the
actual accumulated value.

Press once Press once 7 Selecting display mode

Instantaneous flow rate display Press the and buttons to select the setting.
• The upper part indicates the instantaneous Series name Display mode Minimum setting value
flow rate value. The lower part indicates the MODE FD-M(Z)5A/ Std 0.1
instantaneous flow unit.
M(Z)10A Series rESo ∗ 1 0.01
Press MODE
MODE
FD-M(Z)50A/ Std 1
or once M(Z)100A Series rESo 0.1

Press once Press once ∗1 When "rESo" is selected for FD-M(Z)5A, the flow can
Accumulated value/accumulated flow unit be set in 0.05 increments between 0.15 and 0.5 /min,
• The upper part indicates the accumulated value. and set in 0.01 increments for values above 0.5 /min.
The lower part indicates the accumulated flow unit.
• The displayed value multiplied by the accumulated 8 Setting the display averaging
flow unit produces the actual measured value.
• The accumulated value can be reset by pressing MODE Set the value by pressing the and buttons .
MODE and holding the and buttons for 3 Range: 0 to 10.0 s
seconds. Press MODE

Press once or once

4 E FD-M-IM
 ■ Setting origin adjustment
Press and hold the MODE button and the button at the same time for 3 seconds dur-
If the mode is If the mode is F-1, F-2, or A-1 ing detection mode to start the settings for origin adjustment.
F-3
or A-2 For an explanation of each function, see page 6 of this instruction manual.
9 Setting hysteresis
Detection
Press the and buttons to select the setting.

Series name Display mode Range

Press MODE and buttons for 3 seconds
MODE FD-M(Z)5A/ Std 0.0 to 9.9
M(Z)10A Series rESo 0.00 to 9.99
Press MODE Std 0 to 99
FD-M(Z)50A/ Press and 17 Performing origin adjustment
or once M(Z)100A Series rESo 0.0 to 99.9
buttons for 3 seconds
Press and hold the and buttons for

3 seconds to perform origin adjustment.

When an error
10 Selecting external input has occurred
MODE
∗ " " is displayed while performing
Select the setting by pressing the and buttons. origin adjustment. Adjustment takes about 20 seconds.

When the adjustment succeeded

When adjustment is complete, " " is
Control input off displayed and the unit returns to detection mode.
Use the bank function∗ 1 Turning off the power during adjustment stops origin
MODE
Use accumulation reset function∗ 2 adjustment.
Use zero flow function∗ 3 Press MODE or once ∗ If an error occurs during adjustment,
Press MODE " " is displayed before returning
or once ∗ 1 Only selectable when detection mode is F-1 or F-2 to the " " display.
∗ 2 Only selectable when detection mode is F-3 or A-2
∗ 3 Only "triG" is selectable when detection mode is A-1
11 Selecting flow indicator display color
MODE
Press the and buttons to select the display
color when output is on.
MODE ON: green, OFF: red
Press MODE buttons for 3 seconds
ON: red, OFF: green
Press MODE
or once
To detection

Press the button to return to the previous parameter.

12 Selecting power save mode
Press the and buttons to select the setting.
Do not use
■ Initializing origin adjustment
MODE Use Press and hold the MODE button and the button at the same time for 3 seconds dur-
ing detection mode to start the settings for origin adjustment and empty pipe detection.
Press MODE or once
Detection

13 Selecting analog output

Press MODE and buttons for 3 seconds
Press the and buttons to select the setting.
Standard
MODE Free range analog

Press MODE or once

If Std is If FrAn is selected
selected MODE

14 Setting free range analog lower limit Press once

Press the and buttons to select the setting.

Initializing origin adjustment
Range: 0.0 to maximum display range ( /min)
MODE
Press and hold the and buttons for 3
seconds to return to the factory default settings.
Press MODE or once
MODE
∗ When initialization is complete, " "
is displayed and the unit returns to detection mode.
15 Setting free range analog upper limit
To detection
Press the and buttons to select the setting.
Range: 0.0 to maximum display range ( /min)
MODE

Press MODE or once

16 Setting the alternate frequency functions

Set the value by pressing the and buttons.
Normal
MODE Alternate frequency

Press MODE or once

MODE

Press MODE or once

To detection

* • Press the button to return to the previous parameter.

• Press and hold the MODE button for 3 seconds to exit from the settings.
Any changes made to the settings before exiting will be saved.

E FD-M-IM 5
 Function Explanation 10.Selecting external input (violet line function)
1. Detection mode The violet line has the following function in each detection mode.
F-1 F-2 F-3 A-1 A-2
For more information about detection mode, see "Operations of Detection Modes" OFF × ×
(page 3) of this instruction manual.
Bank input × × ×
Accumulation reset input × × ×
2. Accumulation direction Zero flow input
: Selectable × : Not selectable (not displayed)
Sets the accumulation direction (added to 0 or subtracted from the setting value) for
the accumulated flow. It can only be set when the mode is A-2.
■ Bank function (when the mode is F-1 or F-2)
Two patterns of settings, Bank A and Bank B, can be registered when using the bank
3. Timeout time for Output 2 function.
● Registering settings
Sets the timeout time for output 2. It can only be set when the mode is A-2.
1 Set the detection mode to F-1 or F-2 and select “Bank input” for the external input. For
more detailed information about the settings, see page 5 of this instruction manual.
4. Output mode
• Each output can be set to Normal Open (N.O.) or Normal Closed (N.C.).
2 Press and hold the MODE button for 3 seconds to return to normal detection.

• The following table shows output controls when N.O. is set. 3 Use the MODE button to switch the bank and register the two patterns of settings.
Values in parentheses ( ) indicate output controls when N.C. is set
Output 3 Press the MODE button quickly to switch between banks.
State Output 1 Output 2
(Alarm output)
• The setting indicator illuminates to indicate the Bank A settings (P1 and P2).
ErC is displayed OFF (OFF) OFF (OFF) OFF (OFF)
The setting indicator flashes to the Bank B settings (P3 and P4). (For more
Flow evaluated as Flow evaluated as
Countercurrent ON (OFF) information, see page 4 of this instruction manual.)
0 0
Resetting power OFF (OFF) OFF (OFF) OFF (OFF)
● Bank switching Bank indicator
Flow evaluated as Flow evaluated as
FFFF is displayed OFF (ON) When the detection mode is F-1 or F-2 and bank
max. value max. value
switching is turned on, according to the bank input.
ErE is displayed Normal operations Normal operations ON (OFF) settings change in the following manner.
• Bank input off :Uses settings for Bank A (P1 and P2)
• Bank input on :Uses settings for Bank B (P3 and P4)
5. Accumulated flow unit
■ Accumulation reset function
Sets the accumulated flow unit. The range is different depending on the model. When the accumulation reset function is selected, the MODE
accumulated flow is set to 0 (reset) when the external
input is turned on.
6. Response time
■ Zero flow function
Sets the response time (the time until the internal evaluation and analog output have When the zero flow function is selected, the current value for accumulated flow is fixed
responded 63%). to 0 /min when the external input is turned on. The control output, analog output,
error evaluation, and other displays act as if the flow is 0 /min.
This is useful in situations such as when a flow value is displayed due to the empty
7. Display mode pipe status.

Select the display mode (display resolution).

11.Setting the flow indicator display color
8. Display average Sets the display color for the flow indicator.

Function for stabilizing the current value display. Increasing the setting value makes the
response slower and reduces the fluctuations. 12.Power save mode
Averaging is only performed on the display.
Reference
It does not affect the transistor output or analog output. When using the power save mode, the FD-M Series performs act the following operations:
• If no keys are pressed for about 10 seconds, the display
The display response speed is the response time " " on the setting menu plus the switches to the power save display.
display averaging time. The current value and setting value do not appear
during power save display.
The flow indicator, output indicator, and alarm indicator
9. Hysteresis act as normal. MODE
• Press any key to return to the normal display.
Sets the hysteresis. The range is different depending on the model. It can only be set
when the mode is F-1 or F-2.
13.Analog output and free range analog output (pink line)
Analog output
Analog output is displayed in the following manner with the factory default settings
(Std).
Analog output
(mA)
20
Maximum rated value
FD-M(Z)5A Series : 5 /min
FD-M(Z)10A Series : 10 /min
FD-M(Z)50A Series : 50 /min
FD-M(Z)100A Series : 100 /min

4.8
4
0 Flow ( /min)
0 /min Minimum flow Maximum rated value
* Use the factory default settings in normal circumstances. Use free range analog
output to change the analog output range according to the flow.

Free range analog output

• Free range analog output is output in the range of 4 to 20 mA corresponding to the
lower limit (A-Lo) and the upper limit (A-Hi). (For more information about the settings,
see page 4 of this instruction manual.)

6 E FD-M-IM
 • The values for A-Lo and A-Hi can be set in 10% increments of the maximum rated ■ Key lock
flow. Key lock disables operation of the sensor’s keys. The detection display can be
The maximum value that can be displayed determines the maximum value that can switched even during key lock.
be set. In the FD-M10A Series, for example, this value is 30 /min. ● Enabling key lock
Press and hold the MODE and buttons (or the
[Ex.] When FD-M(Z)10A is set to A-Lo (6 /min) and A-Hi (16 /min)
Analog output
MODE and buttons) for 3 seconds during detection
(mA)
20 mode. " " flashes in the display area for the
current value display and key lock is enabled.
MODE

● Disabling key lock

Press and hold the MODE and buttons (or the
4
Flow ( /min) and buttons) for 3 seconds while the key lock
0 6 16 30
is enabled. " " flashes in the display area for
(A-Lo) (A-Hi)
* When using free range analog, the values less than the minimum flow are output as 4 mA. the setting display and key lock is disabled.
MODE

Note Set the upper limit (A-Hi) so that it is larger than the lower limit (A-Lo).
If the upper limit (A-Hi) is set smaller than the lower limit (A-Lo), then the
analog output is fixed at 4 mA. Setting Flow Direction and Initial Reset (Initialization)
After performing initial reset, set the flow direction.
14.Free range analog lower limit The flow direction can be set in the following manner for T and Y types.
• For Y types, select between left to right flow (r) and right to left flow (L).
Sets the lower limit for the free range analog. This can only be set when "Free range • For T types, select between down to up flow (u) and up to down flow (d).
analog" is set in "13. Analog output". ■ Initial values for each setting

15.Free range analog upper limit Setting

P1
FD-M(Z)5A
2 ( /min)
FD-M(Z)10A
3 ( /min)
FD-M(Z)50A
15 ( /min)
FD-M(Z)100A
30 ( /min)
Sets the upper limit for the free range analog. This can only be set when "Free range If the mode is P2 5 ( /min) 10 ( /min) 50 ( /min) 100 ( /min)
F-1, F-2, or A-
analog" is set in "13. Analog output". 1 P3 7 ( /min) 13 ( /min) 65 ( /min) 130 ( /min)
P4 10 ( /min) 20 ( /min) 100 ( /min) 200 ( /min)
16.Alternate frequency F-3 or A-2 P1 150 ( )
Mode P2 9999 ( )
When the installation distance between neighboring FD-M Series is less than 70 mm,
the display value may fluctuate due to interference.
In this situation, set alternate frequencies for the interfering FD-M Series to prevent ■ Setting initial reset and flow direction
mutual interference. This function works the same whether using self-contained or
separated types.
● Initial reset (Initialization)
Select " (Normal)" Select " (Alternate frequency)" Select " (Normal)"
1 Press the button five times while holding down the MODE buttons.
" " appears on the display.

2 Press the or button

to select the type of initialization.
• "SLct" : Initializes No. 1 to No. 16 of the following
items and each setting value.
70 mm or less 70 mm or less
• "ALL" : Initializes all of the following items and each MODE
70 mm or greater* setting value.
• "no" : Cancels initialization and returns to detection
* Keep an installation distance of at least 70 mm between two normal (Fr1) units and two
mode.
alternate frequency (Fr2) units.
Mutual interference will not always occur if there is less than 70 mm ■ Initial value
Reference
between the units. No. Setting Initial value
1 Detection mode F-1
17.Performing origin adjustment 2 Accumulation direction (A-2) inc
3 Timeout (Output 2) 10
Origin adjustment sets the current flow display as zero. Make sure that the pipes are 4 Output mode nooo
completely filled with water and that there is no flow before performing this adjustment.
5 Accumulated flow unit 1
6 Response time 5
Other precautions
FD-M(Z)5A Series: rESo
7 Display mode FD-M(Z)10A Series: Std
■ ALARM indicator and error alarm output FD-M(Z)50A/M(Z)100A Series: rESo
8 Display average 1.0
● ALARM indicator FD-M(Z)5A Series: 2% of rated current
The ALARM indicator illuminates in the following cases. 9 Hysteresis FD-M(Z)10A/M(Z)50A/M(Z)100A Series 1% of
(1) An overcurrent error is generated. rated current
(2) A countercurrent is detected. 10 Bank switching oFF
(3) An access error occurs in the internal memory. 11 Flow indicator display color G-on
MODE
12 Power save mode oFF
● Error alarm output 13 Analog output Std
Output 3 (alarm output) turns on when the alarm indicator 14 Free range analog lower limit 0
illuminates. ALARM indicator
FD-M(Z)5A Series : 5
FD-M(Z)10A Series : 10
15 Free range analog upper limit
Note The ALARM indicator and Output 3 (alarm output) will usually not turn on if a FD-M(Z)50A Series : 50
longer response time is selected. If a short duration alarm does not affect FD-M(Z)100A Series : 100
detection in your application and if you do not want to show the ALARM 16 Alternate frequency Fr1
indication, select a longer response time.
17 Performing origin adjustment Factory default settings

E FD-M-IM 7
3 Press the MODE button. ■ Troubleshooting (other than error displays)
• When " " or " " are selected, the unit returns to Problem Cause Solution
detection mode. "triG" (zero flow input) is
• Selecting " " moves on to selection of the flow direction. selected for the external input Either select an option other than "triG" (zero
" " appears on the current value display area (upper level). function and external input is flow input) or turn off the external input.
received.
The flow direction is displayed on the setting display area (lower level) in the following
manner, depending on whether a T or Y type is being used." appears on the display. The display is set to the
Select the instantaneous flow rate display.
accumulated value display.
For a T type Conductive material is
attached to the bore or Clean the measurement pipes to remove
throughout the measurement the conductive material.
The instantaneous pipes.
flow rate display
or Strong stress is applied to Correct the axis shift to reduce the stress on
does not change
from "0". the bore, or vibrations are the bore.
MODE MODE
applied to the unit. Change the fixing method to reduce vibrations.
Flow from down to up Flow from up to down
Clean the measurement pipes to remove
For a Y type Insulating material is the attached materials.
attached to the bore or When the inside of the pipe rusts, the rust
throughout the causes conduction defect around the
measurement pipes. bore. Improve the water quality or clean
the measurement pipes.
or
The measurement pipe is Completely fill the measurement pipes with
MODE MODE empty. liquid whose conductivity is 5 μs/cm or more.
• There is pulsating flow or
turbulent flow.
• Correct the piping to reduce the causes
Flow from left to right Flow from right to left • There is cavitation generated
noted to the left.
from extreme pressure due
• Increase the response time.
to problems such as changes
● Setting the flow direction in the bore diameter.

4 Press the or button to select the flow direction.

5 Press the MODE button to complete
the setting.
When the settings are complete,
the unit returns to detection mode.
MODE
Error Displays, Corrective Actions, and Troubleshooting
■ Error displays and corrective actions
Error display Cause
Overcurrent flows through
Output 1 and 2 or Output 3.
The pink wire is short-
circuiting other wires.
An error occurred while
writing to EEPROM.
A part inside of the sensor
is damaged.
The flow is running in the
opposite direction of the
specified flow direction.
The accumulation display
exceeds the upper limit of the
display range.
The instantaneous flow rate
exceeds the display range for
the flow.
• The instantaneous
• The display
Solution
Check the load and return it
within the rated range.
Connect the wires correctly.
Perform initial reset. If
resetting does not correct the
problem, contact your local
KEYENCE dealer.
Replace the sensor.
Set the flow direction to match
the direction that the liquid is
flowing in.
Switch the settings for the
display units or use an
external counter.
* If the symptoms do not improve, contact your nearest KEYENCE office.
Check the flow and return it
within the display range.
Conductive or insulating
Clean the measurement pipes to remove
the conductive material.
material is attached to the When the inside of the pipe rusts, the rust
bore or throughout the
measurement pipes.
causes conduction defect around the
bore. Improve the water quality or clean
the measurement pipes.
flow display • Install the FD-M Series as far as possible
fluctuates. A strong high-frequency
from the source of the magnetic field.
magnetic field is generated
• Insert the FD-M Series into a case made
sometimes near the sensor.
of magnetic metal.
becomes 0 /min.
Keep an installation distance of at least 70 mm
Mutual interference has
between neighboring FD-M Series or set
occurred with another
alternate frequency for the interfering FD-M
FD-M Series or FD-MH
Series.
Series. For more details, see "16. Alternate
frequency" (page 7).
Strong stress is applied to Correct the axis shift to reduce the stress
the bore, or vibrations are on the bore. Change the fixing method to
applied to the unit. reduce vibrations.
Remove the cause of the noise or use the
Noise is applied to the pipe. D type grounding (grounding resistance
of 100 Ω or less) to reduce the noise.
Arrange piping so that the measurement
pipes are always filled with the fluid.
With If the pipes cannot be filled with fluid, try
empty the following methods.
A value The pipes are not full of
pipe Zero flow function
appears fluid.
(Not full Select "triG" (zero flow function) for "10.
on the of fluid) Selecting external input" and start external
flow input. This forces the currently input flow
display display to become as 0 /min.
when
there is Use origin adjustment to adjust the origin.
no fluid A strong stress or shock When displaying the flow while performing
flowing may have affected the unit origin adjustment, slow down the response
Full of fluid during installation (or after time or use the zero flow function. In
installation), which may particular, when using FD-M5A, be aware
have shifted the origin. that using a response time of 0.5 s or 1 s
may cause this problem to occur.
Remove the voltage.
The display does Voltage is being applied to Make sure to use an independent,
not appear. Or, the the bore. insulated power supply when using a
lights flicker on and positive grounding system.
off. The power supply voltage is Try the independent power supply having
unstable. the sufficient capacity.

8 E FD-M-IM
Specifications ■ Allowable ambient operating temperature versus fluid tem-
perature
Ambient temperature 50 ˚C
NPN For vertical piping FD-M(Z)5AT FD-M(Z)10AT FD-M(Z)50AT FD-M(Z)100AT
Fluid temperature 75 ˚C
output For horizontal piping FD-M(Z)5AY FD-M(Z)10AY FD-M(Z)50AY FD-M(Z)100AY 60

Ambient temperature (˚C)

Model*1 50 Ambient temperature 40 ˚C
PNP For vertical piping FD-M5ATP FD-M10ATP FD-M50ATP FD-M100ATP 40 Fluid temperature 85 ˚C
output For horizontal piping FD-M5AYP FD-M10AYP FD-M50AYP FD-M100AYP 30
Allowable operating range
20
Configuration Built-in amplifier
10
Rated flow range*2 0.25 to 5 /min 0.5 to 10 /min 2.5 to 50 /min 5 to 100 /min 0
0 10 20 30 40 50 60 70 80 90
3 Fluid temperature (˚C)
Displayable range* 0.15 to 10 /min 0.5 to 30 /min 2.5 to 100 /min 5 to 200 /min

Settable range 0 to 10 /min 0 to 30 /min 0 to 100 /min 0 to 200 /min ■ Allowable operating pressure range versus fluid temperature
Minimum flow *4 0.15 /min 0.5 /min 2.5 /min 5 /min 1.2
1.1
Connection bore diameter Rc3/8 (10A) Rc3/8 (10A) Rc3/4 (20A) Rc1 (25A) 1.0
0.9

Pressure (MPa)
Detection fluids Water or non-corrosive liquid 0.8
0.7
0.6
Conductivity of detection fluids 5 μS/cm or higher 0.5
0.4 Allowable operating range
Detection fluid temperature 0 to +85 °C (no freezing) 0.3
0.2
Operating pressure range Max. 1.0 MPa 0.1
0
0 10 20 30 40 50 60 70 80 90
Pressure resistance 2.0 MPa Fluid temperature (˚C)

Pressure loss Max. 0.01 MPa

■ Pressure loss characteristics (Measurement fluid: water)
Dual row display with 4-digit, 7 segment LED, bar display (2
Display method FD-M(Z)5A/M(Z)10A Series FD-M(Z)50A Series
colors), output indicators, flow indicator
40 10

Pressure loss (kPa)

5

Pressure loss (kPa)

0.05* /0.1 ( / 0.01/0.1 ( / 35 9
Display resolution 0.1/1 ( /min) selectable 30
8
min) selectable min) selectable 7
25
6
20 5
0.5 s: ±5% of F.S. 1 s: ±3.5% of F.S. 15 4
2.5 s: ±2.5% of F.S. 5 s: ±1.6% of F.S. 3
Repeatability*6
10
2
10 s: ±1% of F.S. 30 s: ±0.8% of F.S. 5
1
0
60 s: ±0.6% of F.S. 0 5 10 15 20 25 30
0
0 20 40 60 80 100
Flow ( /min) Flow ( /min)
Hysteresis Variable
FD-M(Z)100A Series
Response time 10
0.5 s/1 s/2.5 s/5 s/10 s/30 s/60 s variable
Pressure loss (kPa)

(chatter prevention) 9
8
7
0.01/0.1/1/10/100 ( ) 0.1/1/10/100/1000 ( ) 6
Accumulated flow unit 5
selectable selectable 4
3
Accumulation data storage cycle Save to memory every 10 seconds 2
1
0
EEPROM (Data storage length: 10 years or longer, 0 50 100 150 200
Memory backup Flow ( /min)
Data read/write frequency: 1 million times or more)

Control output/Accumulation NPN/PNP open collector, max. 100 mA/ch*7

pulse output/ (NPN: 40 V or less, PNP: 30 V or less), Connections and I/O Circuits
Error alarm output residual voltage 1 V or less, 3 outputs (N.O./N.C. switchable)
■ I/O circuits
Input time: 20 ms or greater,
Accumulation reset/bank
For more details, see "10. Selecting external input (violet line
switching/zero flow function NPN type
function)" (page 6).

4-20 mA, max. load resistance 260 ohms Brown

Analog output 24 VDC
Analog output range can be set to any value Black (Output 1)
Load 5-40 VDC
Main circuit

protection circuit

Power supply voltage 24 V DC ±10%, ripple (P-P) ±10% or less, Class 2

Overcurrent

White (Output 2)
Load 5-40 VDC
Power consumption (Current
Normal: 1700 mW (70 mA), Power save: 1000 mW (40 mA) Gray (Output 3 : Alarm output)
consumption) Load 5-40 VDC
Blue
Enclosure rating IP65 (including the cable connection area) 0V

Ambient operating PNP type

0 to +50 °C (no freezing)
temperature
Brown
Environmental Ambient operating 24 VDC
35 to 85% RH (No condensation)
protection circuit

resistance humidity Black (Output 1)

Load
Overcurrent
Main circuit

10 to 55 Hz, compound amplitude 1.5 mm, XYZ axes 2 hours White (Output 2)
Vibration resistance Load
for each axis
Gray (Output 3 : Alarm output)
Liquid end Load
Bore: SCS13, Measurement pipe: PPS, O ring: fluoro-rubber (FKM) Blue
materials 0V
Materials
Plastic case areas: PPS, Metal case areas: SUS430, Cable:
Other materials
PVC ■ Analog output circuit
Approx. 1100 g/ Approx. 1310 g/
Weight (FD-M/FD-MZ) Approx. 835 g/Approx. 865 g
Approx. 1130 g Approx. 1340 g
Main circuit

Pink Analog output (4-20 mA)

Accessory Instruction Manual
Blue
*1 The models with “A” at the end of the name have additional functions such as display averaging. 0V
On the models with “Z” after “FD-M”, the bore is insulated from the power supply line and
can be used in both the positive grounding system and the negative grounding system. ■ External input circuit (accumulation reset and bank switching)
*2 The rated flow range indicates the range that is supposed to be used in general.
*3 Can be used within the display range as well as within the rated flow range. NPN type PNP type
*4 Flow below the minimum flow is displayed as 0 /min.
*5 When it is 0.05, the display flow can be set in 0.05 increments between 0 and 0.5 , and set 5V 24 VDC
Brown
in 0.01 increments for values above 0.5 .
Main circuit

Main circuit

*6 The repeatability is effective within the display range. Violet

Convert the F.S. (full scale) listed in the table according to the rated flow range.The
Violet
repeatability for FD-M(Z)5AT(P)/Y(P) is ±7.5% of F.S. at a response time of 0.5 s and ±5% of
F.S. at a response time of 1 s.
Blue Blue
The repeatability for FD-M(Z)10AT(P)/Y(P) in the range of 20 to 30 /min is the double of 0V
the value listed in the table.
*7 Maximum 20 mA for alarm output. (Short-circuit current: Approx. 0.7 mA) (Short-circuit current: Approx. 1 mA)

E FD-M-IM 9
 n FD-MZ  A Series connector
Dimensions
Connector part of the main body side
Note The dimensions shown on this page reflect the FD-M(Z)  AY Series. 37.3
The direction of the FD-M(Z) AT Series display is 90 degrees different.

φ15
n FD-M(Z)5A/FD-M(Z)10A Series φ4(7x0.27 mm )
2

110
Cable length: 0.3 m
90
Rc3/8
54

Connector part of the cable side

39.8
56

φ15.5
41
23.8
24

φ4
2
Cable length: 3 m φ4 (7x0.27 mm )
* On the FD-MZ5A/MZ10A, the distance to the connector is 0.3 m. Cable length: 2.7 m

54.1
(64.8)
49.6
(60.3)
WARRANTIES AND DISCLAIMERS
47.1
21.1
(1) KEYENCE warrants the Products to be free of defects in materials and
workmanship for a period of one (1) year from the date of shipment. If any
* The value in the bracket is for the FD-MZ5A/MZ10A
(connector type). models or samples were shown to Buyer, such models or samples were used
63
4-M4
Depth: 6.5
merely to illustrate the general type and quality of the Products and not to
represent that the Products would necessarily conform to said models or
samples. Any Products found to be defective must be shipped to KEYENCE
37 with all shipping costs paid by Buyer or offered to KEYENCE for inspection and
examination. Upon examination by KEYENCE, KEYENCE, at its sole option,
will refund the purchase price of, or repair or replace at no charge any Products
found to be defective. This warranty does not apply to any defects resulting
n FD-M(Z)50A Series from any action of Buyer, including but not limited to improper installation,
120 improper interfacing, improper repair, unauthorized modification, misapplication
95 and mishandling, such as exposure to excessive current, heat, coldness,
Rc3/4 54
moisture, vibration or outdoors air. Components which wear are not warranted.
(2) KEYENCE is pleased to offer suggestions on the use of its various Products.
They are only suggestions, and it is Buyer's responsibility to ascertain the
65
41
fitness of the Products for Buyer’s intended use. KEYENCE will not be
35.4
24 responsible for any damages that may result from the use of the Products.
(3) The Products and any samples ("Products/Samples") supplied to Buyer are not
φ4 to be used internally in humans, for human transportation, as safety devices or
Cable length: 3 m
fail-safe systems, unless their written specifications state otherwise. Should any
* On the FD-MZ50A, the distance to the connector is 0.3 m.
Products/Samples be used in such a manner or misused in any way,
KEYENCE assumes no responsibility, and additionally Buyer will indemnify
65.1
KEYENCE and hold KEYENCE harmless from any liability or damage
(75.8)
60.6
whatsoever arising out of any misuse of the Products/Samples.
(71.3) (4) OTHER THAN AS STATED HEREIN, THE PRODUCTS/SAMPLES ARE
58.1
26.6 PROVIDED WITH NO OTHER WARRANTIES WHATSOEVER. ALL
EXPRESS, IMPLIED, AND STATUTORY WARRANTIES, INCLUDING,
* The value in the bracket is for the FD-MZ50A WITHOUT LIMITATION, THE WARRANTIES OF MERCHANTABILITY,
(connector type). FITNESS FOR A PARTICULAR PURPOSE, AND NON-INFRINGEMENT OF
71
4-M4
Depth: 6.5
PROPRIETARY RIGHTS, ARE EXPRESSLY DISCLAIMED.
IN NO EVENT SHALL KEYENCE AND ITS AFFILIATED ENTITIES BE
LIABLE TO ANY PERSON OR ENTITY FOR ANY DIRECT, INDIRECT,
47.5 INCIDENTAL, PUNITIVE, SPECIAL OR CONSEQUENTIAL DAMAGES
(INCLUDING, WITHOUT LIMITATION, ANY DAMAGES RESULTING FROM
LOSS OF USE, BUSINESS INTERRUPTION, LOSS OF INFORMATION,
LOSS OR INACCURACY OF DATA, LOSS OF PROFITS, LOSS OF
n FD-M(Z)100A Series SAVINGS, THE COST OF PROCUREMENT OF SUBSTITUTED GOODS,
130
SERVICES OR TECHNOLOGIES, OR FOR ANY MATTER ARISING OUT OF
100 OR IN CONNECTION WITH THE USE OR INABILITY TO USE THE
Rc1 54
PRODUCTS, EVEN IF KEYENCE OR ONE OF ITS AFFILIATED ENTITIES
WAS ADVISED OF A POSSIBLE THIRD PARTY’S CLAIM FOR DAMAGES
OR ANY OTHER CLAIM AGAINST BUYER. In some jurisdictions, some of the
70 41
foregoing warranty disclaimers or damage limitations may not apply.
41
24

BUYER'S TRANSFER OBLIGATIONS:

φ4
Cable length: 3 m
If the Products/Samples purchased by Buyer are to be resold or delivered to a
* On the FD-MZ100A, the distance to the connector is 0.3 m. third party, Buyer must provide such third party with a copy of this document, all
specifications, manuals, catalogs, leaflets and written information provided to
71.1
Buyer pertaining to the Products/Samples.
(81.8)
66.6 E 1101-3
(77.3)
64.1
29.6

* The value in the bracket is for the FD-MZ100A

(connector type).
4-M4
73 Depth: 6.5

50

Copyright (c) 2010 KEYENCE CORPORATION. All rights reserved.

11453GB 2052-3d 96M11453 Printed in Japan

10